Quartz microwave window

Abstract

The utility model discloses a quartz microwave window, and relates to the technical field of diamond processing equipment. The microwave window is arranged between the waveguide converter and the bent waveguide and comprises a microwave window upper cover, a microwave window lower cover and microwave window quartz glass, and the microwave window quartz glass is arranged in an embedding groove between the microwave window upper cover and the microwave window lower cover. Through the arrangement of the quartz microwave window structure, the sealing position of the microwave window can be transferred to the ridge waveguide, so that the microwave window does not bear the sealing task any more, and the problems that the microwave window is impacted by plasmas and backflow electrons during use, the temperature rises, silica gel on the microwave window is aged due to long-term operation, and the service life of the microwave window is prolonged are solved. And the sealing failure is caused. Through the arrangement of the microwave window upper cover, the microwave window lower cover and the microwave window quartz glass, the sealable BJ26-to-BJ32 waveguide has a sealable function. The microwave window can also be used as a common switching waveguide, and the problem that a traditional microwave window is prone to sealing failure under the action of high temperature is solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to diamond processing equipment technical field, specifically, relate to a quartz microwave window. BACKGROUND

[0002] Microwave plasma chemical vapor deposition (MPCVD) technology has become the preferred method widely adopted by current researchers and industry due to its outstanding performance in synthesizing high-quality diamonds. Compared to other plasma generation technologies, MPCVD has significant advantages: first, it avoids the contamination of diamond by electrode materials, thereby ensuring the purity and quality of diamond; second, the controllability of this technology is excellent, allowing precise adjustment of various parameters during the deposition process, such as temperature, pressure, and gas flow, to meet the needs of different application scenarios; in addition, the high density of microwave-excited plasma helps to achieve rapid and uniform deposition of diamonds.

[0003] In the process of diamond preparation using a 45GHz electron cyclotron resonance (ECR) ion source, the microwave window, as a key component, has a dual role: on the one hand, it is responsible for effectively feeding microwave energy into the reaction chamber, resonating with the cyclotron electrons, thereby exciting and maintaining the stable generation of plasma; on the other hand, the microwave window also plays a role in sealing the vacuum, ensuring that the vacuum environment inside the reaction chamber is not disturbed by external interference. However, during long-term operation, the microwave window is continuously subjected to the impact of high-energy plasma and backflowing electrons. These high-energy particles interact with the surface of the microwave window, causing its temperature to rise significantly. This continuous high-temperature environment accelerates the aging process of the silicone material on the microwave window, which may lead to sealing failure, affecting the stability and reliability of the entire system.

[0004] Based on this, the utility model provides a quartz microwave window to solve the problems existing in the prior art. UTILITY MODEL CONTENT

[0005] Therefore, the main purpose of the utility model is to provide a quartz microwave window to solve the problem of easy sealing failure under high temperature of the traditional microwave window.

[0006] To achieve the above purpose, the technical scheme of the utility model is as follows:

[0007] A quartz microwave window is arranged between a waveguide converter and a bent waveguide, comprising a microwave window upper cover, a microwave window lower cover, and a microwave window quartz glass. The microwave window quartz glass is arranged in the embedding groove between the microwave window upper cover and the microwave window lower cover.

[0008] In a preferred embodiment, the outer side of the microwave window upper cover and the microwave window lower cover are provided with a plurality of connecting holes which are matched with the connecting holes provided on the waveguide converter and the bent waveguide, and the connecting holes are also matched with the connecting bolts.

[0009] In a preferred embodiment, the microwave window upper cover and the microwave window lower cover are connected through the countersunk bolts.

[0010] In a preferred embodiment, a first sealing groove is arranged on the side surface of the microwave window upper cover close to the waveguide converter, and a second O-shaped sealing is arranged in the first sealing groove.

[0011] In a preferred embodiment, the second O-shaped sealing arranged on the microwave window upper cover is matched with the waveguide converter, and the second O-shaped sealing arranged on the microwave window lower cover is matched with the bent waveguide.

[0012] In a preferred embodiment, the side of the microwave window upper cover close to the microwave window quartz glass is further provided with an embedding groove which is matched with the microwave window quartz glass.

[0013] In a preferred embodiment, a second sealing groove is further arranged on the inner side wall of the embedding groove, a first O-shaped sealing is further arranged in the second sealing groove, and the first O-shaped sealing is matched with the microwave window quartz glass.

[0014] In a preferred embodiment, the microwave window upper cover and the microwave window lower cover are both aluminum alloy cover plates.

[0015] In a preferred embodiment, the waveguide converter is a sealable BJ26 to BJ32 waveguide.

[0016] In a preferred embodiment, the microwave window upper cover and the microwave window lower cover are both tightly pressed on the microwave window quartz glass.

[0017] Compared with the prior art, the quartz microwave window has the following advantages

[0018] Beneficial effects:

[0019] 1. Through the arrangement of the quartz microwave window structure, the sealing position of the microwave window is transferred from the microwave window to the ridge waveguide, so that the microwave window no longer bears the sealing task, and the problems of temperature rise due to the impact of plasma and backflow electrons on the microwave window during use, aging of silica gel on the microwave window due to long-term operation, and sealing failure are avoided.

[0020] 2. By the setting of the microwave window upper cover, the microwave window lower cover and the microwave window quartz glass, the BJ26 to BJ32 waveguide of the sealable type is added with the sealable function compared with the conventional transition waveguide, and can also be used as an ordinary transition waveguide, and compared with the previous transition waveguide, the length of the waveguide is reduced, and the installation space can be saved;

[0021] 3. By the setting of the countersunk hole and the countersunk bolt, the countersunk bolt after installation can avoid the head of the mounting screw from being higher than the waveguide connection surface, and can avoid affecting the connection of the quartz microwave window and other waveguides, and solves the problem of the sealing connection of the microwave window quartz glass and the upper and lower covers in the limited space;

[0022] 4. The microwave window upper cover and the microwave window lower cover are made of aluminum alloy by a numerical control machine tool, avoiding complex processes such as wire cutting and welding, so that the production cost is reduced, and the problem of easy sealing failure under the action of high temperature of the traditional microwave window is solved. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative labor.

[0024] Figure 1 It is a structure schematic view of the waveguide state after the quartz microwave window is installed.

[0025] Figure 2 It is a sectional view of the waveguide state after the quartz microwave window is installed.

[0026] Figure 3 It is a structure schematic view of the quartz microwave window.

[0027] Figure 4 It is an exploded view of the side view angle of the quartz microwave window.

[0028] Figure 5 It is a sectional view of the top view angle of the quartz microwave window.

[0029]

MAIN COMPONENT SYMBOL DESCRIPTION

[0030] 1. waveguide converter; 2. microwave window upper cover; 3. microwave window lower cover; 4. bend waveguide; 5. microwave window quartz glass; 6. first O-ring; 7. second O-ring; 8. countersunk bolt; 9. connecting hole; 10. first sealing groove; 11. second sealing groove; 12. connecting bolt; 13. embedding groove. DETAILED DESCRIPTION

[0031] The structure of the quartz microwave window will be further described in detail below in combination with the drawings and embodiments of the present application.

[0032] It should be noted that the embodiments and features in the embodiments in the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0033] It should be noted that the terms used herein are only for describing specific embodiments, and are not intended to limit the exemplary embodiments of the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should be understood that when the terms "comprise" and / or "include" are used in the specification, there is a presence of the features, steps, operations, devices, components and / or combinations thereof.

[0034] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device that includes a series of steps or units does not have to be limited to those steps or units listed, but can include other steps or units not listed or inherent to these processes, methods, products or devices.

[0035] For purposes of the description hereinafter, spatial relative terms, such as "above", "below", "top", "bottom", and the like, can be used to describe the relative position of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatial relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. For example, if a device in the figures is inverted, elements described as "above" or "below" other elements or features would then be oriented "below" or "above" the other elements or features. Thus, the exemplary term "above" can encompass both an orientation of above and below. The devices can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial relative descriptors used herein interpreted accordingly.

[0036] As shown in the accompanying drawings for Figures 1-5 The utility model provides a technical scheme:

[0037] A quartz microwave window is installed between waveguide converter 1 and bent waveguide 4, used for realizing the purpose of transferring ion source sealing surface from the microwave window to the waveguide, so that the microwave window no longer undertakes the sealing task, comprising microwave window upper cover 2, microwave window lower cover 3 and microwave window quartz glass 5, microwave window quartz glass 5 is installed in the embedded groove 13 between microwave window upper cover 2 and microwave window lower cover 3, and microwave window upper cover 2 and microwave window lower cover 3 are connected through countersunk bolt 8.

[0038] In the above description, by being provided with countersunk hole of microwave window lower cover 3 on microwave window upper cover 2, countersunk bolt 8 after installation can be based on the microwave window upper cover 2 and microwave window lower cover 3 tightly pressing on microwave window quartz glass 5, meanwhile, the head of installation screw can be avoided from being higher than the waveguide connecting surface, influencing the connection of quartz microwave window and other waveguides, the problem of sealing connection of microwave window quartz glass 5 and upper and lower covers in limited space is solved. By connecting microwave window upper cover 2 and waveguide converter 1, microwave window lower cover 3 and bent waveguide 4, the sealing position of the microwave window can be transferred to the ridge waveguide, so that the microwave window no longer undertakes the sealing task, so that the overall structure of waveguide converter 1 is more than the sealing function compared with the previous transition waveguide. Moreover, it can also be used as a common adapter waveguide, and compared with the previous adapter waveguide, the length of the waveguide of the present microwave window is reduced, and the installation space can be saved.

[0039] In a preferred embodiment, as Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the outer side of the microwave window upper cover 2 and the microwave window lower cover 3 is provided with a plurality of connecting holes 9 matched with the connecting holes provided on the waveguide converter 1 and the bent waveguide 4, and in the installation process, the connecting bolt 12 is sequentially penetrated through the connecting holes 9 to connect the quartz microwave window with the waveguide converter 1 and the bent waveguide 4.

[0040] In a preferred embodiment, as shown in Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the side of the microwave window upper cover 2 close to the waveguide converter 1 and the side of the microwave window lower cover 3 close to the bent waveguide 4 are both provided with a first sealing groove 10, and a second O-shaped sealing 7 is arranged in the first sealing groove 10 to be used with the connecting end face of the waveguide converter 1 and the bent waveguide 4 respectively.

[0041] In the above description, through the arrangement of the second O-shaped sealing 7, after the waveguide converter 1 is connected with the microwave window upper cover 2 and the microwave window lower cover 3 is connected with the bent waveguide 4, the sealing between the waveguide converter 1 and the microwave window upper cover 2 and between the microwave window lower cover 3 and the bent waveguide 4 can be effectively guaranteed.

[0042] In a preferred embodiment, as shown in Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the side of the microwave window upper cover 2 close to the microwave window quartz glass 5 is further provided with an embedding groove 13, which is used with the microwave window quartz glass 5 to facilitate clamping and fixing the microwave window quartz glass 5 in the embedding groove 13 during use to avoid the position of the microwave window quartz glass 5 in the embedding groove 13 changing during use; at the same time, to guarantee the sealing, a second sealing groove 11 is further arranged on the inner side wall of the embedding groove 13, and a first O-shaped sealing 6 is further arranged in the second sealing groove 11 to be used with the microwave window quartz glass 5, and after the microwave window quartz glass 5 is installed, the connecting face of the microwave window upper cover 2 and the microwave window quartz glass 5 can be sealed through the sealing effect of the first O-shaped sealing 6.

[0043] In a preferred embodiment, as shown in Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 1 As shown, the waveguide converter 1 is a sealable BJ26 to BJ32 waveguide.

[0044] In a preferred embodiment, as shown in Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 1 Figure 2 Figure 3 Figure 4 Figure 5As shown, the microwave window upper cover 2 and the microwave window lower cover 3 are both cover plate structures made of aluminum alloy, easy to process, so that the overall structure of the microwave window is simple and the assembly is convenient.

[0045] The use and installation principle of the quartz microwave window includes: in use, first, assemble the quartz microwave window, pass the countersunk head bolt 8 through the connecting hole arranged on the microwave window upper cover 2 and the microwave window lower cover 3, connect the microwave window upper cover 2 and the microwave window lower cover 3, and simultaneously install the microwave window quartz glass 5 and the corresponding first O-shaped seal 6; then install the second O-shaped seal 7 on the outer side surface of the microwave window upper cover 2 and the microwave window lower cover 3, and sequentially pass the connecting bolt 12 through the connecting hole 9, connect the quartz microwave window with the waveguide converter 1 and the bent waveguide 4.

[0046] The above is only a preferred embodiment of the utility model, and is not used to limit the protection scope of the utility model.

Claims

1. A quartz microwave window characterized in that, The microwave window upper cover (2) and the microwave window lower cover (3) are both provided with a plurality of connecting holes (9) which are matched with the connecting holes provided on the waveguide converter (1) and the bent waveguide (4) and are also matched with the connecting bolts (12).

2. A quartz microwave window as claimed in claim 1, characterized in that The microwave window upper cover (2) and the microwave window lower cover (3) are connected through the countersunk bolts (8).

3. A quartz microwave window as claimed in claim 1, characterized in that The microwave window upper cover (2) and the microwave window lower cover (3) are both provided with a first sealing groove (10) on the side close to the waveguide converter (1) and the bent waveguide (4) respectively, and a second O-shaped sealing (7) is arranged in the first sealing groove (10).

4. A quartz microwave window as claimed in claim 1, characterized in that The second O-shaped sealing (7) arranged on the microwave window upper cover (2) is matched with the waveguide converter (1), and the second O-shaped sealing (7) arranged on the microwave window lower cover (3) is matched with the bent waveguide (4).

5. A quartz microwave window as claimed in claim 4, characterised in that The microwave window upper cover (2) is further provided with an embedding groove (13) on the side close to the microwave window quartz glass (5), and the embedding groove (13) is matched with the microwave window quartz glass (5).

6. A quartz microwave window as claimed in claim 1, characterized in that The inner wall of the embedding groove (13) is further provided with a second sealing groove (11), and a first O-shaped sealing (6) is arranged in the second sealing groove (11), and the first O-shaped sealing (6) is matched with the microwave window quartz glass (5).

7. A quartz microwave window as claimed in claim 1, wherein The microwave window upper cover (2) and the microwave window lower cover (3) are both aluminum alloy cover plates.

8. A quartz microwave window as claimed in claim 1, wherein, The waveguide converter (1) is a sealable BJ26 to BJ32 waveguide.

9. A quartz microwave window as claimed in claim 1, wherein, The microwave window upper cover (2) and the microwave window lower cover (3) are both tightly pressed on the microwave window quartz glass (5).

10. A quartz microwave window as claimed in claim 1, characterized in that ​

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