Nitrogen purging sprayer

Abstract

The utility model provides a nitrogen purging nozzle which comprises a nozzle body and a group of connectors, the connectors are arranged on two sides of the nozzle body, a nitrogen channel is arranged in the nozzle body along the length direction of the nozzle body, a plurality of purging pipes are further arranged on the nozzle body, the purging pipes are arranged on two sides of the nozzle body and arranged obliquely downwards, and the purging pipes are communicated with the nitrogen channel. The utility model provides a nitrogen purging sprayer which is simple in structure and reasonable in design. The spray head body is in a long strip shape, a product is continuously blown when passing through the spray head body, the blowing effect is effectively improved, the two sides of the spray head body can conduct blowing work, and the blowing efficiency is improved. Air enters the two ends of the nozzle body at the same time, it is guaranteed that the air pressure of each purging pipe is sufficient and relatively average, and the purging effect is further improved.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor product manufacturing, and in particular to a nitrogen purging nozzle. Background Technology

[0002] This practical semiconductor nitrogen purging technology plays a crucial role in the semiconductor manufacturing process. Nitrogen, as a chemically inert and non-conductive gas, effectively protects sensitive silicon wafers from the effects of reactive oxygen and moisture in the air, thereby ensuring the quality and performance of semiconductor products.

[0003] Nitrogen purging can also help remove impurities from product surfaces. For example, when semiconductor products pass through a nitrogen purging device, nitrogen purging can remove impurities from the product surface, thereby ensuring product quality. However, existing nitrogen purging devices cannot effectively remove impurities from semiconductor surfaces, firstly because improper pressure control leads to insufficient pressure, and secondly because the purging time is too short to completely remove impurities, while increasing the purging time affects production efficiency. Therefore, these problems urgently need to be solved. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a nitrogen purging nozzle that can efficiently remove impurities from the semiconductor surface.

[0005] To achieve the above and other related objectives, this utility model provides the following technical solution:

[0006] A nitrogen purging nozzle includes a nozzle body and a set of connectors. The connectors are located on both sides of the nozzle body. A nitrogen channel is provided along the length of the nozzle body. The nozzle body also has several purge pipes, which are located on both sides of the nozzle body and angled downwards. The purge pipes are connected to the nitrogen channel. Nitrogen gas flows through the nitrogen channel into each purge pipe, thereby being blown onto the surface of the product.

[0007] Furthermore, the nozzle body has inclined surfaces on both sides, and the outlet of the purge pipe is located on these inclined surfaces. The inclined surfaces are perpendicular to the axis of the purge pipe. Airflow auxiliary blocks are also provided at the bottom of both sides of the nozzle body, with the top surface of the airflow auxiliary blocks forming a 90° angle with the inclined surfaces. The airflow auxiliary blocks serve to assist in changing the direction of airflow.

[0008] Furthermore, the connector has a connecting channel along its length, one end of which is plugged and the other end connects to a nitrogen channel. A nitrogen connector is located on the bottom surface of the connector, and this connector connects to the connecting channel. The nozzle body is connected to an external nitrogen source via the connector.

[0009] Furthermore, the upper surface of the nozzle body is provided with connecting bolt holes, through which the nozzle body is connected to the external structure.

[0010] Furthermore, the angle between the purge pipe and the horizontal plane is 21.5°.

[0011] Furthermore, the diameter of the purge tube is 1.5 mm.

[0012] Furthermore, the distance from the axis of the purge tube to the top surface of the airflow assist block is 1.9 mm.

[0013] As described above, the nitrogen purging nozzle of this utility model has the following beneficial effects:

[0014] 1. This utility model provides a nitrogen purging nozzle with a simple structure and reasonable design. The nozzle body is elongated, and the product is continuously purged as it passes through the nozzle body, effectively improving the purging effect. Purging can be performed on both sides of the nozzle body, improving purging efficiency. The nozzle body allows air to enter from both ends simultaneously, ensuring sufficient and relatively uniform air pressure in each purging tube, further improving the purging effect.

[0015] 2. This utility model achieves all-round purging by setting an airflow auxiliary block and selecting a suitable purging angle and purging pipe orifice diameter. Attached Figure Description

[0016] Figure 1 The diagram shown is a structural schematic of a nitrogen purging nozzle according to this utility model.

[0017] Figure 2 The image shown is a longitudinal cross-sectional view of a nitrogen purging nozzle according to this utility model.

[0018] Figure 3 The image shown is a cross-sectional view of a nitrogen purging nozzle according to the present invention.

[0019] Among them, 1. Nozzle body, 11. Nitrogen channel, 12. Purge pipe, 13. Inclined surface, 14. Airflow auxiliary block, 15. Connecting bolt hole, 2. Connector, 21. Connecting channel, 22. Nitrogen connector, 23. Plug; 1000. A nitrogen purging nozzle. Detailed Implementation

[0020] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification.

[0021] Please see Figure 1It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this invention, should still fall within the scope of the disclosed technical content. Furthermore, the terms "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0022] Please see Figures 1 to 3 This utility model provides a nitrogen purging nozzle 1000, including a nozzle body 1 and a set of connectors 2. The connectors 2 are located on both sides of the nozzle body 1. A nitrogen channel 11 is provided inside the nozzle body 1 along its length direction. A plurality of purging pipes 12 are also provided on the nozzle body 1. The purging pipes 12 are located on both sides of the nozzle body 1 and are obliquely downward. The purging pipes 12 are connected to the nitrogen channel 11.

[0023] Nitrogen gas passes through nitrogen channel 11 to each purge pipe 12. The downward-sloping purge pipe 12 guides the nitrogen gas to the surface of the product to remove residual impurities. The product passes through the nozzle body 1 from both sides, and the products on both sides can be purged at the same time. At the same time, the product is continuously purged as it passes through the nozzle body 1, which improves the purging efficiency and effect.

[0024] The nozzle body 1 has inclined surfaces 13 on both sides, and the outlet of the purge pipe 12 is located on the inclined surface 13. The inclined surface 13 is perpendicular to the axis of the purge pipe 12. The bottom of both sides of the nozzle body 1 is also provided with airflow auxiliary blocks 14. The angle between the top surface of the airflow auxiliary block 14 and the inclined surface 13 is 90°.

[0025] When nitrogen passes over the top surface of the airflow assist block 14, it can be guided to the bottom of the product, thereby achieving all-round purging.

[0026] In addition, the connector 2 has a connecting channel 21 along its length. One end of the connecting channel 21 is provided with a plug 23, and the other end is connected to the nitrogen channel 11. The bottom surface of the connector 2 is provided with a nitrogen connector 22, which is connected to the connecting channel 21.

[0027] An external nitrogen source is connected to the nozzle body 1 through the nitrogen connector 22 on the connector 2, while the connectors on both sides simultaneously introduce air, ensuring that the air pressure in each purge pipe 12 is sufficient and relatively uniform.

[0028] Specifically, the upper surface of the nozzle body 1 is provided with connecting bolt holes 15, and the nozzle body 1 is connected to the external structure through the connecting bolt holes 15.

[0029] Furthermore, in this embodiment, the angle between the purge pipe 12 and the horizontal plane is 21.5°. Choosing a suitable purge angle avoids the situation where areas far from the nozzle may not be thoroughly purged if the angle is too large, or areas close to the nozzle may not be thoroughly purged if the angle is too small, thus improving the purging effect.

[0030] The diameter of the purge tube 12 is 1.5 mm. A suitable orifice diameter should be selected; a small orifice will result in insufficient air output, while a large orifice will result in insufficient purge air pressure.

[0031] Specifically, the distance from the axis of the purge pipe 12 to the top surface of the airflow auxiliary block 14 is 1.9 mm.

[0032] The principle of the nitrogen purging nozzle 1000 in this utility model is as follows: When the nitrogen purging nozzle 1000 is in use, the product passes through both sides of the nozzle body 1 at the same time. When the product passes through, it is purged by high-pressure nitrogen blown out by the purging pipe 12 to remove large particulate residues on the surface.

[0033] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A nitrogen purge showerhead characterized by, The nozzle body (1) and a set of connecting heads (2) are provided on both sides of the nozzle body (1), a nitrogen channel (11) is arranged along the length direction of the nozzle body (1), and a plurality of purge pipes (12) are arranged on the nozzle body (1) and are inclined downward, the purge pipes (12) are communicated with the nitrogen channel (11).

2. A nitrogen purge showerhead according to claim 1, wherein, The nozzle body (1) is provided with an inclined surface (13) on both sides, the outlet of the purge pipe (12) is located on the inclined surface (13), the inclined surface (13) is perpendicular to the axial direction of the purge pipe (12), and the bottom of the nozzle body (1) is further provided with an airflow auxiliary block (14), and the included angle between the top surface of the airflow auxiliary block (14) and the inclined surface (13) is 90°.

3. The nitrogen purge showerhead of claim 1, wherein, The connecting head (2) is provided with a connecting channel (21) along the length direction thereof, one end of the connecting channel (21) is provided with a plug (23), the other end is communicated with the nitrogen channel (11), the bottom surface of the connecting head (2) is provided with a nitrogen joint (22), and the nitrogen joint (22) is communicated with the connecting channel (21).

4. The nitrogen purge showerhead of claim 1, wherein, The upper surface of the nozzle body (1) is provided with a connecting bolt hole (15), and the nozzle body (1) is connected with an external structure through the connecting bolt hole (15).

5. The nitrogen purge showerhead of claim 1, wherein, The included angle between the purge pipe (12) and the horizontal plane is 21.5°.

6. The nitrogen purge showerhead of claim 1, wherein, The diameter of the purge pipe (12) is 1.5mm.

7. The nitrogen purge showerhead of claim 1, wherein, The distance from the axis of the purge pipe (12) to the top surface of the airflow auxiliary block (14) is 1.9mm.

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