Baffle mechanism and evaporation coating equipment

Abstract

The utility model discloses a baffle mechanism and evaporation coating equipment. The baffle plate mechanism comprises a baffle plate main body which is provided with a first end and a second end, the first driving part is in transmission connection with the first end of the baffle main body, and the first driving part can drive the baffle main body to rotate; the limiting assembly comprises a limiting piece, the limiting piece can move to a first position to support the second end of the baffle body, and the limiting piece can further move to a second position to avoid the baffle body. The first driving piece is in transmission connection with the first end of the baffle body and can drive the baffle body to rotate, the limiting piece can support the second end of the baffle body, and therefore the baffle body can be prevented from shaking.

Description

TECHNICAL FIELD

[0001] The utility model relates to evaporation coating equipment technical field more specifically, relate to a baffle mechanism and evaporation coating equipment. BACKGROUND

[0002] In the related art, when a base material is coated by a PVD (Physical Vapor Deposition) evaporation coating machine, the base material is coated on a coating roller. In order to control the coating heat, a coating baffle mechanism is used to restrict a window during coating. The coating process can only occur in the window. The coating baffle mechanism is installed directly below the coating roller and directly above the evaporation source. During operation, the coating baffle mechanism is turned to a horizontal state. During cleaning, the coating baffle mechanism is turned to a vertical position. However, due to the weight of the coating baffle mechanism, the coating baffle mechanism is prone to shaking during coating, which causes dust attached to the lower surface of the coating baffle mechanism to fall into the evaporation boat.

[0003] Therefore, there is a need to provide a new technical solution to solve the above technical problems. SUMMARY

[0004] An object of the utility model is to provide a new technical solution for a baffle mechanism.

[0005] According to a first aspect of the utility model, a baffle mechanism is provided. The baffle mechanism includes:

[0006] a baffle body having a first end and a second end arranged opposite to each other;

[0007] a first driving member drivingly connected to the first end of the baffle body, the first driving member being capable of rotating the baffle body;

[0008] a limiting assembly including a limiting member, the limiting member being movable to a first position to support the second end of the baffle body, and the limiting member being further movable to a second position to avoid the baffle body.

[0009] Optionally, the limiting assembly further includes a first rotating shaft, the limiting member being connected to the first rotating shaft, and the first rotating shaft being capable of rotating the limiting member to the first position or the second position.

[0010] Optionally, a plurality of limiting members are arranged along the length direction of the first rotating shaft.

[0011] Optionally, the limiting assembly further includes a second driving member, the second driving member being adapted to rotate the first rotating shaft.

[0012] Optionally, the limiting assembly further comprises a linear driving member and a linkage member, the linear driving member is drivingly connected to the first rotating shaft through the linkage member, and the linear driving member can drive the first rotating shaft to rotate.

[0013] Optionally, the linkage member comprises a first connecting rod and a second connecting rod, one end of the first connecting rod is connected to the first rotating shaft, the other end of the first connecting rod is rotatably connected to the second connecting rod, and one end of the second connecting rod away from the first connecting rod is drivingly connected to the linear driving member.

[0014] Optionally, the baffle mechanism further comprises a stopper, the first connecting rod can rotate towards or away from the stopper, and the stopper is suitable for abutting against the first connecting rod when the limiting member moves to the first position.

[0015] Optionally, the baffle body is provided with an avoiding hole, and the avoiding hole is suitable for corresponding to the coated roll.

[0016] Optionally, the baffle body is provided with a shielding plate at two ends opposite to the avoiding hole, and the shielding plate is suitable for corresponding to two sides of the coated roll in the axial direction.

[0017] According to the second aspect of the present application, an evaporation coating equipment is provided.

[0018] One technical effect of the present application is that the first driving member is drivingly connected to the first end of the baffle body and can drive the baffle body to rotate, and the limiting member can support the second end of the baffle body, so that the baffle body can be prevented from shaking.

[0019] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments thereof, taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings incorporated in and forming a part of the specification, illustrate embodiments of the present application and, together with the description, serve to explain the principles of the application.

[0021] Figure 1 is a structural schematic view of a baffle mechanism of one embodiment of the present application.

[0022] Figure 2 is Figure 1 is an enlarged view of A shown.

[0023] Figure 3 is a side view of a baffle mechanism of one embodiment of the present application.

[0024] Figure 4This is a schematic diagram of the structure of a limiting component according to an embodiment of the present invention.

[0025] Figure 5 This is a side view of a limiting component according to an embodiment of the present invention.

[0026] Figure label:

[0027] 1. Baffle body; 11. Clearance hole; 12. Cover plate; 13. Abutment part; 2. First driving component; 3. Limiting assembly; 31. Limiting component; 32. First mounting component; 33. First rotating shaft; 34. Second driving component; 341. Linear driving component; 342. Linkage component; 3421. First connecting rod; 3422. Second connecting rod; 4. Stop component; 5. Second mounting component; 6. Third mounting component; 7. Second rotating shaft. Detailed Implementation

[0028] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0029] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0030] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0031] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0032] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0033] According to one embodiment of this application, a baffle mechanism is provided. Figures 1 to 5 As shown, the baffle mechanism includes a baffle body 1, a first driving member 2, and a limiting assembly 3. The baffle body 1 has a first end and a second end disposed opposite to each other. The first driving member 2 is tractively connected to the first end of the baffle body 1 and can drive the baffle body 1 to rotate. The limiting assembly 3 includes a limiting member 31, which can move to a first position to support the second end of the baffle body 1, and can also move to a second position to avoid obstructing the baffle body 1.

[0034] In this example, the first driving member 2 is connected to the first end of the baffle body 1 and can drive the baffle body 1 to rotate. The limiting member 31 can move to the first position, thereby supporting the second end of the baffle body 1 and preventing the baffle body 1 from shaking. The limiting member 31 can also move to the second position, thereby avoiding the baffle body 1, so that the first driving member 2 can drive the baffle body 1 to rotate.

[0035] The first driving member 2 can drive the baffle body 1 to rotate around the first end. For example, the first driving member 2 can drive the baffle body 1 to rotate to a horizontal position. At this time, the limiting member 31 can move to the first position and support the baffle body 1 to improve the stability of the baffle body 1 and prevent the baffle body 1 from shaking. The limiting member 31 can also move to the second position. At this time, the limiting member 31 can avoid the baffle body 1, so that the first driving member 2 can drive the baffle body 1 to rotate to a vertical position.

[0036] In this example, the first driving component 2 can be a rotary motor, which is connected to the baffle body 1 and can drive the baffle body 1 to rotate. Alternatively, the first driving component 2 can also be other types of rotary driving devices, such as pneumatic rotators or hydraulic rotators. The specific structure of the first driving component 2 can be determined by those skilled in the art based on actual conditions, and is not specifically limited here.

[0037] like Figure 1 As shown, in this example, the baffle body 1 can be provided with a first end and a second end opposite to each other along the width direction. A second rotating shaft 7 is provided at the first end of the baffle body 1, and the second rotating shaft 7 is fixedly connected to the baffle body 1. A first driving member 2 is drivenly connected to the second rotating shaft 7. For example, one end of the second rotating shaft 7 can pass through the baffle body 1 and be rotatably connected to a fixing device, while the other end of the second rotating shaft 7 is also rotatably connected to a fixing device on the other side. The first driving member 2 is drivenly connected to one end of the second rotating shaft 7, thereby driving the second rotating shaft 7 to rotate, which in turn drives the baffle body 1 to rotate. The second rotating shaft 7 can support the first end of the baffle body 1, and the limiting member 31 can support the second end of the baffle body 1, thereby improving the stability of the baffle body 1 and reducing its vibration.

[0038] In one example, such as Figure 1 , Figure 2 and Figure 4 As shown, the limiting component 3 further includes a first rotating shaft 33, and the limiting member 31 is connected to the first rotating shaft 33. The first rotating shaft 33 can drive the limiting member 31 to rotate to a first position or a second position.

[0039] like Figure 1 , Figure 2 andFigure 4 As shown, the limiting member 31 can also be connected to the first rotating shaft 33 via the first mounting member 32, that is, the limiting member 31 is mounted on the first mounting member 32, and the first mounting member 32 is fixedly connected to the first rotating shaft 33. The first rotating shaft 33 can drive the limiting member 31 to rotate between the first position and the second position.

[0040] like Figure 2 As shown, in this example, the limiting member 31 has a support portion located on one radial side of the first rotating shaft 33. The baffle body 1 has an abutment portion 13 at its second end that corresponds to the support portion. For example, when the baffle body 1 can rotate to a horizontal position, the first rotating shaft 33 drives the limiting member 31 to rotate to a first position, where the limiting member 31 is located at the lower end of the support portion and abuts against the lower end of the abutment portion 13, thereby supporting the baffle body 1. The first rotating shaft 33 can also drive the limiting member 31 downward to a second position, so that the support portion moves away from the abutment portion 13, allowing the limiting member 31 to avoid the baffle body 1, enabling the second end of the baffle body 1 to rotate downward, and the baffle body 1 to rotate to a vertical position.

[0041] In this example, the first mounting component 32 may include a mounting block, and a limiting component 31 is fixedly connected to the mounting block. The mounting block can be connected to the first rotating shaft 33 by fasteners such as screws or bolts. The limiting component 31 can be a fastener such as a bolt or screw, and the limiting component 31 is connected to the first mounting component 32 by screwing. One end of the limiting component 31 can be used to support the baffle body 1.

[0042] Alternatively, the limiting member 31 can be directly fixedly connected to the first rotating shaft 33. Of course, those skilled in the art can determine the specific structure and connection method of the limiting member 31 according to the actual situation, and no specific limitation is made here.

[0043] In this example, the two ends of the first rotating shaft 33 can be rotatably mounted on the corresponding fixing devices on both sides. The first rotating shaft 33 is located on one side of the second end of the baffle body 1. The fixing device can support the first rotating shaft 33, thereby providing stable support for the baffle body 1 through the limiting member 31.

[0044] In one example, such as Figure 3 As shown, there are multiple limiting members 31, and the multiple limiting members 31 are arranged at intervals along the length direction of the first rotating shaft 33.

[0045] like Figure 3As shown, in this example, the baffle body 1 is provided with multiple abutment portions 13, and multiple limiting members 31 are spaced apart along the length direction of the first rotating shaft 33. Each limiting member 31 can correspond to one abutment portion 13, thereby further improving the stability of the baffle body 1. The multiple limiting members 31 can also be evenly spaced. For example, two, three, four, or five limiting members 31 can be provided, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0046] In one example, such as Figure 1 As shown, the limiting component 3 also includes a second driving member 34, which is adapted to drive the first rotating shaft 33 to rotate.

[0047] In this example, the first rotating shaft 33 is connected to the second driving member 34. The second driving member 34 can automatically drive the first rotating shaft 33 to rotate, thereby causing the limiting member 31 to rotate between the first position and the second position. By driving the first rotating shaft 33 to rotate through the second driving member 34, the automation level of the baffle mechanism can be improved, and the accuracy of driving the first rotating shaft 33 to rotate can also be improved.

[0048] The second driving component 34 can be an electric rotator, a pneumatic rotator, or a hydraulic rotator, etc. The specific structure of the second driving component 34 can be determined by those skilled in the art based on actual circumstances, and is not specifically limited here.

[0049] In one example, such as Figures 2 to 5 As shown, the limiting component 3 also includes a linear drive component 341 and a linkage component 342. The linear drive component 341 is connected to the first rotating shaft 33 via the linkage component 342, and the linear drive component 341 can drive the first rotating shaft 33 to rotate.

[0050] like Figures 2 to 5 As shown, in this example, the second driving member 34 can be a combination of a linear driving member 341 and a linkage member 342. That is, the driving end of the linear driving member 341 can be connected to the first rotating shaft 33 via the linkage member 342. The linkage member 342 can increase the torque, thereby generating a larger torque with a smaller applied force. In other words, the first rotating shaft 33 can be rotated by the linear driving member 341 with a smaller power.

[0051] In this example, such as Figure 5 As shown, the linkage 342 includes a first link 3421 and a second link 3422. One end of the first link 3421 is connected to the first rotating shaft 33, and the other end is rotatably connected to the second link 3422. The end of the second link 3422 away from the first link 3421 is drively connected to the linear drive 341.

[0052] One end of the first connecting rod 3421 is fixedly connected to the first rotating shaft 33, and the first connecting rod 3421 extends radially along the first rotating shaft 33. The end of the first connecting rod 3421 away from the first rotating shaft 33 is rotatably connected to one end of the second connecting rod 3422, and the other end of the second connecting rod 3422 is connected to the linear drive member 341. By pushing or pulling the second connecting rod 3422 through the linear drive member 341, the first rotating shaft 33 can be rotated through the first connecting rod 3421. The linear drive member 341 can be a cylinder or a linear motor, etc., and the output end of the cylinder or linear motor is connected to the second connecting rod 3422.

[0053] In this example, the baffle mechanism also includes a second mounting member 5, to which the linear drive member 341 can be fixedly connected. The second mounting member 5 can be installed on a fixing device at a corresponding position. For example, the second mounting member 5 can be a fixing block, and it can be installed on the fixing device using fasteners such as screws or bolts. The linear drive mechanism is rotatably adjustable on the second mounting member 5; by rotating the linear drive member 341, the output direction of the linear drive member 341 can be adjusted.

[0054] Of course, the specific structure of the linkage 342 can be determined by those skilled in the art based on the actual situation, and no specific limitation is made here.

[0055] In this example, the first link 3421 and the second link 3422 can be made of metals such as stainless steel or aluminum alloy. Furthermore, the specific strength and dimensions of the first link 3421 and the second link 3422 can be determined by those skilled in the art based on the actual situation, and are not specifically limited here.

[0056] In one example, such as Figures 2 to 5 As shown, in one example, the baffle mechanism further includes a stop 4, the first link 3421 being rotatable toward or away from the stop 4, and the stop 4 being adapted to abut against the first link 3421 when the limiting member 31 moves to the first position.

[0057] In this example, as the first rotating shaft 33 drives the limiting member 31 to rotate from the second position to the first position, the first connecting rod 3421 can rotate toward the stop member 4. When the limiting member 31 rotates to the first position, the first connecting rod 3421 can abut against the stop member 4, thereby limiting the continued rotation of the first connecting rod 3421 and preventing the limiting member 31 from pushing the baffle body 1 too much, causing the baffle body 1 to tilt. As the first rotating shaft 33 drives the limiting member 31 to rotate from the first position to the second position, the first connecting rod 3421 can rotate away from the stop member 4.

[0058] likeFigure 4 and Figure 5 As shown, in this example, the baffle mechanism further includes a third mounting member 6, and a stop member 4 can be fixedly connected to the third mounting member 6. The third mounting member 6 can be fixedly installed on a fixing device at a corresponding position. For example, the third mounting member 6 can be a fixing block, and the third mounting member 6 can be installed on the fixing device using fasteners such as screws or bolts. The stop member 4 can be a bolt, and the stop member 4 is screwed to the third mounting member 6, with the bolt head abutting against the first connecting rod 3421.

[0059] In one example, such as Figure 1 As shown, the baffle body 1 is provided with a clearance hole 11, which is adapted to correspond to the coating roller.

[0060] like Figure 1 As shown, the baffle body 1 has a clearance hole 11 extending through it along the thickness direction, and the clearance hole 11 can correspond to the coating roller. That is, the substrate is wound around the coating roller, the baffle body 1 is located below the coating roller, the evaporation boat is located below the baffle body 1, and the steam can adhere to the corresponding position of the substrate through the clearance hole 11 to form a coating on the surface of the substrate.

[0061] In this example, the length and width of the clearance hole 11 can be determined by those skilled in the art according to the actual situation, and are not specifically limited here.

[0062] In one example, such as Figure 1 As shown, the baffle body 1 is provided with baffles 12 at both ends opposite to the avoidance hole 11, and the baffles 12 are adapted to correspond to the two sides of the coating roller along the axial direction.

[0063] like Figure 1 As shown, the substrate is wound around the coating roller. To ensure sufficient and uniform cooling of the substrate, the axial length of the coating roller is greater than the width of the substrate, and the substrate can be wound around the middle of the coating roller. The axial length of the coating roller is greater than the length corresponding to the clearance hole 11. That is, the baffle body 1 is provided with baffles 12 at both ends of the clearance hole 11 to prevent steam from rising from the clearance hole 11 to the area of ​​the coating roller and adhering to the area of ​​the coating roller where the substrate is not wound.

[0064] According to another embodiment of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the baffle mechanism described in the above embodiment. Figures 1 to 5As shown, the baffle mechanism includes a baffle body 1, a first driving member 2, and a limiting assembly 3. The baffle body 1 has a first end and a second end disposed opposite to each other. The first driving member 2 is tractively connected to the first end of the baffle body 1 and can drive the baffle body 1 to rotate. The limiting assembly 3 includes a limiting member 31, which can move to a first position to support the second end of the baffle body 1, and can also move to a second position to avoid obstructing the baffle body 1. The limiting member 31's ability to move to the first position, thereby supporting the second end of the baffle body 1, prevents the baffle body 1 from shaking.

[0065] In this example, the evaporation coating equipment also includes a cavity, a cover plate, and a winding mechanism, with the winding mechanism located on one side of the cover plate. The winding mechanism includes a coating roller and is suitable for winding a substrate. An evaporation boat is housed within the cavity for evaporating aluminum vapor. A baffle mechanism can be installed on the cover plate, which allows the winding mechanism to enter the cavity and seals the opening of the cavity. In this case, the baffle mechanism is positioned above the evaporation boat and below the evaporation roller.

[0066] The first driving member 2 can drive the baffle body 1 to rotate around the first end. For example, the first driving member 2 can drive the baffle body 1 to rotate to a horizontal position to perform evaporation coating in the cavity. At this time, the limiting member 31 can move to the first position and support the baffle body 1 to improve the stability of the baffle body 1 and prevent the baffle body 1 from shaking. After the evaporation coating is completed, the limiting member 31 can also move to the second position. At this time, the limiting member 31 can avoid the baffle body 1, so that the first driving member 2 can drive the baffle body 1 to rotate to a vertical position to facilitate cleaning of the baffle body 1.

[0067] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0068] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A baffle mechanism, characterized by, The baffle mechanism comprises: a baffle body having a first end and a second end arranged oppositely; a first driving member drivingly connected to the first end of the baffle body, the first driving member being capable of driving the baffle body to rotate; a limiting assembly comprising a limiting member, the limiting member being capable of moving to a first position to support the second end of the baffle body, and the limiting member being capable of moving to a second position to avoid the baffle body.

2. The baffle mechanism of claim 1, wherein, The limiting assembly further comprises a first rotating shaft, the limiting member being connected to the first rotating shaft, and the first rotating shaft being capable of driving the limiting member to rotate to the first position or the second position.

3. The baffle mechanism of claim 2, wherein, A plurality of limiting members are arranged along the length direction of the first rotating shaft.

4. The baffle mechanism of claim 2, wherein, The limiting assembly further comprises a second driving member, the second driving member being suitable for driving the first rotating shaft to rotate.

5. The baffle mechanism of claim 2, wherein, The limiting assembly further comprises a linear driving member and a linkage, the linear driving member being drivingly connected to the first rotating shaft through the linkage, and the linear driving member being capable of driving the first rotating shaft to rotate.

6. The baffle mechanism of claim 5, wherein, The linkage comprises a first connecting rod and a second connecting rod, one end of the first connecting rod being connected to the first rotating shaft, the other end of the first connecting rod being rotatably connected to the second connecting rod, and one end of the second connecting rod away from the first connecting rod being drivingly connected to the linear driving member.

7. The baffle mechanism of claim 6, wherein, The baffle mechanism further comprises a stop member, the first connecting rod being capable of rotating towards or away from the stop member, and the stop member being suitable for abutting against the first connecting rod when the limiting member moves to the first position.

8. The baffle mechanism of claim 6, wherein, The baffle body is provided with an avoiding hole, the avoiding hole being suitable for corresponding to a coating roller.

9. The baffle mechanism of claim 8, wherein, The baffle body is provided with a shutter at two ends opposite to the avoiding hole, the shutter being suitable for corresponding to two sides of the coating roller in the axial direction.

10. An evaporation coating apparatus, characterized by The baffle mechanism comprises any one of claims 1 to 9.

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