Micro-nano sample transfer device

Abstract

The utility model discloses a micro-nano sample transferring device. The micro-nano sample transferring device comprises a sample support, a transfer support and a sample fixing structure, the sample support is provided with a transfer groove which is through in the axial direction of the sample support, the transfer support is detachably arranged in the transfer groove, x sample grooves used for containing micro-nano samples are formed in the transfer support, the sample fixing structure is arranged on the transfer support, and x is larger than or equal to 1 and smaller than or equal to 1. The sample fixing structure is used for fixing the micro-nano sample in the sample groove, and x is greater than or equal to 1.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of micro-nano sample sample transmission devices, belong to micro-nano manufacturing technical field. BACKGROUND

[0002] Molecular beam epitaxy technology is a new technology developed in semiconductor process in recent ten years, in appropriate substrate and suitable conditions, in ultra-high vacuum environment, make one or more molecular (atomic) beam flow with certain thermal energy is sprayed to substrate, thin film is grown along substrate material crystal axis direction layer by layer.The molecular beam epitaxy growth can realize atomic layer-by-layer deposition of single crystal growth, according to the set program switch shutter, change furnace temperature and control growth time, different thickness, different components, different doping concentration epitaxial material can be grown.

[0003] Molecular beam epitaxy (MBE) method has the following characteristics compared with other liquid phase, gas phase epitaxial growth method: 1, the growth rate of molecular beam epitaxy is slower, about 0.01~1nm / s.Single atomic (molecular) layer epitaxy can be realized, with excellent film thickness controllability;2, non-thermal equilibrium growth, substrate temperature can be lower than equilibrium temperature, low temperature growth can be realized, which can effectively reduce interdiffusion and self-doping;3, by adjusting the opening and closing of the shutter between beam source and substrate, the composition and impurity concentration of film can be strictly controlled, and selective epitaxial growth can also be realized;4, cooperate with reflection high energy electron diffraction (RHEED) and other devices, in-situ observation and real-time monitoring can be realized.MBE method can prepare artificial modulated two-dimensional thin film material, and through accurate control of film layer composition, doping concentration and other means, quantum well, superlattice, topological superconducting and other quantum new materials are obtained, which is favored by more and more scientific researchers.

[0004] Reflection high energy electron diffraction (RHEED) is an effective tool for in-situ monitoring of thin film growth structure.In film plating process, RHEED can be used to monitor thin film growth, and the surface reconstruction of substrate, the crystal structure of substrate or thin film surface can be analyzed by RHEED pattern characteristics.Through the change of diffraction intensity, the surface roughness of thin film can be analyzed, so as to monitor the progress of thin film growth. Figure 1As shown, RHEED is incident on the sample surface at a high energy electron of 10-100 keV at a small angle (usually 1-3°), that is, the electron beam is incident in a direction almost parallel to the sample surface, and after diffraction of the sample crystal face, the electron diffraction signal can be detected on the screen on the other side, the momentum component of the electron perpendicular to the sample surface is small, and it is scattered by the Coulomb field, so the penetration depth of the electron beam is only 1-2 atomic layers, therefore RHEED reflects the structure information of the sample surface, and great progress has been made in the study of crystal growth, adsorption, surface defects and the like.

[0005] At present, two-inch and four-inch MBE equipment is mainly used for preparing large-area samples, and for two-inch samples, the uniformity of the sample can generally reach 3-5% or even lower (except for the sample edge of 6mm), and for large samples, the high-energy electron of the in-situ RHEED is incident on the sample surface at a small angle (usually 1-3°), and the light spot can be easily found on the fluorescent screen and the structure information of the sample surface can be obtained by tuning; however, for single crystal substrates such as CdTe and CdZnTe which are relatively expensive, 5mm*5mm or 10mm*10mm substrates are preferentially used for preparing micro-nano samples and devices, but due to the small size of the sample, the in-situ monitoring of the sample information by RHEED requires that the sample be exposed to the incident range of the RHEED electron gun without being blocked by screws or sample holders. However, due to the use of high-temperature silver glue to paste the sample on the two-inch sample holder, the cleanliness of the sample in the ultra-high vacuum cavity cannot be guaranteed, and there is a risk of sample falling off. Practical new type content

[0006] The main purpose of the present application is to provide a micro-nano sample transmission device to overcome the shortcomings of the prior art.

[0007] To achieve the foregoing purposes of the application, the technical scheme adopted by the present application comprises:

[0008] The micro-nano sample transmission device provided by the embodiment of the present application comprises a sample holder, an adapter holder and a sample fixing structure, the sample holder has an adapter slot passing through along the axial direction thereof, the adapter holder is detachably arranged in the adapter slot, the adapter holder is provided with x sample slots for placing micro-nano samples, the sample fixing structure is arranged on the adapter holder, the sample fixing structure is used for fixing the micro-nano sample in the sample slot, and x is greater than or equal to 1.

[0009] Compared with the prior art, the advantages of the utility model include: the utility model embodiment provides a kind of micro-nano sample sample transmission device, can realize the demand of using two inches / four inches MBE equipment to complete micro-nano sample growth, and the tablet of adapter backing surface can effectively reduce the risk of sample drop, and ensure that micro-nano sample front is not blocked, ensure the real-time monitoring of RHEED in micro-nano sample growth process, and, the positioning gap of sample holder can effectively improve sample transmission efficiency;Mechanical hand of circular ring design can avoid micro-nano sample in the process of transmission being contacted pollution by mechanical hand etc. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 It is the schematic diagram of principle that RHEED in-situ monitors sample information in MBE;

[0011] Figure 2 It is the structure schematic diagram of a kind of micro-nano sample sample transmission device provided in a typical embodiment case of the utility model;

[0012] Figure 3 It is the structure schematic diagram of a kind of sample holder provided in a typical embodiment case of the utility model;

[0013] Figure 4 It is the structure schematic diagram of adapter and tablet provided in a typical embodiment case of the utility model;

[0014] Figure 5 It is the structure schematic diagram of another micro-nano sample sample transmission device provided in a typical embodiment case of the utility model;

[0015] Figure 6 It is the top view of another micro-nano sample sample transmission device provided in a typical embodiment case of the utility model;

[0016] Figure 7 It is the structure schematic diagram of a kind of micro-nano sample sample transmission device provided in a typical embodiment case of the utility model;

[0017] Figure 8 It is the structure schematic diagram of the mechanical hand grab head provided in a typical embodiment case of the utility model. DETAILED DESCRIPTION

[0018] In view of the deficiencies in the prior art, the present inventor has long-term research and a large number of practices, and the technical scheme of the utility model is proposed. The technical scheme, its implementation process and principles will be further explained as follows.

[0019] In order to realize the requirement of 200nm patterning growth task in a two-inch MBE device, two kinds of lattice-matched substrate materials and epitaxial target materials are selected, CdTe (001) substrate and PbTe, in order to complete the epitaxial growth of PbTe on the CdTe (001) substrate, the cleanliness of the substrate needs to be confirmed, because the price of the CdTe (001) substrate is expensive, when the early experiment is explored, a small sample, i.e. a 5mm*5mm substrate, is selected. However, for a two-inch sample holder, it is easy to adjust the RHEED laser point to the center of the sample, and the processing condition of the sample surface can be confirmed more simply and conveniently, and the size of the 5mm*5mm CdTe (001) substrate needs to be ensured to be not blocked, the growth condition of the 5mm*5mm small sample is monitored in situ by RHEED, and the sample is ensured not to be blocked by nuts and the like, therefore, a sample adapter holder with an inverted sample groove is designed to fix the sample, and a blocking piece is designed on the back of the sample to fix the sample, so that the inverted sample can be completely exposed to the RHEED electron gun incident range.

[0020] The micro-nano sample transmission device provided by the embodiment of the present application comprises a sample holder, an adapter holder and a sample fixing structure, the sample holder has an adapter groove penetrating along the axial direction of the sample holder, the adapter holder is detachably arranged in the adapter groove, the adapter holder is provided with x sample grooves for placing micro-nano samples, the sample fixing structure is arranged on the adapter holder, the sample fixing structure is used for fixing the micro-nano samples in the sample grooves, and x>1.

[0021] Further, the sample holder has a first working surface and a second working surface arranged back to back along the axial direction of the sample holder, a first groove opening of the adapter groove is located on the first working surface, and a second groove opening of the adapter groove is located on the second working surface, the first groove opening and the second groove opening of the adapter groove are communicated with the first working surface and the second working surface respectively, the adapter holder has a third working surface, the third working surface of the adapter holder located in the adapter groove is located in the same plane as the first working surface, and the sample fixing structure is arranged on the third working surface.

[0022] Further, the sample fixing structure comprises y pressing pieces, each micro-nano sample is fixed by z pressing pieces, the pressing piece has a first end and a second end, the first end is connected to the adapter holder as a connecting end, the second end can contact the micro-nano sample in the sample groove as a pressing end, the pressing piece can apply pressure to the micro-nano sample in the sample groove and limit the micro-nano sample in the sample groove, y≥z≥x≥1.

[0023] Further, the pressing piece is an elastic piece, and the pressure of the pressing piece for limiting the micro-nano sample in the sample groove is from the elastic restoring force of the pressing piece.

[0024] Further, the first end of the pressing plate is fixedly connected with the adapter holder, and the second end of the pressing plate is located at one side of the sample groove along the longitudinal direction of the sample groove.

[0025] Alternatively, the first end of the pressing plate is movably connected with the adapter holder, and the pressing plate can rotate on the third working surface under the action of an external force, so that the second end moves between a first position and a second position, the first position is located in the projection area of the sample groove along the longitudinal direction of the sample groove, and the second position is located in the area outside the projection area of the sample groove.

[0026] Further, the rotation axis of the pressing plate is perpendicular to the third working surface.

[0027] Further, the pressing plate is connected with the adapter holder through a connecting member, and the rotation axis of the pressing plate is the axis of the connecting member.

[0028] Further, the connecting member is a threaded connecting member, and the connecting member is threadedly connected with the adapter holder.

[0029] In a more specific embodiment, the pressing plate further comprises a first transition connecting portion and a second transition connecting portion which are fixedly connected in sequence, the first transition connecting portion is fixedly connected with the first end, the second transition connecting portion is fixedly connected with the second end, the first end and the second end are parallel, and the first transition connecting portion and the second transition connecting portion are located on the side of the first end and the second end away from the adapter holder and are arranged at an angle.

[0030] In a more specific embodiment, the number x of sample grooves provided on the adapter holder is greater than or equal to 2, the number y of pressing plates contained in the sample fixing structure is greater than or equal to 2, the third working surface of the adapter holder has a first area and a second area, the second area is arranged around the first area, x sample grooves are arranged in the second area and sequentially arranged along the circumference of the first area, and the first end of the pressing plate is arranged in the first area.

[0031] Further, the first ends of the y pressing plates are arranged in the same area, the first ends of the y pressing plates are fixedly connected, or the first ends of the y pressing plates are movably matched.

[0032] Further, the first ends of the y pressing plates are sequentially stacked.

[0033] Further, the groove wall of the adapter groove has a stepped structure, and the adapter holder is arranged on the stepped structure.

[0034] Further, the adapter groove is a circular groove, and the adapter holder is a circular structure.

[0035] Further, the sample holder is a circular ring structure.

[0036] Further, the adapter holder has a size of two inches or four inches, and the micro-nano sample has a size of 5mm*5mm or 10mm*10mm.

[0037] In a more specific embodiment, the micro-nano sample transfer device further comprises a mechanical hand grabber for carrying the sample holder, the sample holder is provided with two positioning structure groups, each of the positioning structure groups comprises two positioning notches, and the two positioning notches included in each of the positioning structure groups are oppositely arranged along a diameter direction of the sample holder, the mechanical hand grabber is provided with two positioning columns which are spaced apart and oppositely arranged, and the two positioning columns are respectively arranged in the two positioning notches included in the positioning structure groups.

[0038] Further, the mechanical hand grabber has a positioning groove, the two positioning columns are arranged in the positioning groove, and the sample holder is detachably arranged in the positioning groove, the mechanical hand grabber is further provided with two oppositely arranged avoiding notches, and a part of the outer periphery of the sample holder arranged in the positioning groove is exposed from the two avoiding notches.

[0039] The technical solution, implementation process and principles will be further explained in combination with the accompanying drawings and specific implementation cases.

[0040] In a more specific embodiment, a micro-nano sample transfer device can be used for sample growth and RHEED in-situ monitoring in an MBE device, please refer to Figure 2 、 Figure 3 and Figure 4 , the micro-nano sample transfer device comprises a sample holder 100, an adapter holder 200, and a sample fixing structure 300, the sample holder 100 has an adapter groove 110, the adapter holder 200 is detachably arranged in the adapter groove 110, the adapter holder 200 is provided with x sample grooves 210 for placing micro-nano samples, the sample fixing structure 300 is arranged on the adapter holder 200, and the sample fixing structure 300 is used for fixing the micro-nano samples in the sample grooves 210, wherein the adapter groove 110 is a groove-shaped structure penetrating along the axial direction of the sample holder 100, the sample groove 210 is a groove-shaped structure penetrating along the axial direction of the adapter holder 200, and the micro-nano sample is a square sample with a size of 5mm*5mm or 10mm*10mm.

[0041] Specifically, the adapter tray 200 is a circular sheet structure as a whole, and has a third working surface and a fourth working surface arranged back to back along an axial direction of the adapter tray 200. The sample groove 210 is in communication with the third working surface and the fourth working surface. The micro-nano sample can be inverted in the sample groove 210. The sample fixing structure 300 is arranged on the third working surface of the adapter tray 200 and is used to limit / fix the micro-nano sample in the sample groove 210. More specifically, the fourth slot of the sample groove 210 is in communication with the fourth working surface, and the third slot is in communication with the third working surface. The third slot and the fourth slot of the sample groove 210 are square structures. The groove wall of the sample groove 210 has a step structure for supporting the sample. More specifically, the size of the adapter tray 200 is two inches or four inches. The length of the side of the third slot of the sample groove 210 is 5.1 mm, and the length of the side of the fourth slot is 4.9 mm.

[0042] Specifically, the sample tray 100 is a circular ring structure as a whole, and the adapter groove 110 is a circular groove formed by the inner ring surface of the sample tray 100. The groove wall of the adapter groove 110 has a step structure for supporting the adapter tray 200. More specifically, the sample tray 100 has a first working surface and a second working surface arranged back to back along an axial direction of the sample tray 100. The first slot of the adapter groove 110 is located on the first working surface, and the second slot is located on the second working surface. The first slot and the second slot of the adapter groove 110 are in communication with the first working surface and the second working surface, respectively. The adapter tray 200 is detachably arranged in the adapter groove 110, and the third working surface of the adapter tray 200 is flush with the first working surface of the sample tray 100. The circular sample tray 100 can not only realize the combined assembly with the adapter tray 200, but also will not block the adapter tray 200 and the sample on the adapter tray 200, so as to ensure the realization of the corresponding functions of each structure part. For example, when the size of the adapter tray 200 is two inches, the minimum diameter of the inner ring of the sample tray 100 is 49 mm, and the diameter of the outer ring is 62 mm, so as to ensure that the adapter groove 110 can accommodate the adapter tray 200 and ensure that the adapter tray 200 will not fall off.

[0043] Specifically, the sample fixing structure 300 comprises a pressing sheet 310, each micro-nano sample is fixed by a pressing sheet 310, the pressing sheet 310 has a first end and a second end, the first end is connected with the adapter holder 200 as a connecting end, the second end is in contact with the micro-nano sample in the sample groove 210 as a pressing end, the pressing sheet 310 can apply pressure to the micro-nano sample in the sample groove 210 and limit the micro-nano sample in the sample groove 210. More specifically, the pressing sheet 310 is an elastic sheet, the pressure of the pressing sheet 310 limiting the micro-nano sample in the sample groove 210 comes from the elastic restoring force of itself. More specifically, in order to provide more stable limitation to the micro-nano sample, the pressing sheet 310 further comprises a first transition connecting part and a second transition connecting part fixedly connected in sequence, the first transition connecting part is fixedly connected with the first end, the second transition connecting part is fixedly connected with the second end, the first end and the second end are parallel, and the first transition connecting part and the second transition connecting part are located on the side of the first end and the second end away from the adapter holder 200 and are arranged at an angle.

[0044] As one of the embodiments, the first end of the pressing sheet 310 is fixedly connected with the adapter holder 200, and the second end of the pressing sheet 310 is located on one side of the sample groove 210 along the longitudinal direction of the sample groove 210. When the micro-nano sample is placed in the sample groove 210, the second end of the pressing sheet 310 is lifted, and after the micro-nano sample is placed in the sample groove 210, the external force applied to the pressing sheet 310 is removed, the second end of the pressing sheet 310 is reset under the action of its own elastic force and is pressed on the micro-nano sample. Similarly, the micro-nano sample can also be taken out of the sample groove 210 in this way. Specifically, the pressing sheet 310 can be fixed on the adapter holder 200 by a fixing method or a fixing structure known in the art such as threaded connection or welding.

[0045] As another implementation, the first end of the pressing piece 310 is movably connected with the adapter holder 200, and the pressing piece 310 is capable of rotating on the third working surface under external force, so as to move the second end between a first position and a second position, the first position being located within the projection area of the sample groove 210 along the longitudinal direction of the sample groove 210, and the second position being located outside the projection area of the sample groove 210. When placing the micro-nano sample into the sample groove 210, the pressing piece 310 is rotated to move the second end of the pressing piece 310 away from the notch area of the sample groove 210, and after the micro-nano sample is placed into the sample groove 210, the pressing piece 310 is rotated again to move the second end of the pressing piece 310 to the notch area of the sample groove 210 and press the micro-nano sample. Similarly, the micro-nano sample can also be taken out of the sample groove 210 in this way. Specifically, the first end of the pressing piece 310 can be rotatably connected with the adapter holder 200 through a threaded connecting piece 320, and when the pressing piece 310 is rotated, the force for driving the rotation of the pressing piece 310 can be adjusted by screwing the threaded connecting piece 320.

[0046] Specifically, the number of sample grooves 210 provided on the adapter holder 200 can be one or more, and correspondingly, the number of pressing pieces 310 included in the sample fixing structure 300 can be one or more. The pressing piece 310 and the sample groove 210 can be one-to-one corresponding, that is, one pressing piece 310 is used to limit one micro-nano sample. When the number of sample grooves 210 provided on the adapter holder 200 is multiple, and the number of pressing pieces 310 included in the sample fixing structure 300 is multiple, the third working surface of the adapter holder 200 has a first area and a second area, the second area is provided around the first area, x sample grooves 210 are provided in the second area and sequentially arranged along the circumferential direction of the first area, and the first end of the pressing piece 310 is provided in the first area. As a typical embodiment, the first ends of all pressing pieces 310 are provided in the same area, and the first ends of multiple pressing pieces 310 are fixedly connected or movably matched, for example, the first ends of all pressing pieces 310 are sequentially stacked and connected with the adapter holder 200 through the same threaded connecting piece 320. Figure 2 The case with one sample groove 210 and one pressing piece 310 is shown, Figure 5 and Figure 6 The case with four sample grooves 210 and four pressing pieces 310 is shown.

[0047] In a more specific embodiment, as Figure 7 and Figure 8As shown, the micro-nano sample conveying device further comprises a mechanical hand grab head 400 for carrying the sample holder 100, the outer periphery of the sample holder 100 is provided with two positioning structure groups, each of the positioning structure groups comprises two positioning notches 120, and the two positioning notches 120 included in each of the positioning structure groups are oppositely arranged along a diameter direction of the sample holder 100, and the mechanical hand grab head 400 is provided with two positioning columns 420, the two positioning columns 420 are oppositely arranged and spaced, and the two positioning columns 420 are correspondingly arranged in the two positioning notches 120 included in the positioning structure group. Specifically, the positioning notches 120 on the sample holder 100 are used to provide a certain fault tolerance space for the mechanical hand in the automatic sample conveying process, and the gap width between the edges of the positioning groove 410 of the sample holder 100 and the mechanical hand grab head 400 can be within the error range of 1mm to smoothly convey the sample.

[0048] Specifically, the mechanical hand grab head 400 has a positioning groove 410, two positioning columns 420 are arranged in the positioning groove 410, and the sample holder 100 is detachably arranged in the positioning groove 410. The mechanical hand grab head 400 further has two oppositely arranged avoiding notches, and the outer periphery of the sample holder 100 located in the positioning groove 410 is exposed from the two avoiding notches, and the edges of the avoiding notches can be used as positioning edges. Specifically, the positioning groove 410 is a groove structure penetrating through the mechanical hand grab head 400, and the groove wall of the positioning groove 410 is provided with a step structure for supporting the sample holder 100. Specifically, the mechanical hand grab head 400 is a circular ring structure with avoiding notches, so as to ensure that the bottom of the inverted micro-nano sample is not blocked. For example, the outer diameter of the circular ring of the mechanical hand grab head 400 is 72mm, the width is 50mm, and the inner diameter is 63mm. The mechanical hand grab head 400 is provided with two positioning columns 420, which can meet the growth requirements of samples with different crystal directions, and the micro-nano sample is placed in the atmosphere according to requirements and then conveyed into the vacuum pipeline, and the bottom is not blocked, so as to prevent the sample holder 100 from being touched and polluting the sample.

[0049] The embodiment of the utility model provides a kind of micro-nano sample conveying device, including two / four inch sample holder is converted 5mm*5mm or 10mm*10mm adapter holder, for MBE growth and RHEED in-situ monitoring sample structure information, with positioning edge facilitate confirming sample crystal direction and satisfy test demand, and ensure that in automation sample conveying, mechanical hand cannot cause pollution to sample.

[0050] The embodiment of the utility model provides a kind of micro-nano sample conveying device, which can be used for RHEED in-situ monitoring small sample growth during MBE epitaxial growth, effectively improves the transfer efficiency of micro-nano samples, and avoids contact pollution in ultra-high vacuum.

[0051] The utility model discloses an embodiment provides a kind of micro-nano sample sample transmission device, can realize the demand of using two inch / four inch MBE equipment to complete micro-nano sample growth, and the tabletting of adapter back can effectively reduce the risk of sample drop, and ensure that micro-nano sample front is not blocked, ensure the real-time monitoring of RHEED in micro-nano sample growth process, and, the positioning gap of sample holder can effectively improve sample transmission efficiency;Mechanical hand of circular ring design can avoid micro-nano sample in the transmission process is contacted pollution by mechanical hand etc.

[0052] It should be understood that the above embodiments are only to illustrate the technical concept and characteristics of the utility model, and the purpose is to enable persons skilled in the art to understand the content of the utility model and to implement it, and it cannot limit the protection scope of the utility model. Any equivalent changes or modifications made in accordance with the spirit and essence of the utility model shall be covered within the protection scope of the utility model.

Claims

1. A micro-nano sample transmission device, characterized in that, The application relates to a sample holder, an adapter holder and a sample fixing structure. The sample holder has a first working surface and a second working surface arranged in opposite directions along an axial direction of the sample holder, a first slot of the adapter slot is arranged on the first working surface, and a second slot of the adapter slot is arranged on the second working surface; the first slot and the second slot of the adapter slot are communicated with the first working surface and the second working surface respectively; the adapter holder has a third working surface, the third working surface of the adapter holder arranged in the adapter slot is arranged in the same plane as the first working surface, and the sample fixing structure is arranged on the third working surface. The sample fixing structure comprises y pressing pieces, each micro-nano sample is fixed by z pressing pieces, the pressing piece has a first end and a second end, the first end is connected with the adapter holder as a connecting end, and the second end is capable of contacting the micro-nano sample in the sample slot as a pressing end; the pressing piece can apply pressure to the micro-nano sample in the sample slot and limit the micro-nano sample in the sample slot, and y>=z>=x>=1. The pressing piece is an elastic piece, and the pressure of the pressing piece for limiting the micro-nano sample in the sample slot is from the elastic restoring force of the pressing piece.

2. The micro-nano sample delivery device according to claim 1, wherein: The first end of the pressing piece is fixedly connected with the adapter holder, and the second end of the pressing piece is arranged on one side of the sample slot along the longitudinal direction of the sample slot.

3. The micro-nano sample delivery device of claim 1, wherein: Alternatively, the first end of the pressing piece is movably connected with the adapter holder, and the second end of the pressing piece can be moved between a first position and a second position on the third working surface under the action of an external force; the first position is arranged in a projection area of the sample slot along the longitudinal direction of the sample slot, and the second position is arranged in an area outside the projection area of the sample slot. The rotation axis of the pressing piece is perpendicular to the third working surface.

4. The micro-nano sample delivery device of claim 3, wherein: The pressing piece is connected with the adapter holder through a connecting member, and the rotation axis of the pressing piece is the axis of the connecting member.

5. The micro-nano sample delivery device of claim 3, wherein: The connecting member is a threaded connecting member, and the connecting member is screwed with the adapter holder.

6. The micro-nano sample delivery device of claim 5, wherein: The pressing piece further comprises a first transition connecting part and a second transition connecting part which are fixedly connected in sequence; the first transition connecting part is fixedly connected with the first end, the second transition connecting part is fixedly connected with the second end, the first end and the second end are parallel, and the first transition connecting part and the second transition connecting part are arranged on the side, away from the adapter holder, of the first end and the second end and are arranged at an angle.

7. The micro-nano sample delivery device of claim 3, wherein: ​ 8. The micro-nano sample delivery device of claim 1, wherein: The number of sample slots arranged on the adapter tray is x≥2, the number of tablets contained in the sample fixing structure is y≥2, the third working surface of the adapter tray has a first area and a second area, the second area is arranged around the first area, x sample slots are arranged in the second area and sequentially arranged along the circumference of the first area, and the first end of the tablet is arranged in the first area.

9. The micro-nano sample delivery device of claim 8, wherein: The first end of the y tablets is arranged in the same area, the first end of the y tablets is fixedly connected, or the first end of the y tablets is movably matched.

10. The micro-nano sample delivery device of claim 9, wherein: The first end of the y tablets is sequentially stacked.

11. The micro-nano sample delivery device of claim 1, wherein: The wall of the adapter slot has a step structure, and the adapter tray is arranged on the step structure.

12. The micro-nano sample delivery device of claim 11, wherein: The adapter slot is a circular slot, and the adapter tray is a circular structure.

13. The micro-nano sample delivery device of claim 11, wherein: The sample tray is a circular ring structure.

14. The micro-nano sample delivery device according to claim 1 or 11, wherein: The size of the adapter tray is two inches or four inches, and the size of the micro-nano sample is 5mm×5mm or 10mm×10mm.

15. The micro-nano sample delivery device of claim 1, wherein, Further comprising: A mechanical hand grab head for carrying the sample tray, the outer periphery of the sample tray is provided with two positioning structure groups, each positioning structure group includes two positioning notches, and the two positioning notches included in each positioning structure group are oppositely arranged along a diameter direction of the sample tray. Two positioning columns are arranged on the mechanical hand grab head, and the two positioning columns are spaced apart and oppositely arranged, and the two positioning columns are respectively arranged in the two positioning notches included in the positioning structure group.

16. The micro-nano sample delivery device of claim 15, wherein: The mechanical hand grab head has a positioning slot, two positioning columns are arranged in the positioning slot, the sample tray can be detachably arranged in the positioning slot, and the mechanical hand grab head further has two oppositely arranged avoiding notches, and the outer periphery of the sample tray arranged in the positioning slot is exposed from the two avoiding notches.

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