Detection device

Abstract

The detection device comprises a light source mechanism and a detection mechanism, light rays emitted by the light source mechanism can be coupled into a waveguide substrate and totally reflected in the waveguide substrate, and the detection mechanism is used for collecting information of light spots formed by the light rays at total reflection points of the waveguide substrate. The optical characteristics of the waveguide substrate are determined according to the information of the light spots. According to the technical scheme of the embodiment of the utility model, the optical detection of the waveguide substrate is realized, the detection cost is reduced, and the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to waveguide detection technical field especially, relate to a detection device. BACKGROUND

[0002] In augmented reality (AR) and virtual reality (VR) technology, a light waveguide is needed to transmit a virtual image generated by a light engine to a human eye, and the performance of a wafer as a carrier of the light waveguide is also crucial. Considering that the performance of the wafer is related to its flatness, in the related art, the flatness of the wafer is calculated by laser scanning the wafer to detect the performance of the wafer. However, to achieve high-precision flatness detection, a large number of laser scanning points are needed, which results in a long detection time, is not conducive to mass detection, and a large number of high-precision components are needed for laser scanning detection, which results in high detection cost. SUMMARY

[0003] Embodiments of the utility model provide a kind of detection device, it aims at realizing the optical detection of waveguide substrate, reduce detection cost, improve detection efficiency.

[0004] Embodiments of the utility model provide a kind of detection device, for detecting waveguide substrate, the detection device includes:

[0005] Light source mechanism, the light emitted by the light source mechanism can be coupled into the waveguide substrate and totally reflected in the waveguide substrate;And

[0006] Detection mechanism, the detection mechanism is used to collect the information of the light spot formed by the total reflection of the light in the waveguide substrate, to determine the optical characteristics of the waveguide substrate according to the information of the light spot.

[0007] Optionally, the detection device further includes a light path adjusting mechanism, the light path adjusting mechanism is located on the light exit side of the light source mechanism, and the light path adjusting mechanism is used to change the transmission direction of the light to adjust the position and / or angle of the light coupled into the waveguide substrate.

[0008] Optionally, the light path adjusting mechanism includes a reflecting element, and the reflecting element is used to reflect the light.

[0009] Optionally, the detection device further includes a driving mechanism, the driving mechanism is in transmission connection with the reflecting element, and the driving mechanism is used to drive the reflecting element to rotate.

[0010] Optionally, a prism is provided on the waveguide substrate, and the light is coupled into the waveguide substrate through the prism.

[0011] Optionally, the prism and the waveguide substrate are filled with a refractive index matching liquid.

[0012] Optionally, the light source mechanism comprises a laser light source, and the detection device further comprises an attenuator configured to attenuate the light emitted by the laser light source.

[0013] Optionally, the detection device further comprises a sliding mechanism, and the detection mechanism or the waveguide substrate is connected to the sliding mechanism to enable relative sliding between the detection mechanism and the waveguide substrate.

[0014] Optionally, the detection mechanism comprises a luminance meter or an industrial camera.

[0015] Optionally, the information of the light spot comprises at least one of the following: luminance of the light spot, radial size of the light spot, and spacing between a plurality of light spots.

[0016] The detection device provided by the embodiment of the present application can emit light through the light source mechanism, the light can be totally reflected in the waveguide substrate after being coupled into the waveguide substrate, and a light spot can be formed at the total reflection point. The information of the light spot can be collected through the detection mechanism, and the optical characteristics of the waveguide substrate can be determined by analyzing the information of the light spot. The time for collecting the information of the light spot is relatively short, which is conducive to improving the detection efficiency. Moreover, the detection device directly collects the information of the light spot formed on the waveguide substrate, for example, the luminance of the light spot or the radial size of the light spot, and the optical characteristics of the waveguide substrate can be determined according to the information of the light spot, thereby eliminating the use of high-precision components such as time measurement mechanisms and laser receivers, and reducing the detection cost. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0018] Figure 1 The structure diagram of the detection device provided by the embodiment of the present application is shown. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0020] Please see Figure 1 This invention provides a detection device for detecting a waveguide substrate. The detection device 100 includes a light source mechanism 10 and a detection mechanism 20. The light emitted from the light source mechanism 10 is coupled into the waveguide substrate 200 and undergoes total internal reflection within the waveguide substrate 200. The detection mechanism 20 is used to collect information about the light spot formed at the point of total internal reflection on the waveguide substrate 200, so as to determine the optical characteristics of the waveguide substrate 200 based on the information about the light spot.

[0021] Light rays emitted from the light source mechanism 10 are coupled into the waveguide substrate 200 and undergo total internal reflection within the waveguide substrate 200. A light spot is formed at the point of total internal reflection. The detection mechanism 20 then collects the information from this light spot, allowing the optical characteristics of the waveguide substrate 200 to be determined through analysis of this information. It is understandable that collecting the light spot information via the detection mechanism 20 requires a relatively short time, which improves detection efficiency. Furthermore, the light spot directly reflects the optical characteristics of the waveguide substrate 200, and its optical characteristics can be determined based on this information. This eliminates the need for high-precision components such as time measurement mechanisms and laser receivers during the detection process, thus reducing detection costs.

[0022] For example, the waveguide substrate 200 may be a resin wafer.

[0023] For example, such as Figure 1 As shown, Figure 1 The dashed line in the diagram shows the light transmission path. The waveguide substrate 200 is placed on the reflective plane. The light source mechanism 10 is turned on to emit light. The light is coupled into the waveguide substrate 200 and undergoes total internal reflection within the waveguide substrate 200. The light forms a light spot at the point of total internal reflection. The detection mechanism 20 can collect information from multiple light spots on the waveguide substrate 200 to determine the optical characteristics of the waveguide substrate 200 based on the information from the multiple light spots.

[0024] Furthermore, the information of the light spot includes at least one of the following: the brightness of the light spot, the radial size of the light spot, and the spacing between multiple light spots. It is understandable that when light undergoes total internal reflection within the waveguide substrate 200, the weaker the brightness of the light spot formed at the point of total internal reflection, the more uniform the distribution of the light spot, and the smaller the radial size of the light spot, the better the optical characteristics of the waveguide substrate 200, and the better the display effect of the fabricated optical waveguide. In other words, the optical characteristics of the waveguide substrate 200 can be determined based on the brightness of the collected light spot, the radial size of the light spot, or the spacing between multiple light spots.

[0025] For example, the detection mechanism 20 collects the spacing between any two adjacent light spots among multiple light spots. By comparing the magnitude of each spacing value, if the deviation value between each spacing is less than or equal to a preset value, the distribution uniformity of the light spots is high and the optical characteristics of the waveguide substrate 200 are better.

[0026] For example, the detection mechanism 20 collects the radial size of the light spot. If the radial size of the light spot is less than or equal to a preset size, the optical property of the waveguide substrate 200 is better, which is beneficial to achieve a clearer display effect.

[0027] For example, the detection mechanism 20 collects the brightness of the light spot. If the brightness of the light spot is less than or equal to a preset brightness, the optical property of the waveguide substrate 200 is better.

[0028] In some embodiments, the detection mechanism 20 includes a brightness meter or an industrial camera. It can be understood that the industrial camera can collect the gray scale of the light spot, and determine the brightness of the light spot according to the gray scale. The brightness meter can directly collect the brightness of the light spot, so as to analyze the optical property of the waveguide substrate 200 according to the brightness of the light spot. In addition, the brightness meter and the industrial camera can collect the image of the light spot, and determine the radial size of the steel plate and the spacing between the plurality of light spots through the image, so as to analyze the optical property of the waveguide substrate 200.

[0029] For example, as shown in Figure 1 The waveguide substrate 200 can be placed on a reflecting plane, and the brightness meter can be arranged above the waveguide substrate 200 and opposite to the waveguide substrate 200 to collect the information of the light spot on the waveguide substrate 200.

[0030] Optionally, the light source mechanism 10 can include a laser light source, a visible light source, or an infrared light source, etc.

[0031] In some embodiments, the light source mechanism 10 includes a laser light source, and the detection device 100 further includes an attenuator 3030. The attenuator 30 is used to attenuate the light emitted by the laser light source. It can be understood that the coherence of the laser light source is better, which is beneficial to ensure that the laser maintains a stable waveform and phase during transmission, forms a clear light spot on the waveguide substrate 200, and thus improves the accuracy and stability of the detection. In addition, the attenuator 30 is used to adjust the intensity of the laser emitted by the laser light source, so as to avoid the influence of the laser on the components of the detection device 100 and the waveguide substrate 200.

[0032] In some embodiments, the detection device 100 further includes a light path adjusting mechanism. The light path adjusting mechanism is located on the light emitting side of the light source mechanism 10, and is used to change the transmission direction of the light, so as to adjust the position and / or angle of the light coupled into the waveguide substrate 200. It can be understood that the light path adjusting mechanism can change the transmission direction of the light, so that the light is coupled into the waveguide substrate 200 from different positions or at different angles, so as to collect the light spot formed by the light at the total reflection point of the waveguide substrate 200 under different incident conditions, analyze the optical property of the waveguide substrate 200, and improve the accuracy of the detection.

[0033] Exemplarily, the laser light source is a laser diode. Figure 1 As shown, the laser light emitted by the laser light source is transmitted to the light path adjusting mechanism via the attenuator 30 after being attenuated, so as to adjust the transmission direction of the light by the light path adjusting mechanism.

[0034] Further, the light path adjusting mechanism comprises a reflecting element 41 for reflecting the light. The light is reflected by the reflecting element 41 to change the transmission direction of the light, and the reflecting manner is more accurate for the control of the transmission direction of the light, and the energy loss of the light is smaller, so that the information of the light spot collected by the detecting mechanism 20 is more reliable, and the detection accuracy is improved.

[0035] Exemplarily, the light path adjusting mechanism comprises a liquid crystal reflecting element, and the transmission direction of the light after being emitted from the liquid crystal reflecting element is changed by changing the electric field applied to the liquid crystal in the liquid crystal reflecting element to change the reflecting action of the liquid crystal on the light. In other words, the reflecting element 41 can change the transmission direction of the light after being emitted by the reflecting element 41 itself, so as to couple the light into the waveguide substrate 200 from different positions or at different angles.

[0036] Specifically, the detecting device 100 further comprises a driving mechanism (not shown) in transmission connection with the reflecting element 41, and the driving mechanism is used to drive the reflecting element 41 to rotate, so that the reflecting element 41 can transmit the light to different directions. It can be understood that the reflecting element 41 can also change its posture by the driving mechanism, so as to change the transmission direction of the light after being reflected by the reflecting element 41, so as to couple the light into the waveguide substrate 200 from different positions or at different angles.

[0037] Exemplarily, the light path adjusting mechanism comprises a reflecting mirror, and the driving mechanism comprises a rotating driving motor, and the reflecting mirror is in transmission connection with the rotating driving motor, so as to drive the reflecting mirror to rotate, so that the light emitted by the light source mechanism 10 is incident on the reflecting mirror at different angles, so as to adjust the transmission direction of the light after being emitted from the reflecting mirror.

[0038] Exemplarily, the light path adjusting mechanism further comprises a mounting member, and the reflecting element 41 is arranged on the mounting member, so that the mounting member is in transmission connection with the driving mechanism, so as to drive the reflecting element 41 to rotate by the driving mechanism.

[0039] In some embodiments, the waveguide substrate 200 is provided with a prism 50, and the light is coupled into the waveguide substrate 200 via the prism 50. It can be understood that the prism 50 has a high refractive index, and the structure of the prism 50 is relatively simple, and the prism 50 is used as the coupling structure of the waveguide substrate 200, which is beneficial to control the cost of the detecting device 100.

[0040] It is worth mentioning that the angle of the light incident on the prism 50 is greater than the critical angle, so that the light can be coupled into the prism 50, and then the light is coupled into the waveguide substrate 200 at an angle greater than the critical angle, so that the light is totally reflected in the waveguide substrate 200.

[0041] It can be understood that the light path adjusting mechanism can adjust the position and / or angle of the light incident on the prism 50, so that the light is transmitted to different positions of the prism 50, or so that the light is incident on the prism 50 at different angles. For example, Figure 1 As shown in FIG. 6, the waveguide substrate 200 is provided with three prisms, and the rotation axis of the reflecting mirror is parallel to the center line of the three prisms, so that when the reflecting mirror rotates around the rotation axis, the light can be emitted from the reflecting mirror and then incident on the three prisms at different angles.

[0042] Of course, in other embodiments, a reflecting mirror or a coupling lens can also be used as a coupling structure to couple the light into the waveguide substrate 200 for detection.

[0043] Further, the prism 50 and the waveguide substrate 200 are filled with a refractive index matching liquid. By bonding the prism 50 and the waveguide substrate 200 through the refractive index matching liquid, the interface reflection between the prism 50 and the waveguide substrate 200 is reduced, the coupling efficiency of the light coupled into the waveguide substrate 200 is improved, the energy loss of the light in the coupling process is reduced, and thus the detection accuracy is improved.

[0044] In some embodiments, the detection device 100 further includes a sliding mechanism, and the detection mechanism 20 or the waveguide substrate 200 is connected to the sliding mechanism, so that the detection mechanism 20 and the waveguide substrate 200 can slide relative to each other. It can be understood that the detection mechanism 20 and the waveguide substrate 200 can slide relative to each other, so that the detection mechanism 20 can move more conveniently and align the light spots of the multiple total reflection points on the waveguide substrate 200, so as to collect the information of the multiple light spots, so that the collection result is more accurate, and the detection accuracy is improved.

[0045] For example, as shown in FIG. 7, the multiple light spots are arranged in sequence along the left-right direction, and the detection mechanism 20 can slide along the left-right direction to align the multiple light spots and collect the information of the multiple light spots. Figure 1

[0046] For example, the waveguide substrate 200 can be placed on a reflecting plane, and the sliding mechanism includes at least a sliding block and a sliding rail, and the detection mechanism 20 is connected to the sliding block, and the sliding block is slidingly connected to the sliding rail, so that the detection mechanism 20 can slide relative to the sliding rail with the sliding block, so as to slide relative to the waveguide substrate 200.

[0047] ​For example, the sliding mechanism comprises one or more screw-nut transmission assemblies, and the detection mechanism 20 is connected with the screw-nut transmission assemblies, so as to be capable of sliding relative to the waveguide substrate 200 under the driving of the screw-nut transmission assemblies.

[0048] For example, the screw-nut transmission mechanism is drivingly connected with a driving mechanism, and the detection mechanism 20 is driven to slide relative to the waveguide substrate 200 under the driving of the driving mechanism.

[0049] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed by the present application, and these modifications or replacements should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A detection device, characterized in that, A detection device for detecting a waveguide substrate, the detection device comprising: a light source mechanism, light rays emitted by the light source mechanism being capable of being coupled into the waveguide substrate and totally reflected within the waveguide substrate; and a detection mechanism for collecting information of a light spot formed by the light rays at a total reflection point of the waveguide substrate, so as to determine an optical property of the waveguide substrate according to the information of the light spot.

2. The detection device of claim 1, wherein, The detection device further comprises a light path adjusting mechanism located on a light emitting side of the light source mechanism, the light path adjusting mechanism being configured to change a transmission direction of the light rays, so as to adjust a position and / or an angle at which the light rays are coupled into the waveguide substrate.

3. The detection device of claim 2, wherein, The light path adjusting mechanism comprises a reflecting element configured to reflect the light rays.

4. The detection device of claim 3, wherein, The detection device further comprises a driving mechanism in transmission connection with the reflecting element, the driving mechanism being configured to drive the reflecting element to rotate.

5. The detection device of claim 1, wherein, The waveguide substrate is provided with a prism, and the light rays are coupled into the waveguide substrate via the prism.

6. The detection device of claim 5, wherein, A refractive index matching liquid is filled between the prism and the waveguide substrate.

7. The detection device according to any one of claims 1 to 6, characterized in that The light source mechanism comprises a laser light source, and the detection device further comprises an attenuator configured to attenuate the light rays emitted by the laser light source.

8. The detection device according to any one of claims 1 to 6, characterized in that The detection device further comprises a sliding mechanism, and the detection mechanism or the waveguide substrate is connected to the sliding mechanism, so that the detection mechanism and the waveguide substrate are capable of relatively sliding.

9. The detection device according to any one of claims 1 to 6, characterized in that The detection mechanism comprises a luminance meter or an industrial camera.

10. The detection device according to any one of claims 1 to 6, characterized in that The information of the light spot comprises at least one of the following: luminance of the light spot, radial size of the light spot, and spacing between a plurality of light spots.

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