Illumination type mask surface particulate matter detection equipment

Abstract

The utility model discloses illumination type mask plate surface particulate matter detection equipment which comprises a mounting frame, a mask plate placing assembly and a cleaning assembly are arranged on the mounting frame, the mask plate placing assembly is used for placing a mask plate and can drive the placed mask plate to rotate at a certain angle, and the cleaning assembly is used for cleaning the mask plate placing assembly. A first mechanical arm used for transferring a mask plate detected to be qualified and a third mechanical arm used for transferring a mask plate to be detected to the mask plate placing assembly are installed on the two sides of the top end of the installation frame respectively, and a second mechanical arm used for transferring a mask plate detected to be unqualified is installed at the rear end of the top end of the installation frame. According to the utility model, the particulate matters on the surface of the mask plate can be automatically detected, the particulate matters on the two side surfaces of the mask plate can be detected at the same time, and the particulate matters remained on the mask plate in the detection process can be removed in the process of detecting the particulate matters on the surface of the mask plate, so that the detection precision is improved.

Description

Technical Field

[0001] This utility model relates to the field of particle detection technology on the surface of photomasks, specifically to a photomask surface particle detection device. Background Technology

[0002] An optical photomask is a structure that precisely positions and fabricates various functional patterns on a thin film, plastic, or glass substrate for selective exposure of photoresist coatings. Photomasks have a wide range of applications; they are required in any field involving photolithography processes, such as ICs, FPDs, PCBs, and MEMS. The photomask carries the design pattern, and light passes through it, projecting the design onto the photoresist. When there are many particles on the photomask surface, it can affect light transmission. Therefore, after production, photomask surface particle inspection equipment is needed to detect particles on the photomask surface.

[0003] A search revealed that patent publication number CN20838753U discloses an online particle detection device for wafer surfaces and a wafer production line. This device, which can be integrated into a wafer production line, includes: a laser emitter for emitting a raw laser beam onto the wafer; a laser conversion component disposed between the laser emitter and the wafer for converting the raw laser beam into a line laser, so that the line laser is incident perpendicularly on the surface of the wafer, and this line laser is used for surface scanning of the moving wafer surface; and a signal receiver offset from the incident direction of the raw laser beam for receiving reflected laser light from the wafer when the line laser is incident on the wafer surface. This device utilizes a line laser to continuously scan the moving wafer to achieve surface scanning, thereby realizing continuous, uninterrupted, real-time online defect detection of the wafer. Furthermore, this device can be integrated into the production line to achieve real-time online detection of wafer defects.

[0004] Existing photomask surface particulate matter detection equipment typically only detects one side of the photomask surface. After one side is detected, the photomask must be flipped over before the other side can be detected, resulting in poor detection efficiency. Furthermore, after a photomask with particulate matter is detected, some particulate matter remains on the equipment, affecting the detection accuracy when detecting the next photomask. Therefore, an illumination-based photomask surface particulate matter detection equipment is designed. Utility Model Content

[0005] In view of the defects or deficiencies of existing light-illuminated photomask surface particulate matter detection equipment, the purpose of this utility model is to provide a light-illuminated photomask surface particulate matter detection equipment, which not only realizes automatic detection of particulate matter on the surface of the photomask, but also simultaneously detects particulate matter on both sides of the photomask surface. Furthermore, during the detection process, it can remove particulate matter remaining on the photomask, thereby improving the detection accuracy.

[0006] To achieve the above-mentioned objectives, the present invention adopts the following technical solution:

[0007] This utility model provides a photomask surface particulate matter detection device, including a mounting frame. The mounting frame is equipped with a mask placement component for placing a mask and rotating the placed mask at a certain angle, and a cleaning component for cleaning the mask placement component. A first robotic arm for transferring qualified mask plates and a third robotic arm for transferring the mask to be tested to the mask placement component are respectively installed on both sides of the top of the mounting frame. A second robotic arm for transferring unqualified mask plates is installed at the rear end of the top of the mounting frame. A second particulate matter detection component for detecting particulate matter on the lower surface of the mask is installed at the front end of the top of the mounting frame. A first particulate matter detection component for detecting particulate matter on the upper surface of the mask is arranged directly above the second particulate matter detection component.

[0008] Preferably, the first particulate matter detection component is disposed on an L-shaped mounting plate, and the L-shaped mounting plate is installed at the rear end of one side of the top of the mounting frame;

[0009] Both the first particulate matter detection component and the second particulate matter detection component are composed of a CDD camera, an ultraviolet irradiation lamp and a U-shaped mounting plate. The CDD camera is installed at the center of the inner sidewall of the U-shaped mounting plate, and ultraviolet irradiation lamps are installed on both sides of the inner sidewall of the U-shaped mounting plate.

[0010] Preferably, the mask placement assembly is composed of a rotating plate, a transparent mask placement plate, a hollow rotating shaft, a first bevel gear, a second bevel gear, and a stepper motor. The hollow rotating shaft is installed in a bearing on the top surface of the mounting frame, and the bottom end of the hollow rotating shaft is located inside the mounting frame. A second bevel gear is provided below the circumferential outer wall of the hollow rotating shaft, and the second bevel gear meshes with the first bevel gear.

[0011] Preferably, the first bevel gear is mounted on the output shaft of the stepper motor, and the stepper motor is mounted on the top of the mounting bracket. A rotating plate is mounted above the circumferential outer wall of the hollow rotating shaft, and a transparent mask plate is mounted on the circumferential outer wall of the rotating plate. There are four transparent mask plate plates, and the four transparent mask plate plates are arranged in a ring array.

[0012] Preferably, the cleaning component is provided with a housing, which is mounted on the top of the mounting base, and the mounting base is mounted on the inner bottom of the mounting frame. The housing is provided with an exhaust fan and a plate air filter, with the exhaust fan located above the plate air filter. The top of the housing is provided with an air outlet pipe, and the other end of the air outlet pipe is connected to a connecting pipe through a pipe joint. The other end of the connecting pipe extends through the bearing inside the hollow rotating shaft to the outside and is connected to the air inlet on the exhaust nozzle through a pipe joint.

[0013] Preferably, both ends of the plate-type air filter are installed in the U-shaped grooves on the U-shaped card plate, and the outer walls of both ends of the plate-type air filter are in clearance fit with the groove walls of the U-shaped grooves on the U-shaped card plate. The U-shaped card plate is installed on the inner walls of both sides of the box body. Air inlet slots are opened at the bottom of both outer walls of the box body. A sealing door is provided on the front wall of the box body, and a safety lock is provided on the sealing door.

[0014] Preferably, a control box is installed at the front end of the bottom inner side of the mounting bracket.

[0015] Compared with existing technologies, one or more of the above technical solutions have the following beneficial effects:

[0016] 1. In this utility model, through a series of coordinated structural arrangements, when the device detects particulate matter on the surface of a mask, the third robotic arm clamps and transfers the mask to be tested, conveyed by the external conveying structure, to the transparent mask placement plate corresponding to the third robotic arm. The stepper motor's activation indirectly drives the rotating plate to rotate 90° in a certain direction. After the rotating plate rotates 90°, the third robotic arm again clamps and transfers the mask to be tested, conveyed by the external conveying structure, to the transparent mask placement plate corresponding to the third robotic arm. At this time, the mask to be tested is positioned between the first and second particulate matter detection components. The ultraviolet lamp on the first particulate matter detection component irradiates the upper surface of the mask, and the ultraviolet light generated by the ultraviolet lamp on the second particulate matter detection component passes through the transparent mask placement plate to irradiate the lower surface of the mask. When the light is projected onto the particulate matter, a fluorescent reaction occurs. The CDD phases on the first and second particulate matter detection components respectively capture images of both sides of the mask and send the captured data to the microcontroller. When the particulate matter on the surface of the mask is qualified, and the mask after detection is rotated to the corresponding position of the first robotic arm, the first robotic arm transfers the qualified mask to the conveyor structure for transporting qualified mask. When the particulate matter on the surface of the mask is unqualified, and the mask after detection is rotated to the corresponding position of the second robotic arm, the second robotic arm transfers the unqualified mask to the conveyor structure for transporting unqualified mask. Thus, this invention not only realizes automatic detection of particulate matter on the surface of the mask, but also simultaneously detects particulate matter on both sides of the mask, effectively improving the efficiency of particulate matter detection on the mask surface.

[0017] 2. In this utility model, through the coordinated arrangement of cleaning components and other structures, during the mask inspection process, when the transparent mask placement plate corresponding to the second robotic arm rotates to the position corresponding to the third robotic arm, the blower on the cleaning component starts to draw external air into the housing and indirectly deliver the air to the exhaust nozzle. The exhaust nozzle discharges the air. When the transparent mask placement plate corresponding to the second robotic arm rotates to the position corresponding to the third robotic arm, the air discharged from the exhaust nozzle can remove particles on the transparent mask placement plate. Thus, during the particle detection process on the mask surface, this utility model can remove particles remaining on the mask during the detection process, improving the detection accuracy. Attached Figure Description

[0018] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments of this utility model and their descriptions are used to explain this utility model and do not constitute an improper limitation of this utility model.

[0019] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model. Figure 1 .

[0020] Figure 2 This is a schematic diagram of the overall three-dimensional structure of this utility model. Figure 2 .

[0021] Figure 3 This is a schematic diagram of the connection structure between the mask assembly and the cleaning assembly of this utility model.

[0022] Figure 4 This is a schematic diagram of the structure of the first particulate matter detection component and the second particulate matter detection component of this utility model.

[0023] Figure 5 This is a schematic diagram of the structure of the mask placement component of this utility model.

[0024] Figure 6 This is a schematic diagram of the structure of the cleaning component of this utility model.

[0025] Figure 7 This is a cross-sectional view of the housing of this utility model.

[0026] In the picture:

[0027] 100. Mounting bracket; 110. L-shaped mounting plate;

[0028] 200. The First Robotic Arm;

[0029] 300. First particulate matter detection component; 310. CDD camera; 320. Ultraviolet irradiation lamp; 330. U-shaped mounting plate;

[0030] 400. Second robotic arm;

[0031] 500. The third robotic arm;

[0032] 600. Cleaning components; 610. Housing; 611. Air inlet slot; 612. Sealing door; 613. Safety lock; 614. Air outlet duct; 620. Mounting base; 630. Connecting pipe; 640. Exhaust nozzle; 650. Exhaust fan; 660. U-shaped clamp; 670. Plate air filter;

[0033] 700, Mask placement assembly; 710, Rotating plate; 720, Transparent mask placement plate; 730, Hollow rotating shaft; 740, First bevel gear; 750, Second bevel gear; 760, Stepper motor;

[0034] 800. Second particulate matter detection component;

[0035] 900. Control box. Detailed Implementation

[0036] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0037] It should be noted that the following detailed description is exemplary and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0038] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0039] like Figure 1-7 As shown, a photomask surface particulate matter detection device includes a mounting frame 100. The mounting frame 100 is equipped with a mask placement assembly 700 for placing a mask and rotating the placed mask at a certain angle, and a cleaning assembly 600 for cleaning the mask placement assembly 700. A first robotic arm 200 for transferring qualified masks and a third robotic arm 500 for transferring the mask to be tested to the mask placement assembly 700 are respectively installed on both sides of the top of the mounting frame 100. A second robotic arm 400 for transferring unqualified masks is installed at the rear end of the top of the mounting frame 100. A second particulate matter detection assembly 800 for detecting particulate matter on the lower surface of the mask is installed at the front end of the top of the mounting frame 100. A first particulate matter detection assembly 300 for detecting particulate matter on the upper surface of the mask is arranged directly above the second particulate matter detection assembly 800.

[0040] The first particulate matter detection component 300 is mounted on the L-shaped mounting plate 110, and the L-shaped mounting plate 110 is mounted on the rear end of the top side of the mounting bracket 100.

[0041] The first particulate matter detection component 300 and the second particulate matter detection component 800 are both composed of a CDD camera 310, an ultraviolet irradiation lamp 320 and a U-shaped mounting plate 330. The CDD camera 310 is installed at the center of the inner sidewall of the U-shaped mounting plate 330, and ultraviolet irradiation lamps 320 are installed on both sides of the inner sidewall of the U-shaped mounting plate 330.

[0042] The mask placement assembly 700 is composed of a rotating plate 710, a transparent mask placement plate 720, a hollow rotating shaft 730, a first bevel gear 740, a second bevel gear 750, and a stepper motor 760. The hollow rotating shaft 730 is installed in a bearing on the top surface of the mounting bracket 100, and the bottom end of the hollow rotating shaft 730 is located inside the mounting bracket 100. The second bevel gear 750 is provided below the circumferential outer wall of the hollow rotating shaft 730, and the second bevel gear 750 is meshed with the first bevel gear 740.

[0043] The first bevel gear 740 is mounted on the output shaft of the stepper motor 760, which is mounted on the top of the mounting bracket 100. A rotating plate 710 is mounted on the upper circumferential outer wall of the hollow rotating shaft 730. A transparent mask plate placement plate 720 is mounted on the circumferential outer wall of the rotating plate 710. There are four transparent mask plate placement plates 720, which are arranged in a ring array. When the stepper motor 760 starts, it drives the first bevel gear 740 to rotate. The rotation of the first bevel gear 740 drives the second bevel gear 750 to rotate. The rotation of the second bevel gear 750 drives the hollow rotating shaft 730 to rotate. The rotation of the hollow rotating shaft 730 drives the rotating plate 710 to rotate. The rotation of the rotating plate 710 drives the transparent mask plate placement plate 720 to rotate.

[0044] The cleaning component 600 is equipped with a housing 610, which is mounted on the top of the mounting base 620. The mounting base 620 is mounted on the inner bottom of the mounting bracket 100. The housing 610 contains an exhaust fan 650 and a plate air filter 670, with the exhaust fan 650 positioned above the plate air filter 670. The plate air filter 670 filters dust from the outside air, preventing dust from being blown onto the transparent mask placement plate 720 and causing a large amount of dust to be adsorbed on the surface of the transparent mask placement plate 720. The top of the housing 610 is equipped with an exhaust pipe 614, the other end of which is connected to a connecting pipe 630 via a pipe connector. The other end of the connecting pipe 630 extends through the bearing inside the hollow rotating shaft 730 to the outside and is connected to the air inlet on the exhaust nozzle 640 via a pipe connector.

[0045] Both ends of the plate-type air filter 670 are installed in the U-shaped grooves on the U-shaped clamp 660, and the outer walls of both ends of the plate-type air filter 670 are clearance-fitted with the groove walls of the U-shaped grooves on the U-shaped clamp 660. Because the outer walls of both ends of the plate-type air filter 670 are clearance-fitted with the groove walls of the U-shaped grooves on the U-shaped clamp 660, it is convenient for workers to disassemble, replace or clean the plate-type air filter 670. The U-shaped clamp 660 is installed on the inner walls of both sides of the housing 610. Air inlet slots 611 are opened at the bottom of both outer walls of the housing 610. A sealing door 612 is provided on the front wall of the housing 610, and a safety lock 613 is provided on the sealing door 612.

[0046] The control box 900 is installed at the front end of the bottom inner side of the mounting bracket 100. The control box 900 contains an A / D conversion module and a microcontroller.

[0047] Working principle: When in use, connect to an external power supply. When the device detects particulate matter on the surface of the reticle, the third manipulator 500 clamps and transfers the reticle to be detected conveyed on the external conveying structure to the transparent reticle placement plate 720 at a position corresponding to the third manipulator 500. When the stepping motor 760 starts, it will indirectly drive the rotating plate 710 to rotate 90° in a certain direction. After the rotating plate 710 rotates 90° in a certain direction, the third manipulator 500 will clamp and transfer the reticle to be detected conveyed on the external conveying structure to the transparent reticle placement plate 720 at a position corresponding to the third manipulator 500 again. And when the reticle to be detected is located between the first particulate matter detection component 300 and the second particulate matter detection component 800, the ultraviolet lamp on the first particulate matter detection component 300 irradiates the upper surface of the reticle, and the light generated by the ultraviolet lamp on the second particulate matter detection component 800 passes through the transparent reticle placement plate 720 to irradiate the lower surface of the reticle. When the ultraviolet light irradiates the particulate matter, a fluorescence reaction will occur. The CDDs on the first particulate matter detection component 300 and the second particulate matter detection component 800 respectively take pictures of both sides of the reticle and send the photographed data to the single-chip microcomputer. When the particulate matter on the surface of the detected reticle is qualified, and when the detected reticle rotates to a position corresponding to the first manipulator 200, the first manipulator 200 transfers the qualified reticle to the conveying structure for transporting qualified reticles for conveying. When the particulate matter on the surface of the detected reticle is unqualified, and after the detected reticle rotates to a position corresponding to the second manipulator 400, the second manipulator 400 transfers the unqualified reticle to the conveying structure for transporting detected unqualified reticles for conveying. Thus, the utility model not only realizes the automatic detection of particulate matter on the surface of the reticle, but also can simultaneously detect particulate matter on both sides of the reticle, effectively improving the detection efficiency of particulate matter on the surface of the reticle. When the transparent reticle placement plate 720 corresponding to the second manipulator 400 rotates to a position corresponding to the third manipulator 500, the air blower 650 on the cleaning component 600 starts to suck external air into the interior of the box body 610 and indirectly conveys the air to the exhaust nozzle 640, and the exhaust nozzle 640 discharges the air. When the transparent reticle placement plate 720 corresponding to the second manipulator 400 rotates to a position corresponding to the third manipulator 500, the air discharged by the exhaust nozzle 640 can remove the particulate matter on the transparent reticle placement plate 720. Thus, during the process of detecting particulate matter on the surface of the reticle by the utility model, it can remove the particulate matter remaining on the reticle during the detection process and improve the detection accuracy.

[0048] The above description is merely a preferred embodiment of this utility model and is not intended to limit the invention. For those skilled in the art, various modifications and variations can be made to this invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this invention should be included within the protection scope of this invention.

Claims

1. An illumination mask blank surface particle detection apparatus comprising a mounting frame (100), characterised in that: The mask plate placing assembly (700) for placing the mask plate and capable of driving the placed mask plate to rotate at a certain angle is arranged on the mounting frame (100), and a cleaning assembly (600) for cleaning the mask plate placing assembly (700) is arranged on the mounting frame (100), two sides of the top end of the mounting frame (100) are respectively provided with a first mechanical arm (200) for transferring the qualified mask plate and a third mechanical arm (500) for transferring the mask plate to be detected to the mask plate placing assembly (700), the rear end of the top end of the mounting frame (100) is provided with a second mechanical arm (400) for transferring the unqualified mask plate, and the front end of the top end of the mounting frame (100) is provided with a second particle detection assembly (800) for detecting the lower surface particles of the mask plate, and the first particle detection assembly (300) for detecting the upper surface particles of the mask plate is arranged above the second particle detection assembly (800).

2. The illuminated reticle surface particle inspection apparatus of claim 1, wherein: The first particle detection assembly (300) is arranged on the L-shaped mounting plate (110), and the L-shaped mounting plate (110) is arranged at the rear end of one side of the top end of the mounting frame (100). The first particle detection assembly (300) and the second particle detection assembly (800) are both composed of a CDD camera (310), an ultraviolet irradiation lamp (320) and a U-shaped mounting plate (330), the CDD camera (310) is arranged at the center position of the inner wall of the U-shaped mounting plate (330), and the ultraviolet irradiation lamp (320) is arranged on both sides of the inner wall of the U-shaped mounting plate (330).

3. The illuminated reticle surface particle inspection apparatus of claim 1, wherein: The mask plate placing assembly (700) is composed of a rotating plate (710), a transparent mask plate placing plate (720), a hollow rotating shaft (730), a first bevel gear (740), a second bevel gear (750) and a stepping motor (760), the hollow rotating shaft (730) is arranged in the bearing on the top end surface of the mounting frame (100), and the bottom end of the hollow rotating shaft (730) is arranged on the inner side of the mounting frame (100), the second bevel gear (750) is arranged below the circumferential outer wall of the hollow rotating shaft (730), and the second bevel gear (750) is in meshing connection with the first bevel gear (740).

4. The illuminated reticle surface particle inspection apparatus of claim 3, wherein: The first bevel gear (740) is arranged on the output shaft of the stepping motor (760), and the stepping motor (760) is arranged on the top end of the mounting frame (100), the rotating plate (710) is arranged above the circumferential outer wall of the hollow rotating shaft (730), the transparent mask plate placing plate (720) is arranged on the circumferential outer wall of the rotating plate (710), there are four transparent mask plate placing plates (720), and the four transparent mask plate placing plates (720) are arranged in a ring array.

5. The illuminated reticle surface particle inspection apparatus of claim 1, wherein: The cleaning assembly (600) is provided with a box (610) installed at the top end of a mounting seat (620), and the mounting seat (620) is installed at the inner bottom end of the mounting frame (100); the inside of the box (610) is provided with an air blower (650) and a plate air filter screen (670), and the air blower (650) is located above the plate air filter screen (670); the top end of the box (610) is provided with an air outlet pipe (614), the other end of the air outlet pipe (614) is connected with a connecting pipe (630) through a pipe joint, the other end of the connecting pipe (630) extends to the outside through a bearing inside a hollow rotating shaft (730) and is connected with an air inlet end of an air exhaust nozzle (640) through a pipe joint.

6. The illuminated reticle surface particle inspection apparatus of claim 5, wherein: The both ends of the plate air filter screen (670) are installed in U-shaped grooves on U-shaped clamping plates (660), and the outer walls of the both ends of the plate air filter screen (670) are gap-fitted with the groove walls of the U-shaped grooves on the U-shaped clamping plates (660); the U-shaped clamping plates (660) are installed on the both side inner walls of the box (610); the both side outer walls of the box (610) are provided with air inlet grooves (611) below; and the front end wall of the box (610) is provided with a sealing door (612), and the sealing door (612) is provided with a safety lock (613).

7. The illuminated reticle surface particle inspection apparatus of claim 1, wherein: The front end of the inner bottom of the mounting frame (100) is provided with a control box (900).

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