Device for detecting content of sulfate radicals in hydrofluoric acid

Abstract

The utility model relates to the technical field of electronic chemical content detection, in particular to a device for detecting the content of sulfate radicals in hydrofluoric acid, which comprises a detection box body, a placing groove is arranged in the detection box body, a sealing cover for sealing the opening of the placing groove is hinged on the detection box body, a detection box body is arranged in the placing groove, and the detection box body is connected with the placing groove. A placing frame for placing a hydrofluoric acid container is arranged in the detection box body, light-transmitting detection assemblies are arranged on the two sides of the placing frame in the detection box body, and light-transmitting holes are formed in the two opposite side walls of the placing frame; and a constant-temperature mechanism for keeping the interior of the detection box body constant in temperature is also arranged in the circumferential direction of the detection box body. The detection sensitivity of the content of the sulfate radicals in the hydrofluoric acid can be improved, so that the stability and the accuracy of the content detection of the sulfate radicals can be improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of electronic chemical content detection, in particular to a device for detecting the content of sulfate in hydrofluoric acid. BACKGROUND

[0002] With the rapid development of the semiconductor and microelectronic industries, the demand for ultraclean high-purity electronic chemicals is increasing. Electronic-grade hydrofluoric acid is a high-purity hydrofluoric acid, which is mainly used in the semiconductor and microelectronic industries, such as silicon wafer cleaning, etching and other high-precision processes. Since the purity of electronic-grade hydrofluoric acid is high, the control of metal ions and trace impurities is extremely strict, and therefore it is very important to detect and analyze the purity and impurity content of electronic-grade hydrofluoric acid.

[0003] Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas, which is a colorless transparent smoky liquid with a pungent odor. Pure hydrogen fluoride is sometimes also called anhydrous hydrofluoric acid, with a relative density of 1.15-1.18 and a boiling point of 112.2°C. It smokes in air and has a pungent odor. It is highly toxic. Hydrofluoric acid can react with general metals, metal oxides and hydroxides to form various salts. It is extremely corrosive and can corrode glass and silicates to form gaseous silicon tetrafluoride. It is soluble in water and alcohol, but difficult to dissolve in other organic solvents.

[0004] After the hydrofluoric acid is volatilized by water bath, the residual components such as sulfuric acid and sulfate will affect the purity of the hydrofluoric acid, so that the hydrofluoric acid contains trace amounts of sulfate. However, in the prior art, the content of sulfate in the hydrofluoric acid is usually low, which significantly reduces the absorbance, sensitivity and accuracy of the sulfate, so that it is difficult to sensitively and stably detect the content of the sulfate contained in the hydrofluoric acid. CONTENT OF THE INVENTION

[0005] In order to improve the sensitivity of the detection of the content of sulfate in the hydrofluoric acid, thereby improving the stability and accuracy of the detection of the content of sulfate, the application provides a device for detecting the content of sulfate in hydrofluoric acid.

[0006] The application provides a device for detecting the content of sulfate in hydrofluoric acid, which adopts the following technical scheme:

[0007] A device for detecting the content of sulfate in hydrofluoric acid, comprising a detection box body, a placing groove is arranged in the detection box body, a cover is hingedly arranged on the detection box body and used for closing the opening of the placing groove, a detection box body is arranged in the placing groove, a placing frame for placing a hydrofluoric acid container is arranged in the detection box body, light-transmitting detection assemblies are arranged on both sides of the placing frame in the detection box body, light-transmitting holes are arranged on the opposite side walls of the placing frame, and a constant-temperature mechanism for keeping the inside of the detection box body at a constant temperature is further arranged on the circumference of the detection box body.

[0008] By adopting the above technical scheme, after the sulfate in the hydrofluoric acid reacts with the barium chloride to form the barium sulfate suspension, the light transmission detection assembly is used to detect the turbidity of the barium sulfate suspension, thereby indirectly calculating the sulfate content in the hydrofluoric acid. The constant temperature mechanism is used to help maintain a constant temperature inside the detection box, thereby helping to improve the ability of the sulfate to react with the barium chloride to form the barium sulfate suspension, thereby helping to enhance the turbidity of the barium sulfate suspension, helping to improve the sensitivity of the light transmission detection assembly in detecting the turbidity of the barium sulfate suspension, that is, helping to improve the sensitivity of detecting the sulfate content in the hydrofluoric acid, improving the stability and accuracy of detecting the sulfate content in the hydrofluoric acid.

[0009] In a specific implementation, the light transmission detection assembly includes a light source emitter and a light source receiving processor, the light source emitter is arranged on the inner wall of the detection box and is used to emit a light source, and the light source receiving processor is arranged on the inner wall of the detection box opposite to the light source emitter and is used to receive and process the light source.

[0010] By adopting the above technical scheme, after the sulfate in the hydrofluoric acid reacts with the barium chloride to form the barium sulfate suspension, the light source emitter emits a light source, the light source penetrates the barium sulfate suspension after passing through the light transmission hole, and then reaches the light source receiving processor after passing through another light transmission hole. The light source receiving processor measures the intensity of the attenuated light, calculates the turbidity of the barium sulfate suspension from the intensity of the attenuated light, thereby indirectly calculating the sulfate content in the hydrofluoric acid.

[0011] In a specific implementation, the light source emitter is provided with a first light shield, one end of the first light shield away from the light source emitter is in abutment with the side wall of the placement frame, and the first light shield is arranged on the periphery of the light transmission hole. The light source receiving processor is provided with a second light shield, one end of the second light shield away from the light source receiving processor is in abutment with the side wall of the placement frame, and the second light shield is arranged on the periphery of the light transmission hole.

[0012] By adopting the above technical scheme, the first light shield and the second light shield are used to limit the advancing path of the light emitted by the light source emitter, thereby preventing the light from repeatedly irradiating the inside of the barium sulfate suspension through reflection in the detection box, thereby improving the accuracy of detecting the turbidity of the barium sulfate suspension, further improving the sensitivity of detecting the sulfate content in the hydrofluoric acid, and further improving the stability and accuracy of detecting the sulfate content in the hydrofluoric acid.

[0013] In a specific implementation, the circumferential inner wall of the first light shield and the circumferential inner wall of the second light shield are both provided with a light-absorbing coating.

[0014] By adopting the above technical scheme, the light absorption coating helps to absorb the light irradiated on the inner wall of the first light shielding cover and the second light shielding cover, thereby helping to block the reflection of the light in the first light shielding cover and the second light shielding cover, further improving the accuracy of detecting the turbidity of the barium sulfate suspension, further improving the sensitivity of detecting the sulfate content in the hydrofluoric acid, and further improving the stability and accuracy of detecting the sulfate content in the hydrofluoric acid.

[0015] In a specific implementation, the constant temperature mechanism includes a constant temperature box body, the constant temperature box body is sleeved on the circumferential periphery of the detection box body, a circulating pipeline is arranged on the circumferential inner wall of the constant temperature box body, a circulating pump connected with the circulating pipeline is arranged outside the constant temperature box body, the inside of the constant temperature box body and the circulating pipeline are filled with a heat conducting medium, a temperature sensor is arranged inside the detection box body, a heating assembly and a cooling assembly are arranged in the detection box body, the heating assembly is used for heating and warming the heat conducting medium in the circulating pipeline, and the cooling assembly is used for cooling and cooling the heat conducting medium in the circulating pipeline.

[0016] By adopting the above technical scheme, the temperature sensor helps to monitor the temperature inside the detection box body in real time, the heating assembly and the cooling assembly help to heat and warm or cool and cool the heat conducting medium in the circulating pipeline according to the monitoring result of the temperature sensor, so as to help the inside of the detection box body to keep constant temperature, thereby helping to improve the ability of the sulfate to react with the barium chloride to form the barium sulfate suspension, helping to enhance the turbidity of the barium sulfate suspension, and helping to improve the sensitivity of the light transmission detection assembly to detect the turbidity of the barium sulfate suspension, that is, to improve the sensitivity of detecting the sulfate content in the hydrofluoric acid, and to improve the stability and accuracy of detecting the sulfate content in the hydrofluoric acid.

[0017] In a specific implementation, the heating assembly includes a heat conducting sleeve, a heating wire and a heat insulation sleeve, the heat conducting sleeve is arranged on the circumferential periphery of the circulating pipeline, the heating wire is embedded on the circumferential outer wall of the heat conducting sleeve and arranged in a spiral shape, and the heat insulation sleeve is sleeved on the circumferential periphery of the circulating pipeline and located outside the heat conducting sleeve.

[0018] By adopting the above technical scheme, when the temperature monitored by the temperature sensor is less than the set temperature, the heating wire is used to heat the heat conducting sleeve, and then the heat conducting sleeve is used to transfer heat to the circulating pipeline, thereby helping to heat and warm the heat conducting medium in the circulating pipeline, and further helping to heat the heat conducting medium inside the constant temperature box body, helping to raise the temperature in the detection box body to the set temperature, and helping to keep the temperature inside the detection box body constant.

[0019] In one specific implementation, the cooling assembly includes a heat insulation sleeve, a micro cooling water circulating machine and a circulating water pipe, the heat insulation sleeve is sleeved on the circumferential periphery of the circulating pipe, the micro cooling water circulating machine is arranged inside the detection box, and the micro cooling water circulating machine is connected with the heat insulation sleeve through the circulating water pipe.

[0020] By adopting the above technical scheme, when the temperature monitored by the temperature sensor is greater than the set temperature, the micro cooling water circulating machine drives the cooling water to circulate in the heat insulation sleeve, thereby helping to cool the heat-conducting medium in the circulating pipe by using the cooling water, and further helping to cool the heat-conducting medium inside the constant-temperature box, helping to reduce the temperature in the detection box to the set temperature, and helping to keep the temperature inside the detection box constant.

[0021] In one specific implementation, the cover is provided with a heat insulation layer on the side facing the inside of the placement groove, and the heat insulation layer is used to block the transmission of heat.

[0022] By adopting the above technical scheme, the heat insulation layer helps to block the transmission of heat, thereby helping to improve the heat preservation effect inside the detection box.

[0023] In summary, the present application has at least one of the following beneficial technical effects:

[0024] 1. The present application is provided by the light transmission detection assembly and the constant-temperature mechanism, the light transmission detection assembly helps to detect the turbidity of the barium sulfate suspension, thereby helping to indirectly calculate the sulfate content in the hydrofluoric acid; the constant-temperature mechanism helps to keep the temperature inside the detection box constant, thereby helping to improve the ability of the sulfate to react with barium chloride to form a barium sulfate suspension, and further helping to enhance the turbidity of the barium sulfate suspension, helping to improve the sensitivity of the light transmission detection assembly in detecting the turbidity of the barium sulfate suspension, that is, helping to improve the sensitivity of detecting the sulfate content in the hydrofluoric acid, improving the stability and accuracy of detecting the sulfate content in the hydrofluoric acid. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a schematic diagram of the overall structure of the embodiment of the present application.

[0026] Figure 2 is a schematic diagram of the specific structure inside the placement groove.

[0027] Figure 3 is a sectional view of the specific structure inside the detection box.

[0028] Figure 4 is a schematic diagram of the specific structure of the heating assembly.

[0029] Figure 5 is a schematic view embodying the specific structure of the cooling assembly.

[0030] Figure 6 is a partial sectional view embodying the specific structure of the cover.

[0031] The reference signs are as follows: 1, detection box body; 2, placement groove; 3, cover; 4, detection box body; 5, placement frame; 6, light transmission detection assembly; 61, light source emitter; 62, light source receiving processor; 7, light transmission hole; 8, first light shield cover; 9, second light shield cover; 10, light absorption coating; 11, constant temperature box body; 12, circulation pipeline; 13, circulation pump; 14, temperature sensor; 15, heating assembly; 151, heat conduction sleeve; 152, heating wire; 153, heat insulation sleeve; 16, cooling assembly; 161, heat insulation sleeve; 162, miniature cooling water circulating machine; 163, circulating water pipe; 17, heat insulation layer. DETAILED DESCRIPTION

[0032] The application will be further described in detail below with reference to the accompanying drawings.

[0033] The application embodiment discloses a device for detecting the content of sulfate in hydrofluoric acid. Figure 1 and Figure 2 The device comprises a detection box body 1, the inside of the detection box body 1 is provided with a placement groove 2, and the detection box body 1 is hingedly provided with a cover 3. The detection box body 4 is fixedly placed in the placement groove 2, the detection box body 4 is fixedly placed with a placement frame 5 in the inside, and the detection box body 4 is provided with a light transmission detection assembly 6 on both sides of the placement frame 5.

[0034] Referring to Figure 2 and Figure 3 The light transmission detection assembly 6 comprises a light source emitter 61 and a light source receiving processor 62, the light source emitter 61 is fixedly installed on the inner wall of the detection box body 4 and located on one side of the placement frame 5, and the light source receiving processor 62 is fixedly installed on the inner wall on the side of the detection box body 4 opposite to the light source emitter 61. The two side walls of the placement frame 5 towards the light source emitter 61 and the light source receiving processor 62 are both provided with a light transmission hole 7, and the light source emitter 61 and the light source receiving processor 62 are coaxially arranged with the light transmission hole 7.

[0035] Referring to Figure 3The first light blocking cover 8 is fixedly connected to the light source emitter 61, one end of the first light blocking cover 8 away from the light source emitter 61 abuts against the side wall of the placing frame 5, and the other end of the first light blocking cover 8 away from the light source emitter 61 is covered outside one light transmission hole 7. The second light blocking cover 9 is fixedly connected to the light source receiving processor 62, one end of the second light blocking cover 9 away from the light source receiving processor 62 abuts against the side wall of the placing frame 5, and the other end of the second light blocking cover 9 away from the light source receiving processor 62 is covered outside another light transmission hole 7. The circumferential inner wall of the first light blocking cover 8 and the circumferential inner wall of the second light blocking cover 9 are coated with a light-absorbing coating 10.

[0036] With reference to Figure 2 and Figure 3 , the circumferential periphery of the detection box 4 is further provided with a constant temperature mechanism. The constant temperature mechanism comprises a constant temperature box 11 fixedly sleeved on the circumferential periphery of the detection box 4, and a circulating pipeline 12 installed around the circumferential inner wall of the constant temperature box 11. The inside of the constant temperature box 11 and the inside of the circulating pipeline 12 are both filled with a heat-conducting medium. In this embodiment, the heat-conducting medium is heat-conducting oil. A circulating pump 13 in communication with the circulating pipeline 12 is fixedly installed outside the constant temperature box 11. The constant temperature mechanism further comprises a temperature sensor 14 fixedly installed on the inner wall of the detection box 4.

[0037] With reference to Figure 2 and Figure 4 , the constant temperature mechanism further comprises a heating assembly 15. The heating assembly 15 comprises a heat-conducting sleeve 151, a heating wire 152 and a heat insulation sleeve 153. The heat-conducting sleeve 151 is fixedly sleeved on the circumferential periphery of the circulating pipeline 12. The heating wire 152 is embedded on the circumferential outer wall of the heat-conducting sleeve 151 and arranged in a spiral shape. The heat insulation sleeve 153 is fixedly sleeved on the circumferential periphery of the circulating pipeline 12 and located outside the heat-conducting sleeve 151.

[0038] With reference to Figure 2 and Figure 5 , the constant temperature mechanism further comprises a cooling assembly 16. The cooling assembly 16 comprises a heat insulation sleeve 161, a micro cooling water circulating machine 162 and a circulating water pipe 163. The heat insulation sleeve 161 is fixedly sleeved on the circumferential periphery of the circulating pipeline 12. The micro cooling water circulating machine 162 is fixedly installed inside the detection box 1 and in fixed communication with the heat insulation sleeve 161 through the circulating water pipe 163.

[0039] With reference to Figure 2 and Figure 3In the detection of the content of sulfate in hydrofluoric acid, barium chloride is added to the hydrofluoric acid, and the pH of the hydrofluoric acid is adjusted. In this embodiment, the pH of the hydrofluoric acid is adjusted to 3.5. After the pH of the hydrofluoric acid is adjusted, the container containing the hydrofluoric acid is placed inside the placement frame 5, and the sulfate in the hydrofluoric acid reacts with the barium chloride to form a barium sulfate suspension. The light source emitter 61 is started to emit light, which passes through the light transmission hole 7, penetrates the barium sulfate suspension, and then passes through another light transmission hole 7 to the light source receiver processor 62. The light source receiver processor 62 measures the intensity of the attenuated light, calculates the turbidity of the barium sulfate suspension from the intensity of the attenuated light, and indirectly calculates the content of sulfate in the hydrofluoric acid.

[0040] Referring to Figure 3 In the detection of the content of sulfate in hydrofluoric acid, the first light shield 8 and the second light shield 9 limit the path of the light emitted by the light source emitter 61, preventing the light from repeatedly illuminating the inside of the barium sulfate suspension through reflection in the detection box 4, thereby improving the accuracy of the detection of the turbidity of the barium sulfate suspension, further improving the sensitivity of the detection of the content of sulfate in hydrofluoric acid, and further improving the stability and accuracy of the detection of the content of sulfate in hydrofluoric acid. The light-absorbing coating 10 absorbs the light that illuminates the inner walls of the first light shield 8 and the second light shield 9, thereby blocking the reflection of light within the first light shield 8 and the second light shield 9, further improving the accuracy of the detection of the turbidity of the barium sulfate suspension, further improving the sensitivity of the detection of the content of sulfate in hydrofluoric acid, and further improving the stability and accuracy of the detection of the content of sulfate in hydrofluoric acid.

[0041] Referring to Figure 2 and Figure 4 In the detection of the content of sulfate in hydrofluoric acid, the temperature sensor 14 is used to monitor the temperature inside the detection box 4 in real time. When the temperature monitored by the temperature sensor 14 is less than 25 degrees Celsius, the heating wire 152 is energized to heat the heat conduction sleeve 151, which in turn transmits heat to the circulating pipe 12, thereby heating the heat-conducting oil in the circulating pipe 12, and further heating the heat-conducting oil inside the constant-temperature box 11, thereby raising the temperature inside the detection box 4 and keeping the temperature inside the detection box 4 at 25 degrees Celsius.

[0042] Referring to Figure 2 and Figure 5When the temperature monitored by the temperature sensor 14 is greater than 25 degrees Celsius, the micro cooling water circulating machine 162 is started to make the cooling water circulate in the heat insulation sleeve 161 through the circulating water pipe 163, so that the heat conducting oil in the circulating pipe 12 is cooled by the cooling water, and then the heat conducting oil in the thermostat box 11 is cooled, which helps to reduce the temperature in the detection box 4 and keep the temperature in the detection box 4 at 25 degrees Celsius.

[0043] By keeping the temperature in the detection box 4 at 25 degrees Celsius and adjusting the pH of the hydrofluoric acid to 3.5, the ability of the sulfate to react with barium chloride to form barium sulfate suspension is improved, which helps to enhance the turbidity of the barium sulfate suspension, and then helps to improve the sensitivity of detecting the turbidity of the barium sulfate suspension, that is, to improve the sensitivity of detecting the sulfate content in the hydrofluoric acid, and improves the stability and accuracy of detecting the sulfate content in the hydrofluoric acid.

[0044] Referring to Figure 6 The cover 3 is fixedly installed with a heat insulation layer 17 on the side facing the inside of the placing groove 2, which helps to block the heat transfer between the inside and outside of the detection box 4 through the cover 3, thereby improving the heat preservation effect of the inside of the detection box 4, and further improving the stability of the temperature in the inside of the detection box 4.

[0045] The principle of the embodiment is that when detecting the content of sulfate in hydrofluoric acid, barium chloride is first added to the hydrofluoric acid, and the pH of the hydrofluoric acid is adjusted. In this embodiment, the pH of the hydrofluoric acid is adjusted to 3.5. After the pH of the hydrofluoric acid is adjusted, the container containing the hydrofluoric acid is placed in the placing frame 5, and the sulfate in the hydrofluoric acid reacts with the barium chloride to form a barium sulfate suspension. The light source emitter 61 is started to emit light, and the light passes through the light transmission hole 7, penetrates the barium sulfate suspension, and then passes through another light transmission hole 7 to reach the light source receiving processor 62. The light source receiving processor 62 measures the intensity of the attenuated light, calculates the turbidity of the barium sulfate suspension from the intensity of the attenuated light, and indirectly calculates the content of sulfate in the hydrofluoric acid.

[0046] When detecting the content of sulfate in hydrofluoric acid, the temperature sensor 14 is used to monitor the temperature in the detection box 4 in real time. When the temperature monitored by the temperature sensor 14 is less than 25 degrees Celsius, the heating wire 152 is powered to heat, the heat conducting sleeve 151 is heated by the heating wire 152, and then the heat is transferred to the circulating pipe 12 by the heat conducting sleeve 151, so as to heat the heat conducting oil in the circulating pipe 12, and then heat the heat conducting oil in the thermostat box 11, which helps to increase the temperature in the detection box 4 and keep the temperature in the detection box 4 at 25 degrees Celsius.

[0047] When the temperature monitored by the temperature sensor 14 is greater than 25 degrees Celsius, the micro cooling water circulating machine 162 is started, so that the cooling water circulates in the heat insulation sleeve 161 through the circulating water pipe 163, thereby cooling the heat-conducting oil in the circulating pipe 12 by the cooling water, and then cooling the heat-conducting oil inside the thermostat box 11, which helps to reduce the temperature inside the detection box 4 and keep the temperature inside the detection box 4 at 25 degrees Celsius.

[0048] By keeping the temperature inside the detection box 4 at 25 degrees Celsius and adjusting the pH value of the hydrofluoric acid to 3.5, the ability of the sulfate to react with barium chloride to form barium sulfate suspension is improved, thereby enhancing the turbidity of the barium sulfate suspension, and further improving the sensitivity of detecting the turbidity of the barium sulfate suspension, that is, improving the sensitivity of detecting the sulfate content in the hydrofluoric acid, and improving the stability and accuracy of detecting the sulfate content in the hydrofluoric acid.

[0049] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application, therefore: any equivalent changes made on the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A device for detecting the sulfate content in hydrofluoric acid, characterized by: The utility model provides a detection box, which comprises a detection box (1), a placing groove (2) is arranged in the detection box (1), a cover (3) is hingedly arranged on the detection box (1) and is used for closing the slot of the placing groove (2), a detection box body (4) is arranged in the placing groove (2), a placing frame (5) for placing a hydrofluoric acid container is arranged in the detection box body (4), light transmission detection assemblies (6) are arranged on both sides of the placing frame (5) in the detection box body (4), light transmission holes (7) are arranged on the opposite side walls of the placing frame (5), and a constant temperature mechanism for keeping the inside of the detection box body (4) at a constant temperature is further arranged on the periphery of the detection box body (4).

2. The device for detecting the sulfate content in hydrofluoric acid according to claim 1, characterized in that: The light transmission detection assembly (6) comprises a light source emitter (61) and a light source receiving processor (62), the light source emitter (61) is arranged on the inner wall of the detection box body (4) and is used for emitting light, and the light source receiving processor (62) is arranged on the inner wall of the detection box body (4) opposite to the light source emitter (61) and is used for receiving and processing light.

3. A device for detecting the sulfate content in hydrofluoric acid according to claim 2, characterized in that: A first light shielding cover (8) is arranged on the light source emitter (61), one end of the first light shielding cover (8) away from the light source emitter (61) abuts against the side wall of the placing frame (5) and covers the periphery of the light transmission hole (7), a second light shielding cover (9) is arranged on the light source receiving processor (62), one end of the second light shielding cover (9) away from the light source receiving processor (62) abuts against the side wall of the placing frame (5) and covers the periphery of the light transmission hole (7).

4. The apparatus for detecting sulfate content in hydrofluoric acid according to claim 3, characterized by: The circumferential inner walls of the first light shielding cover (8) and the second light shielding cover (9) are provided with light absorbing coatings (10).

5. The apparatus for detecting sulfate content in hydrofluoric acid according to claim 1, characterized by: The constant temperature mechanism comprises a constant temperature box body (11), the constant temperature box body (11) is sleeved on the peripheral periphery of the detection box body (4), a circulating pipeline (12) is arranged on the circumferential inner wall of the constant temperature box body (11), a circulating pump (13) connected with the circulating pipeline (12) is arranged outside the constant temperature box body (11), heat conducting medium is filled in the constant temperature box body (11) and the circulating pipeline (12), a temperature sensor (14) is arranged in the detection box body (4), a heating assembly (15) and a cooling assembly (16) are arranged in the detection box (1), the heating assembly (15) is used for heating and warming the heat conducting medium in the circulating pipeline (12), and the cooling assembly (16) is used for cooling and cooling the heat conducting medium in the circulating pipeline (12).

6. A device for detecting the sulfate content in hydrofluoric acid according to claim 5, characterized in that: The heating assembly (15) comprises a heat conducting sleeve (151), a heating wire (152) and a heat insulation sleeve (153), the heat conducting sleeve (151) is arranged on the peripheral periphery of the circulating pipeline (12), the heating wire (152) is embedded on the circumferential outer wall of the heat conducting sleeve (151) and is arranged in a spiral shape, and the heat insulation sleeve (153) is sleeved on the peripheral periphery of the circulating pipeline (12) and is located at the periphery of the heat conducting sleeve (151).

7. The apparatus for detecting the sulfate content in hydrofluoric acid according to claim 5, characterized by: The cooling assembly (16) comprises a heat insulation sleeve (161), a micro cooling water circulating machine (162) and a circulating water pipe (163), the heat insulation sleeve (161) is sleeved on the circumferential periphery of the circulating pipe (12), the micro cooling water circulating machine (162) is arranged inside the detection box (1), and the micro cooling water circulating machine (162) is connected with the heat insulation sleeve (161) through the circulating water pipe (163).

8. The apparatus for detecting sulfate content in hydrofluoric acid according to claim 1, characterized by: A heat insulation layer (17) is arranged on the side of the cover (3) facing the inside of the placing groove (2), and the heat insulation layer (17) is used for blocking the transmission of heat.

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