Frameless single-rod goods shelf structure of vertical continuous furnace

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a frameless single-rod goods shelf structure of a vertical continuous furnace, which comprises a support provided with a driving position for an external conveying driving structure to drive the support to move in a coating cavity; the upper end of the bearing rod is connected with the support, and the lower end of the bearing rod is provided with a positioning end used for being matched with an external positioning structure at the coating position for positioning. According to the utility model, the continuous moving coating requirement of the continuous furnace with a plurality of coating cavities can be met; based on the arrangement of the single-rod type bearing rod on the bracket, the width of the goods shelf structure is narrower, the size is smaller, and the goods shelf structure is more flexible to use so as to meet the coating requirement of a small-size coating cavity; and when the goods shelf structure is used for coating, other shielding structures do not exist on the peripheries of the bearing rods, so that the workpieces cannot be shielded, and the coating effect of the workpieces can be better.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of vacuum coating, especially relates to a frameless vertical continuous furnace single rod shelf structure. BACKGROUND

[0002] Vacuum coating technology is an important branch of vacuum application technology, which involves the use of a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetic control, and is a method of evaporating or sputtering metal, alloy or compound in vacuum, and condensing and depositing it on the surface of the workpiece to form a thin film. In vacuum coating processing, the workpiece is usually installed on the shelf, and the workpiece is carried by the shelf to carry out coating in the coating cavity of the coating equipment; however, the existing shelf is directly installed in the coating cavity, and is only suitable for single-cavity coating equipment, and cannot meet the continuous coating requirements of continuous coating equipment with multiple cavities. SUMMARY

[0003] In order to solve the above problems, the primary purpose of the utility model is to provide a frameless vertical continuous furnace single rod shelf structure, which can meet the continuous coating requirements of the continuous furnace with multiple coating cavities.

[0004] Another purpose of the utility model is to provide a frameless vertical continuous furnace single rod shelf structure, which is smaller in size and more flexible to use, and can be applied to the coating requirements of small-volume coating cavities; and the shelf structure does not block the workpiece during coating, so that the coating effect of the workpiece is better.

[0005] In order to achieve the above purpose, the technical scheme of the utility model is as follows.

[0006] A frameless vertical continuous furnace single rod shelf structure, comprising:

[0007] A support is provided with a driving position for driving an external conveying driving structure to move in the coating cavity;

[0008] A carrying rod for carrying the workpiece, the upper end of the carrying rod is connected with the support, and the lower end of the carrying rod is provided with a positioning end for cooperating with the external positioning structure at the coating position.

[0009] In the shelf structure, when carrying out coating processing, the external conveying driving structure in the coating cavity can drive the shelf structure to vertically convey coating between the coating cavities, thereby meeting the continuous moving coating requirement of the continuous furnace with multiple coating cavities; based on the single-rod type bearing rod arranged on the bracket, the width of the shelf structure is narrower, the volume is smaller, and the shelf structure is more flexible in use, so as to be suitable for the coating requirement of small-volume coating cavities; and when the shelf structure carries out coating, the bearing rod is only fixed by the upper end through the bracket, and the lower end can be positioned by the external positioning structure when entering the coating position, and there is no frame or other shielding structure around the bearing rod, so that the workpiece is not shielded, and the coating effect of the workpiece is better.

[0010] Further, the upper end of the bearing rod is rotatably arranged on the bracket, and the upper end of the bearing rod passes through the upper side of the bracket to form a rotary driving end.

[0011] Further, the upper side of the bracket is further provided with a positioning portion for positioning the position of the shelf structure.

[0012] Further, the positioning portion is provided with a shelf positioning groove.

[0013] Further, the bearing rod and the bracket are rotatably connected through a rotary bearing.

[0014] Further, the rotary driving end is provided with two or more driving protrusions.

[0015] Further, the rotary driving end is further provided with a rotary positioning groove, and the two or more driving protrusions are respectively located on both sides of the rotary positioning groove.

[0016] Further, the driving position is a driving groove arranged on the left side or the right side of the bracket.

[0017] Further, the number of driving grooves is two or more.

[0018] Further, the driving groove comprises a vertical pushing surface and an inclined separation surface.

[0019] Further, the bracket is provided with a guide assembly for guiding the movement of the shelf structure.

[0020] Further, the guide assembly comprises a plurality of guide bearings rotatably arranged on the upper side of the bracket.

[0021] The utility model discloses a beneficial effect lies in, in this goods shelf structure, when carrying out coating process, the external conveying drive structure in coating cavity can drive the goods shelf structure vertical conveying coating between coating cavities, and further satisfy the continuous moving coating demand of the continuous furnace with multiple coating cavities, and based on the setting of the single rod type load bar on the support, make the width of goods shelf structure narrower, and the volume is smaller, more flexible when using, to be applicable to the coating demand of small volume coating cavity, and when the goods shelf structure carries out coating, and its load bar both ends respectively through the position positioning of support and external positioning structure, and its periphery does not exist other shielding structure, and will not shield workpiece, can make the coating effect of workpiece better. BRIEF DESCRIPTION OF DRAWINGS

[0022] Fig. 1 It is the structural schematic diagram when the utility model cooperates with external positioning structure.

[0023] Fig. 2 It is the structural schematic diagram of the utility model.

[0024] Reference numerals:

[0025] 1, support, 11, drive groove, 111, vertical push surface, 112, inclined separation surface, 12, positioning portion, 13, goods shelf positioning groove,

[0026] 2, load bar, 21, rotary drive end, 22, drive protrusion, 23, rotary positioning groove, 24, rotary bearing, 25, positioning end,

[0027] 3, guide assembly, 31, guide bearing,

[0028] 4, external positioning structure. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantage of the utility model more clearly, the following is combined with the embodiment, and the utility model is further detailedly explained.It should be understood that the specific embodiment described here is only used to explain the utility model, and is not used to limit the utility model.

[0030] See Figs. 1-2 The embodiment provides a frameless vertical continuous furnace single rod goods shelf structure, comprising:

[0031] Support 1 is provided with the drive position for the external conveying drive structure to drive it to move in the coating cavity on the support 1;

[0032] The load bar 2 for carrying workpiece, the load bar 2 upper end is connected with the support 1, and the load bar 2 lower end is provided with the positioning end 25 for cooperating with the external positioning structure 4 at coating position and positioning.

[0033] In the shelf structure, when carrying out the coating process, the external conveying driving structure in the coating cavity can drive the shelf structure to vertically convey the coating between the coating cavities through the driving position of the support 1, thereby meeting the continuous movement coating requirement of the continuous furnace with multiple coating cavities; and based on the single-rod type bearing rod 2 arranged on the support 1, the width of the shelf structure is narrower, the volume is smaller, and the shelf structure is more flexible in use, so as to be suitable for the coating requirement of the small-volume coating cavity; and when the shelf structure is carrying out the coating, the bearing rod 2 is only fixed through the upper end thereof by the support 1, and when entering the coating position, the lower end positioning end 25 can be positioned by the external positioning structure 4, and there is no frame or other shielding structure around the shelf structure, so as not to shield the workpiece, and the coating effect of the workpiece is better.

[0034] In the embodiment, the upper end of the bearing rod 2 is rotatably arranged on the support 1, and the upper end of the bearing rod 2 passes through the upper side of the support 1 to form a rotary driving end 21. The external rotary driving structure in the coating cavity can drive the bearing rod 2 to rotate through the rotary driving end 21, so as to rotate the workpiece on the bearing rod 2 to carry out the rotary coating.

[0035] In the embodiment, the upper side of the support 1 is further provided with a positioning portion 12 for positioning the position of the shelf structure. When the shelf structure moves into the corresponding coating cavity to carry out the coating, the external locking structure in the coating cavity can position the position of the shelf structure through the positioning portion 12, so as to ensure that the shelf structure is located at the correct coating position and the position of the shelf structure is stable during the coating.

[0036] In the embodiment, the positioning portion 12 is provided with a shelf positioning groove 13. The external locking structure can be positioned by being inserted into the shelf positioning groove 13.

[0037] In the embodiment, the bearing rod 2 and the support 1 are rotatably connected through a rotary bearing 24.

[0038] In the embodiment, the rotary driving end 21 is provided with two or more driving protrusions 22. The external rotary driving structure can drive the rotation of the rotary driving end 21 through the two or more driving protrusions 22.

[0039] In the embodiment, the rotary driving end 21 is further provided with a rotary positioning groove 23, and the two or more driving protrusions 22 are respectively located on the two sides of the rotary positioning groove 23. The rotary positioning groove 23 is arranged to facilitate the external rotary driving structure to extend into the rotary positioning groove 23 to drive the rotation of the rotary driving end 21.

[0040] In the embodiment, the driving position is a driving groove 11 arranged on the left side or the right side of the support 1. The external conveying driving structure can drive the movement of the shelf structure by extending into the driving groove 11.

[0041] In the embodiment, the number of the driving grooves 11 is two or more.

[0042] In the embodiment, the driving grooves 11 include a vertical pushing surface 111 and an inclined separating surface 112. The vertical pushing surface 111 is a position where the external conveying driving structure is pushed when driving the shelf structure, and the inclined separating surface 112 is a position where the external conveying driving structure passes through when separating from the shelf structure.

[0043] In the embodiment, the bracket 1 is provided with a guiding assembly 3 for guiding the movement of the shelf structure. The guiding assembly 3 is arranged to guide the movement of the shelf structure.

[0044] In the embodiment, the guiding assembly 3 includes a plurality of guiding bearings 31 rotatably arranged on the upper side of the bracket 1.

[0045] It is worth mentioning that the specific way of mounting or fixing or hanging the workpiece on the carrying rod 2 is prior art, and is not the design point of the utility model, and therefore is not described in detail in the utility model. In addition, the structures of the above-mentioned external structures are not the structures to be protected in the utility model, and therefore are not described in detail in the utility model.

[0046] The above is only a preferred embodiment of the utility model, and is not used to limit the utility model. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A frameless vertical continuous furnace single-pole shelf structure, characterized by, The utility model relates to a kind of coating device, including: Support, drive bit for being driven by external conveying driving structure to move in coating cavity is provided on the support; Carrying rod for carrying workpiece, the upper end of the carrying rod is connected with the support, and the lower end of the carrying rod is provided with the positioning end for cooperating with the external positioning structure at coating position.

2. A frameless vertical continuous furnace single-pole shelf structure according to claim 1, characterized in that, The upper end of the carrying rod is rotatably provided on the support, and the upper end of the carrying rod is formed with a rotary driving end through the upper side of the support.

3. The frameless vertical continuous furnace single-pole shelf structure according to claim 1, characterized in that, The upper side of the support is further provided with a positioning part for positioning the support structure position.

4. A frameless vertical continuous furnace single-pole shelf structure according to claim 3, characterized in that, The positioning part is provided with a support positioning groove.

5. The frameless vertical continuous furnace single-pole shelf structure according to claim 2, characterized in that, The carrying rod and the support are rotatably connected by a rotary bearing.

6. A frameless vertical continuous furnace single-pole shelf structure according to claim 2, wherein The rotary driving end is provided with two or more driving protrusions.

7. A frameless vertical continuous furnace single-pole shelf structure according to claim 6, characterized in that, The rotary driving end is further provided with a rotary positioning groove, and the two or more driving protrusions are respectively located on both sides of the rotary positioning groove.

8. The frameless vertical continuous furnace single-pole shelf structure according to claim 1, characterized in that, The drive bit is a drive groove provided on the left side or the right side of the support.

9. A frameless vertical continuous furnace single-pole shelving structure according to any one of claims 1-8, characterized in that, The support is provided with a guide assembly for guiding the movement of the support structure.

10. A frameless vertical continuous furnace single-pole shelf structure according to claim 9, characterized in that, The guide assembly includes a plurality of guide bearings rotatably provided on the upper side of the support.

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