In-situ illumination KPFM testing device

Abstract

The utility model discloses an in-situ illumination KPFM testing device. The in-situ illumination KPFM testing device comprises a KPFM tester body, the KPFM tester body comprises a laser detector, a reflective mirror, a spectroscope, a laser and a sample table; laser emitted by the laser device sequentially passes through the spectroscope, the sample table and the reflective mirror and enters the laser detector; an additional light source is arranged at a position close to the sample table, and the distance between a light outlet of the additional light source and the sample table is 3-5cm; and a light filtering assembly is arranged at an inlet of the laser detector. According to the testing device, interference factors in the testing process can be effectively reduced while the authenticity of the testing environment is kept, so that the testing efficiency and precision are improved, and the accuracy and reliability of in-situ illumination testing through the KPFM are remarkably improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the micro area surface potential in situ testing technical field relates to a kind of in situ illumination KPFM testing device. BACKGROUND

[0002] Kelvin probe force microscope (KPFM) is a derivative technique of atomic force microscope. AC voltage is applied to the probe, and electric field force is formed between the needle tip and the sample. By applying a DC voltage to offset the electric field force, the surface potential of the sample can be observed. In addition, the contact potential difference between the conductive needle tip and the sample V CPD is defined as V CPD = ( φ tip - φ sample ) / - e , wherein φ sample and φ tip are the work functions of the sample and the needle tip, e is the elementary charge. Therefore, when the work function of the needle tip and the contact potential difference are known, the work function of the sample can be obtained. KPFM has been applied to many fields for non-destructive testing of local surface potential of samples under atmospheric conditions, such as local doping concentration measurement, band bending measurement near structural defects, and domain configuration in samples containing two different phases. KPFM can also obtain the spatial distribution of surface potential and work function, and the change under illumination. Surface potential is generated by photoexcitation of carriers and subsequent redistribution of static charges. Therefore, KPFM experiments will help to clarify the interaction between surface potential excited by incident photons and charge carriers in active materials. This has an important role in the mechanism research of photocatalysis, perovskite battery, etc. The most common atomic force needle microscope mainly consists of a laser system, a photoelectric detection system, a feedback system, a piezoelectric scanning system, a data processing and display system, and a shock isolation system, etc. In the photoelectric detection system, the laser hits the probe needle tip, first uses the optical lever principle to amplify the bending deformation or vibration change of the microcantilever, and then uses the optical detector to convert it into an electrical signal for detection.

[0003] During the test, when the performance of the material under light excitation is studied, in-situ light test needs to be carried out, that is, the surface potential of the sample is measured by KPFM under the irradiation of an external light source, and the surface potential distribution of the sample is obtained to reflect the carrier distribution. However, the external light source will enter the laser detector, and the external light source entering the laser detector will interfere with the laser detection signal, and the topographic map will appear serious noise. Practical new type content

[0004] In view of the problems in the prior art, the utility model provides a kind of in-situ light KPFM testing device, to solve the influence of external light source on test result when in-situ light test is carried out using KPFM in prior art.

[0005] The utility model is realized through the following technical schemes:

[0006] A kind of in-situ light KPFM testing device, including KPFM tester body;The KPFM tester body includes laser detector, reflector, beam splitter, laser and sample stage;The laser emitted by the laser passes through beam splitter, sample stage and reflector in turn, and enters laser detector;

[0007] External light source is provided at the position close to the sample stage, and the distance between the light outlet of the external light source and the sample stage is 3-5cm;

[0008] The entrance of the laser detector is provided with a light filtering assembly.

[0009] Preferably, the external light source is Xe lamp, white light LED lamp, ultraviolet lamp or red light lamp.

[0010] Preferably, when the external light source is Xe lamp, the light outlet of the Xe lamp is provided with optical fiber, and the distance between the light outlet of the optical fiber and the sample stage is 3-5cm.

[0011] Preferably, the light filtering assembly includes a baffle or a filter;The baffle is provided with a through hole.

[0012] Preferably, the diameter of the through hole on the baffle is 1-2mm.

[0013] Preferably, the filter includes any one of absorption filter, reflection filter, composite filter and band-pass filter.

[0014] Preferably, when the filter is a band-pass filter, the center wavelength of the passband of the filter is consistent with the wavelength of the laser emitted by the laser, and the half-width of the passband of the filter is 50nm.

[0015] Preferably, the laser detector entrance is provided with a clamping fixing assembly, and the light filtering assembly is arranged at the laser detector entrance of the KPFM tester body through the clamping fixing assembly.

[0016] Preferably, the test device further comprises a heat dissipation assembly for dissipating heat generated by the additional light source.

[0017] Preferably, a sealing assembly is arranged between the light filtering assembly and the laser detector entrance of the KPFM tester body.

[0018] Compared with the prior art, the utility model has the following beneficial technical effects:

[0019] The utility model discloses a kind of in situ illumination KPFM test devices, first, additional light source is provided in the position close to sample table, the design of additional light source makes that test device can simulate or provide the illumination condition of the sample to be tested in actual working environment, to be more accurately reflect the performance of the sample to be tested in practical application, by accurately simulating actual working illumination, the performance of these materials can be more effectively evaluated, in addition, the distance between the light outlet of the additional light source and sample table is controlled to be 3~5cm, effectively ensure that additional light source is fully excited to sample to be tested in testing process, ensure the sensitivity of test result, while avoid the influence of heat generated by additional light source to sample to be tested;Second, light filtering assembly is arranged at the entrance of laser detector, the setting of light filtering assembly can block or attenuate the wavelength in additional light source that produces interference to laser detector, this helps to reduce noise and error in testing process, improve the accuracy and reliability of test, in KPFM test, the sensitivity of laser detector to light is extremely high, any unnecessary interference can cause test result to deviate from true value, by the accurate filtering effect of light filtering assembly, it can ensure that laser detector only receives effective signal from sample to be tested, to obtain more accurate test result;The utility model combines the design of additional light source and light filtering assembly, the test device can effectively reduce interference factors in testing process while keeping the authenticity of test environment, to improve test efficiency and precision, significantly improve the accuracy and reliability of in situ illumination test using KPFM.

[0020] Further, the additional light source is Xe lamp, white light LED lamp, ultraviolet lamp or red light lamp, the selection of multiple light sources provides more extensive test conditions, so that test device can simulate or provide a variety of different illumination environments;Different sample to be tested is also more sensitive to specific wavelength of light or has specific spectral response, by setting multiple light sources, test device can more easily adapt to the test needs of different sample to be tested, improve the pertinence and accuracy of test.

[0021] Further, when the external light source is a Xe lamp, the light outlet of the Xe lamp is provided with an optical fiber, and the distance between the light outlet of the optical fiber and the sample table is 3-5 cm. Here, the Xe lamp is guided by the optical fiber. On the one hand, the light is more fully and effectively concentrated on the sample surface for testing the sample. On the other hand, the light entering the detector is avoided, which affects the test results.

[0022] Further, the light filtering assembly includes a baffle or a filter with through holes. First, by providing through holes, the range of light from the external light source that shines on the laser detector can be accurately controlled. This helps to reduce unnecessary light interference and ensure that only light information related to the test is received during the test, thereby improving the accuracy and reliability of the test. The design of the filter allows only light of a specific wavelength or range to pass through, thereby blocking other wavelengths of light that may interfere with the laser detector. This helps to reduce test errors caused by light interference and prolongs the service life of the laser detector. Through the provision of the light filtering assembly, the accuracy and reliability of the test are effectively improved.

[0023] Further, the diameter of the through hole on the baffle is 1-2 mm. First, the through hole with a diameter of 1-2 mm can accurately control the amount of light passing through, avoiding excessive light entering the laser detector, thereby reducing light interference. This helps to ensure that the laser detector receives direct and clear light signals from the sample to be tested, improving the accuracy and precision of the test. The small-diameter through hole can effectively block stray light from outside the test area, which can interfere with the normal operation of the laser detector. By reducing the influence of stray light, the accuracy and reliability of the test can be further improved.

[0024] Further, the filter includes any one of an absorption filter, a reflective filter, a composite filter, and a band-pass filter. Different types of filters have different filtering characteristics and can meet different testing needs. For example, an absorption filter achieves filtering effect by absorbing light of a specific wavelength, while a reflective filter achieves the purpose by reflecting light of a specific wavelength. This diversified filtering effect enables the testing device to cope with various testing scenarios and testing requirements. The filter can accurately control the wavelength and intensity of the light passing through, thereby reducing light interference and scattering and improving the accuracy and reliability of the test. Different types of filters have different adaptabilities to light sources and testing environments. For example, a band-pass filter allows light of a specific wavelength range to pass through, while light of other wavelengths is suppressed, making it particularly suitable for testing scenarios that require a specific wavelength light source. Therefore, this setting enables the testing device to adapt to different light sources and testing environments, improving the flexibility and versatility of the test.

[0025] Further, when the filter is a band-pass filter, the center wavelength of the filter passband is consistent with the wavelength of the laser emitted by the laser, and the half-width of the passband of the filter is 50 nm, which can ensure that only light information related to the test is received during the test, reducing light interference and scattering, thereby improving the accuracy and reliability of the test.

[0026] Further, the laser detector entrance is provided with a clamping and fixing assembly, and the light filtering assembly is arranged at the laser detector entrance of the KPFM tester body through the clamping and fixing assembly. The clamping and fixing assembly provides a stable mounting platform for the light filtering assembly, ensuring the stability and reliability of the light filtering assembly during the test. This stability is crucial for maintaining the consistency of the light filtering performance, as any slight displacement or vibration can affect the light filtering effect and thus the accuracy of the test results. At the same time, the clamping and fixing assembly is designed to be easily disassembled and reinstalled, which allows users to conveniently replace the light filtering assembly to adapt to different testing needs or perform regular maintenance, thus improving the versatility and usability of the testing device. In addition, the close fit between the clamping and fixing assembly and the light filtering assembly helps to reduce light loss and interference when the light passes through the light filtering assembly, ensuring that the light can efficiently pass through the light filtering assembly and enter the laser detector, thereby improving the sensitivity and accuracy of the test.

[0027] Further, the testing device further comprises a heat dissipation assembly for dissipating the heat generated by the additional light source. The additional light source generates a large amount of heat when working for a long time or at high power output. If not dissipated in time, the light source may overheat, affecting its performance and stability, and even causing damage. The heat dissipation assembly can effectively reduce the working temperature of the light source, ensuring its operation within a safe range and prolonging its service life. In addition, changes in the temperature of the light source may cause changes in its spectral characteristics, which will directly affect the accuracy of the test results. The heat dissipation assembly helps to ensure the consistency of the spectral characteristics of the light source during the test, thereby improving the test precision. In addition, overheating of the light source may cause problems such as reduced luminous efficiency and spectral drift, which will increase the error during the test. The heat dissipation assembly effectively dissipates heat, reducing the test error caused by overheating of the light source and improving the accuracy and repeatability of the test results.

[0028] Further, a sealing assembly is provided between the light filtering assembly and the laser detector entrance of the KPFM tester body, which fully avoids the light of the additional light source entering the detector and ensures the detection results of the detector. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the premise of the drawings.

[0030] Figure 1 For the morphology and surface potential map under different wavelength light illumination at low power (~13 W / m 2 ), wherein (a, e) is the morphology and potential map in dark state, (b, f), (c, g), (d, h) are the morphology and potential map under ultraviolet light, red light and white light illumination respectively;

[0031] Figure 2 For the morphology and surface potential map under different wavelength light illumination at medium power (~130 W / m 2 ), wherein (a, d) is the morphology and potential map in dark state, (b, e), (f) are the morphology and potential map under red light and white light illumination respectively;

[0032] Figure 3 For the structure schematic diagram of the in-situ light illumination KPFM testing device in the present application;

[0033] Figure 4 For the structure schematic diagram of the baffle with through hole in the present application;

[0034] Figure 5 For the light transmission band of the band-pass filter in the present application;

[0035] Figure 6 For the instrument response in dark state and under light illumination in the experimental scene of setting optical fiber light guide only;

[0036] Figure 7 For the effect of setting different light filtering strategies under different external light sources; (a-c) are morphology maps, (d-f) are potential maps, (a, d) are in dark state, (b, e) are under Xe lamp light illumination plus optical fiber light guide, (c, f) are under Xe lamp light illumination plus using narrow band-pass filter.

[0037] Wherein: 1, KPFM tester body, 2, external light source, 3, light filtering assembly, 4, through hole, 11, laser detector, 12, reflector, 13, beam splitter, 14, laser, 15, sample stage. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0040] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0041] In the description of the embodiments of the present application, it should be noted that if the terms "upper", "lower", "horizontal", "inner" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the present application product when it is usually placed, only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, structure and operation, therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" and the like are only used for differentiation, and cannot be understood as indicating or implying relative importance.

[0042] In addition, if the term "horizontal" appears, it does not mean that the component must be absolutely horizontal, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0043] In the description of the embodiments of the present application, it should also be noted that unless otherwise explicitly specified and limited, if the terms "set", "mount", "connected", "connected" appear, they should be understood in a broad sense, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, can be electrically connected; can be directly connected, can be indirectly connected through an intermediate medium, or can be connected inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0044] The present application will be described in further detail below in conjunction with the drawings:

[0045] In the process of in-situ light test, different power or different wavelength of light will be used to induce effect according to the sample to be tested, in order to explore whether the different power or different wavelength of external light source affects the detection result of the laser detector in the test process, the exploration of the embodiment is carried out. Figure 1 The morphology and surface potential diagram of the sample under different wavelength light at low power (~ 13 W / m 2 ) are shown in the figure, and it can be seen from the figure that different wavelength of light has almost no effect on the test under low power condition. Figure 2 The morphology and surface potential diagram of the sample under different wavelength light at medium power (~ 130 W / m 2 ) are shown in the figure, and it can be seen from the figure that the morphology and potential diagram under light and dark state conditions have almost no change. Therefore, it is speculated that the wavelength has little effect on the test, and the power has greater effect. Therefore, Xe lamp light source is used to irradiate and test at higher power. When the Xe lamp irradiation power is 1714.6 W / m 2 , the light is too strong, which causes the index SUM value of the probe tip reflected light intensity detected by the instrument laser detector to exceed the range, and the probe tuning under the tapping mode cannot be carried out, so that the test cannot be carried out. The Xe lamp light source cannot be used to test under high power condition, which proves that the higher the power is, the greater the interference to the instrument test is.

[0046] Based on the above problems, the utility model provides a kind of in-situ light KPFM testing device, as Figure 3 shown, the testing device includes KPFM tester body 1, the KPFM tester body 1 includes laser detector 11, reflector 12, beam splitter 13, laser 14 and sample stage 15;The laser emitted by the laser 14 sequentially passes through beam splitter 13, sample stage 15 and reflector 12, and enters laser detector 11;External light source 2 is arranged close to the position of the sample stage 15, and the distance between the light outlet of the external light source 2 and the sample stage 15 is 3~5cm;The entrance of the laser detector 11 is provided with light filter assembly 3. The external light source 2 is used to simulate or provide the light irradiation condition of the sample to be tested under actual working environment;The light filter assembly 3 is used to block or attenuate the wavelength of the external light source 2 that interferes with the laser detector.

[0047] Specifically, the laser emitted by the laser 14 is irradiated to the probe microcantilever above the sample table 15 through the beam splitter 13, the laser is reflected to the mirror 12, and the detection process is realized by entering the laser detector 11 through the mirror 12; By setting the additional light source 2 near the sample table 15, the material performance under special working conditions is tested. At the same time, by setting the light filtering assembly 3 at the entrance of the laser detector 11 of the KPFM tester body 1, the blocking or attenuation of the wavelength of the additional light source 2 which interferes with the laser detector is realized. In order to meet various testing requirements, the additional light source 2 is a Xe lamp, a white light LED lamp, an ultraviolet lamp or a red light lamp.

[0048] In addition, in use, first, the KPFM tester body 1 is turned on, the distance between the additional light source 2 and the sample to be tested is 3-5cm, the additional light source 2 is turned on for testing. When the additional light source 2 is a Xe lamp, the Xe lamp is placed at a distance of 45-50cm from the sample to be tested due to its large size, and an optical fiber is arranged at the light outlet of the Xe lamp. The distance between the light outlet of the optical fiber and the sample table 15 is 3-5cm. The light emitted by the Xe lamp is guided to the vicinity of the sample through the optical fiber, which can make the light more fully and effectively concentrated on the surface of the sample for testing, and avoid the light entering the detector and affecting the test results.

[0049] At the same time, in a preferred scheme, as shown in Figure 4 The light filtering assembly 3 includes a baffle or a light filter provided with a through hole 4. The diameter of the through hole 4 on the baffle is preferably 1-2mm. The baffle is preferably a copper foil or an aluminum foil.

[0050] In addition, in order to avoid external light sources entering the detector as much as possible, a sealing assembly is arranged between the light filtering assembly 3 and the entrance of the laser detector of the KPFM tester body 1, so that the test results are more accurate.

[0051] The light filter in the utility model includes any one of the absorption filter, the reflection filter, the composite filter and the band-pass filter, which realizes the testing requirements in different testing environments. In addition, when the light filter is a band-pass filter, the center wavelength of the passband of the light filter is consistent with the wavelength of the laser emitted by the laser 14, and the half-width of the passband of the light filter is 50nm. As shown in Figure 5 In one embodiment, the center wavelength of the passband of the light filter is 650nm.

[0052] In addition, a clamping and fixing assembly is arranged at the entrance of the laser detector, and the light filtering assembly 3 is arranged at the entrance of the laser detector of the KPFM tester body 1 through the clamping and fixing assembly.

[0053] Meanwhile, the testing device also includes a heat dissipation component, which is used to dissipate the heat generated by the external light source 2.

[0054] In this invention, using only optical fiber for light guiding, without a filter component at the laser detector entrance, can still affect the test results. Figure 6 These are test results for using an external light source guided solely by an optical fiber, without a filter at the laser detector entrance. During this test, the external light source, guided by an optical fiber, is used to locally illuminate the sample's test area, minimizing the amount of external light entering the laser four-quadrant detector and thus reducing interference. This method reduces interference to some extent, but some light still enters the detector, and the interference increases with the intensity of the external light. Figure 6 As shown, when an Xe lamp is used as the light source, the optical power is relatively large, the intensity of the laser signal detected by the laser detector is enhanced (from 4.73 to 6.75), the position deviation V changes (from -0.03 to -0.31), and the curve (red and blue lines) of the corresponding XZ section shows obvious jitter.

[0055] Therefore, this invention adds a filter component 3 to the external light source to achieve spatial filtering or spectral filtering. Spatial filtering here refers to installing a baffle with a through-hole 4 at the entrance of the laser detector. The advantage of this method is its ease of operation and low cost; the disadvantage is that its interference removal effect is not as good as spectral filtering. Because the external light source also enters the laser detector through the small hole, it increases the detected light intensity, causes the light spot to deviate from its original position, and interferes with the morphology and potential diagram. However, it can mitigate the influence of the external light source to some extent.

[0056] Spectral filtering refers to installing a filter at the entrance of the laser detector, such as... Figure 7 As shown, when a 650nm narrow-bandpass filter is placed in front of the laser detector, and a high-brightness Xe lamp is applied for illumination, the intensity of the laser signal detected by the laser detector, as well as the position deviation values ​​V and H, do not change significantly. Figure 7 (b, e) is 1714.6 W / m 2 The sample was illuminated with Xe lamp using fiber optic light guide, and the resulting morphology and potential diagrams were obtained. The light power received by the sample at this time was measured to be 811.3 W / m². 2 . Figure 7 (c, f) is 1714.6 W / m 2 The morphology and potential maps were obtained by illuminating the sample with a Xe lamp and adding a narrow bandpass filter in front of the laser detector. The illumination power received by the sample surface was still 1714.6 W / m². 2Comparing the potentials of the samples under three conditions—dark state, fiber optic guidance, and spectral filtering—it was found that the potentials under the light conditions were all higher than those under the dark conditions, with the most significant increase observed under spectral filtering.

[0057] In addition, to verify the effect of the filter on optical power, the following test was conducted: the filter was placed between the external light source and the optical power meter to test the effect of the filter on the optical power. The power of the ultraviolet light before and after adding the filter was 20.2 W / m. 2 and 1.8 W / m 2 The power of the red light is 230.6 W / m. 2 and 139.7 W / m 2 The power of white light is 8.5 W / m. 2 and 2.2 W / m 2 The power before adding the filter can be considered as the power illuminating the sample, and the power after adding the filter can be considered as the power of the external light source detected by the laser detector. R This represents the power after adding the filter divided by the power before adding the filter. R The smaller the value, the better. (Three light sources) R The results were 8.9%, 60.6%, and 25.9%, respectively, indicating that the spectral filtering method is most effective for ultraviolet light, followed by white light, and least effective for red light.

[0058] Therefore, direct external illumination (red and white light) in in-situ illuminated KPFM experiments severely interferes with the test, resulting in significant image noise and rendering the test unusable. By employing fiber optic guidance, pinhole spatial filtering, and narrow-bandpass filter filtering, the amount of external light entering the laser detector is reduced, thus stabilizing the test and obtaining clear and stable morphology and surface potential maps under illumination conditions. The filter method demonstrates the best performance and is worthy of promotion, providing a reference for the micro-area potential characterization of photocatalytic materials, perovskite solar cell materials, etc.

[0059] Based on this device, the morphology and potential diagrams of both the filtered dark state and the illuminated state are normal and stable. A high-power xenon lamp was used as the light source, providing high light intensity. Under these conditions, the test results were excellent, demonstrating the significant advantages of this spectral filtering method.

[0060] Two aspects need to be considered when conducting in-situ illumination KPFM experiments. First, the experiment must proceed normally; second, the illumination power received by the tested material must be sufficient to generate photogenerated carriers. Initially, stable morphology and potential diagrams are obtained as the power of the external light source gradually increases. However, as the Xe lamp light power reaches 1714.6 W / m², [further changes occur]. 2 If it is found that the test cannot be carried out due to the high power, it is necessary to use the test device in this utility model to conduct the test and ensure that the light power received by the sample is as high as possible.

[0061] The preferred embodiments of the present application have been described above with the preferred embodiments, but are not intended to limit the present application. For those skilled in the art, the present application can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An in-situ photo-KPFM testing apparatus, characterized by, The KPFM tester body (1) comprises a laser detector (11), a reflector (12), a beam splitter (13), a laser (14) and a sample stage (15); the laser emitted by the laser (14) passes through the beam splitter (13), the sample stage (15) and the reflector (12) in sequence and enters the laser detector (11); An additional light source (2) is arranged near the sample stage (15), and the distance between the light outlet of the additional light source (2) and the sample stage (15) is 3-5 cm; An optical filter assembly (3) is arranged at the entrance of the laser detector (11).

2. The in-situ illuminated KPFM testing device of claim 1, wherein, The additional light source (2) is an Xe lamp, a white light LED lamp, an ultraviolet lamp or a red light lamp.

3. An in-situ illuminated KPFM testing apparatus according to claim 2, wherein, When the additional light source (2) is an Xe lamp, the light outlet of the Xe lamp is provided with an optical fiber, and the distance between the light outlet of the optical fiber and the sample stage (15) is 3-5 cm.

4. The in-situ illuminated KPFM testing device of claim 1, wherein, The optical filter assembly (3) comprises a baffle or a filter, and the baffle is provided with a through hole (4).

5. An in-situ illuminated KPFM testing apparatus according to claim 4, wherein, The diameter of the through hole (4) on the baffle is 1-2 mm.

6. An in-situ illuminated KPFM testing apparatus according to claim 4, wherein, The filter comprises any one of an absorption filter, a reflection filter, a composite filter and a band-pass filter.

7. An in-situ illuminated KPFM testing apparatus according to claim 6, wherein, When the filter is a band-pass filter, the center wavelength of the passband of the filter is consistent with the wavelength of the laser emitted by the laser (14), and the half-width of the passband of the filter is 50 nm.

8. The in-situ illuminated KPFM testing device of claim 1, wherein, A clamping and fixing assembly is arranged at the entrance of the laser detector, and the optical filter assembly (3) is arranged at the entrance of the laser detector of the KPFM tester body (1) through the clamping and fixing assembly.

9. The in-situ illuminated KPFM testing device of claim 1, wherein, The test device further comprises a heat dissipation assembly for dissipating the heat generated by the additional light source (2).

10. The in-situ illuminated KPFM testing device of claim 1, wherein, A sealing assembly is arranged between the optical filter assembly (3) and the entrance of the laser detector of the KPFM tester body (1).

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