Transmission mechanism and photoetching machine

Abstract

The utility model provides a transmission mechanism and a photoetching machine, and belongs to the technical field of photoetching machines. According to the transmission mechanism, the first supporting unit capable of emitting sound waves and the second supporting unit capable of emitting light waves are arranged on the transmission path of the transmission mechanism, and the mover is supported through sound pressure generated between the first supporting unit and the mover and light pressure generated between the second supporting unit and the mover; therefore, the rotor does not make direct contact with the guide rail in the moving process, and the problem that friction exists in a traditional transmission method is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photoetching machines, in particular to a transmission mechanism and a photoetching machine. BACKGROUND

[0002] In the transmission method of a photoetching machine, many transmission methods need to be carried. Generally, the commonly used linear carrying methods include ball screw transmission, synchronous belt transmission, gear and rack transmission, linear motor transmission, etc. However, each of them has disadvantages.

[0003] ① The positioning accuracy of ball screw transmission is ±0.005 mm, and the self-locking problem still exists;

[0004] ② The positioning accuracy of synchronous belt transmission is ±0.04 mm, and there is an overshoot phenomenon because of flexible transmission, and there is a problem of low-speed transmission and small transmission load;

[0005] ③ The positioning accuracy of gear transmission is ±0.02 mm, and the environment is easily polluted because of the need for lubricating oil, and the transmission noise is large;

[0006] ④ The positioning accuracy of linear motor transmission is ±0.001 mm, and the friction exists because the stator bearing relies on the guide rail, which affects the efficiency;

[0007] ⑤ The magnetic suspension transmission mechanism has the problems of magnetic field stability and electromagnetic interference;

[0008] In summary, the transmission methods on the market all have friction, which affects the transmission efficiency and accuracy, and there is no calibration mechanism in motion to ensure accuracy, and there is no separate non-contact suspension method. CONTENT OF THE INVENTION

[0009] The embodiment of the present application provides a transmission mechanism and a photoetching machine to at least solve the problem that the transmission methods on the market all have friction. Specifically:

[0010] The first aspect of the embodiment of the present application provides a transmission mechanism, which comprises a support unit arranged along a transmission path of the transmission mechanism, and a mover capable of moving along the transmission path of the transmission mechanism, the support unit comprises a first support unit capable of emitting sound waves and a second support unit capable of emitting light waves, the first support unit can cooperate with the mover moving along the transmission path and generate sound pressure for supporting the mover, and the second support unit can cooperate with the mover moving along the transmission path and generate light pressure for supporting the mover;

[0011] Among them

[0012] The first support unit and the second support unit jointly act on the mover to enable the mover in movement to be supported and / or to drive the mover to move along the transmission path of the transmission mechanism.

[0013] In the technical solution described above, the first support unit is used to cooperate with the bottom of the mover and generate acoustic pressure to support the bottom of the mover, and / or the first support unit is used to cooperate with the side of the mover and generate acoustic pressure to support the side of the mover.

[0014] In the technical solution described above, the second support unit is used to cooperate with the bottom of the mover and generate light pressure to support the bottom of the mover, and / or the second support unit is used to cooperate with the side of the mover and generate light pressure to support the side of the mover.

[0015] In the technical solution described above, the side of the mover includes the left side and the right side of the mover, wherein at least one support unit for supporting the bottom of the mover is arranged on the transmission path of the transmission mechanism, and at least one support unit for supporting the left and right sides of the mover is arranged on the transmission path of the transmission mechanism.

[0016] The support unit for supporting the bottom of the mover and the support unit for supporting the left and right sides of the mover jointly act on the mover to enable the mover to move in a suspended manner on the transmission path of the transmission mechanism.

[0017] In the technical solution described above, the first support unit and the second support unit constitute a support module, and the support module includes a bottom support module for supporting the bottom of the mover, a left side support module for supporting the left side of the mover, and a right side support module for supporting the right side of the mover.

[0018] The bottom support module is used to cooperate with the bottom of the mover and generate acoustic pressure and light pressure to support the bottom of the mover, the left side support module is used to cooperate with the left side of the mover and generate acoustic pressure and light pressure to support the left side of the mover, and the right side support module is used to cooperate with the right side of the mover and generate acoustic pressure and light pressure to support the right side of the mover.

[0019] In the technical solution described above, the bottom support module is provided in multiple groups, and the multiple groups of the bottom support module are uniformly distributed along the transmission path of the transmission mechanism.

[0020] The left side support module is provided in multiple groups, and the multiple groups of the left side support module are uniformly distributed along the transmission path of the transmission mechanism.

[0021] The right side support module is provided with multiple groups, and the multiple groups of right side support modules are uniformly distributed along the transmission path of the transmission mechanism.

[0022] In the technical solution, the transmission mechanism further comprises:

[0023] A detection device is arranged for detecting the offset of the mover in the left-right direction when moving along the transmission path;

[0024] A control device is arranged for adjusting the support force of the left side support module on the left side of the mover and / or adjusting the support force of the right side support module on the right side of the mover according to the offset of the mover in the left-right direction when moving.

[0025] In the technical solution, the support module arranged on the left-right direction of the mover comprises the first support unit for generating ultrasonic waves, and the first support unit is connected with a power supply, wherein when the power supply supplies current to the first support unit, the first support unit can cooperate with the bottom of the mover and generate acoustic pressure to support the bottom of the mover.

[0026] By changing the current value inputted by the power supply to the first support unit, the support force of the first support unit on the left-right direction of the mover can be adjusted to correct the deviation of the mover in the left-right direction.

[0027] In the technical solution, the detection device comprises a magnetic scale distributed on both sides of the left-right direction of the mover and arranged along the transmission path of the transmission mechanism, and the control device comprises an industrial computer electrically connected with the magnetic scale.

[0028] In the technical solution, the mover comprises graphene capable of generating photoelectric effect under irradiation of a light source.

[0029] In the technical solution, the transmission mechanism further comprises a light source reflection member distributed on both sides of the left-right direction of the mover and arranged along the transmission path of the transmission mechanism.

[0030] The support unit comprises multiple second support units distributed on both sides of the left-right direction of the mover and arranged along the transmission path of the transmission mechanism.

[0031] The second support units can emit composite light to the light source reflection member at an inclined angle, and the inclined light beam reflected by the light source reflection member can act on the surface of the mover to drive the mover to move along the transmission path of the transmission mechanism.

[0032] In the above technical solution, multiple second support units arranged along the transmission path of the transmission mechanism are provided with different magnitudes of current according to a preset pattern;

[0033] The second support units, which are supplied with different currents according to a preset pattern, can generate different light pressures at different positions on the side of the mover, so as to drive the mover to move continuously in the forward or reverse direction along the transmission path of the transmission mechanism.

[0034] In the above technical solution, the transmission mechanism also includes a bellows cover, a dustproof sheet metal, an end cover plate and a base plate that form its outer contour;

[0035] The accordion cover, the dustproof sheet metal, the end cover plate, and the base plate together form a transmission mechanism with a linear guide rail.

[0036] The second aspect of this application also provides a lithography machine, which includes the transmission mechanism provided in the first aspect of the application.

[0037] By adopting the above technical solution, this utility model has the following beneficial effects compared with the prior art:

[0038] I. The transmission mechanism in this application embodiment provides a first support unit capable of emitting sound waves and a second support unit capable of emitting light waves along its transmission path. The sound pressure generated between the first support unit and the mover and the light pressure generated between the second support unit and the mover support the mover, thereby preventing the mover from directly contacting the guide rail during movement and thus solving the problem of friction that exists in traditional transmission methods. Attached Figure Description

[0039] Figure 1 This is a three-dimensional structural diagram of the transmission mechanism in the embodiments of this application. Figure 1 ;

[0040] Figure 2 This is a three-dimensional structural diagram of the transmission mechanism in the embodiments of this application. Figure 2 ;

[0041] Figure 3 This is a longitudinal section diagram of the transmission mechanism in the embodiment of this application. In the figure, green is a schematic diagram of the light source, pink is a schematic diagram of the moving part, cyan is a schematic diagram of the thrust of the light source, and dark blue is a schematic diagram of the thrust of the sound source.

[0042] Figure 4 This is a schematic cross-sectional view of the transmission mechanism in the embodiments of this application from a top perspective. Figure 1 The moving part in the diagram moves in the positive direction. The green part is a schematic diagram of the light source, the pink part is a schematic diagram of the moving part, and the red, orange, yellow, green, blue, indigo and violet parts are schematic diagrams of the mixed light in a beam of light.

[0043] Figure 5 Fig. 1 is a schematic diagram of a cross-sectional structure of a transmission mechanism in the embodiment of the present application under a top view of filling; Figure 2 In the figure, the mover moves in the opposite direction, the green color in the figure is a schematic diagram of a light source, the pink color is a schematic diagram of a mover, and the red, orange, yellow, green, blue, indigo and violet colors are schematic diagrams of mixed light in a bundle of light;

[0044] Figure 6 Fig. 4 is a flow chart of a working process of the transmission mechanism in the embodiment of the present application.

[0045] In the figure:

[0046] 100 - Mover;

[0047] 200 - First supporting unit;

[0048] 300 - Second supporting unit;

[0049] 400 - Light source reflection member;

[0050] 500 - Detection device;

[0051] 600 - Piano case;

[0052] 700 - Dustproof sheet metal;

[0053] 800 - End cover plate;

[0054] 900 - Bottom plate. DETAILED DESCRIPTION

[0055] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the drawings, in which the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as limiting the present application.

[0056] Throughout the specification and claims, the following terms have at least the meanings explicitly associated herein, unless the context otherwise requires. The meanings identified below do not necessarily limit the terms, but only provide illustrative examples of the terms.

[0057] In the description of the present utility model, the phrase "in an embodiment" does not necessarily refer to the same embodiment, although it can. Similarly, the phrase "in some embodiments", as used herein, when used multiple times in the description, does not necessarily refer to the same embodiments, although it can. As used herein, the term "or" is the inclusive or operator and is equivalent to the term "and / or", unless the context clearly dictates otherwise. The term "based on" is not exclusive and allows for additional factors based on which the determination is made, unless the context clearly dictates otherwise. The word "exemplary" is used herein to mean "serving as an example, instance, or illustration." Any implementation described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other implementations. The scope of the present utility model is limited only by the scope of the appended claims, and any examples in the specification illustrating aspects of the claimed utility model are intended to non-limiting, but merely to illustrate some of the many possible embodiments of the claimed utility model. The various embodiments provided by the present utility model should not be construed as limiting the scope of protection of the present utility model.

[0058] In the description of the present utility model, it needs to be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, and are not intended to indicate or imply that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present utility model.

[0059] In addition, the terms "first", "second", "third", etc. are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0060] In the present utility model, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present utility model can be understood according to the specific circumstances.

[0061] In the utility model, unless another definite provision and limitation, first feature is in second feature "on" or "under" can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them.Moreover, first feature "on", "above" and "on" second feature include that first feature is directly above and obliquely above second feature, or only indicate that first feature horizontal height is higher than second feature.First feature "under", "below" and "under" second feature include that first feature is directly below and obliquely below second feature, or only indicate that first feature horizontal height is less than second feature.

[0062] BACKGROUND

[0063] In the transmission method of the photoetching machine, many transmission methods need to be carried, generally, the commonly used linear carrying method has ball screw transmission, synchronous belt transmission, gear and rack transmission, linear motor transmission and the like.But all have respective shortcomings,

[0064] ① Ball screw transmission positioning precision ±0.005mm, still exists the problem of not self-locking;

[0065] ②Synchronous belt transmission positioning precision ±0.04mm, because of flexible transmission, there is overshoot phenomenon, and there is low-speed transmission, transmission load small problem;

[0066] ③Gear transmission positioning precision ±0.02mm, because need to add lubricating oil, easy to pollute the environment, transmission noise is big;

[0067] ④Linear motor transmission positioning precision ±0.001mm, because the stator bearing relies on guide rail, there is friction, influence efficiency problem;

[0068] ⑤Magnetic suspension transmission mechanism exists magnetic field stability and electromagnetic interference problem;

[0069] In summary, the transmission method on the market at present, all exist friction, influence transmission efficiency and precision, more do not have the calibration mechanism in motion, to ensure precision, do not have the separate non-contact suspension method.

[0070] Based on this, such as Figures 1-6As shown, the first aspect of the embodiments of the present application provides a transmission mechanism, which comprises a support unit arranged along a transmission path of the transmission mechanism, and a mover 100 capable of moving along the transmission path of the transmission mechanism, the support unit comprising a first support unit 200 capable of emitting sound waves (i.e. a sound source) and a second support unit 300 capable of emitting light waves (i.e. a light source), the first support unit 200 being capable of cooperating with the mover 100 moving along the transmission path and generating a sound pressure for supporting the mover 100, and the second support unit 300 being capable of cooperating with the mover 100 moving along the transmission path and generating a light pressure for supporting the mover 100.

[0071] wherein

[0072] the first support unit 100 and the second support unit 200 jointly act on the mover to be capable of supporting the mover 100 in movement and / or driving the mover 100 to move along the transmission path of the transmission mechanism.

[0073] In the embodiments of the present application, the first support unit 200 (sound source) and the second support unit 300 (light source) cooperate with the mover 100 to generate sound pressure and light pressure respectively to support the mover 100. Specifically, the ultrasonic wave generates a sound wave of a specific frequency, forms a standing wave after encountering the reflecting plate, and the nodes on the standing wave generate a stable pressure which offsets the gravity of the mover 100, so that the mover 100 is suspended; the strong ion light irradiates the mover 100 to generate a light pressure which offsets the gravity of the mover 100, so that the mover 100 is suspended. This non-contact support mode cancels the traditional guide rail support, avoiding the problems of energy loss and precision reduction caused by guide rail friction. The mover 100 does not contact any solid parts during transmission, thereby reducing wear and tear, prolonging the service life of the equipment, and improving transmission efficiency and precision. In addition, the first support unit 200 (sound source) and the second support unit 300 (light source) can also cooperate with the mover 100 to drive the mover to move along the transmission path of the transmission mechanism by using sound pressure and / or light pressure.

[0074] Further, in some possible implementations, the first support unit 200 is configured to cooperate with the bottom of the mover 100 and generate a sound pressure for supporting the bottom of the mover 100, and / or the first support unit 200 is configured to cooperate with the side of the mover 100 and generate a sound pressure for supporting the side of the mover 100;

[0075] and / or

[0076] the second support unit 300 is configured to cooperate with the bottom of the mover 100 and generate a light pressure for supporting the bottom of the mover 100, and / or the second support unit 300 is configured to cooperate with the side of the mover 100 and generate a light pressure for supporting the side of the mover 100.

[0077] In the embodiments of the present application, the first support unit 200 (sound source) and the second support unit 300 (light source) cooperate with the mover 100 to generate sound pressure and light pressure respectively to support the mover 100.

[0078] Specifically, the ultrasonic wave generates a specific frequency of sound wave, forms a standing wave after encountering the reflecting plate, and the nodes on the standing wave generate stable pressure to offset the gravity of the mover 100, so that the mover 100 is suspended; the strong ion light irradiates the mover 100 to generate light pressure, which offsets the gravity of the mover 100, so as to realize suspension. This non-contact support mode cancels the traditional guide rail support, avoiding the problems of energy loss and precision reduction caused by guide rail friction. The mover 100 does not contact any solid parts during transmission, thereby reducing wear and tear, prolonging the service life of the equipment, and improving the transmission efficiency and precision.

[0079] That is, the transmission mechanism in the embodiments of the present application cancels the traditional mechanical transmission components such as ball screws, synchronous belts, gears, etc. These components will generate friction and noise during operation. The sound source and the light source almost do not generate noise during operation, and do not need lubricating oil, avoiding environmental pollution. This environmentally friendly and low-noise design not only improves the comfort of the working environment, but also reduces the interference to the surrounding equipment and personnel. Especially in a precise photoetching workshop, a low-noise and pollution-free environment helps to improve the overall production efficiency and stability of the equipment.

[0080] Further, in some possible implementations, the side of the mover 100 includes the left side and the right side of the mover 100, wherein at least one support unit for supporting the bottom of the mover 100 is arranged on the transmission path of the transmission mechanism, and at least one support unit for supporting the left and right sides of the mover 100 is arranged on the transmission path of the transmission mechanism.

[0081] The support unit for supporting the bottom of the mover 100 and the support unit for supporting the left and right sides of the mover 100 jointly act on the mover 100 to enable the mover 100 to move in a suspended manner on the transmission path of the transmission mechanism.

[0082] Specifically, the transmission path of the transmission mechanism not only has the support unit for supporting the bottom of the mover 100, but also has at least one support unit for supporting the left and right sides of the mover 100. These support units jointly act on the mover 100 to enable the mover 100 to move in a suspended manner on the transmission path. This omnidirectional suspension support mechanism ensures that the mover 100 is uniformly supported in the vertical and horizontal directions, thereby realizing the high stability and balance of the mover 100 during transmission. The mover 100 does not contact any solid parts on the transmission path, further reducing energy loss and wear and tear, and improving transmission efficiency and equipment service life.

[0083] Specifically, by setting the support units at the bottom and both sides of the mover 100, the mover 100 is not only supported by acoustic pressure and optical pressure in the vertical direction during transmission, but also corrected in the horizontal direction by acoustic pressure. The magnetic grating detects the position of the mover 100 in real time and feeds back the signal to the industrial computer. The industrial computer adjusts the current of the sound source according to the feedback signal to change the acoustic pressure, thereby correcting the mover 100. This multi-dimensional support and correction mechanism makes the mover 100 more stable during transmission and will not deviate or jitter. Especially in high-precision lithography process, the stability and precision of the mover 100 are crucial. Through the all-around suspension support and high-precision position feedback, the mover 100 can maintain high stability and precision on the transmission path, ensuring the high-quality completion of the lithography process.

[0084] Since the mover 100 is completely suspended during transmission and does not contact any solid components, friction is reduced. The combined action of acoustic pressure and optical pressure ensures smooth movement of the mover 100 on the transmission path, reducing energy loss. This non-contact transmission method significantly improves transmission efficiency, and the mover 100 can move to the target position faster, reducing transmission time and improving production efficiency. At the same time, the vibration and noise caused by friction are reduced, further improving the smoothness and reliability of the equipment.

[0085] Further, in some possible embodiments, the first support unit 200 and the second support unit 300 constitute a support module, and the support module includes a bottom support module for supporting the bottom of the mover 100, a left side support module for supporting the left side of the mover 100, and a right side support module for supporting the right side of the mover 100.

[0086] The bottom support module is used to cooperate with the bottom of the mover 100 and generate acoustic pressure and optical pressure to support the bottom of the mover 100, the left side support module is used to cooperate with the left side of the mover 100 and generate acoustic pressure and optical pressure to support the left side of the mover 100, and the right side support module is used to cooperate with the right side of the mover 100 and generate acoustic pressure and optical pressure to support the right side of the mover 100.

[0087] Specifically, the first support unit 200 (sound source) and the second support unit 300 (light source) constitute a support module, which includes a bottom support module, a left side support module, and a right side support module. Each module cooperates with the bottom, left side, and right side of the mover 100, respectively, to generate corresponding sound pressure and light pressure, which collectively support the mover 100. This modular design makes the function of each support module more explicit and refined, facilitating design, manufacturing, and maintenance. Each module can be independently adjusted and optimized, improving the flexibility and maintainability of the system. For example, if a module fails, it can be quickly replaced or repaired without affecting the operation of the entire system. The bottom support module, left side support module, and right side support module cooperate with the bottom, left side, and right side of the mover 100, respectively, to generate sound pressure and light pressure, which collectively support the mover 100. This multi-point support mechanism ensures the stability and balance of the mover 100 on the transmission path. Through multi-point support, the mover 100 receives uniform support force during transmission, reducing instability and deviation caused by single-point support. This precise multi-point support mechanism not only improves the stability and precision of the mover 100, but also ensures the smoothness and uniformity of the mover 100 during transmission, further improving the positioning accuracy and transmission efficiency of the lithography machine. Each support module can independently adjust the size of the sound pressure and light pressure. For example, when the magnetic grating detects that the mover 100 deviates to the left, the industrial computer can independently adjust the sound pressure of the left side support module to increase it, while reducing the sound pressure of the right side support module, thereby correcting the position of the mover 100. This efficient dynamic adjustment mechanism makes the position control of the mover 100 more accurate and fast. By independently adjusting the sound pressure and light pressure of each support module, the deviation of the mover 100 can be corrected in real time, ensuring that the mover 100 always remains at the predetermined position on the transmission path, improving the response speed and control accuracy of the system.

[0088] Further, in some possible embodiments, the bottom support module is provided with multiple groups, and the multiple groups of bottom support modules are evenly distributed along the transmission path of the transmission mechanism;

[0089] The left side support module is provided with multiple groups, and the multiple groups of left side support modules are evenly distributed along the transmission path of the transmission mechanism;

[0090] The right side support module is provided with multiple groups, and the multiple groups of right side support modules are evenly distributed along the transmission path of the transmission mechanism.

[0091] Specifically, multiple sets of bottom support modules, left side support modules, and right side support modules are arranged and evenly distributed along the transmission path of the transmission mechanism. This evenly distributed support module design ensures that the mover 100 receives uniform support force at every position on the transmission path. During movement, the mover 100 receives stable support regardless of its position, reducing vibration and deviation caused by uneven support force, further improving transmission stability and precision. The even distribution of multiple sets of support modules means that even if a support module fails, other support modules can still provide support force, ensuring stable transmission of the mover 100. This design significantly improves system redundancy and reliability. Even if some support modules fail, the system can still operate normally, reducing downtime caused by single-point failures and improving device availability and production efficiency. The even distribution of multiple sets of support modules allows for more precise adjustment of the mover 100 position. The magnetic grating ruler detects the position of the mover 100 in real time and feeds back signals to the industrial computer, which adjusts the sound pressure and light pressure of each support module based on the feedback signals to achieve precise position control. Through the fine adjustment of multiple sets of support modules, the position control of the mover 100 is more accurate. This high-precision position control mechanism not only improves the positioning accuracy of the lithography machine but also ensures the smoothness and uniformity of the transmission process, making it suitable for high-precision lithography processes.

[0092] Further, in some possible implementations, the transmission mechanism further comprises:

[0093] a detection device 500, the detection device 500 being configured to detect the amount of deviation of the mover 100 in the left-right direction when moving along the transmission path;

[0094] a control device, the control device being configured to adjust the support force of the left side support module on the left side of the mover 100 and / or adjust the support force of the right side support module on the right side of the mover 100 according to the amount of deviation of the mover 100 in the left-right direction when moving.

[0095] The detection device 500 in the embodiments of the present application is used to detect the offset of the mover 100 in the left-right direction in real time when the mover 100 moves along the transmission path. The control device adjusts the support force of the left support module and / or the right support module on the mover 100 according to the detected offset. This real-time position monitoring and feedback mechanism ensures the position accuracy of the mover 100 during transmission. The detection device 500 can accurately detect the offset of the mover 100 and feed back the signal to the control device in real time. The control device quickly adjusts the support force according to the feedback signal, thereby realizing accurate position control of the mover 100. This mechanism not only improves the positioning accuracy of the mover 100, but also ensures the stability and reliability of the transmission process. The control device dynamically adjusts the sound pressure and light pressure of the left support module and the right support module according to the offset fed back by the detection device 500. For example, if it is detected that the mover 100 is offset to the left, the control device will increase the support force of the right support module and simultaneously decrease the support force of the left support module, thereby correcting the position of the mover 100. This precise dynamic adjustment mechanism makes the position control of the mover 100 more delicate and fast. By adjusting the support force in real time, the mover 100 always maintains at the predetermined position during transmission, reducing the offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring high-quality completion of the lithography process. Preferably, the detection device is a magnetic grating ruler.

[0096] Further, in some possible embodiments, the support module arranged in the left-right direction of the mover 100 includes a first support unit 200 for generating ultrasonic waves, and the first support unit 200 is connected with a power supply. When the power supply supplies current to the first support unit 200, the first support unit 200 can cooperate with the bottom of the mover 100 and generate sound pressure supporting the bottom of the mover 100.

[0097] By changing the current value input by the power supply to the first support unit 200, the support force of the first support unit 200 on the mover 100 in the left-right direction can be adjusted to correct the offset of the mover 100 in the left-right direction.

[0098] Specifically, the support modules arranged in the left-right direction of the mover 100 include a first support unit 200 (acoustic source) for generating ultrasonic waves, and the first support unit 200 is connected with a power supply. By changing the current value input by the power supply to the first support unit 200, the support force of the first support unit 200 in the left-right direction of the mover 100 can be adjusted, thereby correcting the deviation of the mover 100 in the left-right direction. This precise sound pressure control mechanism makes the correction of the mover 100 more precise and flexible. By adjusting the current value, the size of the sound pressure can be changed in real time, thereby accurately controlling the position of the mover 100 in the left-right direction. This mechanism not only improves the positioning accuracy of the mover 100, but also ensures the smoothness and stability of the transmission process, which is suitable for high-precision lithography processes. By changing the current value input by the power supply, the first support unit 200 can quickly respond and adjust the sound pressure. For example, if it is detected that the mover 100 deviates to the left, the control device will increase the current of the right support module, thereby increasing the sound pressure on the right side, and at the same time, it will reduce the current of the left support module, thereby reducing the sound pressure on the left side, and realize the correction of the mover 100. This efficient dynamic adjustment mechanism makes the position control of the mover 100 more rapid and accurate. By adjusting the current value in real time, the mover 100 always maintains at the predetermined position during the transmission process, reducing the deviation and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring the high-quality completion of the lithography process. By adjusting the current value to control the sound pressure, the control logic is simplified. The control device only needs to adjust the current value of the power supply according to the deviation amount fed back by the detection device 500, and the correction of the mover 100 can be realized. This simplified control logic not only improves the response speed of the system, but also reduces the complexity and cost of the control system. Through simple current adjustment, accurate position control is realized, and the reliability and maintainability of the system are improved. This design makes the system easier to implement and maintain, reducing the development and operation cost. By accurately controlling the current value, the first support unit 200 only generates the required sound pressure when necessary, avoiding unnecessary energy waste. This optimized energy consumption management mechanism ensures the efficient operation of the system. By accurately adjusting the current value, the system only consumes energy when necessary, reducing energy waste and improving energy utilization efficiency. This not only reduces the operating cost, but also reduces the thermal load of the equipment, further improving the stability and reliability of the system.

[0099] Further, in some possible embodiments, the detection device 500 includes magnetic grating scales distributed on both sides of the mover 100 in the left-right direction and arranged along the transmission path of the transmission mechanism, and the control device includes an industrial computer electrically connected with the magnetic grating scales.

[0100] The magnetic grating ruler is a high-precision displacement detection device 500 with an accuracy of ±0.000002 mm, far exceeding traditional detection methods such as encoders (±0.002 mm) and range finders (±0.05 mm). By arranging the magnetic grating ruler on both sides of the mover 100 in the left-right direction, the position of the mover 100 on the transmission path can be detected in real time and accurately, especially the offset in the left-right direction. This high-precision position detection mechanism ensures more accurate and reliable position control of the mover 100. The magnetic grating ruler feeds back the detected position signals to the industrial computer in real time, and the industrial computer quickly calculates the offset of the mover 100 according to these signals and adjusts the support force of the left and right support modules to realize the correction of the mover 100. This real-time feedback and control mechanism makes the position adjustment of the mover 100 more timely and accurate. The industrial computer can quickly respond to the feedback signals of the magnetic grating ruler and adjust the support force in real time to ensure that the mover 100 always maintains the predetermined position during transmission. This closed-loop control mechanism not only improves the positioning accuracy of the mover 100, but also ensures the stability and reliability of the transmission process, which is suitable for high-precision lithography processes. The combination of the magnetic grating ruler and the industrial computer provides a high-reliability and stable detection and control mechanism. The magnetic grating ruler can maintain high-precision detection in harsh environments, and the industrial computer has strong computing and control capabilities, which can quickly process feedback signals and make adjustments. This high-reliability and stable detection and control mechanism ensures long-term stable operation of the system. Even in complex industrial environments, the magnetic grating ruler and the industrial computer can maintain high precision and high response speed, reducing downtime caused by detection and control failures, and improving the availability and production efficiency of the equipment. The industrial computer dynamically adjusts the sound pressure and light pressure of the left and right support modules according to the offset feedback from the magnetic grating ruler. For example, if it is detected that the mover 100 is offset to the left, the industrial computer will increase the sound pressure of the right support module and decrease the sound pressure of the left support module to correct the position of the mover 100. This precise dynamic adjustment mechanism makes the position control of the mover 100 more delicate and flexible. By adjusting the support force in real time, the mover 100 always maintains the predetermined position during transmission, reducing offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring high-quality completion of the lithography process.

[0101] Further, in some possible embodiments, the mover 100 includes graphene capable of generating a photoelectric effect under illumination of a light source.

[0102] Specifically, graphene is a material with excellent photoelectric properties, which can produce photoelectric effect under the irradiation of strong ion light, eject electrons, and thus generate optical pressure. This efficient optical pressure generation mechanism ensures that the mover 100 can quickly respond under the irradiation of the light source and generate sufficient optical pressure to achieve suspension and movement. The efficient photoelectric effect of graphene improves the response speed and stability of the system, ensuring the smoothness and uniformity of the mover 100 during transmission. Graphene not only has excellent photoelectric properties, but also has the characteristics of light weight and high strength. The mover 100 adopts graphene material, which can reduce the weight of the mover 100 while ensuring the strength. The light weight and high strength of the mover 100 material reduces the inertia of the mover 100, improving the dynamic response speed of the system. The mover 100 can accelerate and decelerate faster during transmission, improving the transmission efficiency. At the same time, the high strength of graphene ensures the structural stability of the mover 100 during high-precision transmission, reducing the deviation and jitter caused by material deformation, and further improving the positioning accuracy and transmission efficiency of the lithography machine. Graphene has excellent electrical conductivity and thermal stability, which can maintain stable performance in high-current and high-temperature environments. Excellent electrical conductivity ensures that the mover 100 can efficiently eject electrons during photoelectric effect and generate stable optical pressure. Thermal stability ensures that the mover 100 will not deform or degrade in performance under the irradiation of high-energy light sources, improving the reliability and stability of the system. This material property allows the mover 100 to maintain high performance during long-term operation, reducing maintenance and replacement frequency, and reducing operating costs. The use of graphene material not only improves the performance of the system, but also has the characteristics of environmental friendliness and low noise. Graphene does not produce harmful substances during photoelectric effect, and almost no noise is generated during operation. This environmentally friendly and low-noise design not only improves the comfort of the working environment, but also reduces interference with surrounding equipment and personnel. Especially in a precise lithography workshop, low noise and pollution-free environment can help improve overall production efficiency and equipment stability.

[0103] Further, in some possible embodiments, the transmission mechanism further includes light source reflecting members 400 distributed on both sides of the mover 100 in the left-right direction and arranged along the transmission path of the transmission mechanism; preferably, the light source reflecting members are glass;

[0104] The support unit includes a plurality of second support units 300 distributed on both sides of the mover 100 in the left-right direction and arranged along the transmission path of the transmission mechanism;

[0105] The second support unit 300 can emit composite light at an inclined angle to the light source reflecting member 400, and the inclined light beam reflected by the light source reflecting member 400 can act on the surface of the mover 100 to drive the mover 100 to move along the transmission path of the transmission mechanism.

[0106] Specifically, the light source reflector 400 is distributed on both sides of the mover 100 in the horizontal direction and is arranged along the transmission path of the transmission mechanism. The second support unit 300 can emit composite light to the light source reflector 400 at an inclined angle. The inclined light beam reflected by the light source reflector 400 can act on the surface of the mover 100 at an inclined angle to drive the mover 100 to move along the transmission path of the transmission mechanism. This design enhances the driving effect of the light pressure by emitting composite light at an inclined angle and reflecting the light beam. The light pressure generated by the inclined light beam on the surface of the mover 100 not only pushes the mover 100 to move, but also realizes more precise control by adjusting the angle and intensity of the light beam. This enhanced light pressure driving mechanism improves the moving speed and precision of the mover 100, ensuring the smoothness and uniformity of the transmission process. By adjusting the inclined angle and intensity of the composite light emitted by the second support unit 300, the force of the light beam reflected by the light source reflector 400 on the mover 100 can be precisely controlled. This precise control mechanism makes the movement of the mover 100 more flexible and accurate. This precise light pressure control mechanism not only improves the positioning accuracy of the mover 100, but also ensures the stability and reliability of the transmission process. By adjusting the angle and intensity of the light beam, the deviation of the mover 100 can be corrected in real time, ensuring that the mover 100 always stays at the predetermined position on the transmission path. This mechanism is particularly suitable for high-precision photolithography processes, ensuring high-quality completion of the photolithography process. The combination of the light source reflector 400 and the second support unit 300 provides a high-stability and reliable driving mechanism. The light source reflector 400 can uniformly reflect the light beam, ensuring that the mover 100 is subjected to uniform light pressure at every position on the transmission path. The multi-point arrangement of the second support unit 300 further improves the redundancy of the system. This high-stability and reliable driving mechanism ensures the long-term stable operation of the system. Even if some of the second support units 300 fail, other support units can still provide light pressure to ensure stable transmission of the mover 100. This design reduces downtime caused by driving failures, improving the availability and production efficiency of the equipment. By precisely controlling the inclined angle and intensity of the composite light emitted by the second support unit 300, the system only generates the required light pressure when necessary, avoiding unnecessary energy waste. This optimized energy consumption management mechanism ensures efficient operation of the system. By precisely adjusting the angle and intensity of the light beam, the system only consumes energy when necessary, reducing energy waste and improving energy utilization efficiency. This not only reduces operating costs, but also reduces the thermal load of the equipment, further improving the stability and reliability of the system.

[0107] Further, in some possible embodiments, the plurality of second support units 300 arranged along the transmission path of the transmission mechanism are provided with different sizes of current according to a predetermined rule;

[0108] The multiple second support units 300 providing different sizes of current according to the preset rule can generate different sizes of optical pressure on different positions of the side of the mover 100, so as to drive the mover 100 to move in the positive direction or the reverse direction along the transmission path of the transmission mechanism.

[0109] In the embodiment of the present application, the multiple second support units 300 arranged along the transmission path of the transmission mechanism provide different sizes of current according to the preset rule, which makes the second support units 300 generate different sizes of optical pressure on different positions of the side of the mover 100, so as to drive the mover 100 to move in the positive direction or the reverse direction along the transmission path of the transmission mechanism. This fine optical pressure gradient control mechanism makes the movement of the mover 100 more flexible and accurate. By adjusting the current of the second support units 300 at different positions, an optical pressure gradient can be created, and the mover 100 moves in the predetermined direction under the action of the optical pressure gradient. This mechanism not only improves the movement speed and accuracy of the mover 100, but also ensures the smoothness and uniformity of the transmission process, which is suitable for high-precision photolithography process.

[0110] In the embodiment of the present application, by adjusting the current of the second support units 300, the mover 100 can move in the positive direction and the reverse direction. For example, if the mover 100 needs to move in the positive direction, the current of the second support units 300 in front can be increased, and the current of the second support units 300 behind can be reduced; conversely, if the mover 100 needs to move in the reverse direction, the current of the second support units 300 in front can be reduced, and the current of the second support units 300 behind can be increased. This bidirectional movement capability makes the transmission mechanism more flexible and multifunctional. The mover 100 can move freely on the transmission path as needed, which not only improves the flexibility of the equipment, but also reduces the downtime caused by direction switching, and improves the production efficiency. This mechanism is particularly suitable for photolithography process which needs to change direction frequently, and ensures the efficient completion of the photolithography process.

[0111] In the embodiment of the present application, by accurately controlling the current of the second support units 300, the system only generates the required optical pressure when necessary, avoiding unnecessary energy waste. This efficient energy utilization mechanism ensures the efficient operation of the system. By accurately adjusting the current, the system only consumes energy when necessary, reducing energy waste and improving energy utilization efficiency. This not only reduces the operating cost, but also reduces the thermal load of the equipment, further improving the stability and reliability of the system.

[0112] In this embodiment, the position of the mover 100 on the transmission path can be precisely controlled by creating an optical pressure gradient. The industrial control computer dynamically adjusts the current of the second support unit 300 based on the offset feedback from the magnetic scale, thereby adjusting the optical pressure gradient and achieving precise position control of the mover 100. This precise position control mechanism ensures that the mover 100 remains in the predetermined position during transmission, reducing offset and jitter, and improving the positioning accuracy and transmission efficiency of the lithography machine. This mechanism is particularly suitable for high-precision lithography processes, ensuring high-quality completion of the lithography process.

[0113] Furthermore, in some possible implementations, the transmission mechanism also includes a bellows cover 600, a dustproof sheet metal 700, an end cover plate 800, and a base plate 900 that form its outer contour.

[0114] The bellows cover 600, the dustproof sheet metal 700, the end cover plate 800, and the base plate 900 together form a transmission mechanism with linear guide rails.

[0115] In this embodiment, the bellows cover 600, dustproof sheet metal 700, end cover plate 800, and base plate 900 together constitute a closed protective structure, effectively protecting internal transmission components such as the mover 100 and support unit, preventing dust, impurities, and external interference from entering. This protection mechanism not only improves the reliability and stability of the system but also extends the service life of the equipment. Protected by the bellows cover 600 and dustproof sheet metal 700, the transmission mechanism can operate normally in harsh industrial environments. The bellows cover 600 can extend and retract with the movement of the mover 100, ensuring that the mover 100 remains protected during movement. This design improves the environmental adaptability of the transmission mechanism, enabling it to operate normally in dusty, humid, or chemically corrosive environments. The dustproof sheet metal 700 and end cover plate 800 further enhance the protective effect, reducing failures and maintenance costs caused by environmental factors. The combination of the bellows cover 600, dustproof sheet metal 700, end cover plate 800, and base plate 900 provides a structure that is easy to maintain and clean. These components can be quickly disassembled and installed, facilitating maintenance and cleaning of internal components. This design simplifies maintenance and cleaning, reducing maintenance time and costs. Maintenance personnel can quickly open the protective structure to inspect, clean, and replace internal components, improving equipment maintenance efficiency and availability. End cover plate 800 and base plate 900 provide a stable support structure, ensuring the linear guide rails and other components of the transmission mechanism remain stable during operation. Bellows cover 600 and dustproof sheet metal 700 provide flexible protection, ensuring the mover 100 is not affected by external interference during movement. This design improves the overall structural stability of the transmission mechanism, reducing failures caused by structural deformation or vibration. The stable structure not only improves transmission accuracy and reliability but also ensures high performance of the equipment during long-term operation.

[0116] Specifically, in combination with Figures 1-6 As shown, the middle of the bottom plate 900 is the bottom light source, the sound source and the glass, the two ends are the end cover plate 800, and the two sides are the dustproof sheet metal 700, which are connected by screws and pins. The magnetic grating is on both sides of the bottom light source, connected by screws and pins. Each bottom plate 900 light source is also fixed with a magnetic grating, connected by screws and pins. The light source and the sound source on both sides are fixed on the dustproof sheet metal 700 on both sides, connected by screws and pins. The reflector plate is suspended above the bottom light source and the sound source, and the middle of the light source and the sound source on both sides. No connection, suspended. The load is connected above the reflector plate by screws and pins.

[0117] In order to more clearly understand the working principle of the transmission mechanism in the embodiment of the application, the following will be specifically described in combination with Figures 1-6 The working principle is as follows:

[0118] Working principle:

[0119] Ultrasonic wave is a pressure wave. Ultrasonic wave generates a specific frequency sound wave (emission wave), which returns to the original route when encountering a reflector plate, forming a reflected wave. The emission wave and the reflected wave superimpose each other to generate a standing wave. There are a series of stationary nodes on the standing wave, and these nodes have stable pressure. Adjusting the frequency of the ultrasonic wave can make the pressure of these nodes counteract the gravity of the mover 100, so as to make the mover 100 stably suspended on the nodes.

[0120] Strong ion light can also produce a certain pressure on the irradiated object, which is called light pressure. Under the action of light, the mover 100 (graphene) generates a photoelectric effect and sprays out electrons, which eventually counteract the gravity of the mover 100, so as to make the mover 100 suspended.

[0121] The newly developed method is that the double-layer pressure of the bottom sound pressure and the light pressure counteracts the gravity of the mover 100. The above is to explain the bearing suspension problem of the mover 100. The original guide rail support is cancelled, the friction and the energy loss of movement are reduced, and the wear and tear risk caused by contact is reduced.

[0122] The following is to explain the deviation correction problem of the mover 100.

[0123] When the mover 100 is in motion, because it is suspended, there is a possibility of deviation to the left or right. For example, when the magnetic grating detects that the mover 100 deviates to the left, the magnetic grating feeds back a signal to the industrial computer, the industrial computer gives a signal, the current and voltage of the sound source (left) are continuously increased, the amplitude of the sound source signal is also increased, the volume is also continuously increased, so that the sound pressure on the left is increased, thereby the pressure of the sound source (left) on the mover 100 is increased, at the same time, the current of the sound source (right) is reduced, the sound pressure on the right is reduced, thereby the pressure of the sound source (right) on the mover 100 is weakened, through the regulation of the sound sources on both sides and the real-time feedback of the position of the magnetic grating, the position of the mover 100 reaches the accurate position, the sound sources (left) and (right) play the role of auxiliary support and preventing deviation for the mover 100.

[0124] It is worth noting that the position feedback of the grating mentioned here has the following mechanisms with equivalent functions,

[0125] 1. Motor plus encoder, working principle: the motor drives the load to move, at the same time, the encoder also rotates, the number of revolutions of the encoder is fed back to the moving distance, the disadvantage: the moving problem needs to be in direct contact with the bottom plate 900, the precision is ±0.002mm, if installed in this mechanism space is relatively large, it is relatively limited;

[0126] 2. Range finder, working principle: installed at both ends of the load movement stroke, through laser scanning to the load surface, and returning to the range finder, the distance back and forth is used to calculate the displacement position. Disadvantage: the accuracy cannot reach the accuracy of the grating, the accuracy is ±0.05mm, while the accuracy of the grating is ±0.000002mm, and the installation space is relatively large;

[0127] Considering the accuracy and space installation problem from the lithography machine equipment, the range finder and the motor plus encoder are excluded, so the grating is more suitable.

[0128] Mover 100 reciprocating drive working principle:

[0129] Strong ion light irradiated object can also produce a certain pressure, called light pressure. When strong ion light passes through glass at a certain angle, refraction phenomenon will occur. Strong ion light is a kind of composite light, which is mixed by light waves of different colors. When strong ion light irradiates on the glass, the part of light wave entering the glass will be slowed down, which will change the angle of the whole wave, as shown in Figure 4 The red light beam that is first refracted produces light pressure on the mover 100 first, making the mover 100 move in the direction of the arrow. When the pressure of the red light beam decays, the orange light can produce a pressure on the mover 100, and the process is repeated, new light pressure is continuously generated to make it move, and the real-time feedback of the position of the magnetic grating is combined to stop at the required position.

[0130] AsFigure 4 As shown, when the current at a is continuously increased, the light intensity at a is continuously enhanced, so that the light pressure at a is continuously increased; the current at b is continuously decreased, so that the light pressure at b is continuously weakened, so that the light pressure at a is greater than that at b, and the light pressure moves from the greater to the smaller, so as to move in the direction of the arrow.

[0131] Conversely, as shown in FIG. 2B, when the current at b is continuously increased, the light intensity at b is continuously enhanced, so that the light pressure at b is continuously increased; the current at a is continuously decreased, so that the light pressure at a is continuously weakened, so that the light pressure at b is greater than that at a, and the light pressure moves from the greater to the smaller, so as to move in the direction of the arrow, so as to enable the mover 100 to move back and forth. Figure 5

[0132] Further, the second aspect of the embodiment of the present application further provides a photolithography machine comprising the transmission mechanism provided by the first aspect of the embodiment of the present application.

[0133] ​The photolithography machine provided in the second aspect of the embodiments of the present application uses the transmission mechanism provided in the first aspect of the embodiments, and the transmission system of the photolithography machine can realize non-contact and high-precision mover 100 movement control. In particular, the suspension mechanism using light pressure and sound pressure, as well as the high-precision position feedback and control of the magnetic scale and the industrial computer, ensure the position accuracy of the mover 100 during transmission. This high-precision transmission mechanism directly improves the alignment accuracy of the photolithography machine, reduces the pattern shift caused by mechanical friction and vibration, thereby improving the resolution and consistency of the photolithography pattern, and is suitable for manufacturing smaller size and higher density integrated circuits and other micro-nano structures. The modular design, multi-point support, and real-time feedback control mechanism of the transmission mechanism enable the photolithography machine to maintain high stability during operation. Even under long-time operation or high-frequency operation, stable performance can be maintained. The enhanced stability of the system means that the photolithography machine can maintain high performance under a wider range of process conditions, reduce production interruptions caused by equipment failure, and improve production efficiency and equipment availability. The optimized design of the transmission mechanism, such as the elimination of traditional guide rails, the use of graphene movers, precise light pressure and sound pressure control, etc., not only improves transmission efficiency, but also reduces energy consumption and maintenance requirements. Reduced energy consumption and maintenance costs directly reduce the operating costs of the photolithography machine. In addition, due to the improvement of system stability, the additional repair costs caused by equipment failure are reduced, further reducing the total cost of ownership (TCO). The efficient dynamic adjustment and bidirectional movement capability of the transmission mechanism enable the photolithography machine to complete pattern transmission and alignment more quickly, reducing the processing time of each wafer. The improvement of production efficiency means that more wafers can be processed in the same time, thereby improving the productivity of the photolithography machine to meet the demand of high-yield production. The flexible design of the transmission mechanism, such as adjustable light pressure and sound pressure, bidirectional movement capability, etc., enables the photolithography machine to adapt to various different photolithography process requirements, including different sizes of wafers, different pattern densities and complex alignment requirements. This adaptability not only makes the photolithography machine suitable for current processes, but also meets the needs of future technological development, prolongs the service life of the equipment, and improves the return on investment.

[0134] In summary, these technical effects not only improve the performance and reliability of the photolithography machine, but also ensure its efficient operation in high-precision photolithography processes, making it suitable for modern semiconductor manufacturing and other high-precision micro-nano processing fields.

[0135] In the above-described embodiments of the present application, the description of each embodiment has its own focus, and the parts not described in detail in a certain embodiment can be referred to the relevant description of other embodiments. The steps shown in the related flowcharts can be executed in a computer system such as a set of computer-executable instructions, and although the logical order is shown in the flowcharts, in some cases, the steps shown or described can be executed in an order different from that shown here. In other words, the order of the steps described in the foregoing embodiments is only an example, and reasonable adjustment of the order of the steps based on the content of the embodiments of the present application is also within the protection scope of the embodiments of the present application.

[0136] The sequence numbers or the order of introduction of the embodiments of the present application are only for description, and do not represent the advantages or disadvantages of the embodiments.

[0137] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in the present application.

[0138] Although the embodiments of the present application have been shown and described above, it can be understood that the above-described embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can change, modify, replace and modify the above-described embodiments within the scope of the present application.

Claims

1. A transmission mechanism, characterized in that, The device includes a support unit disposed along the transmission path of the transmission mechanism, and a mover (100) capable of moving along the transmission path of the transmission mechanism. The support unit includes a first support unit (200) capable of emitting sound waves and a second support unit (300) capable of emitting light waves. The first support unit (200) can cooperate with the mover (100) moving along the transmission path and generate sound pressure for supporting the mover (100). The second support unit (300) can cooperate with the mover (100) moving along the transmission path and generate light pressure for supporting the mover (100). The first support unit (100) and the second support unit (200) work together on the moving part to support the moving part (100) and / or drive the moving part (100) to move along the transmission path of the transmission mechanism.

2. The transmission mechanism according to claim 1, characterized in that, The first support unit (200) is used to cooperate with the bottom of the mover (100) and generate sound pressure to support the bottom of the mover (100), and / or the first support unit (200) is used to cooperate with the side of the mover (100) and generate sound pressure to support the side of the mover (100).

3. The transmission mechanism according to claim 1, characterized in that, The second support unit (300) is used to cooperate with the bottom of the mover (100) and generate light pressure to support the bottom of the mover (100), and / or the second support unit (300) is used to cooperate with the side of the mover (100) and generate light pressure to support the side of the mover (100).

4. The transmission mechanism according to claim 1, characterized in that, The side of the mover (100) includes the left side and the right side of the mover (100), wherein at least one support unit for supporting the bottom of the mover (100) is provided on the transmission path of the transmission mechanism, and at least one support unit for supporting the left and right sides of the mover (100) is provided on the transmission path of the transmission mechanism. The support unit for supporting the bottom of the mover (100) and the support unit for supporting the left and right sides of the mover (100) work together to enable the mover (100) to move in a suspended manner on the transmission path of the transmission mechanism.

5. The transmission mechanism according to claim 1, characterized in that, The first support unit (200) and the second support unit (300) constitute a support module, which includes a bottom support module for supporting the bottom of the mover (100), a left support module for supporting the left side of the mover (100), and a right support module for supporting the right side of the mover (100). The bottom support module is used to cooperate with the bottom of the mover (100) and generate sound pressure and light pressure to support the bottom of the mover (100). The left support module is used to cooperate with the left side of the mover (100) and generate sound pressure and light pressure to support the left side of the mover (100). The right support module is used to cooperate with the right side of the mover (100) and generate sound pressure and light pressure to support the right side of the mover (100).

6. The transmission mechanism according to claim 5, characterized in that, The bottom support module is provided in multiple sets, and the multiple sets of bottom support modules are evenly distributed along the transmission path of the transmission mechanism; The left support module is provided in multiple sets, and the multiple sets of left support modules are evenly distributed along the transmission path of the transmission mechanism; The right-side support module is provided in multiple sets, and the multiple sets of right-side support modules are evenly distributed along the transmission path of the transmission mechanism.

7. The transmission mechanism according to claim 5, characterized in that, The transmission mechanism also includes: A detection device (500) is used to detect the amount of offset of the mover (100) in the left-right direction as it moves along the transmission path; A control device is provided for adjusting the support force of the left support module on the left side of the mover (100) and / or adjusting the support force of the right support module on the right side of the mover (100) based on the offset of the mover (100) in the left-right direction during movement.

8. The transmission mechanism according to claim 7, characterized in that, The support module arranged in the left-right direction of the mover (100) includes a first support unit (200) for generating ultrasonic waves. The first support unit (200) is connected to a power source. When the power source supplies current to the first support unit (200), the first support unit (200) can cooperate with the bottom of the mover (100) and generate sound pressure to support the bottom of the mover (100). By changing the current value input by the power supply to the first support unit (200), the supporting force of the first support unit (200) on the mover (100) in the left and right directions can be adjusted, so as to correct the movement of the mover (100) in the left and right directions.

9. The transmission mechanism according to any one of claims 1-8, characterized in that, The transmission mechanism also includes light source reflectors (400) distributed on both sides of the mover (100) in the left and right directions and arranged along the transmission path of the transmission mechanism; The support unit includes a plurality of second support units (300) distributed on both sides of the mover (100) in the left and right directions and arranged along the transmission path of the transmission mechanism; The second support unit (300) can emit composite light at an inclined angle to the light source reflector (400), and the inclined light beam reflected by the light source reflector (400) can act on the surface of the mover (100) at an inclined angle to drive the mover (100) to move along the transmission path of the transmission mechanism.

10. The transmission mechanism according to claim 9, characterized in that, The multiple second support units (300) arranged along the transmission path of the transmission mechanism are provided with different magnitudes of current according to a preset pattern; The multiple second support units (300) that are supplied with different currents according to a preset rule can exert forces on different positions on the side of the mover (100) to drive the mover (100) to move continuously in the positive or negative direction along the transmission path of the transmission mechanism.

11. The transmission mechanism according to any one of claims 1-8, characterized in that, The transmission mechanism also includes a bellows cover (600), a dustproof sheet metal (700), an end cover (800), and a base plate (900) that form its outer contour; The accordion cover (600), the dustproof sheet metal (700), the end cover plate (800), and the base plate (900) together form a transmission mechanism with a linear guide rail.

12. A lithography machine, characterized in that, The transmission mechanism includes any one of claims 1-11.

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