Ethylene purification and adsorption device and regeneration system thereof

Abstract

The utility model provides an ethylene purification and adsorption device and a regeneration system thereof, the ethylene purification and adsorption device comprises: a housing, a first chamber is arranged in the housing; the adsorption device is arranged in the first cavity, a second cavity is formed in the adsorption device, and the second cavity is used for packaging an adsorbent; the feeding pipe is mounted on the shell and the adsorption device, and the feeding pipe is communicated with the second cavity; the discharging pipe is mounted on the shell and the adsorption device, and the discharging pipe is communicated with the second cavity; the cooling pipe assembly comprises an outer coil pipe and an inner coil pipe, the outer coil pipe is located in the first cavity and wound around the surface of the adsorption device, the inner coil pipe communicates with the outer coil pipe, the inner coil pipe is arranged in the second cavity, and a medium inlet and a medium outlet of the cooling pipe assembly are located outside the shell. According to the scheme, ethylene can be effectively purified, the purity of ethylene can be improved, and the production requirements of 5N-6N high-purity ethylene can be fully met.

Description

Technical Field

[0001] This utility model relates to the field of gas purification technology, specifically to an ethylene purification adsorption device and its regeneration system. Background Technology

[0002] High-purity ethylene (5N-6N) is an indispensable raw material in semiconductor manufacturing, primarily used for etching dielectric films on aluminum metal surfaces in chip manufacturing, as well as in the chemical vapor deposition and vapor phase epitaxial growth processes of third-generation semiconductors (SiC). Adsorption and distillation are the main methods for producing high-purity ethylene. However, acetylene impurities are difficult to separate during distillation, thus requiring a new technological solution to improve the purification efficiency of ethylene. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model proposes an ethylene purification adsorption device. This solution can effectively purify ethylene and adsorb acetylene and carbon dioxide in crude ethylene feedstock at low temperature, which can fully meet the production requirements of 5N to 6N high-purity ethylene.

[0004] Specifically, this utility model proposes an ethylene purification adsorption device, comprising:

[0005] A housing having a first chamber;

[0006] An adsorption device is disposed in a first chamber and has a second chamber for encapsulating an adsorbent.

[0007] A feeding pipe is installed on the housing and the adsorption device, and the feeding pipe communicates with the second chamber;

[0008] A discharge pipe is installed on the housing and the adsorption device, and the discharge pipe communicates with the second chamber;

[0009] A cooling pipe assembly, comprising an outer coil and an inner coil, wherein the outer coil is located in the first chamber and is wound around the surface of the adsorption device, the inner coil is connected to the outer coil and is disposed in the second chamber, and the medium inlet and medium outlet of the cooling pipe assembly are respectively located outside the housing.

[0010] Preferably, the top of the housing and the adsorption device is provided with an adsorbent inlet communicating with the second chamber, and the bottom of the housing and the adsorption device is provided with an adsorbent outlet communicating with the second chamber.

[0011] Preferably, the feeding pipe is installed at the lower end of the adsorption device, and the discharge pipe is installed at the upper end of the adsorption device.

[0012] Preferably, the discharge pipe is connected to a buffer tank or a distillation system via a first valve.

[0013] Preferably, a temperature monitoring device is installed on the housing, which is used to detect the temperature of the adsorption device.

[0014] Preferably, the first chamber is a vacuum chamber.

[0015] Preferably, the lower end of the outer coil has an outlet pipe for connecting to a refrigerant storage tank.

[0016] In addition, this application also proposes a regeneration system for the above-mentioned ethylene purification adsorption device, comprising: a regeneration gas input system, wherein the regeneration gas input system is connected to the discharge pipe via a second valve.

[0017] Furthermore, the regenerated gas input system includes a heating device having a gas inlet end and a gas outlet end, the gas outlet end being connected to the discharge pipe via a second valve.

[0018] Furthermore, an electric heating wire is installed in the second chamber.

[0019] Furthermore, the number of heating wires is multiple, and the multiple heating wires are evenly arranged close to the inner wall of the adsorption device. Alternatively, two heating wires may be used. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0021] Figure 1 This embodiment presents a schematic diagram of the structure of an ethylene purification adsorption device and its regeneration system;

[0022] Figure 2 This is an exploded view of the shell in this embodiment.

[0023] The reference numerals used in the attached figures are as follows:

[0024] 11-Shell; 12-First chamber; 13-Adsorption device; 14-Second chamber; 15-Feeding pipe; 16-Discharge pipe; 17-Outer coil; 18-Inner coil; 19-Media inlet; 20-Media outlet; 21-Adsorbent feed port; 22-Adsorbent discharge port; 23-First valve; 24-Temperature monitoring device; 25-Outflow pipe; 26-Refrigerant storage tank; 27-Second valve; 28-Heating device. Detailed Implementation

[0025] The technical solutions of this application will be further described below with reference to specific embodiments, but this application is not limited to these embodiments.

[0026] like Figure 1 and Figure 2 As shown, this embodiment proposes an ethylene purification adsorption device, comprising:

[0027] Housing 11, wherein the housing 11 has a first chamber 12;

[0028] An adsorption device 13 is disposed in the first chamber 12 and has a second chamber 14 for encapsulating the adsorbent.

[0029] Feeding pipe 15, the feeding pipe 15 is installed on the housing 11 and the adsorption device 13, and the feeding pipe 15 communicates with the second chamber 14;

[0030] The discharge pipe 16 is installed on the housing 11 and the adsorption device 13, and the discharge pipe 16 communicates with the second chamber 14.

[0031] The cooling pipe assembly includes an outer coil 17 and an inner coil 18. The outer coil 17 is located in the first chamber 12 and is wound around the surface of the adsorption device 13. The inner coil 18 is connected to the outer coil 17 and is disposed in the second chamber 14. The medium inlet 19 and the medium outlet 20 of the cooling pipe assembly are located outside the housing 11, respectively.

[0032] The technical advantages of this solution are: it can effectively purify ethylene, and can adsorb acetylene and carbon dioxide in crude ethylene feedstock at low temperature, which can fully meet the production requirements of 5N to 6N high-purity ethylene.

[0033] The cooling pipe assembly in this design provides a low-temperature environment for low-temperature adsorption. Simultaneously, the design employs a two-layer shell structure 11, with an adsorption device 13 housed within each shell 11 to reduce heat exchange and prevent heat exchange between the second chamber 14 and the external environment. The first chamber 12 is a vacuum chamber, further reducing heat exchange.

[0034] The feed pipe 15 is used to transport crude ethylene feedstock into the second chamber 14, and the discharge pipe 16 is used to discharge the purified ethylene.

[0035] Furthermore, the medium inlet 19 and medium outlet 20 of the cooling pipe assembly are located above the housing 11, respectively.

[0036] Furthermore, the housing 11 is cylindrical and has a detachable structure. The housing 11 is connected by two semi-cylindrical sleeves through a detachable installation method.

[0037] In one embodiment of this invention, the top of the housing 11 and the adsorption device 13 is provided with an adsorbent inlet 21 that communicates with the second chamber 14, and the bottom of the housing 11 and the adsorption device 13 is provided with an adsorbent outlet 22 that communicates with the second chamber 14. This design is used for filling or discharging material into the second chamber 14, facilitating the replacement of the adsorbent.

[0038] Furthermore, both the adsorbent feed port 21 and the discharge port 22 are insulated and can also be enclosed in a vacuum jacket.

[0039] In one embodiment of this invention, the feeding pipe 15 is installed at the lower end of the adsorption device 13, and the discharge pipe 16 is installed at the upper end of the adsorption device 13.

[0040] Furthermore, the upper and lower ends of the adsorption device 13 are both conical, which conforms to the diffusion and flow path of the airflow in the second chamber 14, and can effectively prevent the adsorbent in dead corners from failing to contact the material, thus avoiding waste of resources.

[0041] In one embodiment of this invention, the discharge pipe 16 is connected to a buffer tank or a distillation system via a first valve 23.

[0042] As one embodiment of this invention, a temperature monitoring device 24 is installed on the housing 11, and the temperature monitoring device 24 is used to detect the temperature of the adsorption device 13.

[0043] Furthermore, there are multiple temperature monitoring devices 24, and each temperature monitoring device 24 has a sleeve structure. Temperature measuring devices such as resistance temperature detectors or thermocouples are installed in the sleeve to monitor the adsorption temperature or regeneration temperature.

[0044] In one embodiment of this invention, the lower end of the outer coil 17 has an outlet pipe 25, which is used to connect to the refrigerant storage tank 26. This outlet pipe 25 is used to drain the refrigerant from the outer coil 17 and the inner coil 18.

[0045] The pipes in this solution are covered with a thermal insulation and waterproof layer.

[0046] In addition, this application also proposes a regeneration system for the above-mentioned ethylene purification adsorption device, comprising: a regeneration gas input system, wherein the regeneration gas input system is connected to the discharge pipe 16 via a second valve 27.

[0047] This method is used to reverse the process of venting the gas adsorbed in the adsorbent, thereby enabling the adsorbent to regenerate and improving its utilization rate.

[0048] Furthermore, the regeneration gas input system includes a heating device 28, which has a gas inlet end and a gas outlet end. The gas outlet end is connected to the discharge pipe 16 via a second valve 27. The heating device 28 is used to heat the regeneration gas to improve the regeneration effect of the adsorbent.

[0049] Furthermore, an electric heating wire is installed in the second chamber 14. Furthermore, there are multiple electric heating wires, which are evenly arranged close to the inner wall of the adsorption device 13. This further improves the regeneration effect of the adsorbent.

[0050] Low-temperature adsorption method: Initially, the second chamber 14 is in a vacuum state, filled with adsorbent. Refrigerant flows from an external low-temperature chiller, into the outer coil 17 via the medium inlet 19, then into the inner coil 18, and finally out of the medium outlet 20, returning to the low-temperature chiller to complete the cycle. The refrigerant temperature is slowly reduced until the preset adsorption temperature (-50℃~-30℃) is reached. The temperature inside the adsorption device 13 is monitored by the temperature monitoring device 24. After reaching the target temperature, the crude ethylene feedstock begins to enter the second chamber 14 from the feed pipe 15 until positive pressure is achieved inside the chamber, at which point the material begins to flow out from the discharge pipe 16. Considering the initial adsorption heat, the initial feed rate needs to be reduced accordingly. The temperature monitoring device 24 can also monitor the adsorption heat and adjust the feed rate accordingly. After the initial feeding is completed, the normal feed rate can be resumed. Therefore, when the discharge pipe 16 is connected to the buffer tank, it facilitates control of the feed rate in subsequent processes.

[0051] High-temperature in-situ regeneration method: First, stop the entry of ethylene feedstock, stop the refrigerant circulation, and discharge the refrigerant into the refrigerant storage tank 26 through the outlet pipe 25. The regeneration gas flows into the second chamber 14 through the heating device 28, and the regeneration gas and the waste gas separated from the adsorbent are purged out through the feed pipe 15 and enter the tail gas system.

[0052] Considering the residual ethylene in the adsorbent, direct heating would be dangerous. Therefore, most of the residual ethylene in the second chamber 14 was initially removed at room temperature through vacuuming and purging with regeneration gas. Subsequently, heating device 28 and electric heating wire were simultaneously turned on to perform high-temperature regeneration at 200℃~400℃. After regeneration, the second chamber 14 was evacuated to complete the cycle between low-temperature adsorption and regeneration.

[0053] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. An ethylene purification adsorption apparatus characterized by comprising: It comprises: a housing (11) having a first chamber (12) therein; an adsorption device (13) disposed in the first chamber (12) and having a second chamber (14) therein for encapsulating an adsorbent; a feeding pipe (15) mounted on the housing (11) and the adsorption device (13) and penetrating the second chamber (14); a discharging pipe (16) mounted on the housing (11) and the adsorption device (13) and penetrating the second chamber (14); a cooling pipe assembly comprising an outer coil pipe (17) located in the first chamber (12) and wound around the surface of the adsorption device (13) and an inner coil pipe (18) connected with the outer coil pipe (17) and disposed in the second chamber (14), the medium inlet (19) and the medium outlet (20) of the cooling pipe assembly being located outside the housing (11) respectively.

2. The ethylene purification adsorption apparatus according to claim 1, characterized by The top of the housing (11) and the adsorption device (13) is provided with an adsorbent feeding port (21) penetrating the second chamber (14), and the bottom of the housing (11) and the adsorption device (13) is provided with an adsorbent discharging port (22) penetrating the second chamber (14).

3. The ethylene purification adsorption apparatus according to claim 1, characterized by The feeding pipe (15) is mounted at the lower end of the adsorption device (13), and the discharging pipe (16) is mounted at the upper end of the adsorption device (13).

4. The ethylene purification adsorption apparatus according to claim 1, wherein The discharging pipe (16) is connected with a buffer tank or a rectification system through a first valve (23).

5. The ethylene purification adsorption apparatus according to claim 1, wherein A temperature monitoring device (24) is mounted on the housing (11) for detecting the temperature of the adsorption device (13).

6. The ethylene purification adsorption device according to claim 1, characterized by The first chamber (12) is a vacuum chamber.

7. The ethylene purification adsorption apparatus according to claim 1, wherein The lower end of the outer coil pipe (17) has a flow-out pipe (25) for connecting a refrigerant storage tank (26).

8. A regeneration system characterized by, For regenerating the ethylene purification adsorption device as claimed in any one of claims 1 to 7, comprising: a regeneration gas input system connected with the discharging pipe (16) through a second valve (27).

9. The regeneration system of claim 8, wherein, The regeneration gas input system comprises a heating device (28) having a gas inflow end and a gas outflow end, the gas outflow end being connected with the discharging pipe (16) through the second valve (27).

10. The regeneration system of claim 8, wherein, An electric heating wire is mounted in the second chamber (14).

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