Adjustable silicon carbide seed crystal coating film

Abstract

The utility model relates to the technical field of coating, in particular to an adjustable silicon carbide seed crystal coating which comprises a bottom plate, a vertical plate is fixedly connected to the upper end of the bottom plate, a conveying assembly is arranged at the front end of the vertical plate, and a pretreatment assembly is arranged at the position, above the conveying assembly, of the left side of the vertical plate. The adjusting motor drives the threaded rod to rotate, drives the threaded sleeve to move downwards, drives the gluing roller to move downwards, the contact ball abuts against the silicon carbide seed crystal, drives the sealing plate to slide away from the sealing groove, glue in the containing cavity flows to the silicon carbide seed crystal through the gluing hole (the diameter of the gluing hole is larger than that of the sliding rod), and the silicon carbide seed crystal is glued. In addition, when the requirement for the gluing amount is met, the purpose of controlling the glue outlet amount can be achieved by controlling the downward movement distance of the gluing roller and controlling the sliding distance of the sealing plate from the sealing groove, the coating thickness is further controlled, and the finished product quality is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, specifically to an adjustable silicon carbide seed crystal coating. Background Technology

[0002] Silicon carbide (SiC) seed crystals are initial seed crystals grown from single silicon carbide crystals. They are used to manufacture large-size silicon carbide crystals and are widely used in high-power, high-temperature, high-frequency semiconductor devices, optoelectronic devices, and high-efficiency power electronics. Silicon carbide (SiC) seed crystal coatings are used to improve its performance or prepare it for subsequent processing. In semiconductors, optoelectronics, and coating materials, silicon carbide materials are widely used due to their excellent high-temperature resistance, wear resistance, and corrosion resistance. Coatings help improve the mechanical, chemical, and optical properties of silicon carbide.

[0003] The main steps in the silicon carbide seed wafer coating process are: 1. Coating: A layer of adhesive containing silicon carbide is applied to the Si surface of the polished silicon carbide wafer for coating. However, existing silicon carbide seed wafer coating processes make it difficult to control the film thickness during the adhesive coating process, thus reducing the quality of the finished product. Utility Model Content

[0004] In view of the above-mentioned shortcomings of the existing technology, the present invention provides an adjustable silicon carbide seed crystal coating, which can effectively solve the problem that the thickness of the silicon carbide seed crystal coating is difficult to control during the coating process, thus reducing the quality of the finished product.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] This utility model provides an adjustable silicon carbide seed crystal coating, including a base plate, an upright plate fixedly connected to the upper end of the base plate, a conveying component provided at the front end of the upright plate, a pretreatment component provided on the left side of the upright plate above the conveying component, and a coating mechanism provided on the upright plate to the right of the pretreatment component.

[0007] The coating mechanism includes an installation groove on a vertical plate, a threaded rod that is vertically rotatably installed in the installation groove, an adjustment motor for driving the threaded rod that is fixedly installed at the upper end of the vertical plate, a threaded sleeve that is threadedly connected to the body of the threaded rod, a glue-applying roller that is fixedly connected to the front end of the threaded sleeve, a receiving cavity that is opened in the glue-applying roller, a control component that is installed at the lower end of the glue-applying roller, and a spreading roller that is rotatably installed at the front end of the vertical plate to the right of the glue-applying roller.

[0008] The control component includes multiple glue-applying holes spaced apart at the lower end of the glue-applying roller. The glue-applying roller also has multiple sealing grooves that communicate with the receiving cavity and the glue-applying holes. The glue-applying roller is slidably connected to a sliding rod. A sealing plate is fixedly connected to the upper end of the sliding rod, and the sealing plate is adapted to the shape of the sealing groove. A fixing plate is fixedly connected inside the glue-applying roller. Multiple compression springs are fixedly connected between the multiple sealing plates and the fixing plates.

[0009] According to the above-mentioned adjustable silicon carbide seed crystal coating, the pretreatment component includes a reciprocating lead screw rotatably connected to the front end of a vertical plate, a rotary motor for driving the reciprocating lead screw is fixedly installed at the rear end of the vertical plate, a slider is slidably fitted on the body of the reciprocating lead screw, and a blower is fixedly embedded at the lower end of the slider.

[0010] According to the above-mentioned adjustable silicon carbide seed crystal coating, the front end of the upright plate is also fixedly connected to a guide rod, and the guide rod is slidably connected to the slider.

[0011] According to the above-mentioned adjustable silicon carbide seed crystal coating, the lower ends of the plurality of sliding rods are provided with contact balls, and the inner side of the conveying assembly is provided with a plurality of support rollers rotatably below the coating mechanism.

[0012] According to the above-mentioned adjustable silicon carbide seed crystal coating, the mounting groove is square in shape, and the threaded sleeve is slidably connected to the mounting groove.

[0013] According to the above-mentioned adjustable silicon carbide seed crystal coating, the compression spring is always in a compressed state, and the compression spring is never in a state of extreme compression.

[0014] The technical solution provided by this utility model has the following advantages compared with the known prior art:

[0015] This invention adjusts the motor to drive the threaded rod to rotate, causing the threaded sleeve to move downwards, which in turn causes the glue-applying roller to move downwards. The contact ball abuts against the silicon carbide seed crystal, causing the sealing plate to slide away from the sealing groove. The glue in the receiving cavity flows through the glue-applying hole to the silicon carbide seed crystal (the diameter of the glue-applying hole is larger than the diameter of the sliding rod), applying glue to the silicon carbide seed crystal. No glue will leak out at the contact ball where it does not abut against the silicon carbide seed crystal. In addition, when there are requirements for the amount of glue applied, the distance of the glue-applying roller moving downwards can be controlled to control the distance the sealing plate slides away from the sealing groove, thereby controlling the amount of glue applied and thus controlling the thickness of the coating to ensure the quality of the finished product. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a first-view structural schematic diagram of the present invention;

[0018] Figure 2 This is a structural schematic diagram of the present invention from a second perspective;

[0019] Figure 3 for Figure 1 A schematic diagram of the internal structure of the intermediate coating roller;

[0020] Figure 4 for Figure 3 An enlarged structural diagram of part A in the middle.

[0021] Reference numerals: 1. Base plate; 2. Vertical plate; 3. Conveying assembly; 4. Pre-treatment assembly; 41. Reciprocating lead screw; 42. Rotary motor; 43. Slider; 44. Blower; 45. Guide rod; 5. Mounting groove; 6. Threaded rod; 7. Adjusting motor; 8. Threaded sleeve; 9. Glue roller; 10. Receiving cavity; 11. Glue application hole; 12. Sealing groove; 13. Sliding rod; 14. Sealing plate; 15. Contact ball; 16. Fixing plate; 17. Compression spring; 18. Spreading roller. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0023] The present invention will be further described below with reference to the embodiments.

[0024] Example: Refer to Figures 1 to 4An adjustable silicon carbide seed crystal coating includes a base plate 1, a vertical plate 2 fixedly connected to the upper end of the base plate 1, a conveying assembly 3 at the front end of the vertical plate 2, and a pretreatment assembly 4 above the conveying assembly 3 on the left side of the vertical plate 2. Specifically, the pretreatment assembly 4 includes a reciprocating screw 41 rotatably connected to the front end of the vertical plate 2, a rotary motor 42 for driving the reciprocating screw 41 fixedly installed at the rear end of the vertical plate 2, a slider 43 slidably fitted to the body of the reciprocating screw 41, and a blower 44 fixedly embedded at the lower end of the slider 43. In use, the rotary motor 42 drives the reciprocating screw 41 to rotate, causing the slider 43 and the blower 44 to move back and forth. The blower 44 blows air onto the surface of the silicon carbide seed crystal. Before coating, the surface of the silicon carbide seed crystal is cleaned to remove dirt and enhance the adhesion of the film layer.

[0025] The front end of the upright plate 2 is also fixedly connected to a guide rod 45, and the guide rod 45 is slidably connected to the slider 43. The guide rod 45 guides the slider 43 to ensure that the rotation of the reciprocating screw 41 can drive the slider 43 to move vertically.

[0026] A coating mechanism is provided on the right side of the pretreatment component 4 on the upright plate 2. Specifically, the coating mechanism includes an installation groove 5 opened on the upright plate 2. A threaded rod 6 is vertically rotatably installed in the installation groove 5. An adjustment motor 7 for driving the threaded rod 6 is fixedly installed at the upper end of the upright plate 2. A threaded sleeve 8 is threadedly connected to the rod body of the threaded rod 6. The installation groove 5 is square in shape, and the threaded sleeve 8 is slidably connected to the installation groove 5. The square installation groove 5 limits the threaded sleeve 8.

[0027] A glue-applying roller 9 is fixedly connected to the front end of the threaded sleeve 8. A receiving cavity 10 is opened inside the glue-applying roller 9. A control component is provided at the lower end of the glue-applying roller 9. Specifically, the control component includes multiple glue-applying holes 11 spaced apart at the lower end of the glue-applying roller 9. Multiple sealing grooves 12 that communicate with the receiving cavity 10 and the glue-applying holes 11 are also opened inside the glue-applying roller 9. A sliding rod 13 is slidably connected to the glue-applying roller 9. A sealing plate 14 is fixedly connected to the upper end of the sliding rod 13. The sealing plate 14 is adapted to the shape of the sealing groove 12. A fixing plate 16 is fixedly connected inside the glue-applying roller 9. Multiple compression springs 17 are fixedly connected between the multiple sealing plates 14 and the fixing plate 16. The compression springs 17 are always in a compressed state and are never in a state of extreme compression. The compression springs 17 are always in a compressed state to ensure the stability of the engagement between the sealing plate 14 and the sealing groove 12. The compression springs 17 are never in a state of extreme compression to avoid elastic fatigue.

[0028] Each of the sliding rods 13 has a contact ball 15 at its lower end. The inner side of the conveying assembly 3 is provided with multiple support rollers that rotate directly below the coating mechanism to prevent the conveying assembly from being pressed down when applying adhesive to the silicon carbide seed crystal.

[0029] At the front end of the upright plate 2, to the right of the coating roller 9, a smoothing roller 18 is also rotatably set. After the silicon carbide seed crystal is coated with glue, the smoothing roller is set to smooth the glue on the silicon carbide seed crystal. The coated silicon carbide seed crystal exhibits better stability and durability in high temperature environment, and is suitable for high power application scenarios.

[0030] The working principle of this utility model is as follows:

[0031] It should be noted that the conveying component conveys the silicon carbide seed crystal from left to right, and the pretreatment component 4, the coating mechanism, and the smearing roller 18 are arranged alternately from left to right.

[0032] The silicon carbide seed crystal is placed at the top of the conveying component 3. The silicon carbide seed crystal first passes through the pretreatment component 4, where the dirt on the surface of the silicon carbide seed crystal is blown away by the blower 44. Then, the silicon carbide seed crystal is coated with glue. During the glue coating process, the adjusting motor 7 drives the threaded rod 6 to rotate, which drives the threaded sleeve 8 to move downward, and drives the glue coating roller 9 to move downward. The contact ball 15 abuts against the silicon carbide seed crystal, the sliding rod 13 slides upward, and the compression spring 17 is further compressed, causing the sealing plate 14 to slide away from the sealing groove 12. The glue in the receiving cavity 10 flows to the silicon carbide seed crystal through the glue coating hole 11 (the diameter of the glue coating hole 11 is larger than the diameter of the sliding rod 13) to coat the silicon carbide seed crystal. No glue will leak out at the contact ball 15 that does not abut against the silicon carbide seed crystal. In addition, when there is a requirement for the amount of glue applied, the distance of the downward movement of the glue coating roller 9 can be controlled to control the distance of the sealing plate 14 sliding away from the sealing groove 12, thereby achieving the purpose of controlling the amount of glue dispensed.

[0033] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of this utility model.

Claims

1. An adjustable silicon carbide seed coating, comprising: The application relates to a film coating device for a glass substrate, which comprises a bottom plate (1), the upper end of the bottom plate (1) being fixedly connected with a vertical plate (2), the front end of the vertical plate (2) being provided with a conveying assembly (3), the left side of the vertical plate (2) being provided with a pretreatment assembly (4) above the conveying assembly (3), and a film coating mechanism being arranged on the vertical plate (2) to the right of the pretreatment assembly (4). The film coating mechanism comprises an installation groove (5) formed on the vertical plate (2), a threaded rod (6) being vertically arranged in the installation groove (5), an adjusting motor (7) being fixedly arranged on the upper end of the vertical plate (2) and used for driving the threaded rod (6), a threaded sleeve (8) being threadedly connected with the rod body of the threaded rod (6), a glue coating roller (9) being fixedly connected with the front end of the threaded sleeve (8), an accommodating cavity (10) being formed in the glue coating roller (9), and a control assembly being arranged on the lower end of the glue coating roller (9). The control assembly comprises a plurality of glue coating holes (11) which are formed on the lower end of the glue coating roller (9) and are spaced apart from each other, a plurality of sealing grooves (12) which are formed in the glue coating roller (9) and are in communication with the accommodating cavity (10) and the glue coating holes (11), a sliding rod (13) which is slidably connected with the glue coating roller (9), a sealing plate (14) which is fixedly connected with the upper end of the sliding rod (13) and is in shape adaptation with the sealing grooves (12), and a fixed plate (16) which is fixedly connected with the glue coating roller (9), and a plurality of compression springs (17) which are fixedly connected between the sealing plate (14) and the fixed plate (16).

2. The adjustable silicon carbide seed coating of claim 1, wherein, The pretreatment assembly (4) comprises a reciprocating screw rod (41) which is rotatably connected with the front end of the vertical plate (2), a rotating motor (42) which is fixedly arranged on the rear end of the vertical plate (2) and used for driving the reciprocating screw rod (41), and a sliding block (43) which is slidably connected with the rod body of the reciprocating screw rod (41).

3. The adjustable silicon carbide seed according to claim 2, wherein, The front end of the vertical plate (2) is further fixedly connected with a guide rod (45), and the guide rod (45) is slidably connected with the sliding block (43).

4. The adjustable silicon carbide seed according to claim 1, wherein, The lower end of each sliding rod (13) is provided with a contact ball (15), and a plurality of supporting rollers are rotatably arranged on the inner side of the conveying assembly (3) directly below the film coating mechanism.

5. The adjustable silicon carbide seed according to claim 1, wherein, The installation groove (5) is square in shape, and the threaded sleeve (8) is slidably connected with the installation groove (5).

6. The adjustable silicon carbide seed according to claim 1, wherein, The compression spring (17) is always in a compressed state, and the compression spring (17) is always not in a limit compression state.

Images