Adjustable track of plasma cleaning machine
By designing adjustable left and right track structures, the problem that existing plasma cleaner tracks can only fix chips of specific sizes has been solved, enabling flexible cleaning of chips of different sizes, improving efficiency and equipment utilization, and ensuring cleaning uniformity and stability.
Patent Information
- Application Number
- CN202423206519.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2034-12-24
AI Technical Summary
Existing plasma cleaner track designs can only fix packaged chips of a specific size, and cannot adapt to packaged chips of different sizes. This results in low cleaning efficiency, poor flexibility, increased operational complexity and time costs, and affects cleaning effect and equipment utilization.
Design an adjustable track structure including a left track and a right track. The left track has multiple grooves, and the right track is stepped. The grooves correspond to the steps, which can accommodate packaged chips of different sizes. The chip is driven into the cleaning machine for cleaning by adjusting the track.
It improves the flexibility and efficiency of cleaning, reduces operational complexity and maintenance costs, enhances equipment utilization, and ensures cleaning uniformity and chip stability.
Smart Images
Figure CN223761656U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor processing technology, specifically to an adjustable track for a plasma cleaner. Background Technology
[0002] In existing plasma cleaners, the track design typically employs a fixed structure, limiting the fixation and transport of packaged chips to a specific size. This design has significant limitations; when cleaning packaged chips of different sizes is required, the existing track structure cannot effectively adapt, resulting in a substantial reduction in cleaning efficiency and flexibility. (See attached image) Figure 1 This is a schematic diagram of the track structure of an existing plasma cleaner.
[0003] Existing track structures typically consist of grooves or fixtures of a single size or a limited number of sizes, which are tightly matched to the dimensions of the packaged chip. However, in semiconductor manufacturing, the dimensions of packaged chips can vary between different batches or types of products. Therefore, when faced with packaged chips of different sizes, existing track structures often need to be replaced or adjusted, which not only increases operational complexity and time costs but may also affect cleaning effectiveness and equipment utilization. The fixation of existing track structures can also lead to inhomogeneity during the cleaning process. Because packaged chips of different sizes may have different fixing positions and angles on the track, their exposure and cleaning effects in the plasma cleaner will also vary. This inhomogeneity further affects the quality and consistency of semiconductor products. Utility Model Content
[0004] The present invention aims to provide an adjustable track for a plasma cleaner, so as to solve the problem that the track of the plasma cleaner in the prior art can only fix packaged chips of a fixed size.
[0005] To solve the above technical problems, this utility model provides the following technical solution: an adjustable track for a plasma cleaner, including a left track and a right track. One side wall of the left track is provided with multiple grooves, and one side wall of the right track is stepped. The groove surface of the left track is opposite to the stepped surface of the right track, and an encapsulated chip is connected between the opposite groove and the step.
[0006] The working principle of this utility model is as follows: The packaged chips are arranged from largest to smallest from top to bottom. One side of the packaged chip is inserted into the groove of the left track, and the other end of the packaged chip is slid into the stepped surface of the ladder. After installation, the bottom ends of the left and right tracks are moved to drive multiple packaged chips into the plasma cleaner for cleaning.
[0007] The beneficial effects of this utility model are as follows: 1. The adjustable track design of the plasma cleaner provided by this utility model overcomes the limitation of traditional fixed tracks that can only handle chips of specific sizes. Through the grooved design of the left track and the stepped design of the right track, it can adapt to chips of different sizes, thus significantly improving the flexibility of cleaning. 2. This utility model can handle chips of various sizes without frequent replacement or adjustment of the track structure, thereby reducing operational complexity and time costs. It not only improves cleaning efficiency and reduces maintenance costs, but also increases the utilization rate of the equipment. 3.
[0008] Furthermore, the grooves in the left track are spaced apart and the spacing is the same. This spacing between the grooves allows the plasma cleaner to uniformly clean both surfaces of each packaged chip.
[0009] Furthermore, the multiple steps of the right track correspond one-to-one with the multiple grooves. By limiting the number of steps on the right track, the entire track can be made symmetrical, increasing the stability of the track.
[0010] Furthermore, the relative steps and grooves are parallel to each other. This parallel arrangement ensures the packaged chip remains in a parallel position, maximizing cleaning efficiency.
[0011] Furthermore, the stepped surface of the right track decreases from bottom to top. This stepped shape allows the entire device to be moved from the lower end after installation.
[0012] Furthermore, the left and right tracks have the same width. This width setting ensures that both sides of the packaged chip are completely contained, preventing the corners of the packaged chip from being exposed and damaged during transportation. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the track structure of an existing plasma cleaner.
[0014] Figure 2 This is a schematic diagram of the adjustable track of a plasma cleaner according to the present invention;
[0015] Figure 3 for Figure 2 Top view. Detailed Implementation
[0016] The following detailed description illustrates the specific implementation method:
[0017] The reference numerals in the accompanying drawings include: left track 1, packaged chip 2, and right track 3.
[0018] The basic implementation examples are as follows: Figure 2 - Appendix Figure 3 As shown: An adjustable track for a plasma cleaner includes a left track 1 and a right track 3. The left track 1 and the right track 3 have the same width. The right side wall of the left track 1 has three grooves with equal spacing between them. The left side wall of the right track 3 is stepped, and the stepped surfaces of the right track 3 decrease from bottom to top. The right side wall of the left track 1 is opposite to the left side wall of the right track 3. The steps and grooves of the right track 3 correspond one-to-one, and the opposite steps and grooves are parallel to each other. An encapsulated chip 2 is slidably connected between the opposite grooves and steps.
[0019] The specific implementation process is as follows: According to the specifications, the packaged chips 2 are arranged from largest to smallest from top to bottom. One side of the packaged chip 2 is inserted into the groove of the left track 1, and the other end of the packaged chip 2 is slid into the step surface of the ladder. After installation, the bottom ends of the left track 1 and the right track 3 are moved to drive the three packaged chips 2 into the plasma cleaner for cleaning.
[0020] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.
Claims
1. A tunable track for a plasma cleaning machine, characterized by: The left track and the right track are included, one side wall of the left track is provided with a plurality of grooves, one side wall of the right track is in a stepped shape, the groove surface of the left track is opposite to the stepped surface of the right track, and a packaging chip is connected between the opposite groove and the stepped surface.
2. The adjustable track for a plasma cleaning machine of claim 1, wherein: The plurality of grooves of the left track are spaced apart and have the same spacing.
3. An adjustable track for a plasma cleaning machine as claimed in claim 2, wherein: The plurality of steps of the right track correspond to the plurality of grooves one by one.
4. The adjustable track for a plasma cleaning machine of claim 3, wherein: The groove and the step are parallel to each other.
5. An adjustable track for a plasma cleaning machine as claimed in claim 4 wherein: The stepped surface of the right track is decreasing from bottom to top.
6. An adjustable track for a plasma cleaning machine as claimed in claim 5 wherein: The left track and the right track have the same width.