Anti-pollution structure of observation window

Abstract

The utility model discloses an observation window anti-pollution structure, which comprises a furnace body, a furnace cover, a window seat, an upper cover and a quartz window, the furnace cover is covered on the furnace body, the window seat is provided with an annular groove, and the groove wall of the inner side of the annular groove is provided with an airflow gap for enabling gas to flow to the central position of the inner surface of the quartz window. In the crystal growth process, clean gas is guided by the annular groove, flows out of the airflow gap and is uniformly blown to the center position of the inner surface of the quartz window, and an air cushion layer and airflow flowing downwards are formed on the lower surface of the quartz window through continuous blowing, so that floating dust and impurities in a furnace are effectively contacted and attached to the lower surface of the quartz window, and the crystal growth is realized. The quartz window can be kept clean for a long time, and operators can conveniently observe conditions in the furnace, measure temperature and the like; and meanwhile, a certain cooling effect is achieved on the surrounding structure of the window through the blowing effect of airflow, the problems of airtightness failure and the like caused by thermal expansion deformation are solved, the maintenance cost is reduced, the equipment operation stability is improved, and the working efficiency is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of crystal growing furnace, especially to an observation window anti-pollution structure applied to a silicon carbide single crystal furnace. BACKGROUND

[0002] The silicon carbide single crystal furnace is a device for preparing silicon carbide (SiC) single crystal, and its working principle is based on the gas phase transmission and condensation of substances. The silicon carbide single crystal furnace is mainly composed of a furnace body, a heating system, a reaction atmosphere control system, and a crystal growth device. Under the action of high temperature and a specific atmosphere, the silicon carbide powder in the furnace body begins to chemically react to form silicon carbide substances in vapor state. These vapors will deposit on the crystal growth device, and some crystal growth volatiles will also cover the observation window. After a period of use, the observation window will become blurred, making it difficult to observe and inaccurate to measure the temperature. Therefore, the observation window must be regularly disassembled and cleaned, which is time-consuming and laborious, affects normal work, and reduces work efficiency. SUMMARY

[0003] In view of the above problems, the utility model aims to provide an observation window anti-pollution structure with a reasonable structure design and effective solution to the problem of easy pollution of the observation window during use.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0005] An observation window anti-pollution structure includes a furnace body, a furnace cover, a window seat, an upper cover, and a quartz observation window. The furnace cover is placed on the furnace body, and the furnace cover is provided with an observation window opening. The window seat is arranged on the furnace cover and is provided with an observation window aperture opposite the observation window opening. An annular groove extending along the circumferential direction of the observation window aperture is arranged on the outer edge of the observation window aperture. The quartz observation window is positioned and sealed on the observation window aperture and the annular groove by the upper cover. The inner side groove wall of the annular groove is provided with a gas flow gap allowing gas to flow to the center of the inner surface of the quartz observation window.

[0006] As a preferred scheme of the utility model, the height of the inner side groove wall of the annular groove is lower than the inner surface of the quartz observation window, and a gap is formed between them to form the gas flow gap, ensuring that the gas can uniformly flow to the center of the observation window and further enhancing the anti-pollution effect.

[0007] As a preferred scheme of the utility model, the upper surface of the window seat is provided with a fitting recess matching the contour of the quartz observation window, ensuring accurate installation and positioning of the quartz observation window and improving the stability and reliability of the structure.

[0008] As a preferred scheme of the utility model, the bottom surface of the assembly recess is equipped with a sealing ring between the quartz window, which is tightly matched and effectively improves the air tightness.

[0009] As a preferred scheme of the utility model, the window seat is fixed on the furnace cover through lower bolts, the upper cover is fixed on the window seat through upper bolts, the lower bolts and the upper bolts are staggered in the vertical direction to avoid structural interference and enhance the stability of the structure, and meanwhile, the height space is saved.

[0010] As a preferred scheme of the utility model, the outer wall of the window seat is equipped with an air inlet joint in communication with the annular groove, which conveniently introduces clean gas.

[0011] As a preferred scheme of the utility model, the air inlet joint is connected with a gas tank through a pipeline, the pipeline is equipped with a flow meter and an adjusting valve, the flow and speed of the gas can be accurately controlled, the gas can be uniformly flowed to the center of the window, and therefore, a higher anti-pollution effect is realized.

[0012] As a preferred scheme of the utility model, the number of the window openings is two, and the two window openings are symmetrically arranged on the furnace cover, which can provide a wider field of view, facilitate the operator to observe the situation in the furnace, and meanwhile, the reliability and redundancy of the equipment are increased, even if one window has a problem, the other window can still work normally.

[0013] The utility model has the advantages that: the utility model has reasonable structure, in the crystal growing process, the clean gas is guided by the annular groove and flows out from the air flow gap to uniformly blow to the center position of the inner surface of the quartz window, through the continuous blowing, the air cushion layer and the downward flowing air flow are formed on the lower surface of the quartz window, the floating dust and impurities in the furnace are effectively contacted and adhered on the lower surface of the quartz window, the quartz window can be kept clean for a long time, the operator can conveniently observe the situation in the furnace and perform temperature measurement and other operations, meanwhile, through the blowing effect of the air flow, the structure around the window is cooled to a certain extent, the problems of air tightness failure due to thermal expansion deformation are avoided, the maintenance cost is reduced, the equipment operation stability is improved, and the work efficiency is high. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the overall structure schematic view of the utility model.

[0015] Figure 2 It is the local sectional structure schematic view of the utility model.

[0016] Figure 3 It is the local sectional structure schematic view of the utility model.

[0017] Figure 4 It is the structure schematic view of the window seat in the utility model.

[0018] Figure 5 is the gas flow chart when the utility model works. DETAILED DESCRIPTION

[0019] Embodiment: refer to Figures 1 to 4 The utility model discloses a kind of observation window anti-pollution structures provided in the embodiment, it includes furnace body 1, furnace cover 2, window seat 3, upper cover 4 and quartz window 5.

[0020] The furnace cover 2 covers on the furnace body 1, the furnace cover 2 is equipped with window opening 21, the window seat 3 is arranged on furnace cover 2, and is equipped with the window transparent mouth 31 that is opposite with the window opening 21, the outer side edge position corresponding the window transparent mouth 31 is equipped with annular groove 32 extending along the circumferential direction of the window transparent mouth 31 on the window seat 3. Annular groove 32 is communicated with the gas inlet connector 36 on the outer wall of the window seat 3, and clean gas is conveniently introduced. The gas inlet connector 36 is connected with gas tank 7 by pipeline 6, and flowmeter 8 and regulating valve 9 are arranged on the pipeline 6, so that the flow and speed of the gas can be accurately controlled, to ensure that the gas can flow uniformly to the center of the window, so that higher anti-pollution effect is realized.

[0021] The quartz window 5 is positioned and closed on the window transparent mouth 31 and annular groove 32 by the upper cover 4. Preferably, the assembly recess 33 matched with the contour of the quartz window 5 is arranged on the upper surface of the window seat 3, to ensure accurate installation and positioning of the quartz window 5, and to improve the stability and reliability of the structure. The window seat 3 is fixed on the furnace cover 2 by lower bolt 34, the upper cover 4 is fixed on the window seat 3 by upper bolt 41, and the lower bolt 34 and the upper bolt 41 are arranged in a staggered manner in the vertical direction, to avoid structural interference and enhance the stability of the structure, while also saving height space. Preferably, a sealing ring 10 is arranged between the bottom surface of the assembly recess 33 and the quartz window 5, to cooperate tightly and effectively improve the air tightness.

[0022] The inner side groove wall of the annular groove 32 is provided with a gas flow gap 35 leading the gas to the center position of the inner surface of the quartz window 5. Specifically, the height of the inner side groove wall of the annular groove 32 is lower than the inner surface of the quartz window 5, and the gap forms the gas flow gap 35, to ensure that the gas can flow uniformly to the center of the window, and to further enhance the anti-pollution effect. In other embodiments, a plurality of gaps can be uniformly distributed on the inner side groove wall of the annular groove 32.

[0023] In this embodiment, the number of the window openings 21 is two, which are symmetrically arranged on the furnace cover 2. It can provide a wider field of view, and facilitate the operator to observe the situation inside the furnace. At the same time, it also increases the reliability and redundancy of the equipment, even if one window has a problem, the other window can still work normally. In other embodiments, the number of the window openings 21 is set according to the needs, such as one, three or more.

[0024] In the process of crystal growth, the clean gas provided by the gas tank 7. The gas is guided through the pipeline 6, the annular groove 32, and finally flows out from the gas flow gap 35 and uniformly blows to the center position of the inner surface of the quartz window 5. See Figure 5 By continuous purging of the gas, an air cushion layer and downward flowing gas flow are formed on the lower surface of the quartz window 5, which effectively contacts and adheres the floating dust and impurities in the furnace to the lower surface of the quartz window 5, and can keep the quartz window 5 clean for a long time, which brings convenience to the observation and temperature measurement of the operator.

[0025] According to the disclosure and teaching of the above description, those skilled in the art of the present application can also change and modify the above embodiments. Therefore, the present application is not limited to the specific embodiments disclosed and described above, and some modifications and changes of the present application should fall within the protection scope of the claims of the present application. In addition, although some specific terms are used in the specification, these terms are only for convenience of explanation and do not constitute any limitation on the present application. As described in the above embodiments of the present application, other structures obtained by using the same or similar structures are within the scope of protection of the present application.

Claims

1. A structure for preventing contamination of a sight window, comprising a furnace body and a furnace cover which is fitted to the furnace body, and a sight window opening is provided in the furnace cover, characterized in that, It also includes a window seat, an upper cover and a quartz window, the window seat is arranged on the furnace cover and is provided with a window opening corresponding to the window opening, the outer edge of the window opening is provided with an annular groove extending along the circumferential direction of the window opening, the quartz window is positioned and closed on the window opening and the annular groove through the upper cover, and the inner side groove wall of the annular groove is provided with a gas flow gap allowing the gas to flow to the center position of the inner surface of the quartz window.

2. The anti-fouling structure for a sight window according to claim 1, wherein The height of the inner side groove wall of the annular groove is lower than the inner surface of the quartz window, and a gap is formed between the height and the inner surface to form the gas flow gap.

3. The anti-fouling structure for a sight window according to claim 1, wherein The upper surface of the window seat is provided with a fitting recess matching the contour of the quartz window.

4. The anti-fouling structure for a view window according to claim 3, wherein A sealing ring is arranged between the bottom surface of the fitting recess and the quartz window.

5. The anti-fouling structure for a sight window according to claim 1, wherein The window seat is fixed on the furnace cover through lower bolts, the upper cover is fixed on the window seat through upper bolts, and the lower bolts and the upper bolts are arranged in a staggered manner in the vertical direction.

6. The anti-fouling structure for a sight window according to claim 1, wherein An air inlet connector is arranged on the outer wall of the window seat and communicates with the annular groove.

7. The anti-fouling structure for a view window according to claim 6, wherein The air inlet connector is connected with a gas tank through a pipeline, and a flow meter and an adjusting valve are arranged on the pipeline.

8. The anti-fouling structure for a sight window according to any one of claims 1 to 7, wherein The number of window openings is two, and the window openings are symmetrically arranged on the furnace cover.

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