Damping vibration isolation platform

Abstract

The utility model discloses a damping vibration isolation platform, and relates to the technical field of damping vibration isolation platforms, and the damping vibration isolation platform comprises damping air floating vibration isolation supporting legs, a honeycomb platform, a precision control system and a lifting mechanism; the honeycomb platform is installed on the multiple damping air floatation vibration isolation supporting legs which are arranged in parallel, the precision control system is installed on the honeycomb platform, and the lifting mechanisms are installed in the damping air floatation vibration isolation supporting legs; wherein the lifting mechanism comprises a driving part, a linkage part and a supporting plate, the supporting plate is installed between the adjacent damping air floating vibration isolation supporting legs, the driving part is installed on the supporting plate, the linkage part is installed at the extending end of the driving part, and the linkage part is matched with the honeycomb platform in a hinged mode. The vibration isolation platform has the effects of improving the vibration isolation effect and ensuring the stability and accurate positioning of the platform.

Description

Technical Field

[0001] This application relates to the field of damping vibration isolation platform technology, and in particular to a damping vibration isolation platform. Background Technology

[0002] Damped vibration isolation platforms, as a key piece of equipment, have wide applications in precision instruments, optical inspection, and high-end manufacturing. With technological advancements, the requirements for vibration isolation accuracy are increasing, making the role of damped vibration isolation platforms even more crucial. They effectively reduce the impact of external vibrations on equipment, improve equipment stability and measurement accuracy, thereby enhancing the overall system performance and reliability. However, existing damped vibration isolation platforms often exhibit poor vibration isolation performance when dealing with complex vibration environments. In applications requiring high-precision positioning and high stability, the traditional combination of air-bearing vibration isolation legs and rigid platforms is insufficient, leading to unstable equipment operation and affecting equipment accuracy and lifespan. Utility Model Content

[0003] In order to improve the poor vibration isolation effect in complex vibration environments, traditional air-floating vibration isolation legs and platforms are difficult to meet the requirements, resulting in unstable equipment operation and affecting equipment accuracy and service life. This application provides a damping vibration isolation platform.

[0004] The damping vibration isolation platform provided in this application adopts the following technical solution:

[0005] A damping vibration isolation platform includes damping air-float vibration isolation legs, a honeycomb platform, a precision control system, and a lifting mechanism. The honeycomb platform is mounted on multiple parallel damping air-float vibration isolation legs, the precision control system is mounted on the honeycomb platform, and the lifting mechanism is mounted inside the damping air-float vibration isolation legs. The lifting mechanism includes a drive component, a linkage component, and a support plate. The support plate is mounted between adjacent damping air-float vibration isolation legs, the drive component is mounted on the support plate, and the linkage component is mounted on the extended end of the drive component. The linkage component and the honeycomb platform are hinged together.

[0006] By adopting the above technical solutions, the damping vibration isolation platform can effectively isolate external vibrations, improve the stability and measurement accuracy of precision equipment, and the damping air-floating vibration isolation legs reduce the impact of ground vibrations on the platform, ensuring the platform's stability. The honeycomb platform has good rigidity and shock absorption performance, further improving the platform's vibration resistance. The precision control system enables the platform to achieve precise positioning and adjustment at different positions, improving the convenience and accuracy of operation. The lifting mechanism allows the platform's height to be flexibly adjusted to meet different usage needs. The drive component drives the linkage component to transmit power and drive the honeycomb platform to lift and lower, achieving smooth and reliable lifting action and ensuring the platform's stability during height changes.

[0007] Optionally, the driving component is a dual-axis motor.

[0008] By adopting the above technical solutions, the dual-axis motor, as the driving component, can provide stable and efficient driving force, ensuring the smooth operation of the lifting mechanism. The bidirectional driving capability of the dual-axis motor enables the linkage to more accurately control the height adjustment of the honeycomb platform, improving the accuracy and stability of the entire damping vibration isolation platform. The reliability and durability of the dual-axis motor also enhance the service life of the system.

[0009] Optionally, the linkage includes a support rod, a threaded sleeve, and a screw. The screw is respectively installed on the extended end of the dual-axis motor. The screw and the adjacent damping air-bearing vibration isolation support leg are rotatably engaged. The threaded sleeve and the screw are threadedly engaged. One end of the support rod is hinged to the threaded sleeve, and the other end of the support rod is hinged to the honeycomb platform.

[0010] By adopting the above technical solution, the screw is fixedly installed at the two output ends of the dual-axis motor. After the dual-axis motor is driven, it drives the screw transmission. The threaded sleeves on the screw move towards or away from each other along the screw axis, causing the support rod to move along the threaded sleeves, thereby driving the honeycomb platform connected to the support rod to move up or down.

[0011] Optionally, the honeycomb platform includes an upper platform panel, side panels, a honeycomb core structure, and a lower bottom panel. The lower bottom panel is mounted on multiple damping air-bearing vibration isolation legs, the honeycomb core structure is mounted on the lower bottom panel, the upper platform panel is mounted on the honeycomb core structure, and the side panels surround the honeycomb core structure.

[0012] By adopting the above technical solutions, the honeycomb core structure has good rigidity and stability, effectively dissipates and absorbs vibration energy, improves the vibration isolation performance of the overall damping vibration isolation platform, and the side panels reduce the occurrence of external debris entering the honeycomb platform, protect the internal structure from damage, and extend its service life.

[0013] Optionally, a support pad is also installed on the end face of the damping air-bearing vibration isolation leg away from the honeycomb platform.

[0014] By adopting the above technical solution, the support pad effectively improves the stability of the damping air-floating vibration isolation leg, preventing vibration transmission caused by uneven ground, thereby improving the overall damping and vibration isolation effect.

[0015] Optionally, the precision control system includes a laser displacement meter, a controller, and an air pump. The laser displacement meter is installed on the outer wall of the damped air-float vibration isolation leg, and the laser displacement meter and the controller are connected by an electrical signal. The controller is installed on the bottom panel, and the air pump is installed between adjacent damped air-float vibration isolation legs. The air pump and the damped air-float vibration isolation leg are connected by an air pipe.

[0016] By adopting the above technical solution, the laser displacement gauge monitors the height change of the platform in real time to ensure the stability and accuracy of the platform. The controller is used to automatically adjust the height of the platform. The displacement changes collected by the laser displacement gauge are transmitted to the controller. When it is necessary to balance the height of the air-bearing vibration isolation legs with different damping, the air pump is used to adjust the air pressure, thereby realizing the dynamic response and stability of the overall platform.

[0017] Optionally, the upper panel is made of high magnetic permeability stainless steel.

[0018] By adopting the above technical solutions, the upper platform panel made of high-permeability stainless steel can effectively improve the concentration of the magnetic field and enhance the stability of the magnetic environment of the equipment, making it suitable for applications requiring precise magnetic field control. The lower platform panel made of high-quality carbon steel has good mechanical strength and wear resistance, ensuring the overall stability and durability of the platform.

[0019] Optionally, the upper panel has several through holes, and a sealing frame is also installed between the upper panel and the honeycomb core structure.

[0020] By adopting the above technical solution, the through holes effectively reduce the weight of the upper panel and the overall weight of the platform, thereby improving the stability of the platform. A sealing frame is installed between the upper panel and the honeycomb core structure to prevent external dust and impurities from entering the honeycomb core structure, keeping the interior clean and extending the service life of the platform.

[0021] Optionally, the bottom of the honeycomb platform is also provided with an inverted swing plate, the top of the damping air-float vibration isolation leg is provided with a pressure plate, an air film is formed between the pressure plate and the damping air-float vibration isolation leg, and a cavity is formed inside the damping air-float vibration isolation leg.

[0022] By adopting the above technical solution, when a certain distance is formed between the inverted swing plate and the pressure plate, the damping air-floating vibration isolation leg plays a vibration reduction role. The pressure plate and the damping air-floating vibration isolation leg are fastened by bolts. The inflated cavity and the suspended air film form an air spring, which makes the overall inverted swing vibrate up and down and play a vibration reduction role.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. By combining damped air-floating vibration isolation legs and a honeycomb platform, the vibration isolation effect is improved, effectively reducing the impact of external vibration on the equipment and enhancing the stability and measurement accuracy of the equipment;

[0025] 2. The lifting mechanism drives the honeycomb platform to make precise adjustments at different heights, ensuring that the platform can maintain high-precision positioning and stability in the vertical direction even in complex vibration environments;

[0026] 3. The precision control system enables real-time monitoring and adjustment of the platform's height and position, enhancing the platform's dynamic balance capability. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the overall structure shown in this application.

[0029] Figure 2 This is an exploded view of the cellular platform shown in this application.

[0030] Figure 3 This is a schematic diagram illustrating the structure of a precision control system as presented in this application.

[0031] Figure 4 This is a cross-sectional view of the internal structure of the damped air-bearing vibration isolation leg shown in this application.

[0032] Figure 5 This application demonstrates Figure 4 A magnified view from direction A.

[0033] Reference numerals: 1. Damped air-float vibration isolation leg; 2. Honeycomb platform; 3. Precision control system; 4. Lifting mechanism; 41. Drive component; 42. Linkage component; 43. Support plate; 421. Support rod; 422. Threaded sleeve; 423. Screw; 21. Upper platform panel; 22. Side panel; 23. Honeycomb core structure; 24. Lower bottom panel; 5. Support pad; 31. Laser displacement gauge; 32. Controller; 6. Sealing frame; 7. Inverted swing plate; 8. Air pump; 9. Air film; 10. Pressure plate; 11. Cavity. Detailed Implementation

[0034] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0035] This application discloses a damping vibration isolation platform.

[0036] Reference Figure 1It includes damped air-floating vibration isolation legs 1, honeycomb platform 2, precision control system 3, and lifting mechanism 4; the damped air-floating vibration isolation legs 1 achieve dynamic balance through air pressure regulation, better adapting to the complex vibration environment; the honeycomb platform 2 is installed on multiple parallel damped air-floating vibration isolation legs 1; the precision control system 3 is installed on the honeycomb platform 2; and the lifting mechanism 4 is installed inside the damped air-floating vibration isolation legs 1, achieving the purpose of improving vibration isolation effect, precise height adjustment, and stable support;

[0037] See Figure 1 As shown, the lifting mechanism 4 includes a drive component 41, a linkage component 42, and a support plate 43. The support plate 43 is installed between adjacent damped air-bearing vibration isolation legs 1. The drive component 41 is installed on the support plate 43, and the linkage component 42 is installed on the extended end of the drive component 41. The linkage component 42 and the honeycomb platform 2 are hinged together. The drive component 41 is a dual-axis motor. The lifting mechanism 4 can achieve a large stroke adjustment within a small range, which improves the height adjustment accuracy of the platform.

[0038] See Figure 1 As shown, the linkage 42 includes a support rod 421, a threaded sleeve 422, and a screw 423. The screw 423 is installed on the extended end of the dual-axis motor. The screw 423 and the adjacent damping air-bearing vibration isolation support leg 1 are rotatably engaged. The threaded sleeve 422 and the screw 423 are threadedly engaged. One end of the support rod 421 is hinged to the threaded sleeve 422, and the other end of the support rod 421 is hinged to the honeycomb platform 2. After the dual-axis motor is driven, the extended shaft of the dual-axis motor drives the threaded sleeves 422 on the screw 423 to move closer or further away from each other. The support rod 421, which is hinged to the threaded sleeve 422, lifts upward or moves downward to move the honeycomb platform 2, thereby realizing the rise or fall of the honeycomb platform 2.

[0039] See Figure 2 As shown, the honeycomb platform 2 includes an upper platform panel 21, side panels 22, a honeycomb core structure 23, and a lower bottom panel 24. The upper platform panel 21 is made of high-permeability stainless steel, and the lower bottom panel 24 is made of high-quality carbon steel, which can improve the rigidity and stability of the platform and has good magnetic permeability, making it suitable for occasions requiring high magnetic field shielding. The lower bottom panel 24 is mounted on multiple damping air-bearing vibration isolation legs 1, the honeycomb core structure 23 is mounted on the lower bottom panel 24, the upper platform panel 21 is mounted on the honeycomb core structure 23, and the side panels 22 surround the honeycomb core structure 23.

[0040] See Figure 3 and Figure 4As shown, the precision control system 3 includes a laser displacement meter 31, a controller 32, and an air pump 8. The laser displacement meter 31 is installed on the outer wall of the damped air-float vibration isolation leg 1, and the laser displacement meter 31 and the controller 32 are connected by an electrical signal. The data measured by the laser displacement meter 31 is fed back to the controller 32 in real time. The controller 32 is installed on the bottom panel 24. The air pump 8 is installed between adjacent damped air-float vibration isolation legs 1, and the air pump 8 and the damped air-float vibration isolation leg 1 are connected by an air pipe.

[0041] See Figure 5 As shown, the bottom of the honeycomb platform 2 is also provided with an inverted swing plate 7, the top of the damping air-float vibration isolation leg 1 is provided with a pressure plate 10, an air film 9 is formed between the pressure plate 10 and the damping air-float vibration isolation leg 1, and a cavity 11 is formed inside the damping air-float vibration isolation leg 1.

[0042] The system consists of four damping air-floating vibration isolation legs 1, which can be divided into support No. 1, support No. 2, support No. 3, and support No. 4. After being pumped by air pump 8, the air is controlled by precision control system 3 and inflated through air pipes to support No. 1, support No. 2, support No. 3, and support No. 4 respectively. Under air pressure, all four damping air-floating vibration isolation legs 1 rise by L, and the distance between the rise L is the distance between the inverted swing plate 7 and the pressure plate 10. At this time, the inverted swing plate 7 and the pressure plate 10 are in a disengaged state, and the entire vibration damping leg achieves the vibration damping effect. If the distance between the rises is less than L, the vibration damping effect will not be achieved, and the distance between the rises needs to be further adjusted.

[0043] When the air pump 8 inflates the cavity 11 inside the damping air-floating vibration isolation leg 1 through the air pipe, and the air film 9 is suspended to form an air spring, the entire inverted swing plate 7 vibrates up and down to reduce vibration. At the same time, when the inverted swing plate 7 vibrates up and down, the air in the compressed cavity 11 passes through the throttling hole opened in the middle of the damping air-floating vibration isolation leg 1. The throttling hole is small in size and has the function of obstructing the air passage. Therefore, damping is formed at the throttling hole, thereby consuming energy and achieving the vertical vibration reduction effect.

[0044] For horizontal vibration reduction, the swing rod set in the middle of the swing plate 7 and the damping air float vibration isolation leg 1 remains stationary. The entire piston and air film 9 swing left and right around the pivot point of the rotating pair to form a unidirectional swing, thereby reducing horizontal vibration. During the swing, the silicone oil has the effect of hindering the piston swing, thus forming damping and consuming energy.

[0045] The damping air-bearing vibration isolation leg 1 is also equipped with a support pad 5 on the end face away from the honeycomb platform 2, providing a good cushioning effect to prevent excessive impact during the lifting and lowering of the honeycomb platform 2. The upper platform panel 21 has several through holes, and a sealing frame 6 is also installed between the upper platform panel 21 and the honeycomb core structure 23 to reduce air resistance and improve the platform's response speed and stability.

[0046] Three laser displacement gauges 31 are mounted on the outer wall of each damped air-float vibration isolation leg 1 via mounting bases. Each laser displacement gauge 31 emits a beam of light, which can measure the distance S from the bottom of the bottom panel 24 to the surface of the laser displacement gauge 31. For example, if the vertical distance of the laser displacement gauge 31 is set to less than S+L in the precision control system 3, the precision control system 3 inflates the damped air-float vibration isolation leg 1, and the inverted swing plate 7 will rise. If the value of the laser displacement gauge 31 is greater than S+L, the precision control system 3 deflates the damped air-float vibration isolation leg 1, and the inverted swing plate 7 will fall together until the value of the laser displacement gauge 31 equals S+L. At this time, the precision control system 3 shuts down, and the air pump 8 stops inflating or deflating. Since the three points form a plane, the three laser displacement gauges 31 measure the rise L of the three points. The accuracy of each laser displacement gauge 31 is ±0.2mm. Therefore, the precision control system 3 can control the rise error of the entire honeycomb platform 2 to ±0.2mm, while ensuring the parallelism of the entire honeycomb platform 2 (the height difference of the three points does not exceed 0.4mm).

[0047] The implementation principle of the damping vibration isolation platform in this application embodiment is as follows: by combining the damping air-bearing vibration isolation legs 1 and the honeycomb platform 2, high vibration isolation effect and high stability are achieved. The lifting mechanism 4 enables the honeycomb platform 2 to achieve large stroke adjustment within a small range, ensuring that the platform can still maintain high-precision positioning and stability in the vertical direction in complex vibration environment. The precision control system 3 further improves the automation level and ease of operation of the platform. While maintaining high vibration isolation effect, it achieves precise height adjustment and stable support, improves the operating stability and measurement accuracy of the equipment, and extends the service life of the equipment.

[0048] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," "third," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" and similar terms mean that the elements or objects preceding "comprising" or "including" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. "Above," "below," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0049] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A damped vibration isolation platform, characterized by: The application relates to a damping air-floating vibration isolation support leg (1), a honeycomb platform (2), a precision control system (3) and a lifting mechanism (4); the honeycomb platform (2) is installed on a plurality of damping air-floating vibration isolation support legs (1) arranged in parallel, the precision control system (3) is installed on the honeycomb platform (2), and the lifting mechanism (4) is installed in the damping air-floating vibration isolation support leg (1). The lifting mechanism (4) comprises a driving member (41), a linkage member (42) and a support plate (43), the support plate (43) is installed between adjacent damping air-floating vibration isolation support legs (1), the driving member (41) is installed on the support plate (43), the linkage member (42) is installed at the extending end of the driving member (41), and the linkage member (42) is hingedly connected with the honeycomb platform (2).

2. A vibration isolation platform according to claim 1, wherein: The driving member (41) is a double-shaft motor.

3. A damped vibration isolation platform according to claim 2, wherein: The linkage member (42) comprises a supporting rod (421), a threaded sleeve (422) and a screw rod (423), the screw rods (423) are respectively installed at the extending ends of the double-shaft motor, the screw rods (423) are rotationally connected with adjacent damping air-floating vibration isolation support legs (1), the threaded sleeve (422) is in threaded connection with the screw rod (423), one end of the supporting rod (421) is hingedly connected with the threaded sleeve (422), and the other end of the supporting rod (421) is hingedly connected with the honeycomb platform (2).

4. The damped vibration isolation platform of claim 1, wherein: The honeycomb platform (2) comprises an upper table plate (21), a side surrounding plate (22), a honeycomb core structure (23) and a lower bottom plate (24), the lower bottom plate (24) is installed on the plurality of damping air-floating vibration isolation support legs (1), the honeycomb core structure (23) is installed on the lower bottom plate (24), the upper table plate (21) is installed on the honeycomb core structure (23), and the side surrounding plate (22) surrounds the periphery of the honeycomb core structure (23).

5. A vibration isolation platform according to claim 4, wherein: A supporting pad (5) is further installed on the end face of the damping air-floating vibration isolation support leg (1) away from the honeycomb platform (2).

6. A vibration isolation platform according to claim 4, wherein: The precision control system (3) comprises a laser displacement meter (31), a controller (32) and a gas pump (8), the laser displacement meter (31) is installed on the outer side wall of the damping air-floating vibration isolation support leg (1), the laser displacement meter (31) and the controller (32) are connected through an electric signal, the controller (32) is installed on the lower bottom plate (24), the gas pump (8) is installed between adjacent damping air-floating vibration isolation support legs (1), and the gas pump (8) and the damping air-floating vibration isolation support leg (1) are connected through a gas pipe.

7. A vibration isolation platform as claimed in claim 4, wherein: The upper table plate (21) is made of high-permeability stainless steel.

8. A vibration isolation platform as claimed in claim 4, wherein: A plurality of through holes are formed in the upper table plate (21), and a sealing frame (6) is further installed between the upper table plate (21) and the honeycomb core structure (23).

9. A vibration isolation platform as claimed in claim 6, characterized in that: An inverted swing plate (7) is further arranged at the bottom of the honeycomb platform (2), a pressing plate (10) is arranged at the top of the damping air-floating vibration isolation support leg (1), an air film (9) is formed between the pressing plate (10) and the damping air-floating vibration isolation support leg (1), and a cavity (11) is formed in the damping air-floating vibration isolation support leg (1).

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