Wide atmosphere gun plasma equipment

Abstract

The utility model discloses a wide-width atmosphere gun plasma device, which belongs to the technical field of plasma, and comprises a protective shell, a plasma gas outlet, a gas inlet, a gas outlet, a gas inlet, a gas outlet, a gas outlet, a gas outlet, a gas inlet and a gas outlet, and is characterized in that the protective shell is provided with an accommodating cavity extending along the length direction and a plasma gas outlet communicated with the accommodating cavity; the ceramic insulation tube is arranged in the containing cavity, an airflow channel is formed between the ceramic insulation tube and the containing cavity, the ceramic insulation tube is provided with a containing cavity, and the two ends of the containing cavity are communicated with the airflow channel; the electrode is arranged in the accommodating cavity and is used for generating plasma gas; the gas inlet connecting block is connected with the protective shell and comprises a first gas inlet and a first gas outlet which are communicated with each other, the first gas inlet is used for feeding process gas, and the first gas outlet is communicated with the gas flow channel. Compared with the prior art, the wide atmosphere gun plasma equipment is high in stability, and can cool the equipment and plasma gas.

Description

TECHNICAL FIELD

[0001] The utility model relates to a wide atmospheric gun plasma equipment belongs to plasma equipment technical field. BACKGROUND

[0002] Plasma equipment plays an important role in the photoelectric display and packaging industry due to its unique surface treatment capability. These devices can provide non-contact cleaning and surface activation, effectively removing organic residues, micro-particle contamination, and oxide thin layers on the surface of the material, thereby improving the surface activity of the workpiece. In the photoelectric coupler packaging process, plasma cleaning technology can remove organic contamination on the surface of the epoxy encapsulation material, prevent bubbles from forming inside the material during the epoxy encapsulation process, and avoid delamination problems.

[0003] Atmospheric jet plasma equipment, conventional dielectric barrier discharge plasma equipment, and vacuum plasma equipment are widely used plasma equipment. However, they all have some problems. For example, atmospheric jet plasma equipment has high tip temperature of the electrode, limited processing area, uneven processing, and metal sputtering problems. Conventional dielectric barrier discharge plasma equipment faces high equipment temperature, difficulty in simultaneously adjusting intensity and temperature, unstable plasma, and severe electrode ablation problems. Although vacuum plasma equipment has good processing effect, its structure is complex, the cost is high, and it is mostly a single machine device, which cannot be connected with the entire production line, and manual loading and unloading are required, affecting production efficiency. SUMMARY

[0004] To solve the above technical problems, the utility model provides a wide atmospheric gun plasma equipment with high stability and low temperature.

[0005] The technical scheme of the utility model is:

[0006] The utility model provides a wide atmospheric gun plasma equipment, which comprises:

[0007] A protective shell has a receiving cavity extending in the length direction and a plasma gas outlet communicating with the receiving cavity;

[0008] A ceramic insulating tube is arranged in the receiving cavity and has an airflow channel between the receiving cavity, the ceramic insulating tube has a containing cavity, and both ends of the containing cavity communicate with the airflow channel;

[0009] An electrode is arranged in the containing cavity and used for generating plasma gas;

[0010] An air inlet connecting block is connected with the protective shell and comprises a first air inlet and a first air outlet in communication, the first air inlet is used for entering process gas, and the first air outlet communicates with the airflow channel.

[0011] Further, the protective shell comprises a first side and a second side arranged oppositely, the plasma gas outlet is arranged on the first side, the gas inlet connecting block is arranged on the second side, and the second side comprises a docking side facing the second side and a gas inlet side connected with the docking side, the first gas inlet is arranged on the gas inlet side, and the first outlet is arranged on the docking side.

[0012] Further, the second side is provided with a second gas inlet connected with the first outlet, and the second gas inlet is communicated with the accommodating cavity.

[0013] Further, the electrode is provided with a third gas inlet for entering compressed air and a third outlet communicated with the third gas inlet.

[0014] Further, the gas inlet connecting block is provided with a plurality of gas flow holes.

[0015] Further, the power supply is connected with the electrode through the feeding pole, and the protective shell is connected with the ground pole of the power supply.

[0016] Further, the power supply is a medium-frequency plasma power supply containing pulse modulation.

[0017] Further, the electrode comprises a first electrode part and a second electrode part, and the first electrode part and the second electrode part are connected through an electrode connecting sheet.

[0018] Further, at least one ceramic insulation sleeve is sleeved on the ceramic insulation tube, and the ceramic insulation sleeve is abutted with the accommodating cavity of the protective shell, so that the gas flow channel is formed between the ceramic insulation tube and the accommodating cavity.

[0019] Further, in the length direction, the length of the plasma gas outlet is 40mm-120mm.

[0020] The beneficial technical effects of the utility model are as follows:

[0021] The electrode is arranged in the accommodating cavity of the ceramic insulation tube, so that the instability of plasma and the ablation of the electrode during the discharge of the existing sliding arc bare electrode are avoided, and the ceramic insulation tube has the advantages of high melting point, good chemical stability, low thermal conductivity, heat insulation, low linear expansion coefficient and good dimensional stability, so that the wide-width atmospheric gun plasma equipment has the advantages of high stability and low temperature. In addition, the gas flow channel is arranged between the ceramic insulation tube and the protective shell, and the gas flow channel is communicated with the gas inlet connecting block, so that the process gas can enter the gas flow channel through the first gas inlet and the first outlet, the electrode and the protective shell can be cooled while the plasma generated by the electrode is taken out, so that the temperature of the blown plasma is also low, and the subsequent operation is facilitated. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a wide-area atmospheric gun plasma device conforming to a preferred embodiment of the present utility model;

[0023] Figure 2 yes Figure 1 Exploded view of the structure;

[0024] Figure 3 yes Figure 1 A sectional view;

[0025] Figure 4 yes Figure 2 A schematic diagram of the structure of the protective outer shell;

[0026] Figure 5 yes Figure 2 Schematic diagram of the structure of the middle air intake connecting block;

[0027] Figure 6 yes Figure 2 Schematic diagram of the middle electrode;

[0028] Figure 7 yes Figure 6 A schematic diagram of the structure of the middle electrode from another angle.

[0029] Explanation of reference numerals in the attached figures:

[0030] Wide-range atmospheric plasma gun device 100, protective shell 10, receiving cavity 11, plasma gas outlet 12, first side 13, second side 14, second air inlet 15, ceramic insulating tube 20, airflow channel 21, electrode 30, first electrode part 31, second electrode part 32, electrode connecting piece 33, third air inlet 34, third air outlet 35, feed access block 36, air inlet connecting block 40, docking side 41, air inlet side 42, first air inlet 43, first air outlet 44, airflow hole 45, ceramic insulating sleeve 50, fixing assembly 60, fixing block 61, high-frequency gas path fixing block 62, protective cover 63, fixing connector block 64, cable clip block 65. Detailed Implementation

[0031] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0032] Please see Figures 1 to 7As shown in the utility model provides a kind of wide atmospheric gun plasma equipment 100.The wide atmospheric gun plasma equipment 100 includes power supply, protective shell 10, ceramic insulation component, electrode 30, air inlet connecting block 40 and fixed component 60.

[0033] Protective shell 10 has a along length direction extending receiving cavity 11 and with the receiving cavity 11 communication plasma gas outlet 12.Ceramic insulation tube 20 is arranged in the receiving cavity 11, and with the receiving cavity 11 between gas flow passage 21.The ceramic insulation tube 20 has a containing cavity, and the containing cavity both ends with the gas flow passage 21 communication.Electrode 30 is arranged in the containing cavity, for generating plasma gas, plasma gas can enter receiving cavity 11 (in gas flow passage 21) from the both ends of containing cavity, and is ejected through plasma gas outlet 12, to product is handled.Air inlet connecting block 40 is connected with the protective shell 10, including intercommunication first air inlet 43 and first air outlet 44, the first air inlet 43 is used to enter process gas, and the first air outlet 44 is connected with the gas flow passage 21.Process gas enters air inlet connecting block 40 from first air inlet 43, passes through first air outlet 44 and enters the receiving cavity 11 of protective shell 10, is communicated with gas flow passage 21, and flows out through plasma gas outlet 12.In the process of process gas flowing out, the plasma generated by electrode 30 can be carried out simultaneously, and electrode 30 and protective shell 10 can be cooled down, so that the temperature of the blown plasma is also lower, facilitating subsequent operation.

[0034] Please refer to Figure 4 , and combine Figures 1 to 3 As shown in the utility model, protective shell 10 is cuboid, including first side 13 and second side 14 oppositely arranged and third side and fourth side oppositely arranged.The first side 13, the second side 14, the third side and the fourth side are surrounded to form a along length direction extending receiving cavity 11.The receiving cavity 11 is used for accommodating electrode 30 and other structures.A plasma gas outlet 12 is arranged on the first side 13 of protective shell 10 and communicated with the receiving cavity 11, and a second air inlet 15 is arranged on the second side 14 of protective shell 10 and connected with the first air outlet 44 of air inlet connecting block 40.The second air inlet 15 is communicated with the gas flow passage 21 in the receiving cavity 11 and connected with the plasma gas outlet 12 of the first side 13.Such arrangement is helpful to control the flow direction and speed of process gas, and process gas can effectively cool down electrode 30 in the receiving cavity 11, so that the temperature of the blown plasma is lower, facilitating subsequent operation.

[0035] Further, the length of the plasma gas outlet 12 is 40mm-120mm in the length direction. That is, the outlet length of the plasma gas outlet 12 of the wide atmospheric gun plasma equipment 100 is large, and the product only needs to pass once, which can effectively improve the product processing effect and uniformity, and also ensures the processing efficiency.

[0036] Please refer to Figure 5 The air inlet connecting block 40 is arranged on the second side 14 of the protection shell 10. The air inlet connecting block 40 is provided with a fixing hole, and a fastener passes through the fixing hole to fix the air inlet connecting block 40 on the protection shell 10.

[0037] The air inlet connecting block 40 includes an air inlet side 42, a docking side 41 and a connecting side connected with the air inlet side 42 and the docking side 41. The first air inlet 43 is arranged on the air inlet side 42. That is, the first air inlet 43 is arranged on the side surface of the air inlet connecting block 40 to facilitate the access of the process gas. Optionally, the process gas can be inert gas such as nitrogen and argon. The first air outlet 44 is arranged on the docking side 41 facing the second side 14 of the protection shell 10. That is, the first air outlet 44 is arranged on the bottom surface of the air inlet connecting block 40 to facilitate docking with the protection shell 10, so as to introduce the process gas into the protection shell 10.

[0038] Further, a plurality of air flow holes 45 are arranged on the air inlet connecting block 40 in the length direction of the accommodation cavity 11. Optionally, the air flow holes 45 are arranged on the air inlet side 42 and the connecting side of the air inlet connecting block 40. Specifically, the compressed air can enter through the air flow holes 45 arranged on the air inlet side 42, and the compressed air flows out through the air flow holes on the connecting side. In this way, the air inlet connecting block 40 and the protection shell 10, and even the entire wide atmospheric gun plasma equipment 100 are subjected to cooling treatment, which helps to uniformly distribute heat, prevents local overheating, and ensures that the wide atmospheric gun plasma equipment 100 can maintain the best performance under various working conditions.

[0039] Further, the ceramic insulation assembly is arranged in the accommodation cavity 11 of the protection shell 10. The ceramic insulation assembly includes a ceramic insulation tube 20 and at least one ceramic insulation sleeve 50 sleeved on the ceramic insulation tube 20.

[0040] The ceramic insulating tube 20 has a containing cavity for containing the electrode 30. The two ends of the containing cavity are communicated with the airflow channel 21. In this way, the plasma generated by the electrode 30 can enter the containing cavity from the two ends of the containing cavity and more specifically enter the airflow channel 21, so as to facilitate the ejection of the plasma. By arranging the electrode 30 in the containing cavity of the ceramic insulating tube 20, the wide atmospheric gun plasma device 100 of the utility model is in a ceramic structure DBD discharge mode, so as to avoid the instability of the plasma and the ablation of the electrode 30 when the existing sliding arc bare electrode 30 discharges. In addition, due to the high melting point, good chemical stability, low thermal conductivity, good heat insulation, low linear expansion coefficient and good dimensional stability of the ceramic insulating tube 20, the wide atmospheric gun plasma device 100 has the advantages of high stability and low temperature.

[0041] Further, two ceramic insulating sleeves 50 are arranged on the outer side of the ceramic insulating tube 20. The two ceramic insulating sleeves 50 are arranged close to the two ends of the ceramic insulating tube 20, so that the airflow channel 21 in the middle has a larger area. The two ceramic insulating sleeves 50 abut against the containing cavity 11 of the protective shell 10, so as to stably place the ceramic insulating tube 20 and the electrode 30 in the containing cavity 11 of the protective shell 10. In addition, the airflow channel 21 is formed between the ceramic insulating tube 20 and the containing cavity 11 through the two ceramic insulating sleeves 50.

[0042] Please refer to Figure 6 and Figure 7 As shown in the figures, the electrode 30 is arranged in the containing cavity. By connecting the power supply (not shown), the plasma gas can be generated.

[0043] Further, the feeding pole of the power supply is connected with the electrode 30, and the grounding pole of the power supply is connected with the protective shell 10. That is, the feeding access block 36 is arranged on the electrode 30, and the feeding access block 36 is connected with the feeding pole of the power supply, so that the electrode 30 discharges to generate the plasma.

[0044] Further, the power supply is a medium frequency plasma power supply with pulse modulation. By using the pulse modulation medium frequency high voltage discharge, the temperature of the plasma jet can be adjusted, and the problem that the temperature and the intensity of the continuous medium frequency high voltage discharge are difficult to adjust simultaneously can be avoided.

[0045] In the embodiment, the electrode 30 includes a first electrode part 31 and a second electrode part 32, and the first electrode part 31 and the second electrode part 32 are connected through the electrode connecting sheet 33.

[0046] Furthermore, the electrode 30 is provided with a third air inlet 34 for entering compressed air and a third air outlet 35 communicating with the third air inlet 34. By hollowing out the electrode 30 to form a flowable third air inlet 34 and third air outlet 35, the electrode 30 is also ventilated during operation of the wide-area atmospheric gun plasma device 100 for cooling. This helps maintain the temperature of the electrode 30 during operation, prevents overheating, extends the service life of the electrode 30, and maintains the stability of the device. Simultaneously, because the temperature of both the electrode 30 and the protective casing 10 is low, the temperature of the generated plasma is also low, facilitating subsequent processing.

[0047] Optionally, the compressed air flows in the same direction as its length on electrode 30, i.e., laterally. The process gas, however, flows vertically in a straight line.

[0048] Furthermore, the wide-area atmospheric gun plasma device 100 of this utility model also includes fixing components 60 disposed at both ends of the protective housing 10. The fixing components 60 include a fixing block 61 disposed at one end of the protective housing 10, a high-frequency gas path fixing block 62 disposed at the other end (near the air inlet side 42 of the air inlet connection block 40), a cable clamp 65, a protective cover 63, and a fixing connector block 64. These fixing components 60 improve the structural stability and ease of installation of the wide-area atmospheric gun plasma device 100.

[0049] When using the wide-area atmospheric gun plasma device 100 of this invention, compressed air is continuously connected. Compressed air can flow through the third air inlet 34 and the third air outlet 35 on the electrode 30, thereby effectively cooling the electrode 30. Simultaneously, compressed air can also flow through the airflow hole 45 on the air inlet connection block 40, thereby effectively cooling the air inlet connection block 40 and the protective shell 10. Then, process gas enters through the first air inlet 43 on the air inlet connection block 40, enters the airflow channel 21 between the protective shell 10 and the insulating ceramic tube through the first air outlet 44, and is then blown out from the plasma gas outlet 12. When the electrode 30 is energized, a high-voltage discharge occurs between the electrode 30 (high-voltage electrode 30) and the protective shell 10 (grounded electrode 30). Due to the presence of the insulating ceramic tube in its discharge structure, the generation of local sparks or arcs can be effectively suppressed, thereby generating a large-area, high-energy-density, low-temperature non-equilibrium plasma. The plasma enters the gas flow channel 21 and is blown out by the process gas, which acts on the material surface to modify it.

[0050] In summary, this invention avoids the plasma instability and electrode erosion drawbacks of existing bare sliding arc electrodes 30 by placing the electrode 30 within the cavity of the ceramic insulating tube 20. Furthermore, the ceramic insulating tube 20's high melting point, good chemical stability, low thermal conductivity, excellent insulation, low coefficient of linear expansion, and good dimensional stability contribute to the high stability and low temperature of the wide-area atmospheric gun plasma equipment 100. Additionally, by providing an airflow channel 21 between the ceramic insulating tube 20 and the protective shell 10, and connecting the airflow channel 21 to the inlet connection block 40, process gas can enter the airflow channel 21 through the first inlet 43 and the first outlet 44. This allows the plasma generated by the electrode 30 to be carried out while simultaneously cooling the electrode 30 and the protective shell 10, resulting in a lower temperature of the blown-out plasma and facilitating subsequent operations.

[0051] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A wide atmosphere gun plasma apparatus, characterized by, The application relates to a plasma gas generator, comprising: a protective shell (10) having a receiving cavity (11) extending in a length direction and a plasma gas outlet (12) communicating with the receiving cavity (11); a ceramic insulation tube (20) arranged in the receiving cavity (11) and having an airflow channel (21) between the ceramic insulation tube (20) and the receiving cavity (11), the ceramic insulation tube (20) having a receiving cavity, two ends of the receiving cavity communicating with the airflow channel (21); an electrode (30) arranged in the receiving cavity and used for generating plasma gas; an air inlet connecting block (40) connected with the protective shell (10) and comprising a first air inlet (43) and a first air outlet (44) communicating with each other, the first air inlet (43) being used for entering process gas, and the first air outlet (44) communicating with the airflow channel (21).

2. The wide atmosphere gun plasma apparatus of claim 1, wherein, The protective shell (10) comprises a first side (13) and a second side (14) arranged oppositely, the plasma gas outlet is arranged on the first side (13), and the air inlet connecting block (40) is arranged on the second side (14) and comprises a butt joint side (41) facing the second side (14) and an air inlet side (42) connected with the butt joint side (41), the first air inlet (43) is arranged on the air inlet side (42), and the first air outlet (44) is arranged on the butt joint side (41).

3. The wide atmosphere gun plasma apparatus of claim 2, wherein, The second side (14) is provided with a second air inlet (15) connected with the first air outlet (44), and the second air inlet (15) communicates with the receiving cavity (11).

4. The wide atmosphere gun plasma apparatus of claim 1, wherein, The electrode (30) is provided with a third air inlet (34) used for entering compressed air and a third air outlet (35) communicating with the third air inlet (34).

5. The wide atmosphere gun plasma apparatus of claim 1, wherein, The air inlet connecting block (40) is provided with a plurality of airflow holes (45).

6. The wide atmosphere gun plasma apparatus of claim 1, wherein, The application further comprises a power supply, a feeding pole of the power supply being connected with the electrode (30), and a grounding pole of the power supply being connected with the protective shell (10).

7. The wide atmosphere gun plasma apparatus of claim 6, wherein, The power supply is a medium-frequency plasma power supply containing pulse modulation.

8. The wide atmosphere gun plasma apparatus of claim 1, wherein, The electrode (30) comprises a first electrode part (31) and a second electrode part (32), and the first electrode part (31) and the second electrode part (32) are connected through an electrode connecting sheet (33).

9. The wide atmosphere gun plasma apparatus of claim 1, wherein, The application further comprises at least one ceramic insulation sleeve (50) sleeved on the ceramic insulation tube (20), the ceramic insulation sleeve (50) abutting against the receiving cavity (11) of the protective shell (10) and being configured to form the airflow channel (21) between the ceramic insulation tube (20) and the receiving cavity (11).

10. The wide atmosphere gun plasma apparatus of claim 1, wherein, In the length direction, the length of the plasma gas outlet (12) is 40-120 mm.

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