Cleaning device for photoresist nozzle

Abstract

The utility model discloses a photoresist nozzle cleaning device, which relates to the technical field of photoresist nozzle cleaning, and comprises a first connecting seat, a cleaning seat, a second connecting seat, a plurality of positioning units, a sweeping unit and a cleaning unit, and the first connecting seat is in transmission connection with a first pushing seat. The cleaning device has the beneficial effects that by arranging the positioning unit and the cleaning unit, when the adjusting seat moves to drive the pushing frame to move, the pushing frame slides along the peripheral wall of the rotating shaft, and when the pushing frame compresses the extrusion spring, the adjacent cleaning rollers are compressed under the rebound of the extrusion spring, so that the cleaning efficiency is improved. The multiple extrusion springs are compressed at the same time, the compression degrees are the same, it is guaranteed that the distances between the multiple cleaning rollers are the same, the multiple cleaning rollers are evenly distributed above the photoresist spray heads by adjusting the pushing frames on the two sides to move, and the photoresist spray heads of different sizes can be conveniently cleaned.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of photoresist spray head cleaning, especially to a photoresist spray head cleaning device. BACKGROUND

[0002] The cleaning of the photoresist spray head is a very key step in the photoetching process, and its purpose is to remove the residual impurities around the spray head to ensure the uniform spraying of the photoresist and the high-quality photoetching effect

[0003] In order to clean the photoresist spray head more efficiently, a special cleaning device is usually used. These devices usually include a cleaning tank, a flushing pipe, a drain pipe and other components, which can realize the omnibearing cleaning of the spray head.

[0004] At present, when the photoresist spray head is cleaned, it needs to be soaked first and then flushed, and then the photoresist spray head is connected with the flushing pipe manually to clean the photoresist spray head through the flushing pipe. However, in the prior art, when the photoresist spray head is cleaned, the photoresist spray head needs to be placed manually, aligned and fixed, and then cleaned, and then connected with the flushing pipe manually, which needs to be inserted manually and the cleaning liquid needs to be contacted manually, which will cause potential harm to the human body due to long-term contact with the cleaning liquid.

[0005] Therefore, a photoresist spray head cleaning device is proposed to solve the above problems. CONTENT OF THE UTILITY MODEL

[0006] The utility model aims at solving the problem in the prior art that the photoresist spray head needs to be placed manually, aligned and fixed, and then cleaned, and then connected with the flushing pipe manually, which needs to be inserted manually and the cleaning liquid needs to be contacted manually, which will cause potential harm to the human body due to long-term contact with the cleaning liquid, and proposes a photoresist spray head cleaning device to solve the above problems.

[0007] In order to solve the problems in the prior art, the utility model adopts the following technical scheme:

[0008] A photoresist spray head cleaning device includes a first connecting seat, a cleaning seat, a second connecting seat, a plurality of positioning units, a cleaning unit and a cleaning unit, the first connecting seat is drivingly connected with a first push seat, the first push seat is connected with the output end of the cylinder, the plurality of positioning units are arranged on the first connecting seat, the cleaning unit is on the plurality of positioning units, the cleaning unit is on the cleaning seat,

[0009] The positioning unit comprises a contact seat slidably connected to the first connecting seat, a limiting spring is fixedly connected to the inner wall of the contact seat, and an adjusting seat is fixedly connected to the other end of the limiting spring;

[0010] The cleaning unit comprises a pushing frame fixedly connected to the first connecting seat, and a plurality of cleaning rollers are slidably connected to the inner wall of the pushing frame.

[0011] The cleaning unit comprises a plurality of cleaning nozzles slidably connected to the cleaning seat, a branch water pipe is fixedly connected to the outer wall of the cleaning nozzle, and the branch water pipe is in communication with the cleaning nozzle.

[0012] Preferably, the first connecting seat is provided with a soaking box, the soaking box is located directly below the first pushing seat, a second pushing seat is attached to the first pushing seat, and the second pushing seat is connected to the output end of the air cylinder.

[0013] Preferably, the contact seat is provided with bevels on both sides, a sliding rod is fixedly connected to the inner wall of the contact seat, and the sliding rod is slidably connected to the inner walls of the adjusting seat and the first connecting seat.

[0014] Preferably, the outer wall of the adjusting seat is connected to a driving mechanism, and the limiting spring fixedly connected to the adjusting seat is sleeved on the outer peripheral wall of the sliding rod.

[0015] Preferably, the top end face of the adjusting seat is fixedly connected to the pushing frame, the pushing frame is provided with a mounting bearing on one side, the mounting bearing is fixedly mounted on the first connecting seat, and the mounting bearing is rotatably connected to the rotating shaft.

[0016] Preferably, the outer peripheral wall of the rotating shaft is sleeved with a plurality of extrusion springs, the two ends of the extrusion springs located on both sides are fixedly connected to the pushing frame and the cleaning rollers respectively, and the two ends of the extrusion spring located in the middle are fixedly connected to the adjacent cleaning rollers respectively.

[0017] Preferably, the inner wall of the cleaning seat is slidably connected to a third pushing seat, the bottom end face of the third pushing seat is connected to an air cylinder, the air cylinder is fixedly mounted on the bottom end face of the cleaning seat, and the third pushing seat is located directly below the main water pipe and the plurality of cleaning nozzles.

[0018] Preferably, the outer peripheral wall of the main water pipe is slidably connected to a sliding seat, the outer wall of the sliding seat is rotatably connected to a rotating rod, the other end of the rotating rod is rotatably connected to a rotating seat, the rotating seat is fixedly connected to the corresponding cleaning nozzle, and the rotating seat drives the cleaning nozzle to be slidably connected to the inner wall of the cleaning seat.

[0019] Compared with the prior art, the utility model has the advantages that:

[0020] 1. In the utility model, through setting positioning unit and cleaning unit, when adjusting seat moves and drives push frame to move, push frame slides along the outer wall of rotating shaft, when push frame compresses extrusion spring, under the rebound of extrusion spring, adjacent cleaning roller is compressed, at the moment, cleaning roller moves and compresses extrusion spring on the other side, so that the extrusion spring pushes cleaning roller on the other side, carries out the same movement, pushes multiple cleaning rollers, at the moment, multiple extrusion springs are compressed simultaneously, and the compression degree is same, guarantees that the interval of multiple cleaning rollers is same, through adjusting the movement of push frame on both sides, makes multiple cleaning rollers distribute uniformly above photoresist spray head, convenient for cleaning photoresist spray head of different sizes.

[0021] 2. In the utility model, through setting cleaning unit, when photoresist spray head is continuously pushed to third push seat, at the moment, under the drive of air cylinder, third push seat slides along the inner wall of cleaning seat, at the moment, third push seat drives photoresist spray head to move upwards, so that photoresist spray head is connected with multiple cleaning spray heads, at the moment, through main water pipe water inlet, cleaning liquid enters cleaning spray head along water pipe, then cleaning spray head cleans photoresist spray head, avoids artificial contact cleaning, can clean photoresist spray head. BRIEF DESCRIPTION OF DRAWINGS

[0022] The drawings described herein are used to provide further understanding of the utility model, constitute a part of this application, the illustrative embodiment of the utility model and its explanation are used to explain the utility model, and do not constitute improper limitation to the utility model.

[0023] In the drawings:

[0024] Figure 1 It is the overall structure schematic diagram of the utility model;

[0025] Figure 2 It is the cleaning unit structure schematic diagram of the utility model;

[0026] Figure 3 It is the first connecting seat structure schematic diagram of the utility model;

[0027] Figure 4 It is the positioning unit structure schematic diagram of the utility model;

[0028] Figure 5 It is the cleaning unit structure schematic diagram of the utility model.

[0029] The figure serial number: 1, first connecting seat; 2, cleaning seat; 3, second connecting seat; 4, first push seat; 5, second push seat; 6, third push seat; 7, positioning unit; 701, contact seat; 702, sliding rod; 703, limiting spring; 704, adjusting seat; 8, cleaning unit; 801, mounting bearing; 802, push frame; 803, rotating shaft; 804, cleaning roller; 805, extrusion spring; 9, cleaning unit; 901, main water pipe; 902, from water pipe; 903, cleaning nozzle; 904, sliding seat; 905, rotating rod; 906, rotating seat. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0031] Embodiment: the embodiment provides a kind of cleaning device of photoresist nozzle, refer to Figures 1-5 Specifically, it includes: first connecting seat 1, cleaning seat 2, second connecting seat 3, multiple positioning units 7, cleaning unit 8 and cleaning unit 9, first connecting seat 1 is movably connected with first push seat 4, first push seat 4 is connected with the output end of cylinder, is pushed up by the driving cylinder connected with first push seat 4 to move first push seat 4, photoresist nozzle is moved upwards along with first push seat 4 at this time, photoresist nozzle is in the front of second push seat 5 at this time, cylinder is moved at this time with the second push seat 5 connected with second push seat 5, photoresist nozzle is moved at this time by second push seat 5 to push, so that photoresist nozzle is contacted with the bevel of contact seat 701;

[0032] Multiple positioning units 7 are arranged on first connecting seat 1, cleaning unit 8 is on multiple positioning units 7, cleaning unit 9 is on cleaning seat 2,

[0033] Positioning unit 7 includes contact seat 701 slidably connected on first connecting seat 1, limiting spring 703 is fixedly connected on the inner wall of contact seat 701, the other end of limiting spring 703 is fixedly connected with adjusting seat 704, when photoresist nozzle is contacted with the bevel of contact seat 701 and extruded, photoresist nozzle is moved at this time by two contact seats 701, contact seat 701 is slid on first connecting seat 1 at this time, contact seat 701 is slid along adjusting seat 704 and the inner wall of first connecting seat 1 at this time, contact seat 701 is moved to compress limiting spring 703 at this time, under the rebound of limiting spring 703, contact seat 701 is moved, so that two contact seats 701 limit photoresist nozzle, in the central position of first connecting seat 1, guaranteeing positioning, it is convenient to clean;

[0034] The cleaning unit 8 comprises a pushing frame 802 fixedly connected to the first connecting seat 1, a plurality of cleaning rollers 804 are slidably connected to the inner wall of the pushing frame 802, when the adjusting seat 704 moves to drive the pushing frame 802 to move, at this time, the pushing frame 802 slides along the outer peripheral wall of the rotating shaft 803, when the pushing frame 802 compresses the compression spring 805, the compression spring 805 rebounds to compress the adjacent cleaning roller 804, at this time, the cleaning roller 804 moves to compress the compression spring 805 on the other side, so that the compression spring 805 pushes the cleaning roller 804 on the other side to move, and the same movement is performed to push the plurality of cleaning rollers 804, at this time, the plurality of compression springs 805 are compressed at the same time, and the compression degree is the same, so that the spacing of the plurality of cleaning rollers 804 is the same, and the plurality of cleaning rollers 804 are uniformly distributed above the photoresist nozzle by adjusting the movement of the pushing frames 802 on both sides, so that the photoresist nozzle of different sizes can be conveniently cleaned;

[0035] The cleaning unit 9 comprises a plurality of cleaning nozzles 903 slidably connected to the cleaning seat 2, a water pipe 902 is fixedly connected to the outer wall of the cleaning nozzle 903, the water pipe 902 is in communication with the cleaning nozzle 903, when the photoresist nozzle is continuously pushed to the third pushing seat 6, at this time, the third pushing seat 6 slides along the inner wall of the cleaning seat 2 under the drive of the air cylinder, at this time, the third pushing seat 6 drives the photoresist nozzle to move upwards, so that the photoresist nozzle is in communication with the plurality of cleaning nozzles 903, at this time, water is supplied through the main water pipe 901, so that the cleaning liquid enters the cleaning nozzle 903 through the water pipe 902, and then the photoresist nozzle is cleaned through the cleaning nozzle 903, so that the photoresist nozzle can be cleaned without human contact.

[0036] The first connecting seat 1 is provided with a soaking box, the soaking box is located directly below the first pushing seat 4, the second pushing seat 5 is attached to the first pushing seat 4, and the second pushing seat 5 is connected to the output end of the air cylinder. First, the photoresist nozzle is placed in the soaking box for soaking, after soaking for a specified time, the first pushing seat 4 is pushed upwards by the driving air cylinder connected to the first pushing seat 4, at this time, the photoresist nozzle moves upwards with the first pushing seat 4, at this time, the photoresist nozzle is located in front of the second pushing seat 5, at this time, the air cylinder connected to the second pushing seat 5 drives the second pushing seat 5 to move, at this time, the second pushing seat 5 pushes the photoresist nozzle to move, so that the photoresist nozzle is in contact with the inclined edge of the contact seat 701.

[0037] The two sides of the contact seat 701 are provided with bevel edges, and the inner wall of the contact seat 701 is fixedly connected with a sliding rod 702 which is slidingly connected to the inner wall of the adjusting seat 704 and the first connecting seat 1. When the photoresist nozzle contacts and is pressed by the bevel edges of the contact seat 701, the photoresist nozzle pushes the two contact seats 701 to move, and the contact seat 701 slides on the first connecting seat 1. At this time, the contact seat 701 drives the sliding rod 702 to slide along the inner wall of the adjusting seat 704 and the first connecting seat 1. The movement of the contact seat 701 compresses the limiting spring 703, and under the rebound of the limiting spring 703, the contact seat 701 is pushed to move, so that the two contact seats 701 limit the photoresist nozzle to the center position of the first connecting seat 1.

[0038] The outer wall of the adjusting seat 704 is connected with a driving mechanism, and the limiting spring 703 fixedly connected with the adjusting seat 704 is sleeved on the outer peripheral wall of the sliding rod 702. When it is necessary to limit photoresist nozzles of different sizes, the adjusting seat 704 is moved by the driving mechanism, and under the movement of the adjusting seat 704, the adjusting seat 704 pushes the limiting spring 703 to move, so that the limiting spring 703 pushes the contact seat 701 to move, so that the contact seat 701 contacts and presses the photoresist nozzle. Under the reaction force of the contact seat 701, the limiting spring 703 is compressed, and under the rebound of the limiting spring 703, the contact seat 701 clamps and limits the photoresist nozzle, so as to ensure that the cleaning unit 8 cleans the photoresist nozzle.

[0039] The top end face of the adjusting seat 704 is fixedly connected with a pushing frame 802, one side of the pushing frame 802 is provided with a mounting bearing 801 which is fixedly mounted on the first connecting seat 1, the mounting bearing 801 is rotatably connected with a rotating shaft 803, the output end of the rotating shaft 803 is connected with a driving mechanism, a plurality of rotating shafts 803 are connected with a transmission mechanism, the plurality of rotating shafts 803 are driven to rotate simultaneously by the transmission mechanism, and under the rotation of the rotating shaft 803, the cleaning roller 804 rotates, and under the rotation of the cleaning roller 804, the cleaning roller 804 cleans the photoresist nozzle.

[0040] The outer peripheral wall of the rotating shaft 803 is sleeved with a plurality of extrusion springs 805, the two ends of the extrusion springs 805 on both sides are fixedly connected with the push frame 802 and the cleaning roller 804 respectively, and the two ends of the extrusion springs 805 in the middle are fixedly connected with the adjacent cleaning rollers 804 respectively. When the adjusting seat 704 moves to drive the push frame 802 to move, the push frame 802 slides along the outer peripheral wall of the rotating shaft 803. When the push frame 802 compresses the extrusion springs 805, the adjacent cleaning rollers 804 are compressed under the rebound of the extrusion springs 805. At this time, the cleaning roller 804 moves to compress the extrusion spring 805 on the other side, so that the extrusion spring 805 on the other side pushes the cleaning roller 804 on the other side to move, and the same movement is performed on the plurality of cleaning rollers 804. At this time, the plurality of extrusion springs 805 are compressed at the same time, and the compression degree is the same, so that the spacing of the plurality of cleaning rollers 804 is the same. By adjusting the movement of the push frame 802 on both sides, the plurality of cleaning rollers 804 are uniformly distributed above the photoresist nozzle, which is convenient for cleaning photoresist nozzles of different sizes.

[0041] The inner wall of the cleaning seat 2 is slidably connected with a third push seat 6, the bottom end face of the third push seat 6 is connected with a gas cylinder, and the gas cylinder is fixedly installed on the bottom end face of the cleaning seat 2. The third push seat 6 is located below the main water pipe 901 and the plurality of cleaning nozzles 903. When the photoresist nozzle is continuously pushed onto the third push seat 6, the third push seat 6 is driven to slide along the inner wall of the cleaning seat 2 under the driving of the gas cylinder. At this time, the third push seat 6 drives the photoresist nozzle to move upward, so that the photoresist nozzle is connected in communication with the plurality of cleaning nozzles 903. At this time, water is supplied through the main water pipe 901, so that the cleaning liquid enters the cleaning nozzle 903 from the water pipe 902, and then the photoresist nozzle is cleaned through the cleaning nozzle 903. The photoresist nozzle can be cleaned without human contact.

[0042] The outer peripheral wall of the main water pipe 901 is slidably connected with a sliding seat 904, the outer wall of the sliding seat 904 is rotatably connected with a rotating rod 905, the other end of the rotating rod 905 is rotatably connected with a rotating seat 906, the rotating seat 906 is fixedly connected with the corresponding cleaning nozzle 903, the rotating seat 906 drives the cleaning nozzle 903 to be slidably connected on the inner wall of the cleaning seat 2, when it is needed to position and clean the photoresist nozzles of different sizes, the sliding seat 904 is slid along the main water pipe 901 by pulling, under the movement of the sliding seat 904, the sliding seat 904 drives the rotating rods 905 on both sides to rotate, under the rotation of the rotating rods 905, the rotating seat 906 is pulled to drive the cleaning nozzle 903 to slide on the cleaning unit 9, so that the two cleaning nozzles 903 are symmetrically distributed on both sides of the main water pipe 901, when the two cleaning nozzles 903 correspond to the inlets and outlets on the photoresist nozzle, the photoresist nozzle can be conveniently inserted with the cleaning nozzle 903 for cleaning, when the cleaning is completed, the photoresist nozzle is pushed onto the second connecting seat 3, and the photoresist nozzle is drained on the second connecting seat 3.

[0043] Specifically, the working principle and operation method of the utility model are as follows: first, the photoresist nozzle is placed in the soaking box for soaking, when soaking for a specified time, the first pushing seat 4 is pushed upward by the driving cylinder connected with the first pushing seat 4, at this time, the photoresist nozzle moves upward with the first pushing seat 4, at this time, the photoresist nozzle is in front of the second pushing seat 5, at this time, the second pushing seat 5 is moved by the cylinder connected with the second pushing seat 5, at this time, the second pushing seat 5 pushes the photoresist nozzle to move, so that the photoresist nozzle contacts the inclined edge of the contact seat 701;

[0044] When the photoresist nozzle contacts and extrudes the inclined edge of the contact seat 701, at this time, the photoresist nozzle pushes the two contact seats 701 to move, at this time, the contact seat 701 slides on the first connecting seat 1, at this time, the contact seat 701 drives the sliding rod 702 to slide along the inner wall of the adjusting seat 704 and the first connecting seat 1, at this time, the contact seat 701 moves to compress the limiting spring 703, under the rebound of the limiting spring 703, the contact seat 701 is pushed to move, so that the two contact seats 701 limit the photoresist nozzle, and the photoresist nozzle is located at the center position of the first connecting seat 1;

[0045] When it is necessary to limit the photoresist nozzle of different sizes, the adjusting seat 704 is moved by the driving mechanism at this time, and the adjusting seat 704 moves the limiting spring 703 under the movement of the adjusting seat 704, so that the limiting spring 703 moves the contact seat 701, so that the contact seat 701 contacts and extrudes the photoresist nozzle, and under the reaction force of the contact seat 701, the limiting spring 703 is compressed, and under the rebound of the limiting spring 703, the contact seat 701 clamps the photoresist nozzle to ensure that the cleaning unit 8 cleans the photoresist nozzle;

[0046] The output end of the rotating shaft 803 is connected with a driving mechanism, and a transmission mechanism is connected between the plurality of rotating shafts 803. The plurality of rotating shafts 803 are driven to rotate simultaneously by the transmission mechanism, and the cleaning roller 804 rotates under the rotation of the rotating shaft 803, and the cleaning roller 804 cleans the photoresist nozzle under the rotation of the cleaning roller 804;

[0047] When the adjusting seat 704 moves to drive the push frame 802 to move, the push frame 802 slides along the outer wall of the rotating shaft 803 at this time, and the push frame 802 compresses the compression spring 805, and the adjacent cleaning roller 804 is compressed under the rebound of the compression spring 805. At this time, the cleaning roller 804 moves to compress the other side of the compression spring 805, so that the compression spring 805 pushes the other side of the cleaning roller 804;

[0048] The same movement is performed to push the plurality of cleaning rollers 804, and the plurality of compression springs 805 are compressed at the same time, and the compression degree is the same, so that the spacing of the plurality of cleaning rollers 804 is the same. By adjusting the movement of the push frame 802 on both sides, the plurality of cleaning rollers 804 are uniformly distributed above the photoresist nozzle, which facilitates cleaning of photoresist nozzles of different sizes;

[0049] When the photoresist nozzle is continuously pushed to the third push seat 6, the third push seat 6 slides along the inner wall of the cleaning seat 2 under the driving of the air cylinder at this time, and the third push seat 6 drives the photoresist nozzle to move upward, so that the photoresist nozzle is connected in communication with the plurality of cleaning nozzles 903. At this time, water enters the cleaning nozzle 903 through the main water pipe 901, and then the cleaning liquid enters the cleaning nozzle 903 through the water pipe 902, and then the cleaning nozzle 903 cleans the photoresist nozzle, avoiding human contact with the cleaning, that is, the photoresist nozzle can be cleaned;

[0050] When positioning and cleaning photoresist nozzles of different sizes are needed, the sliding seat 904 is pulled to slide along the main water pipe 901. Under the movement of the sliding seat 904, the sliding seat 904 drives the two rotating rods 905 to rotate. Under the rotation of the rotating rods 905, the rotating seat 906 is pulled to drive the cleaning nozzles 903 to slide on the cleaning unit 9, so that the two cleaning nozzles 903 are symmetrically distributed on the two sides of the main water pipe 901. When the two cleaning nozzles 903 correspond to the inlets and outlets on the photoresist nozzles, the photoresist nozzles can be conveniently inserted with the cleaning nozzles 903 for cleaning. When the cleaning is completed, the photoresist nozzles are pushed onto the second connecting seat 3, and the photoresist nozzles are drained on the second connecting seat 3.

[0051] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art, according to the technical scheme and the inventive concept of the present application, can make equivalent replacement or change within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A photoresist nozzle cleaning device, comprising a first connecting seat (1), a cleaning seat (2), a second connecting seat (3), a plurality of positioning units (7), a cleaning unit (8) and a cleaning unit (9), a first push seat (4) is drivenly connected to the first connecting seat (1), the first push seat (4) is connected with the output end of a cylinder, the plurality of positioning units (7) are arranged on the first connecting seat (1), the cleaning unit (8) is on the plurality of positioning units (7), and the cleaning unit (9) is on the cleaning seat (2), characterized by: the positioning unit (7) comprises a contact seat (701) slidably connected to the first connecting seat (1), a limiting spring (703) is fixedly connected to the inner wall of the contact seat (701), and the other end of the limiting spring (703) is fixedly connected with an adjusting seat (704); the cleaning unit (8) comprises a push frame (802) fixedly connected to the first connecting seat (1), and a plurality of cleaning rollers (804) are slidably connected to the inner wall of the push frame (802); the cleaning unit (9) comprises a plurality of cleaning nozzles (903) slidably connected to the cleaning seat (2), a branch water pipe (902) is fixedly connected to the outer wall of the cleaning nozzle (903), and the branch water pipe (902) is in communication with the cleaning nozzle (903).

2. The cleaning device for a photoresist showerhead of claim 1, wherein: The first connecting seat (1) is provided with a soaking box, the soaking box is directly below the first push seat (4), a second push seat (5) is attached to the first push seat (4), and the second push seat (5) is connected with the output end of a cylinder.

3. The cleaning device for a photoresist showerhead of claim 1, wherein: Both sides of the contact seat (701) are provided with bevels, a sliding rod (702) is fixedly connected to the inner wall of the contact seat (701), and the sliding rod (702) is slidably connected to the inner walls of the adjusting seat (704) and the first connecting seat (1).

4. The cleaning device for a photoresist showerhead of claim 3, wherein: A driving mechanism is connected to the outer wall of the adjusting seat (704), and the limiting spring (703) fixedly connected with the adjusting seat (704) is sleeved on the outer peripheral wall of the sliding rod (702).

5. The cleaning apparatus for a photoresist showerhead of claim 4, wherein: The top end face of the adjusting seat (704) is fixedly connected with the push frame (802), one side of the push frame (802) is provided with a mounting bearing (801), the mounting bearing (801) is fixedly mounted on the first connecting seat (1), and the mounting bearing (801) is rotatably connected with a rotating shaft (803).

6. The cleaning apparatus for a photoresist showerhead of claim 5, wherein: A plurality of extrusion springs (805) are sleeved on the outer peripheral wall of the rotating shaft (803), the two ends of the extrusion springs (805) on both sides are fixedly connected with the push frame (802) and the cleaning roller (804) respectively, and the two ends of the extrusion spring (805) in the middle are fixedly connected with adjacent cleaning rollers (804) respectively.

7. The cleaning device for a photoresist showerhead of claim 1, wherein: A third push seat (6) is slidably connected to the inner wall of the cleaning seat (2), a cylinder is connected to the bottom end face of the third push seat (6), and the cylinder is fixedly mounted on the bottom end face of the cleaning seat (2).

8. The cleaning apparatus for a photoresist showerhead of claim 7, wherein: The outer peripheral wall of the main water pipe (901) is slidably connected with a sliding seat (904), the outer wall of the sliding seat (904) is rotatably connected with a rotating rod (905), the other end of the rotating rod (905) is rotatably connected with a rotating seat (906), the rotating seat (906) is fixedly connected with a corresponding cleaning nozzle (903), and the rotating seat (906) drives the cleaning nozzle (903) to be slidably connected to the inner wall of the cleaning seat (2).

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