Single-crystal round bar fixing chuck

Abstract

The utility model relates to the technical field of single-crystal round bar fixing equipment, in particular to a single-crystal round bar fixing chuck which comprises an upper chuck, a lower chuck, a plurality of connecting assemblies and a self-adaption assembly, the upper chuck and the lower chuck are connected through the connecting assemblies, and the self-adaption assembly enables the bottom face of the upper chuck to be attached to the top face of a single-crystal round bar. An upper movable cavity is formed in the upper chuck, a lower movable cavity is formed in the lower chuck, the connecting assembly comprises a connecting bolt, a floating seat and a limiting seat, the floating seat is located in the upper movable cavity, the floating seat can move, deflect and rotate up and down in the upper movable cavity, the floating seat is in threaded connection with the connecting bolt, and the top face of the floating seat protrudes to form a positioning block; and the top surface of the upper movable cavity is sunken to form a positioning groove matched with the positioning block, and through the floating design of the connecting assembly and the adjustment of the self-adaptive assembly, the lower chuck is attached to the bottom surface of the single-crystal rod, and meanwhile, the bottom surface of the upper chuck is attached to the top surface, with an inclined angle, of the single-crystal rod.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal wafer rod fixing equipment, and in particular to a single crystal wafer rod fixing chuck. Background Technology

[0002] Single-crystal ingot fixing chucks are mainly used to fix and support single-crystal ingots during processing, ensuring their stability and accuracy in various operations. The fixing chuck facilitates cutting, grinding, polishing, and other processes, improving processing efficiency and product quality. During the manufacturing process of single-crystal ingots, cutting and chamfering are usually required to obtain the desired shape and size, resulting in a certain tilt angle on the end face of the single-crystal ingot. In existing fixing chucks, the upper and lower chucks are in a parallel state when clamping the single-crystal ingot. Therefore, one of the points abutting the higher part of the single-crystal ingot not only fails to secure it tightly but also damages it. Utility Model Content

[0003] The technical problem to be solved by this utility model is: in order to overcome the problem that in the prior art, one of the higher points of contact with the single crystal rod is unable to secure the single crystal rod, and will cause damage to the single crystal rod, a single crystal rod fixing chuck is provided.

[0004] The technical solution adopted by this utility model to solve its technical problem is: a single crystal rod fixing chuck, including an upper chuck, a lower chuck, several connecting components and an adaptive component. The upper chuck and the lower chuck are connected by the connecting components, and the adaptive component makes the bottom surface of the upper chuck fit against the top surface of the single crystal rod.

[0005] The upper chuck has an upper movable cavity, and the lower chuck has a lower movable cavity. The connecting assembly includes a connecting bolt, a floating seat, and a limiting seat. The floating seat is located in the upper movable cavity and can move up and down, deflect, and rotate within the upper movable cavity. The floating seat and the connecting bolt are threaded together. A positioning block is formed by the protrusion of the top surface of the floating seat, and a positioning groove matching the positioning block is formed by the recess of the top surface of the upper movable cavity. The limiting seat is slidably arranged in the lower movable cavity and is fixedly connected to the bottom of the connecting bolt. When the positioning block is fitted into the positioning groove and the connecting bolt rotates, the floating seat and the connecting bolt can rotate relative to each other. Through the floating design of the connecting assembly and the adjustment of the adaptive assembly, the lower chuck is in contact with the bottom surface of the single crystal rod, while the bottom surface of the upper chuck is in contact with the top surface of the single crystal rod with an inclined angle, ensuring that the single crystal rod is firmly fixed.

[0006] To address the issue of the floating seat interfering with the deflection of the upper chuck, a connecting assembly is further included, comprising an abutment plate and a first elastic element. Both the abutment plate and the first elastic element are located within the upper movable cavity and below the floating seat. One end of the first elastic element abuts against the upper chuck, and the other end abuts against the abutment plate.

[0007] To address the issue of the positioning block's inconvenience in entering the positioning slot, the design further includes a guide surface on the top surface of the positioning block that tapers inward from bottom to top.

[0008] To address the issue of how to arrange the adaptive components, the adaptive components further include an adjusting bolt, an adjusting nut, and a second elastic element. The upper chuck has a through hole for the adjusting bolt to pass through, the shank of the adjusting bolt passes through the through hole, the adjusting nut is threaded onto the shank of the adjusting bolt, and the adjusting nut is located above the upper chuck, with its head located between the upper and lower chucks. The second elastic element is sleeved on the adjusting bolt, with one end abutting against the head of the adjusting bolt and the other end abutting against the upper chuck.

[0009] Furthermore, the head of the connecting bolt is located above the upper chuck.

[0010] To address the issue of adaptive components, the positioning groove is further included as an arcuate groove extending circumferentially along the active cavity.

[0011] It further includes four connecting components and six adaptive components, with the connecting components and adaptive components arranged at intervals on the same circumference.

[0012] The beneficial effects of this utility model are: the single crystal wafer rod fixing chuck provided by this utility model, through the floating design of the connecting components and the adjustment of the adaptive components, makes the lower chuck fit against the bottom surface of the single crystal wafer rod, while also making the bottom surface of the upper chuck fit against the top surface of the single crystal wafer rod with an inclined angle, thus ensuring that the single crystal wafer rod is firmly fixed. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a front view structural diagram of the present invention;

[0015] Figure 2 This is a top view of the structure of this utility model;

[0016] Figure 3 This is a utility model Figure 1 Schematic diagram of the structure with partial cross-section

[0017] Figure 4 This is a utility model Figure 3 Enlarged structural diagram at point A;

[0018] Figure 5 This is a utility model Figure 3 A magnified structural diagram at point B in the middle.

[0019] In the diagram: 1. Upper chuck, 11. Upper movable cavity, 12. Positioning groove, 13. Through hole, 2. Lower chuck, 21. Lower movable cavity, 3. Connecting assembly, 31. Connecting bolt, 32. Floating seat, 321. Positioning block, 33. Limiting seat, 34. Abutment plate, 35. First elastic element, 4. Adaptive assembly, 41. Adjusting bolt, 42. Adjusting nut, 43. Second elastic element. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0021] like Figure 1 This is a schematic diagram of the structure of the present invention. A single crystal rod fixing chuck includes an upper chuck 1, a lower chuck 2, several connecting components 3 and an adaptive component 4. The upper chuck 1 and the lower chuck 2 are connected by the connecting components 3, and the adaptive component 4 makes the bottom surface of the upper chuck 1 fit against the top surface of the single crystal rod.

[0022] like Figure 2 , 3 As shown in Figure 4, the upper chuck 1 has an upper movable cavity 11, and the lower chuck 2 has a lower movable cavity 21. The connecting assembly 3 includes a connecting bolt 31, a floating seat 32, and a limiting seat 33. The head of the connecting bolt 31 is located above the upper chuck 1. The floating seat 32 is located inside the upper movable cavity 11, and the floating seat 32 can move up and down, deflect, and rotate within the upper movable cavity 11. The floating seat 32 and the connecting bolt 31 are threadedly connected. A positioning block 321 protrudes from the top surface of the floating seat 32, and a positioning block 321 is formed in the recessed top surface of the upper movable cavity 11. The positioning groove 12 that matches 321 and the limiting seat 33 are slidably arranged in the lower movable cavity 21. The bottom of the limiting seat 33 and the connecting bolt 31 are fixedly connected. When the positioning block 321 is fitted into the positioning groove 12 and the connecting bolt 31 rotates, the floating seat 32 and the connecting bolt 31 can rotate relative to each other. Through the floating design of the connecting component 3 and the adjustment of the adaptive component 4, the lower chuck 2 is in contact with the bottom surface of the single crystal rod, and the bottom surface of the upper chuck 1 is in contact with the top surface of the single crystal rod with an inclined angle, so as to ensure that the single crystal rod is firmly fixed.

[0023] like Figure 2 , 3As shown in Figure 4, the connecting assembly 3 includes an abutment plate 34 and a first elastic element 35. The first elastic element 35 is a spring. Both the abutment plate 34 and the first elastic element 35 are located in the upper movable cavity 11. Both the abutment plate 34 and the first elastic element 35 are located below the floating seat 32. One end of the first elastic element 35 abuts against the upper chuck 1, and the other end abuts against the abutment plate 34, so that the floating seat 32 is located in the middle of the movable cavity 11, which facilitates the upper chuck 1 to deflect and tilt and fit against the top surface of the single crystal rod.

[0024] like Figure 2 , 3 As shown in Figure 4, the top surface of the positioning block 321 has an inwardly tapering guide surface that facilitates the positioning block 321 entering the positioning groove 12. The positioning groove 12 is an arc-shaped groove extending circumferentially along the movable cavity.

[0025] like Figure 2 , 3 As shown in Figure 4, the adaptive component 4 includes an adjusting bolt 41, an adjusting nut 42, and a second elastic element 43. The second elastic element 43 is a spring. The upper chuck 1 has a through hole 13 for the adjusting bolt 41 to pass through. The rod of the adjusting bolt 41 passes through the through hole 13. The adjusting nut 42 is threaded onto the rod of the adjusting bolt 41 and is located above the upper chuck 1. The head of the adjusting nut 42 is located between the upper chuck 1 and the lower chuck 2. The second elastic element 43 is sleeved on the adjusting bolt 41. One end of the second elastic element 43 abuts against the head of the adjusting bolt 41, and the other end abuts against the upper chuck 1. By rotating the adjusting nut 42, the distance between it and the upper chuck 1 is controlled, thereby controlling the force with which the upper chuck 1 abuts against the fixed single crystal rod.

[0026] There are four connecting components 3 and six adaptive components 4. The connecting components 3 and the adaptive components 4 are arranged at intervals on the same circumference. The multi-point adjustment makes the upper chuck 1 fit the single crystal rod better.

[0027] In use, the single crystal rod is placed between the upper chuck 1 and the lower chuck 2. During placement, the adaptive component 4 can be moved to avoid the single crystal rod. After placement, the connecting bolt 31 is pulled to make the positioning block embed into the positioning groove 12, restricting the circumferential rotation of the floating seat 32. Rotating the connecting bolt 31 allows the floating seat 32 to move along the axial direction of the connecting bolt 31 to approach the single crystal rod until it touches the single crystal rod. Under the elastic force of the second elastic element 43, the upper chuck 1 adheres to the top surface of the single crystal rod.

[0028] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A single-crystal wafer chuck, characterized in that, It includes an upper chuck (1), a lower chuck (2), several connecting components (3) and an adaptive component (4). The upper chuck (1) and the lower chuck (2) are connected by the connecting components (3). The adaptive component (4) makes the bottom surface of the upper chuck (1) fit against the top surface of the single crystal rod. The upper chuck (1) has an upper movable cavity (11), and the lower chuck (2) has a lower movable cavity (21). The connecting assembly (3) includes a connecting bolt (31), a floating seat (32), and a limiting seat (33). The floating seat (32) is located in the upper movable cavity (11), and the floating seat (32) can move up and down, deflect, and rotate within the upper movable cavity (11). The floating seat (32) and the connecting bolt (31) are threaded together. 2) A positioning block (321) is formed by protrusion on the top surface, and a positioning groove (12) matching the positioning block (321) is formed by recess on the top surface of the upper movable cavity (11). The limiting seat (33) is slidably arranged in the lower movable cavity (21), and the bottom of the limiting seat (33) and the connecting bolt (31) are fixedly connected. When the positioning block (321) is fitted into the positioning groove (12) and the connecting bolt (31) rotates, the floating seat (32) and the connecting bolt (31) can rotate relative to each other.

2. The single crystal wafer chuck as described in claim 1, characterized in that: The connecting assembly (3) includes an abutment plate (34) and a first elastic element (35). The abutment plate (34) and the first elastic element (35) are both located in the upper movable cavity (11). The abutment plate (34) and the first elastic element (35) are both located below the floating seat (32). One end of the first elastic element (35) abuts against the upper chuck (1), and the other end abuts against the abutment plate (34).

3. The single crystal wafer chuck as described in claim 1, characterized in that: The top surface of the positioning block (321) has a guide surface that tapers inward from bottom to top.

4. The single crystal wafer chuck as described in claim 1, characterized in that: The adaptive component (4) includes an adjusting bolt (41), an adjusting nut (42), and a second elastic element (43). The upper chuck (1) has a through hole (13) for the adjusting bolt (41) to pass through. The shank of the adjusting bolt (41) passes through the through hole (13). The adjusting nut (42) is threaded onto the shank of the adjusting bolt (41) and is located above the upper chuck (1). The head of the adjusting nut (42) is located between the upper chuck (1) and the lower chuck (2). The second elastic element (43) is sleeved on the adjusting bolt (41). One end of the second elastic element (43) abuts against the head of the adjusting bolt (41), and the other end abuts against the upper chuck (1).

5. A single-crystal wafer fixing chuck as described in claim 1, characterized in that: The head of the connecting bolt (31) is located above the upper chuck (1).

6. The single crystal wafer chuck as described in claim 1, characterized in that: The positioning groove (12) is an arc-shaped groove that extends circumferentially along the active cavity.

7. A single crystal wafer chuck as described in claim 1, characterized in that: Four connecting components (3) are arranged, and six adaptive components (4) are arranged. The connecting components (3) and the adaptive components (4) are arranged at intervals on the same circumference.

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