Rotatable bearing disc for semiconductor wafer storage

Abstract

The utility model discloses a rotatable bearing disc for semiconductor wafer storage, which relates to the technical field of semiconductor wafer storage equipment and comprises a storage box, a positioning rod is mounted on the side wall of the storage box, a rotating rod is mounted on the outer wall of the positioning rod, a limiting sleeve is mounted on the outer wall of the rotating rod, and a fixing plate is mounted on the outer wall of the limiting sleeve. Through the arrangement of the positioning rod, the rotating rod, the limiting sleeve, the fixing plate and the bearing disc body, when semiconductor wafers need to be stored, after the rotating rod is lifted upwards to a proper position along the positioning rod, the bearing disc body is used in cooperation with the limiting sleeve through the rotating rod, and the bearing disc body is rotated to be in a horizontal state; the semiconductor wafers are placed in the bearing disc body, the bearing disc body is rotated to be in the vertical state and then placed in the storage box, the bearing disc body can be rotationally stored, the space utilization rate is greatly increased, and more semiconductor wafers can be stored in the limited space.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor wafer storage device technical field, concretely is a kind of semiconductor wafer storage rotatable bearing disc. BACKGROUND

[0002] As the core basic material of semiconductor manufacturing, the storage and handling process of semiconductor wafer is crucial to ensure the quality and performance of wafer, with the rapid development of semiconductor industry, the production efficiency, precision and yield of semiconductor wafer are increasingly improved, which makes the design and performance of semiconductor wafer storage bearing disc become a key link, but the existing semiconductor wafer bearing disc, especially in the process of transportation or storage, dust may enter, resulting in its photoetch process deviation or reducing its electrical performance, at the same time, the existing bearing disc cannot be rotated and stored, resulting in waste of use space, to solve the above problems, therefore, a kind of semiconductor wafer storage rotatable bearing disc is needed.

[0003] The existing semiconductor wafer storage bearing disc has the problems of poor sealing effect and inability to rotate and store the bearing disc during operation, therefore, a semiconductor wafer storage rotatable bearing disc is urgently needed. UTILITY MODEL CONTENTS

[0004] Therefore, the utility model aims at providing a semiconductor wafer storage rotatable bearing disc to solve the problems of poor sealing effect and inability to rotate and store the bearing disc during use of the existing semiconductor wafer storage bearing disc.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a semiconductor wafer storage rotatable bearing disc, comprising a storage box, a positioning rod is installed on the side wall of the storage box, a rotating rod is installed on the outer wall of the positioning rod, a limiting sleeve is installed on the outer wall of the rotating rod, a fixed plate is installed on the outer wall of the limiting sleeve, a sliding groove is formed in the top of the fixed plate, a bearing disc body is installed on the side wall of the fixed plate, a containing groove is formed in the inside of the bearing disc body, a sealing groove is formed in the top of the bearing disc body, a clamping rod is installed on the side wall of the bearing disc body, a sealing cover plate is installed on the outer wall of the clamping rod, a sealing strip is installed at the bottom of the sealing cover plate, a limiting top rod is installed on the inner wall of the bearing disc body, and a limiting spring is installed on the outer wall of the limiting top rod.

[0006] Preferably, the positioning rods are arranged at equal intervals around the central axis of the storage box and are slidingly connected with the rotating rods.

[0007] Preferably, the bearing disc body and the rotating rod constitute a rotating structure through the limiting sleeve, and the limiting sleeve is symmetrically arranged around the central axis of the bearing disc body.

[0008] Preferably, the sliding slot is movably connected with the clamping rod, and the clamping rod is clamped with the bearing disc body.

[0009] Preferably, the sealing groove is tightly attached with the sealing strip, and the limiting top rod forms a telescopic structure with the bearing disc body through the limiting spring.

[0010] Preferably, the limiting top rod is movably connected with the bearing disc body, and the limiting top rod is clamped with the sealing cover plate.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] 1、The utility model discloses a bearing disc body is provided with the limiting top rod, and the limiting top rod is movably connected with the bearing disc body, and the limiting top rod is clamped with the sealing cover plate.

[0013] 2、The utility model discloses a bearing disc body is provided with the limiting top rod, and the limiting top rod is movably connected with the bearing disc body, and the limiting top rod is clamped with the sealing cover plate. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the structure schematic diagram of the utility model's front appearance.

[0015] Figure 2 It is the structure schematic diagram of the utility model's internal section.

[0016] Figure 3 It is the structure schematic diagram of the utility model's rotating lever surrounding assembly split display.

[0017] Figure 4 It is the structure schematic diagram of the utility model's bearing disc body internal assembly split display.

[0018] In the figure: 1, storage box; 2, positioning rod; 3, rotating rod; 4, limiting sleeve; 5, fixed plate; 6, sliding groove; 7, bearing disc main body; 8, containing groove; 9, sealing groove; 10, clamping rod; 11, sealing cover plate; 12, sealing strip; 13, limiting top rod; 14, limiting spring. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are used only for explaining the utility model, and cannot be understood as limiting the utility model.

[0020] The embodiments will be described below according to the overall structure of the utility model.

[0021] Please refer to Figures 1-4 A rotatable bearing disc for semiconductor wafer storage includes a storage box 1, the side wall of the storage box 1 is provided with a positioning rod 2, the outer wall of the positioning rod 2 is provided with a rotating rod 3, the outer wall of the rotating rod 3 is provided with a limiting sleeve 4, the outer wall of the limiting sleeve 4 is provided with a fixed plate 5, the top of the fixed plate 5 is provided with a sliding groove 6, the side wall of the fixed plate 5 is provided with a bearing disc main body 7, the positioning rod 2 is arranged at equal intervals around the central axis of the storage box 1, and the positioning rod 2 is slidably connected with the rotating rod 3, the bearing disc main body 7 forms a rotating structure with the rotating rod 3 through the limiting sleeve 4, and the limiting sleeve 4 is symmetrically arranged around the central axis of the bearing disc main body 7. When the semiconductor wafer needs to be stored, the rotating rod 3 is pulled upwards along the positioning rod 2 to a suitable position, then the bearing disc main body 7 is used in cooperation with the rotating rod 3 and the limiting sleeve 4, the bearing disc main body 7 is rotated to a horizontal state, then the semiconductor wafer is placed in the bearing disc main body 7, and then the bearing disc main body 7 is rotated to a vertical state and placed in the storage box 1. The bearing disc main body 7 can be rotatably stored, which greatly improves the space utilization, and more semiconductor wafers can be stored in a limited space.

[0022] Please refer to Figures 1-4The utility model provides a kind of semiconductor wafer storage rotatable bearing disc, the inside of bearing disc main body 7 is provided with containing groove 8, the top of bearing disc main body 7 is provided with sealing groove 9, the side wall of bearing disc main body 7 is equipped with clamping rod 10, the outer wall of clamping rod 10 is equipped with sealing cover plate 11, the bottom of sealing cover plate 11 is equipped with sealing strip 12, the inner wall of bearing disc main body 7 is equipped with limiting top rod 13, the outer wall of limiting top rod 13 is equipped with limiting spring 14, sliding slot 6 is movably connected with clamping rod 10, and clamping rod 10 is hingedly connected with bearing disc main body 7, sealing groove 9 is tightly attached with sealing strip 12, limiting top rod 13 is telescopic structure with bearing disc main body 7 by limiting spring 14, limiting top rod 13 is movably connected with bearing disc main body 7, and limiting top rod 13 is hingedly connected with sealing cover plate 11, by being provided with fixed plate 5, sliding slot 6, bearing disc main body 7, containing groove 8, sealing groove 9, clamping rod 10, sealing cover plate 11, sealing strip 12, limiting top rod 13 and limiting spring 14, limiting top rod 13 is pressed down, then sealing cover plate 11 is slid open with bearing disc main body 7 by clamping rod 10, then semiconductor wafer is placed into containing groove 8, and sealing cover plate 11 is closed, limiting top rod 13 is ejected upward by the elastic force of limiting spring 14 at this time, so that limiting top rod 13 is fixed with sealing cover plate 11, avoid that semiconductor wafer falls due to the loosening of sealing cover plate 11, and the cooperation of sealing groove 9 and sealing strip 12 increases the airtightness in bearing disc main body 7, to avoid dust from entering inside to cause influence to semiconductor wafer.

[0023] Working principle: in use, first, the device is moved to the required position, then when semiconductor wafer needs to be stored, the bearing disc main body 7 is rotated to the horizontal state by the cooperation of the rotating rod 3 and the limiting sleeve 4, the limiting top rod 13 is pressed down, then the sealing cover plate 11 is slid open with the bearing disc main body 7 by the clamping rod 10, then the semiconductor wafer is placed into the containing groove 8, and the sealing cover plate 11 is closed, the limiting top rod 13 is ejected upward by the elastic force of the limiting spring 14 at this time, so that the limiting top rod 13 is fixed with the sealing cover plate 11, avoiding the semiconductor wafer from falling due to the loosening of the sealing cover plate 11, and the cooperation of the sealing groove 9 and the sealing strip 12 increases the airtightness in the bearing disc main body 7, avoiding dust from entering inside to cause influence to the semiconductor wafer, finally, the bearing disc main body 7 is rotated to the vertical state and placed into the storage box 1, and the bearing disc main body 7 can be stored rotatably, greatly improving the space utilization, more semiconductor wafers can be stored in limited space, so the use process of the device is completed.

[0024] Although the utility model has been explained in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacement to part of the technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A rotatable carrier disk for semiconductor wafer storage comprising a housing (1), characterized in that: The side wall of the storage box (1) is provided with a positioning rod (2), the outer wall of the positioning rod (2) is provided with a rotating rod (3), the outer wall of the rotating rod (3) is provided with a limiting sleeve (4), the outer wall of the limiting sleeve (4) is provided with a fixed plate (5), the top of the fixed plate (5) is provided with a sliding groove (6), the side wall of the fixed plate (5) is provided with a bearing disc body (7), the inside of the bearing disc body (7) is provided with a containing groove (8), the top of the bearing disc body (7) is provided with a sealing groove (9), the side wall of the bearing disc body (7) is provided with a clamping rod (10), the outer wall of the clamping rod (10) is provided with a sealing cover plate (11), the bottom of the sealing cover plate (11) is provided with a sealing strip (12), the inner wall of the bearing disc body (7) is provided with a limiting top rod (13), the outer wall of the limiting top rod (13) is provided with a limiting spring (14).

2. A rotatable carrier disk for semiconductor wafer storage according to claim 1, wherein: The positioning rod (2) is arranged at equal intervals around the central axis of the storage box (1), and the positioning rod (2) is in sliding connection with the rotating rod (3).

3. A rotatable carrier disk for semiconductor wafer storage according to claim 1, wherein: The bearing disc body (7) is in rotating connection with the limiting sleeve (4) and the rotating rod (3), and the limiting sleeve (4) is symmetrically arranged around the central axis of the bearing disc body (7).

4. A rotatable carrier disk for semiconductor wafer storage according to claim 1, wherein: The sliding groove (6) is in movable connection with the clamping rod (10), and the clamping rod (10) is in clamping connection with the bearing disc body (7).

5. A rotatable carrier disk for semiconductor wafer storage according to claim 1, wherein: The sealing groove (9) is tightly attached to the sealing strip (12), and the limiting top rod (13) is in telescopic connection with the bearing disc body (7) through the limiting spring (14).

6. A rotatable carrier disk for semiconductor wafer storage according to claim 1, wherein: The limiting top rod (13) is in movable connection with the bearing disc body (7), and the limiting top rod (13) is in clamping connection with the sealing cover plate (11).

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