Multidirectional rotating workpiece rotating stand for film coating

Abstract

The utility model discloses a multidirectional rotating workpiece rotating stand for coating, which comprises a fixed gear, a driving turntable and a plurality of planet carriers, the fixed gear is fixedly arranged, the driving turntable is rotationally arranged, and the planet carriers are arranged on the driving turntable; the planet carrier comprises a fixed shaft, a rotary shell, a driven gear and a plurality of layers of hanging rods, the fixed shaft is fixedly installed on the driving rotary disc, the rotary shell is rotatably installed on the driving rotary disc, the rotation center of the rotary shell coincides with the axis of the fixed shaft, the driven gear is fixedly installed on the rotary shell, and the driven gear is meshed with the fixed gear; a fixed bevel gear and an inert bevel gear are arranged corresponding to each layer of hanging rod, the fixed bevel gear is fixedly connected to the fixed shaft, the inert bevel gear is rotationally connected to the inner side of the rotary shell and meshed with the fixed bevel gear, the hanging rods are rotationally arranged on the rotary shell and incline outwards, and output bevel gears meshed with the inert bevel gear are arranged on the hanging rods. According to the utility model, uniform coating of a workpiece with a complex coating surface can be better realized.

Description

Technical Field

[0001] This utility model relates to the field of sputtering coating technology, specifically to a multi-directional rotating workpiece frame for coating. Background Technology

[0002] Sputtering deposition is a process in which ions bombard the surface of a target material, ejecting atoms from the target and depositing them onto the workpiece surface to form a thin film. During the deposition process, the workpiece is fixed on a workpiece holder using appropriate fixtures. Traditional workpiece holders typically fix the workpiece vertically and then perform simple revolutions and rotations to achieve the thin film deposition on the workpiece surface.

[0003] Traditional workpiece rotating stands struggle to achieve uniform coating on workpieces with complex shapes and coating surfaces, such as semi-circular workpieces with an arc-shaped coating surface. When coating a semi-circular workpiece, the traditional workpiece rotating stand is vertically fixed, with the sputtering target positioned on the side. During sputtering, the traditional workpiece rotating stand drives the semi-circular workpiece to revolve and rotate, but the top center of the semi-circular workpiece is difficult to coat.

[0004] Therefore, this utility model designs a multi-directional rotating workpiece frame for workpieces with complex coating surfaces, so as to achieve uniform coating of workpieces with complex coating surfaces. Utility Model Content

[0005] The purpose of this invention is to provide a multi-directional rotating workpiece holder for coating, which can better achieve uniform coating of workpieces with complex coating surfaces.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A multi-directional rotating workpiece carrier for coating is characterized by comprising a fixed gear, a driving turntable, and multiple planetary carriers. The fixed gear is fixedly mounted, the driving turntable is rotatably mounted and coincides with the center of the fixed gear, and the planetary carriers are mounted on the driving turntable and arranged around the center of the driving turntable. The planetary carriers include a fixed shaft, a rotating housing, a driven gear, and multiple layers of hanging rods. The fixed shaft is fixedly mounted on the driving turntable, the rotating housing is rotatably mounted on the driving turntable, and the rotation center of the rotating housing coincides with the axis of the fixed shaft. The driven gear is fixedly mounted on the rotating housing and meshes with the fixed gear. Each layer of hanging rods on the planetary carrier is provided with a fixed bevel tooth and an inert bevel tooth. The fixed bevel tooth is fixedly connected to the fixed shaft, and the inert bevel tooth is rotatably connected to the inner side of the rotating housing and meshes with the fixed bevel tooth. The hanging rods are rotatably mounted on the rotating housing and tilted outwards, and the hanging rods are provided with output bevel teeth that mesh with the inert bevel teeth.

[0008] A further technical solution of this utility model is as follows: each hanging rod is provided with a movable bearing seat on the rotating outer shell. The movable bearing seat can be rotated and adjusted relative to the rotating outer shell. The rotation adjustment center of the movable bearing seat coincides with the rotation center of the inertial bevel tooth. The hanging rod is rotatably connected to the movable bearing seat. The tilt angle of the hanging rod can be adjusted by rotating and adjusting the movable bearing seat.

[0009] A further technical solution of this utility model is as follows: the two sides of the movable bearing seat are provided with rotating connecting parts, and the rotating housing is provided with a rotating connecting shaft corresponding to the rotating connecting parts. The rotating connecting parts are rotatably connected to the rotating connecting shaft. The rotating housing is provided with a lifting adjustment component corresponding to each movable bearing seat, and the movable bearing seat is rotated and adjusted by the lifting adjustment component.

[0010] A further technical solution of this utility model is as follows: the lifting and adjusting assembly includes a push screw and a pull screw. The rotating housing has an outwardly protruding mounting part for each movable bearing seat. The mounting part has a threaded hole and a through hole. The push screw is threaded into the threaded hole, and the inner end of the push screw abuts against the movable bearing seat. The pull screw passes through the through hole, and the inner end of the pull screw is hinged to the movable bearing seat. An adjusting nut is provided on the part of the pull screw that extends out of the rotating housing.

[0011] A further technical solution of this utility model is as follows: the multi-directional rotating workpiece frame also includes a connecting plate arranged opposite to the active turntable. The active turntable and the connecting plate are fixedly connected together by a support rod. The active turntable and the connecting plate are respectively provided with fixed bearing seats and anti-rotation plates on the planetary carrier. The two ends of the rotating shell are respectively rotatably connected to the fixed bearing seats of the active turntable and the connecting plate. The fixed shaft passes through the middle of the rotating shell. The two ends of the fixed shaft are respectively connected to the anti-rotation plates. The anti-rotation plates support the fixed shaft and restrict the rotation of the fixed shaft.

[0012] A further technical solution of this utility model is as follows: rotating bushings are fixedly provided at both ends of the rotating housing, the rotating bushings are rotatably connected to the fixed bearing seat, and the end of the fixed shaft passes through the rotating bushing.

[0013] A further technical solution of this utility model is: a limiting strip is provided on the anti-rotation plate, and a limiting through groove is provided on the end face of the fixed shaft, with the limiting strip embedded in the limiting through groove.

[0014] A further technical solution of this utility model is: two adjacent hanging rods are staggered and located on different sides of the rotating shell.

[0015] A further technical solution of this utility model is: each layer of the rotating shell is provided with two hanging rods located on opposite sides.

[0016] A further technical solution of this utility model is as follows: the workpiece rotating frame also includes a fixed plate and a motor, the fixed gear is fixedly mounted on the fixed plate, the active turntable is rotatably mounted on the fixed plate, the motor is fixedly mounted in the middle of the fixed plate, and the output shaft of the motor is connected to the middle of the active turntable.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. When in use, this utility model can rotate the workpiece fixed on the hanging rod around the center of the active turntable, around the center of the fixed shaft, and around the center of the hanging rod, realizing multi-directional rotation. In addition, the inclined hanging rod makes the workpiece also inclined during the coating process. Through the combination of the above two aspects, this utility model can better achieve uniform coating on workpieces with complex coating surfaces.

[0019] 2. This utility model further installs the hanging rod by means of an adjustable movable bearing seat, so that the tilt angle of the hanging rod can be adjusted, thereby better adapting to workpieces of different shapes. Attached Figure Description

[0020] Figure 1 This is one of the three-dimensional schematic diagrams of the multi-directional rotating workpiece frame according to an embodiment of this utility model;

[0021] Figure 2 This is the second perspective view of the multi-directional rotating workpiece frame according to an embodiment of this utility model;

[0022] Figure 3 This is a front view schematic diagram of a multi-directional rotating workpiece frame according to an embodiment of the present utility model;

[0023] Figure 4 This is a bottom view of the multi-directional rotating workpiece frame according to an embodiment of the present invention;

[0024] Figure 5 This is a front view schematic diagram of the planetary carrier according to an embodiment of the present utility model;

[0025] Figure 6 yes Figure 5 Schematic diagram of the cross section at the middle EE;

[0026] Figure 7 This is a top view of the planetary carrier according to an embodiment of the present invention;

[0027] Figure 8 yes Figure 6 Enlarged view of point G in the middle;

[0028] Figure 9 yes Figure 5 Enlarged view of point F in the middle;

[0029] Figure 10 This is a schematic diagram of the assembly structure at one of the hanging rods of the planetary carrier according to an embodiment of the present utility model;

[0030] Figure 11 This is a schematic diagram of the vertical adjustment of the hanging rod of the planetary carrier according to an embodiment of the present invention;

[0031] Figure 12 This is a schematic diagram of the structure of the movable bearing seat in an embodiment of the present invention when partially disassembled;

[0032] Figure 13 This is a schematic diagram of the installation structure of the active turntable and the fixed gear according to an embodiment of the present invention.

[0033] Meaning of the labels in the attached diagram:

[0034] 1-Driven turntable; 2-Planetary carrier; 2.1-Driven gear; 2.2-Hanging rod; 2.3-Fixed shaft; 2.4-Rotating housing; 2.5-Abutting screw; 2.6-Limiting slot; 2.7-Fixed bevel gear; 2.8-Inertial bevel gear; 2.9-Output bevel gear; 2.10-Modible bearing seat; 2.11-Pull-back screw; 2.12-Locking nut; 2.13-Mounting part; 2.14-Adjusting nut; 2.15-Rotating connecting shaft; 2.16-Rotating connecting part; 2.17-Rotating bushing; 2.18-Elongated hole; 3-Anti-rotation plate; 3.1-Limiting strip; 4-Support rod; 5-Connecting disc; 6-Fixed gear; 7-Fixed bearing seat; 8-Fixed plate; 9-Turntable bearing; 10-Motor. Detailed Implementation

[0035] The present invention will be further described below with reference to embodiments.

[0036] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0038] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0039] Example:

[0040] like Figures 1 to 13 The figure shown is a multi-directional rotating workpiece frame for coating in this embodiment, which includes a fixed gear 6, a drive turntable 1, a connecting plate 5 and multiple planetary carriers 2. The number of planetary carriers 2 is designed according to the size and other requirements of the coating equipment. Twelve planetary carriers 2 are shown in the figure of this embodiment.

[0041] The fixed gear 6 is fixedly mounted, while the driving disc 1 is rotatable. The centers of the driving disc 1 and the fixed gear 6 coincide, and the driving disc 1 is located above the fixed gear 6. The connecting disc 5 is vertically aligned with the driving disc 1, and the driving disc 1 and the connecting disc 5 are fixedly connected together by multiple support rods 4. The planetary carrier 2 is installed between the driving disc 1 and the connecting disc 5, and is arranged around the center of the driving disc 1.

[0042] like Figures 5 to 10 As shown, the planetary carrier 2 includes a fixed shaft 2.3, a rotating housing 2.4, a driven gear 2.1, and multiple layers of hanging rods 2.2. In this embodiment, the planetary carrier 2 is shown to have nine layers of hanging rods 2.2. Each layer contains two hanging rods 2.2 located on opposite sides, and the two adjacent layers of hanging rods 2.2 are staggered and located on different sides of the rotating housing 2.4. The staggered arrangement can avoid the influence between the upper and lower workpieces on the coating.

[0043] Fixed bearing seats 7 are respectively provided on the planetary carriers of the drive turntable 1 and the connecting plate 5, and anti-rotation plates 3 are respectively provided on the bottom of the drive turntable 1 and the top of the connecting plate 5 corresponding to the fixed shaft 2.3. Rotating bushings 2.17 are fixedly provided at both ends of the rotating housing 2.4, and the rotating bushings 2.17 are rotatably connected to the fixed bearing seats 7, thereby rotatably mounting the rotating housing 2.4 between the drive turntable 1 and the connecting plate 5. The fixed shaft 2.3 passes through the middle of the rotating housing 2.4, and the end of the fixed shaft 2.3 passes through the rotating bushing 2.17. The two ends of the fixed shaft 2.3 are respectively connected to the anti-rotation plates 3, which support the fixed shaft 2.3 and restrict its rotation, thereby fixing the fixed shaft 2.3 on the drive turntable 1. The rotation center of the rotating housing 2.4 coincides with the axis of the fixed shaft 2.3.

[0044] The structure connecting the end of the fixed shaft 2.3 to the anti-rotation plate 3 is as follows: the anti-rotation plate 3 is provided with a limiting strip 3.1, the end face of the fixed shaft 2.3 is provided with a limiting through groove 2.6, and the limiting strip 3.1 is embedded in the limiting through groove 2.6.

[0045] The driven gear 2.1 is fixedly mounted on the rotating shaft sleeve 2.17 at the lower end of the rotating housing 2.4, and the driven gear 2.1 is located inside the anti-rotation plate 3. The driven gears 2.1 of all planetary carriers 2 mesh with the fixed gears 6. When the driving turntable 1 drives all planetary carriers 2 to rotate, the driven gears 2.1 will rotate themselves due to the cooperation between the driven gears 2.1 and the fixed gears 6, thereby driving the rotating housing 2.4 to rotate.

[0046] In this embodiment, each hanging rod 2.2 is provided with a fixed bevel tooth 2.7 and an inert bevel tooth 2.8. The fixed bevel tooth 2.7 is fixedly connected to the fixed shaft 2.3, and the inert bevel tooth 2.8 is rotatably connected to the inside of the rotating housing 2.4, and the inert bevel tooth 2.8 meshes with the fixed bevel tooth 2.7. When the rotating housing 2.4 rotates, the inert bevel tooth 2.8 will rotate due to the cooperation between the inert bevel tooth 2.8 and the fixed bevel tooth 2.7.

[0047] In this embodiment, the rotating outer shell 2.4 is provided with a movable bearing seat 2.10 corresponding to each hanging rod 2.2. The movable bearing seat 2.10 can be adjusted up and down relative to the rotating outer shell 2.4. The specific installation structure of the movable bearing seat 2.10 is as follows: Figure 10 and Figure 12 As shown, the movable bearing housing 2.10 has rotating connecting parts 2.16 on both sides. The two inner sides of the rotating housing 2.4 are provided with rotating connecting shafts 2.15 corresponding to the rotating connecting parts 2.16. The centers of the two inner rotating connecting shafts 2.15 coincide. The rotating connecting parts 2.16 are rotatably connected to the rotating connecting shafts 2.15 through rotating holes, allowing the movable bearing housing 2.10 to rotate up and down for adjustment. Rotating the movable bearing housing 2.10 adjusts the tilt angle of the hanging rod 2.2. An inertial bevel gear 2.8 is rotatably mounted on the inner end of one of the rotating connecting shafts 2.15, ensuring that the center of rotation adjustment of the movable bearing housing 2.10 coincides with the rotation center of the inertial bevel gear 2.8.

[0048] A lifting adjustment assembly is provided on the rotating housing 2.4 for each movable bearing seat 2.10, and the rotation of the movable bearing seat 2.10 is adjusted by the lifting adjustment assembly. The specific structure of the lifting adjustment assembly is as follows: Figures 8 to 11As shown, the lifting adjustment assembly of this embodiment includes two abutting screws 2.5 and one pull-back screw 2.11. The rotating housing 2.4 has a horizontally protruding mounting portion 2.13 for each movable bearing seat 2.10. In this embodiment, the mounting portion 2.13 is a horizontal plate located below the corresponding movable bearing 2.10. The mounting portion 2.13 has two threaded holes on both sides and a through hole in the middle. The two abutting screws 2.5 are threaded into the threaded holes, with the abutting screws 2.5 vertically extending upwards into the rotating housing. The inner end of the abutting screw 2.5 abuts against the bottom of the movable bearing seat 2.10. A locking nut 2.12 is threaded onto the portion of the abutting screw 2.5 outside the rotating housing 2.4. After the rotation adjustment of the abutting screw 2.5 is completed, tightening the locking nut 2.12 locks the abutting screw 2.5. The pull-back screw 2.11 passes through the through hole and is located between the two abutting screws 2.5. The inner end of the pull-back screw 2.11 is hinged to the movable bearing seat 2.10. An adjusting nut 2.14 is threaded onto the part of the pull-back screw 2.11 that extends out of the rotating housing 2.4.

[0049] The rotating housing 2.4 has vertical elongated holes 2.18 corresponding to each hanging rod 2.2. The hanging rod 2.2 passes through the elongated holes 2.18 and is rotatably connected to the movable bearing seat 2.10. The hanging rod 2.2 is tilted outward, so the workpiece fixed on the hanging rod 2.2 during coating will also be in an tilted state.

[0050] When it is necessary to adjust the tilt angle of the hanging rod 2.2, the locking nut 2.12 needs to be loosened, and then the abutment screw 2.5 and adjusting nut 2.14 are rotated for adjustment. After the adjustment is completed, the locking nut 2.12 is tightened again.

[0051] Each hanging rod 2.2 has an output bevel tooth 2.9 at its inner end. The output bevel tooth 2.9 meshes with the inert bevel tooth 2.8. When the inert bevel tooth 2.8 rotates, it will drive the output bevel tooth 2.9 to rotate, thereby driving the hanging rod 2.2 to rotate.

[0052] The adjustment and transmission structures of the aforementioned hanging rod 2.2 enable the hanging rod 2.2 to achieve both rotation and angle adjustment, without any conflict between the two functions.

[0053] In application, the multi-directional rotating workpiece frame of this embodiment will also be equipped with a fixing plate 8 and a motor 10, such as... Figure 13As shown, the fixed gear 6 is fixedly mounted on the fixed plate 8, and the drive turntable 1 is mounted on the fixed plate 8 through the turntable bearing 9, so that the drive turntable 1 can rotate on the fixed plate 8. The motor 10 is fixedly mounted on the lower middle part of the fixed plate 8, and the output shaft of the motor 10 is vertically upward and connected to the middle part of the drive turntable 1. The motor 10 drives the drive turntable 1 to rotate, and the fixed plate 8 is fixedly mounted on the equipment.

[0054] The operation process of the multi-directional rotating workpiece frame in this embodiment is as follows:

[0055] When in use, the multi-directional rotating workpiece stand will be installed in the coating chamber of the sputtering coating equipment. The target material will be installed on the side of the multi-directional rotating workpiece stand, and the workpiece will be fixed to the hanging rod 2.2 by a conventional fixture. The workpiece will be in an inclined state.

[0056] During the coating process, the motor 10 drives the active turntable 1 to rotate, and the active turntable 1 will drive all the planetary carriers 2 and the workpiece to rotate together around the center of the active turntable 1. Figure 4 The rotation direction shown in A is the rotation direction of the active turntable 1 in this embodiment. Simultaneously, with the cooperation between the driven gear 2.1 and the fixed gear 6, the driven gear 2.1 will rotate (…). Figure 4 The rotation direction shown in B is the rotation direction of the driven gear 2.1 in this embodiment, which in turn drives the rotating housing 2.4 to rotate. Figure 7 The rotation direction shown in C is the rotation direction of the rotating housing 2.4 in this embodiment, causing the workpiece on the planetary carrier 2 to rotate simultaneously around the fixed axis 2.3. While the rotating housing 2.4 rotates, the inertial bevel gear 2.8 rotates due to the engagement between the fixed bevel gear 2.7 and the inertial bevel gear 2.8. This rotation of the inertial bevel gear 2.8 drives the output bevel gears 2.9 on both sides to rotate, thereby causing the hanging rod 2.2 to rotate. Figure 7 The rotation direction shown in D is the rotation direction of the hanging rod 2.2 in this embodiment, which in turn drives the workpiece on the hanging rod 2.2 to rotate around the center of the hanging rod 2.2. During the above operation, the workpiece will rotate in three directions and the workpiece is in an inclined state, which can better achieve uniform coating on the complex coating surface of the workpiece, such as the arc-shaped coating surface.

[0057] The above embodiments of this utility model are not intended to limit the scope of protection of this utility model. The implementation of this utility model is not limited thereto. All other modifications, substitutions or alterations made to the above structure of this utility model based on the above content of this utility model and in accordance with the common technical knowledge and conventional means in the field, without departing from the basic technical idea of ​​this utility model, shall fall within the scope of protection of this utility model.

Claims

1. A multi-directional rotating workpiece holder for coating, characterized in that: The device includes a fixed gear, a driving turntable, and multiple planetary carriers. The fixed gear is fixedly mounted, and the driving turntable is rotatably mounted and coincides with the center of the fixed gear. The planetary carriers are mounted on the driving turntable and arranged around its center. Each planetary carrier includes a fixed shaft, a rotating housing, a driven gear, and multiple layers of connecting rods. The fixed shaft is fixedly mounted on the driving turntable, and the rotating housing is rotatably mounted on the driving turntable. The rotation center of the rotating housing coincides with the axis of the fixed shaft. The driven gear is fixedly mounted on the rotating housing and meshes with the fixed gear. Each connecting rod on the planetary carrier has a fixed bevel tooth and an inert bevel tooth. The fixed bevel tooth is fixedly connected to the fixed shaft, and the inert bevel tooth is rotatably connected to the inner side of the rotating housing and meshes with the fixed bevel tooth. Each connecting rod is rotatably mounted on the rotating housing and tilted outwards. Each connecting rod has an output bevel tooth that meshes with the inert bevel tooth.

2. The multi-directional rotating workpiece frame for coating according to claim 1, characterized in that: Each of the hanging rods is provided with a movable bearing seat on the rotating housing. The movable bearing seat can be rotated relative to the rotating housing. The rotation adjustment center of the movable bearing seat coincides with the rotation center of the inert bevel gear. The hanging rod is rotatably connected to the movable bearing seat. The tilt angle of the hanging rod can be adjusted by rotating and adjusting the movable bearing seat.

3. The multi-directional rotating workpiece holder for coating according to claim 2, characterized in that: The movable bearing seat has rotating connecting parts on both sides, and the rotating housing has a rotating connecting shaft corresponding to the rotating connecting parts. The rotating connecting parts are rotatably connected to the rotating connecting shaft. The rotating housing has a lifting adjustment component corresponding to each movable bearing seat, and the movable bearing seat is rotated and adjusted by the lifting adjustment component.

4. The multi-directional rotating workpiece frame for coating according to claim 3, characterized in that: The lifting and adjusting assembly includes a push screw and a pull screw. The rotary housing has an outwardly protruding mounting portion for each of the movable bearing seats. The mounting portion has a threaded hole and a through hole. The push screw is threaded into the threaded hole, and the inner end of the push screw abuts against the movable bearing seat. The pull screw passes through the through hole, and the inner end of the pull screw is hinged to the movable bearing seat. An adjusting nut is provided on the part of the pull screw that extends outside the rotary housing.

5. The multi-directional rotating workpiece frame for coating according to claim 1, characterized in that: The multi-directional rotating workpiece frame also includes a connecting plate arranged opposite to the active turntable. The active turntable and the connecting plate are fixedly connected together by a support rod. The active turntable and the connecting plate are respectively provided with fixed bearing seats and anti-rotation plates corresponding to the planetary carrier. The two ends of the rotating housing are respectively rotatably connected to the fixed bearing seats of the active turntable and the connecting plate. The fixed shaft passes through the middle of the rotating housing. The two ends of the fixed shaft are respectively connected to the anti-rotation plates. The anti-rotation plates support the fixed shaft and restrict its rotation.

6. The multi-directional rotating workpiece holder for coating according to claim 5, characterized in that: Rotary bushings are fixed at both ends of the rotating housing, and the rotating bushings are rotatably connected to the fixed bearing seat. The end of the fixed shaft passes through the rotating bushing.

7. The multi-directional rotating workpiece holder for coating according to claim 5, characterized in that: The anti-rotation plate is provided with a limiting strip, and the end face of the fixed shaft is provided with a limiting through groove, and the limiting strip is embedded in the limiting through groove.

8. The multi-directional rotating workpiece frame for coating according to claim 1, characterized in that: The two adjacent hanging rods are staggered and located on different sides of the rotating housing.

9. The multi-directional rotating workpiece holder for coating according to claim 8, characterized in that: Each layer of the rotating shell is provided with two hanging rods located on opposite sides.

10. The multi-directional rotating workpiece frame for coating according to claim 1, characterized in that: The workpiece rotating frame also includes a fixed plate and a motor. The fixed gear is fixedly mounted on the fixed plate, the drive turntable is rotatably mounted on the fixed plate, the motor is fixedly mounted in the middle of the fixed plate, and the output shaft of the motor is connected to the middle of the drive turntable.

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