No-shielding probe transmission structure for vacuum evaporator

Abstract

The invention relates to the technical field of transmission structures of vacuum evaporators, in particular to a probe unshielded transmission structure for a vacuum evaporator, which comprises a bearing mounting disc mounted at the top of an outer shell of the vacuum evaporator, and a bearing seat is mounted on the bottom surface of the bearing mounting disc through screws; an upper transmission hollow part is connected to the inner side of the lower portion of the bearing seat through a bearing, a lower transmission hollow part is installed below the control gear through a flange plate, and a detection probe is installed in a through hole formed in the middle of the bearing installation plate in a penetrating mode. According to the probe non-shielding transmission structure for the vacuum evaporator, instant shielding cannot be caused to the detection probe, and then signal loss of the detection probe cannot be caused, so that the transmission structure cannot affect the accuracy of film thickness monitoring of the detection probe, the transmission structure is well used for the vacuum evaporator, and the transmission efficiency of the vacuum evaporator is improved. And compared with traditional screw installation, the structure is convenient and fast to operate.

Description

Technical Field

[0001] This invention relates to the field of transmission structure technology for vacuum evaporation machines, specifically to an unobstructed transmission structure for a probe in a vacuum evaporation machine. Background Technology

[0002] The top of the vacuum evaporation machine needs to use a transmission structure to drive the coating pot to rotate so that the substrate mounted on the coating pot can be coated well. Therefore, the transmission structure is particularly important for the vacuum evaporation machine. For example, the patent disclosed in the prior art with the publication number "CN214193431U" is entitled "A novel planetary rotation structure for a vacuum evaporation coating machine". It discloses that the rotating shaft connecting the motor is connected to the fixing component. The two L-shaped rods of the fixing component then transmit the rotational kinetic energy to the hollow plate and the side connecting component in sequence, so that the coating pot performs planetary rotation. There are three side connecting components, which also include a hollow cylindrical shaft and a nut. The hollow connecting shaft is fixed to the fixing strip by screws. The hollow connecting shaft is sleeved on the hollow cylindrical shaft, and the protrusion in the middle of the hollow connecting shaft and the hollow cylindrical shaft is fixed. The disc component is sleeved on the hollow connecting shaft. The top part of the hollow cylindrical shaft is threaded, and the nut is threadedly connected and fixed to the top part of the hollow cylindrical shaft.

[0003] In the aforementioned prior art transmission structure, because the crystal oscillator probe is positioned above the two L-shaped rods, the two L-shaped rods momentarily block the crystal oscillator probe every time the plating pot rotates once. With continuous rotation, this results in an increasing number of times the two L-shaped rods block the crystal oscillator probe signal, leading to signal loss from the crystal oscillator probe. Consequently, the transmission structure affects the accuracy of the crystal oscillator probe in monitoring film thickness. Therefore, we propose an unobstructed transmission structure for the probe of a vacuum evaporation machine to solve the aforementioned problems. Summary of the Invention

[0004] The purpose of this invention is to provide a non-obstructing transmission structure for a probe in a vacuum evaporation coating machine, in order to solve the problem mentioned in the background art. In the current market transmission structure, because the crystal oscillator probe is located above the two L-shaped rods, the two L-shaped rods will momentarily obstruct the crystal oscillator probe every time the coating pot rotates once. With continuous rotation, the two L-shaped rods will obstruct the crystal oscillator probe signal more and more times, resulting in signal loss from the crystal oscillator probe. Consequently, the transmission structure affects the accuracy of the crystal oscillator probe in monitoring film thickness.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a probe-free transmission structure for a vacuum evaporation coating machine, comprising a support mounting plate installed on the top of the vacuum evaporation coating machine housing, wherein a bearing seat is screwed on the bottom surface of the support mounting plate, an upper transmission hollow part is connected to the lower inner side of the bearing seat via a bearing, a control gear is installed below the upper transmission hollow part, and a lower transmission hollow part is installed below the control gear via a flange, a detection probe is installed through a through hole in the middle of the support mounting plate, and the lower part of the detection probe is inserted through the interior of the upper and lower transmission hollow parts, a connecting protective ring plate is integrally fixed to the lower outer side of the lower transmission hollow part, and the inner side of the connecting protective ring plate is connected to the upper outer side of the coating pot via a quick-connect assembly.

[0006] Preferably, a magnetic seal shaft is installed through the interior of the support mounting plate, and a transmission gear is installed on the lower outer side of the magnetic seal shaft. The outer side of the transmission gear is meshed with a control gear. Meanwhile, the upper part of the magnetic seal shaft is connected to the output end of a motor installed on the upper part of the support mounting plate through a bevel gear set.

[0007] Preferably, the interiors of the upper transmission hollow section, the control gear, and the lower transmission hollow section are all hollow.

[0008] Preferably, the quick-connect assembly includes crossbars evenly spaced on the outside of the connecting protective ring plate, with a self-inserting rod slidably connected through the outside of the crossbars, and a return spring nested on the outside of the end of the crossbars near the connecting protective ring plate, with one end of the return spring connected to the inside of the connecting protective ring plate and the other end of the return spring connected to the vertical section of the self-inserting rod.

[0009] Preferably, the crossbar is T-shaped and the insert rod is L-shaped, and the horizontal section below the insert rod passes through the inner side of the outer side of the protective ring plate and is inserted into the groove opened on the outer side of the plating pot.

[0010] Preferably, the outer side of the hollow part of the lower transmission is provided with equally spaced grooves, and a connecting spring is installed inside the groove. A counterweight cover is sleeved on the outer side of the hollow part of the lower transmission, and a protrusion is fixed on the upper inner side wall of the counterweight cover. The upper surface of the protrusion is connected to the lower end of the connecting spring, and the protrusion is engaged and slidably connected with the groove.

[0011] Preferably, the counterweight cover is funnel-shaped, and the upper inner diameter of the counterweight cover is smaller than the lower inner diameter of the counterweight cover. The lower inner sidewall of the counterweight cover is in close contact with the upper end of the self-inserting rod, and the self-inserting rod forms a sliding structure through the counterweight cover.

[0012] Preferably, the outer side of the plating pot is provided with equally spaced docking grooves, and the top of the docking grooves is an opening.

[0013] Preferably, the outer side of the connecting protective ring plate has slots at equal intervals for installing fixing rods, and a protective guide block is provided through the outer side of the fixing rod. The interior of the protective guide block is hollow, and the protective guide block and the docking groove are in concave-convex fit.

[0014] Preferably, the lowest point of the protective guide block is lower than the lowest point of the connecting protective ring plate, and the protective guide block and the connecting protective ring plate form a sliding structure.

[0015] Compared with the prior art, the beneficial effects of this invention are: the probe-free transmission structure of this vacuum evaporation machine will not cause momentary obstruction to the detection probe, thus preventing signal loss. Therefore, the transmission structure will not affect the accuracy of the detection probe in monitoring film thickness, making the transmission structure well-suited for use in vacuum evaporation machines. It facilitates quick installation and disassembly of the evaporation pot. Compared with traditional screw installation, this structure is more convenient to operate. The specific details are as follows: (1) The transmission structure is composed of an upper transmission hollow part and a lower transmission hollow part, which are both hollow inside. The transmission structure is hollow inside, which makes it easy to install the detection probe in the hollow position inside the transmission structure. Therefore, when the transmission structure drives the plating pot to rotate later, the transmission structure will not block the detection probe for a moment, and thus will not cause the detection probe to lose its signal. Therefore, the transmission structure will not affect the accuracy of the detection probe in film thickness monitoring, and the transmission structure is well used in vacuum evaporation machines. (2) By connecting the spring and the weight of the counterweight cover itself, the inner wall of the lower part of the counterweight cover applies an inward pushing force to the upper end of multiple self-inserting rods at the same time, thereby causing multiple self-inserting rods to automatically insert into the slots opened on the outer side of the plating pot, which facilitates the quick installation and disassembly of the plating pot. Compared with the traditional screw installation, this structure is convenient to operate and saves time and effort. (3) By engaging the protective guide plate with the docking groove, it is easy to insert the top of the plating pot into the inner side of the connecting protective ring plate in an aligned manner, so that the self-insertion rod corresponds one-to-one with the holes and slots opened on the outer side of the top of the plating pot. There is no need to repeatedly rotate to adjust the position of the plating pot so that the holes and slots correspond one-to-one with the self-insertion rod, thus further improving the convenience of connecting the transmission structure and the plating pot. (4) By connecting the protective ring plate and the protective guide block, the lowest point of the protective guide block is lower than the lowest point of the detection probe. Therefore, the bottom outer side of the detection probe can be shielded and protected to avoid accidental collision with the detection probe when the pot is installed. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the transmission structure and the mounting structure of the vapor deposition machine housing of the present invention; Figure 2 This is a bottom view of the plating pot structure of the present invention; Figure 3 This is a schematic diagram of the three-dimensional structure of the plating pot of the present invention; Figure 4 This is a schematic diagram of the overall main cross-sectional structure of the present invention; Figure 5 This is a schematic cross-sectional view of the connection between the hollow lower transmission section and the hollow lower transmission section of the present invention. Figure 6 For the present invention Figure 5 Enlarged structural diagram at point A in the middle; Figure 7 This is a bottom view of the separate structure of the lower transmission hollow part, the lower transmission hollow part, and the plating pot of the present invention; Figure 8 This is a schematic diagram of the separation structure of the connecting protective ring plate and the self-inserting rod of the present invention; Figure 9 This is a partial cross-sectional view of the connection between the protective ring plate and the plating pot in Embodiment 2 of the present invention; Figure 10 This is a bottom view of the structure where the protective ring plate is separated from the plating pot in Embodiment 2 of the present invention; Figure 11 This is a cross-sectional view of the connection between the protective ring plate and the protective guide block of the present invention.

[0017] In the diagram: 1. Load-bearing mounting plate; 2. Motor; 3. Plating pot; 301. Docking groove; 4. Detection probe; 5. Bearing seat; 6. Upper transmission hollow part; 7. Control gear; 8. Lower transmission hollow part; 81. Slide groove; 82. Connecting spring; 9. Magnetic seal shaft; 91. Transmission gear; 10. Connecting protective ring plate; 11. Crossbar; 111. Self-inserting rod; 112. Return spring; 12. Counterweight cover; 121. Protrusion; 13. Protective guide block; 14. Fixing rod. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1-11 The present invention provides the following technical solution: Example 1: The probe-free transmission structure of the vacuum evaporation machine in this example does not cause momentary obstruction to the detection probe 4 during use, thus preventing signal loss. Therefore, the transmission structure does not affect the accuracy of film thickness monitoring by the detection probe 4, making it well-suited for use in vacuum evaporation machines. Furthermore, this transmission structure facilitates quick installation and disassembly of the plating pan 3. See attached diagram for details. Figures 1-8 As shown, a support mounting plate 1 is installed on the top of the vacuum evaporation machine housing, and a bearing seat 5 is screwed on the bottom surface of the support mounting plate 1. The lower inner side of the bearing seat 5 is connected to the upper transmission hollow part 6 through a bearing, and a control gear 7 is installed below the upper transmission hollow part 6. The lower part of the control gear 7 is installed below the flange and a lower transmission hollow part 8 is installed. A detection probe 4 is installed through a through hole in the middle of the support mounting plate 1, and the lower part of the detection probe 4 is inserted through the interior of the upper transmission hollow part 6 and the lower transmission hollow part 8. A connecting protective ring plate 10 is integrally fixed to the lower outer side of the lower transmission hollow part 8, and the inner side of the connecting protective ring plate 10 is connected to the upper outer side of the plating pot 3 through a quick-connect assembly. A magnetic sealing shaft 9 is installed through the interior of the support mounting plate 1, and a transmission gear 91 is installed on the lower outer side of the magnetic sealing shaft 9. The outer side of the transmission gear 91 is meshed with the control gear 7. At the same time, the upper part of the magnetic sealing shaft 9 is connected to the output end of the motor 2 installed above the support mounting plate 1 through a bevel gear set.

[0020] The interiors of the upper transmission hollow section 6, the control gear 7, and the lower transmission hollow section 8 are all hollow. The quick-connect assembly includes crossbars 11 evenly spaced on the outside of the connecting protective ring plate 10. A self-inserting rod 111 is slidably connected through the outside of the crossbars 11. A return spring 112 is nested on the outside of the crossbars 11 near the connecting protective ring plate 10. One end of the return spring 112 is connected to the inside of the connecting protective ring plate 10, and the other end of the return spring 112 is connected to the vertical section of the self-inserting rod 111. The crossbars 11 are T-shaped, and the self-inserting rod 111 is L-shaped. The horizontal section below the self-inserting rod 111 passes through the outside of the connecting protective ring plate 10. The inner surface is inserted into the hole groove opened on the outer side of the plating pot 3. The outer side of the lower transmission hollow part 8 is provided with equally spaced sliding grooves 81, and the inner side of the sliding grooves 81 is equipped with connecting springs 82. The outer side of the lower transmission hollow part 8 is fitted with a counterweight cover 12, and the upper inner side wall of the counterweight cover 12 is fixed with a protrusion 121. The upper surface of the protrusion 121 is connected to the lower end of the connecting spring 82. The protrusion 121 and the sliding groove 81 are engaged and slidably connected. The counterweight cover 12 is set in a funnel shape, and the upper inner diameter of the counterweight cover 12 is smaller than the lower inner diameter of the counterweight cover 12. The lower inner side wall of the counterweight cover 12 is in close contact with the upper end of the self-inserting rod 111. The self-inserting rod 111 forms a sliding structure through the counterweight cover 12.

[0021] First, the bearing mounting plate 1 within the entire transmission structure is installed on the top of the vacuum evaporation machine housing using screws. At this point, the bearing seat 5 and the upper transmission hollow section 6 pass through the mounting groove opened on the top of the vacuum evaporation machine housing. When the plating pot 3 needs to be installed, the counterweight cover 12 is manually pushed upwards. The protrusion 121 on the inner side of the counterweight cover 12 slides within the slide groove 81, and the connecting spring 82 stores force. Then, the lower inner side of the counterweight cover 12 separates from the upper end of the self-inserting rod 111. The self-inserting rod 111 then automatically moves outwards on the outside of the crossbar 11 due to the stored force of the return spring 112, causing the lower part of the self-inserting rod 111 to move into the connecting protective ring plate 10. Next, the upper end of the plating pot 3 is inserted into the connecting... The upper outer side of the plating pot 3 is brought into contact with the inner wall of the protective ring plate 10. Then, the counterweight cover 12 is manually released. Through the weight of the counterweight cover 12 itself and the stored force of the connecting spring 82, the counterweight cover 12 moves automatically downward. The lower inner side of the funnel-shaped counterweight cover 12 applies an inward pushing force to the upper end of the self-insertion rod 111, causing the self-insertion rod 111 to move inward on the outside of the crossbar 11. Then, the lower end of the "L"-shaped self-insertion rod 111 is inserted into the hole groove opened on the upper outer side of the plating pot 3, which facilitates the quick installation of the plating pot 3. The operation is convenient. When disassembly is required, as shown above, simply push the counterweight cover 12 upward.

[0022] Next, motor 2 drives magnetic seal shaft 9 to rotate via bevel gear set. Magnetic seal shaft 9 drives transmission gear 91 on the lower outer side to rotate. When transmission gear 91 rotates, it drives control gear 7 on the outer side to rotate. Then, control gear 7 drives upper transmission hollow part 6, lower transmission hollow part 8, connecting protective ring plate 10, and plating pot 3 to rotate together. This facilitates the vacuum evaporation machine to perform coating operations on the substrate installed on the plating pot 3. During the rotation of the transmission structure, it will not cause momentary obstruction to the detection probe 4, thus preventing signal loss from the detection probe 4. Therefore, the transmission structure will not affect the accuracy of the detection probe 4 in monitoring the film thickness, making the transmission structure well-suited for use in vacuum evaporation machines.

[0023] Example 2: The unobstructed transmission structure for the vacuum evaporation coating machine in this example, based on Example 1, further improves the ease of connection between the transmission structure and the coating pot 3. It also provides shielding protection for the bottom outer side of the detection probe 4, preventing accidental impacts to the detection probe 4 during installation of the coating pot 3. See attached diagram for the specific structure. Figures 9-11As shown, the outer side of the plating pot 3 is provided with equally spaced docking grooves 301, and the top of the docking grooves 301 is open. The outer side of the connecting protective ring plate 10 is provided with equally spaced grooves for installing fixing rods 14, and a protective guide block 13 is provided through the outer side of the fixing rod 14. The interior of the protective guide block 13 is hollow, and the protective guide block 13 and the docking grooves 301 are in concave-convex fit. The lowest point of the protective guide block 13 is lower than the lowest point of the connecting protective ring plate 10, and the protective guide block 13 and the connecting protective ring plate 10 form a sliding structure.

[0024] When the upper end of the plating pot 3 is inserted into the connecting protective ring plate 10, the docking groove 301 is first aligned with the protective guide block 13. Then, the lower end of the protective guide block 13 enters the docking groove 301. Next, the docking groove 301 pushes the protective guide block 13 upward, so that the fixing rod 14 slides in the through groove in the protective guide block 13. Therefore, through the concave-convex fit between the protective guide block 13 and the docking groove 301, the self-insertion rod 111 is aligned with the hole groove opened on the upper outer side of the plating pot 3. No repeated adjustment is required later, and the operation is convenient. This facilitates further improvement of the connection between the transmission structure and the plating pot 3, thereby completing a series of tasks.

[0025] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A probe unobstructed transmission structure for a vacuum evaporation machine, comprising a bearing mounting disc (1) mounted on the top of a vacuum evaporation machine housing, and a bearing seat (5) screw-mounted on the bottom surface of the bearing mounting disc (1), characterized in that: The lower inner side of the bearing seat (5) is connected with the upper transmission hollow part (6) through a bearing, and the lower end of the upper transmission hollow part (6) is provided with a control gear (7), and the lower end of the control gear (7) is provided with a lower transmission hollow part (8) through a flange, the through hole in the middle of the bearing mounting disc (1) is provided with a detection probe (4), and the lower end of the detection probe (4) is inserted into the inside of the upper transmission hollow part (6) and the lower transmission hollow part (8), and the lower outer side of the lower transmission hollow part (8) is integrally fixed with a connecting protection ring plate (10), and the inner side of the connecting protection ring plate (10) is connected with the outer side of the upper end of the pot (3) through a quick connecting assembly.

2. The probe non-shielding transmission structure for a vacuum evaporation machine according to claim 1, characterized in that: The inside of the bearing mounting disc (1) is provided with a magnetic seal shaft (9), and the outer side of the transmission gear (91) is connected with the control gear (7), and the upper end of the magnetic seal shaft (9) is connected with the output end of the motor (2) installed on the upper end of the bearing mounting disc (1) through a bevel gear set.

3. The probe drive structure without shielding for a vacuum evaporation machine according to claim 1, characterized in that: The inside of the upper transmission hollow part (6), the control gear (7) and the lower transmission hollow part (8) is hollow.

4. The probe drive structure without shielding for a vacuum evaporation machine according to claim 1, characterized in that: The quick connecting assembly comprises a cross rod (11) installed at equal intervals on the outer side of the connecting protection ring plate (10), and the outer side of the cross rod (11) is provided with a self-inserting rod (111) connected through sliding, and the outer side of the cross rod (11) close to the connecting protection ring plate (10) is provided with a reset spring (112) connected through nesting, and one end of the reset spring (112) is connected with the inside of the connecting protection ring plate (10), and the other end of the reset spring (112) is connected with the vertical section of the self-inserting rod (111).

5. The probe drive structure without shielding for a vacuum evaporation machine according to claim 4, characterized in that: The cross rod (11) is arranged in a "T" shape, and the self-inserting rod (111) is arranged in an "L" shape, and the horizontal section of the lower end of the self-inserting rod (111) is inserted into the hole groove formed on the outer side of the pot (3) through the inside of the outer side of the connecting protection ring plate (10).

6. The probe drive structure without shielding for a vacuum evaporation machine according to claim 5, characterized in that: The outer side of the lower transmission hollow part (8) is provided with a sliding groove (81) at equal intervals, and the inside of the sliding groove (81) is provided with a connecting spring (82), and the outer side of the lower transmission hollow part (8) is provided with a counterweight cover (12), and the upper inner side wall of the counterweight cover (12) is provided with a lug (121), and the upper surface of the lug (121) is connected with the lower end of the connecting spring (82), and the lug (121) is connected with the sliding groove (81).

7. The probe drive structure without shielding for a vacuum evaporation machine according to claim 6, characterized in that: The counterweight cover (12) is arranged in a funnel shape, and the inner diameter of the upper end of the counterweight cover (12) is smaller than the inner diameter of the lower end of the counterweight cover (12), and the lower inner side wall of the counterweight cover (12) is in contact with the upper end of the self-inserting rod (111), and the self-inserting rod (111) forms a sliding structure through the counterweight cover (12).

8. The probe drive structure without shielding for a vacuum evaporation machine according to claim 1, characterized in that: The outer side of the pot (3) is provided with a butt joint groove (301) at equal intervals, and the upper end of the butt joint groove (301) is provided with an opening.

9. The probe drive structure without shielding for a vacuum evaporation machine according to claim 8, characterized in that: The outer side of the connecting protection ring plate (10) is internally provided with equidistantly arranged slots for installing fixing rods (14), the outer side of the fixing rod (14) is provided with a protection guide block (13) penetratingly arranged, the inner side of the protection guide block (13) is hollowly arranged, and the protection guide block (13) is in concave-convex cooperation with the butt joint groove (301).

10. The probe drive structure without shielding for a vacuum evaporation machine according to claim 9, characterized in that: The lowest point of the protection guide block (13) is lower than the lowest point of the connecting protection ring plate (10), and the protection guide block (13) and the connecting protection ring plate (10) form a sliding structure.

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