MOCVD (Metal Organic Chemical Vapor Deposition) cavity sector plate
By designing a mating groove and mating protrusion on the sector plate of the MOCVD chamber, the problem of unstable sector plate is solved, achieving a more stable connection and reliable rectification and heat insulation protection, reducing equipment failures and extending service life.
Patent Information
- Application Number
- CN202520408071.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-10
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2035-03-10
AI Technical Summary
The existing MOCVD machine chamber sector plates are unstable due to planar contact bonding, making them prone to displacement and affecting rectification and thermal insulation protection.
The design incorporates four sector-shaped sub-plates that surround a single circular plate. By incorporating joint grooves and joint protrusions on the jointing sides, the tightness of the connection between adjacent sector-shaped sub-plates is enhanced. The joint protrusions can retract into the sector-shaped sub-plates.
It improves the connection stability of the sector plate, enhances rectification and heat insulation protection, reduces equipment downtime, extends service life, and is easy to use.
Smart Images
Figure CN223780353U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to MOCVD cavity sector plate. Background Technology
[0002] The existing MOCVD machine chamber sector plates are made of quartz material and have a sector-shaped structure. They are usually arranged in pairs, with four pieces in total, in a circular shape and laid flat inside the chamber. They are mainly used for rectification and heat insulation protection.
[0003] However, because the relatively flat surfaces of the sector plates are planar, this direct surface-to-surface contact during operation makes the sector plates unstable and prone to shifting. Once shifted, it can easily affect the rectification and heat insulation protection effects. Utility Model Content
[0004] This application provides a sector plate for an MOCVD cavity, which can effectively improve the connection tightness between adjacent sector sub-plates, making the overall structure of the sector plate more stable and the rectification and heat insulation protection functions more reliable.
[0005] This application provides an MOCVD cavity sector plate, including four sector sub-plates. The four sector sub-plates are distributed along the same plane and are joined together to form a whole annular plate. Each sector sub-plate has a first joint side and a second joint side. The first joint side is provided with a joint groove, and the second joint side is provided with a joint protrusion that cooperates with the joint groove. The joint protrusion can protrude from the second joint side and be inserted into the joint groove, thereby allowing the four sector sub-plates to join together to form a whole annular plate. The joint protrusion can also retract into the sector sub-plate.
[0006] In one possible implementation, the connecting groove is a strip-shaped groove that extends along the length of the first connecting side. The bottom of the connecting groove is integrally provided with an arc-shaped groove. The connecting protrusion is a strip-shaped protrusion, and the top of the connecting protrusion is integrally provided with an arc-shaped protrusion surface that matches the arc-shaped groove.
[0007] In one possible implementation, the mating groove is a toothed groove that extends along the width direction of the first mating side, and the mating protrusion is a toothed protrusion.
[0008] In one possible implementation, the fan-shaped sub-plate has a movable channel at one end near the second mating side that mates with the mating protrusion. The outer end of the movable channel has a strip-shaped hole. Both the movable channel and the strip-shaped hole extend circumferentially along the annular plate. A movable handle is provided in the strip-shaped hole. One end of the movable handle is vertically connected to the mating protrusion, and the other end protrudes from the outer end of the fan-shaped sub-plate.
[0009] In one possible implementation, the lower wall of the moving channel is provided with an anti-retraction protrusion, the anti-retraction protrusion and the second mating side are kept at a predetermined distance, such that when the mating protrusion passes the anti-retraction protrusion outward, it can protrude outward from the second mating side, and when the mating protrusion moves inward and passes the anti-retraction protrusion, it can retract into the moving channel.
[0010] In one possible implementation, the anti-retraction protrusion is made of quartz.
[0011] In one possible implementation, the anti-retraction protrusion extends perpendicular to the direction of movement of the connecting protrusion, and the cross-section of the anti-retraction protrusion is trapezoidal, the lower bottom of the anti-retraction protrusion is connected to the lower wall of the moving channel, and the corner of the upper bottom of the anti-retraction protrusion is an arc-shaped structure.
[0012] Beneficial effects: Compared with the prior art, the MOCVD cavity sector plate provided in this application has a joint groove and a joint protrusion respectively set on the first joint side and the second joint side of the four sector sub-plates. During operation, the connection between adjacent sector sub-plates can be effectively strengthened based on the cooperation relationship between the joint protrusion and the joint groove, making the overall structure of the sector plate more stable, the rectification and heat insulation protection more reliable, reducing the downtime caused by sector plate problems, and extending the equipment service life. At the same time, the joint protrusion can also be retracted into the sector sub-plate for convenient use.
[0013] These and other objects, features and advantages of this utility model will be fully realized through the following detailed description. Attached Figure Description
[0014] Figure 1 A three-dimensional structural schematic diagram of the MOCVD cavity sector plate of this application is shown, in which the specific structure of the first and second joint sides is shown only on two adjacent sector sub-plates.
[0015] Figure 2 The diagram shows a top view of the MOCVD cavity sector plate of this application.
[0016] Figure 3 A partial structural schematic diagram of the sector plate of the MOCVD cavity in this application is shown at one end of the second bonding side. Detailed Implementation
[0017] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of the present invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.
[0018] Those skilled in the art should understand that, in the disclosure of this specification, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on this utility model.
[0019] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.
[0020] refer to Figures 1 to 3This application provides an MOCVD cavity sector plate, including four sector sub-plates 10, wherein the four sector sub-plates 10 are distributed along the same plane and are joined together to form a whole annular plate 100. The sector sub-plates 10 have opposing first joint side 11 and second joint side 12, that is, in use, between adjacent sector sub-plates 10, the first joint side 11 of the first sector sub-plate 10 and the second joint side 12 of the second sector sub-plate 10 are joined together, the first joint side 11 of the second sector sub-plate 10 and the second joint side 12 of the third sector sub-plate 10 are joined together, the first joint side 11 of the third sector sub-plate 10 and the second joint side 12 of the fourth sector sub-plate 10 are joined together, and the first joint side 11 of the fourth sector sub-plate 10 and the second joint side 12 of the first sector sub-plate 10 are joined together. The first connecting side 11 is provided with a connecting groove 101. Correspondingly, the second connecting side 12 is provided with a connecting protrusion 111 that cooperates with the connecting groove 101. The connecting protrusion 111 can protrude from the second connecting side 12 and insert into the connecting groove 101, thereby allowing the four fan-shaped sub-plates 10 to connect and surround each other to form a whole annular plate 100. In this way, the connection tightness between adjacent fan-shaped sub-plates 10 can be effectively strengthened, making the combination of the whole annular plate 100 more stable and less prone to fan-shaped sub-plate 10 displacement. This makes the rectification and heat insulation protection functions of the fan-shaped plate more reliable, reduces the downtime caused by fan-shaped plate problems, and extends the service life of the equipment. In addition, when needed, the connecting protrusion 111 can also be retracted into the fan-shaped sub-plate 10 for convenient use.
[0021] In one embodiment, the connecting groove 101 is a strip-shaped groove, and the connecting groove 101 extends along the length direction of the first connecting side 11. The bottom of the connecting groove 101 is integrally provided with an arc-shaped groove 102. Correspondingly, the connecting protrusion 111 is a strip-shaped protrusion, and the top of the connecting protrusion 111 is integrally provided with an arc-shaped protrusion surface 112 that cooperates with the arc-shaped groove 102. Thus, on the one hand, the connection stability between adjacent sector sub-plates 10 can be improved by the cooperation of the connecting groove 101 and the connecting protrusion 111. On the other hand, the contact area between the connecting groove 101 and the connecting protrusion 111 can be increased by the cooperation of the arc-shaped groove 102 and the arc-shaped protrusion surface 112, further improving the connection stability between adjacent sector sub-plates 10.
[0022] In another embodiment, the connecting groove 101 is a toothed groove, and the connecting groove 101 extends along the width direction of the first connecting side 11. Correspondingly, the connecting protrusion 111 is a toothed protrusion. In this way, the toothed groove and the toothed protrusion have a large contact area in a small space, which can directly improve the connection stability between adjacent sector sub-plates 10.
[0023] In one embodiment, the fan-shaped sub-plate 10 has a moving channel 103 at one end near the second mating side 12 that mates with the mating protrusion 111. Simultaneously, a strip-shaped hole 104 is provided at the outer end of the moving channel 103. Both the moving channel 103 and the strip-shaped hole 104 extend circumferentially along the annular plate. A moving handle 113 is provided within the strip-shaped hole 104. One end of the moving handle 113 is vertically connected to the mating protrusion 111, and the other end protrudes from the outer end of the fan-shaped sub-plate 10. Thus, the mating protrusion 111 can be directly moved by manipulating the moving handle 113, causing it to directionally move within the moving channel 103, protruding from the second mating side 12 and inserting into the mating groove 101, or moving the mating protrusion 111 away from the mating groove 101 and retracting into the fan-shaped sub-plate 10. This allows for rapid separation of the individual fan-shaped sub-plates 10.
[0024] More preferably, the lower wall of the moving channel 103 is provided with an anti-retraction protrusion 114, wherein the anti-retraction protrusion 114 and the second mating side 12 maintain a predetermined distance, such that when the mating protrusion 111 moves outward past the anti-retraction protrusion 114, it can protrude from the second mating side 12 and thus insert into the mating groove 101, and when the mating protrusion 111 moves inward past the anti-retraction protrusion 114, it can retract into the moving channel 103. The anti-retraction protrusion 114 mainly serves to prevent the mating protrusion 111 from disengaging from the mating groove 101, wherein when the mating protrusion 111 moves outward past the anti-retraction protrusion 114, the mating protrusion 111 forms a good fit with the mating groove 101. During operation, the mating protrusion 111 can be gently lifted by moving the handle 113, allowing the mating protrusion 111 to pass over the anti-retraction protrusion 114.
[0025] In one embodiment, the anti-retraction protrusion 114 is made of quartz.
[0026] In one embodiment, the anti-retraction protrusion 114 extends perpendicular to the moving direction of the connecting protrusion 111, and the cross-section of the anti-retraction protrusion 114 is trapezoidal. The lower bottom of the anti-retraction protrusion 114 is connected to the lower wall of the moving channel 103, and the corner of the upper bottom of the anti-retraction protrusion 114 is an arc-shaped structure, which can prevent the anti-retraction protrusion 114 from scratching the connecting protrusion 111 during operation.
[0027] It should be noted that the terms "first" and "second" used in this application are for descriptive purposes only and do not indicate any order. They should not be construed as indicating or implying relative importance, and can be interpreted as names.
[0028] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are merely examples and do not limit the present invention. The advantages of the present invention have been fully and effectively realized. The functional and structural principles of the present invention have been shown and explained in the embodiments, and any modifications or variations may be made to the implementation of the present invention without departing from the stated principles.
Claims
1. An MOCVD cavity sector plate, comprising four sector sub-plates, the four sector sub-plates being distributed along the same plane and interlocking to form a complete circular ring plate, characterized in that, The fan-shaped sub-plate has a first joint side and a second joint side. The first joint side is provided with a joint groove, and the second joint side is provided with a joint protrusion that cooperates with the joint groove. The joint protrusion can protrude out of the second joint side and insert into the joint groove, so that the four fan-shaped sub-plates can be joined together to form a whole ring plate. The joint protrusion can also be retracted into the fan-shaped sub-plate.
2. The MOCVD cavity sector plate as described in claim 1, characterized in that, The connecting groove is a strip-shaped groove that extends along the length of the first connecting side. The bottom of the connecting groove is integrally provided with an arc-shaped groove. The connecting protrusion is a strip-shaped protrusion, and the top of the connecting protrusion is integrally provided with an arc-shaped protrusion surface that matches the arc-shaped groove.
3. The MOCVD cavity sector plate as described in claim 1, characterized in that, The connecting groove is a toothed groove that extends along the width direction of the first connecting side surface, and the connecting protrusion is a toothed protrusion.
4. The MOCVD cavity sector plate as described in claim 2 or 3, characterized in that, The fan-shaped sub-plate has a movable channel at one end near the second connecting side that mates with the connecting protrusion. The outer end of the movable channel has a strip-shaped hole. Both the movable channel and the strip-shaped hole extend circumferentially along the annular plate. A movable handle is provided inside the strip-shaped hole. One end of the movable handle is vertically connected to the connecting protrusion, and the other end protrudes from the outer end of the fan-shaped sub-plate.
5. The MOCVD cavity sector plate as described in claim 4, characterized in that, The lower wall of the moving channel is provided with an anti-retraction protrusion. The anti-retraction protrusion and the second mating side are kept at a predetermined distance, so that when the mating protrusion passes the anti-retraction protrusion outward, it can protrude outward from the second mating side, and when the mating protrusion moves inward and passes the anti-retraction protrusion, it can retract into the moving channel.
6. The MOCVD cavity sector plate as described in claim 5, characterized in that, The anti-retraction protrusion is made of quartz.
7. The MOCVD cavity sector plate as described in claim 5, characterized in that, The anti-retraction protrusion extends perpendicular to the moving direction of the connecting protrusion, and the cross-section of the anti-retraction protrusion is trapezoidal. The lower bottom of the anti-retraction protrusion is connected to the lower wall of the moving channel, and the corner of the upper bottom of the anti-retraction protrusion is an arc-shaped structure.