Electroplating chuck and electroplating device

Abstract

The utility model discloses an electroplating chuck and an electroplating device, and relates to the technical field of electroplating, the electroplating chuck comprises a pressing assembly, a linkage assembly, a first metal clamping pin and a second metal clamping pin; the downward pressing assembly is fixedly installed on the top of the linkage assembly. The first metal clamping foot and the second metal clamping foot are fixedly installed at the bottom of the linkage assembly, and the first metal clamping foot and the second metal clamping foot are arranged in parallel. Each of the first metal clamping pin and the second metal clamping pin comprises a conductive section and a rubber coating section; the conductive section is close to the linkage assembly; the horizontal planes, close to each other, of the bottom of the rubber coating section are each provided with a contact conductive face and a contact insulating face, and the contact conductive face and the contact insulating face of the first metal clamping foot and the contact conductive face and the contact insulating face of the second metal clamping foot are arranged in a staggered mode. The beneficial effect of the utility model is that the problem of belt breakage caused by double-sided copper particles and copper thorns can be reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to electroplating technical field more specifically, relate to a kind of electroplating chuck and electroplating device. BACKGROUND

[0002] In electroplating industry, bilateral clamping equipment electric chuck as the key component connecting electroplating equipment and workpiece, its performance directly affects the stability of electroplating process and the quality of electroplating product.When the electric chuck appears uneven conduction and copper deposition at contact point position, it will trigger a series of chain reactions, eventually leading to the product unable to meet the high quality requirements of the industry for the length of the coil.Current electric chuck design faces the following problems and defects:

[0003] 1.Electroplating chuck uneven conduction: electroplating chuck should ensure uniform distribution of current on the surface of workpiece during electroplating process to form uniform and dense electroplating layer.However, when the chuck design is unreasonable, severe wear or clamping force is uneven, it will lead to uneven distribution of current on the surface of workpiece, with too high current density in some areas and too low current density in other areas.Finally, the thickness and physical properties of the product metal layer will not meet the customer's demand standard.

[0004] 2.Electroplating chuck and thin film contact point position copper deposition: due to uneven conduction, the contact point position often becomes the area where current concentrates, leading to rapid reduction and deposition of copper ions in this area, forming copper deposition phenomenon.Copper deposition is often irregular, with copper particles, copper slag, and severe copper spikes.Thin film moves under the clamping of electric chuck, and there is resistance in the plating solution, which is easily pierced by copper particles, copper slag and copper spikes at the contact position, and will break at the piercing position when it cannot withstand the resistance in the plating solution.The length of the coil is only a few tens of meters at the shortest, and more than two or three thousand meters, while the industry requires the length of the coil to be more than ten thousand meters. SUMMARY

[0005] In order to overcome the shortcomings of the prior art, the utility model provides an electroplating chuck and an electroplating device, which can effectively ensure stable current output and reduce the copper deposition rate of the thin film, thereby reducing the breakage problem caused by copper particles and copper spikes.

[0006] The technical solution adopted by the utility model to solve its technical problems is: an electroplating chuck, which is improved in that the electroplating chuck comprises a pressing assembly, a linkage assembly, a first metal clamp leg and a second metal clamp leg; the pressing assembly is fixedly installed on the top of the linkage assembly; the first metal clamp leg and the second metal clamp leg are fixedly installed on the bottom of the linkage assembly, and the first metal clamp leg and the second metal clamp leg are arranged in parallel with each other;

[0007] The first metal clamping leg and the second metal clamping leg each comprise a conductive section and a rubber-coated section; the conductive section is close to the linkage assembly; the bottom of the rubber-coated section is provided with a contact conductive surface and a contact insulating surface, and the contact conductive surface and the contact insulating surface of the first metal clamping leg are arranged in a staggered manner with the contact conductive surface and the contact insulating surface of the second metal clamping leg.

[0008] In the above structure, the lower pressing assembly comprises a pressing wheel, a pressing wheel mounting seat, a movable block, a pressing shaft and a first spring; the pressing wheel is rotationally connected with the pressing wheel mounting seat, and the pressing wheel is located at the end of the pressing wheel mounting seat; one end of the pressing wheel mounting seat is fixedly connected with the top of the movable block, and the other end is fixedly connected with the top of the pressing shaft; the bottom of the pressing shaft is fixedly connected with the linkage assembly; the first spring is fixedly connected between the movable block and the linkage assembly.

[0009] In the above structure, the lower pressing assembly further comprises a second spring and a cushion block; the second spring is fixedly connected between the movable block and the cushion block; the cushion block is fixed with the linkage assembly and is located on the side of the first spring away from the pressing shaft.

[0010] In the above structure, the linkage assembly comprises a connecting plate, a pressing block and a sliding block; the connecting plate is slidingly connected with one side of the cushion block and is fixedly connected with one side of the sliding block; the top of the pressing block is fixed with the first spring and the cushion block, and the bottom of the pressing block is fixed with the top of the sliding block; the top of the sliding block is fixed with the pressing shaft, and the bottom is fixed with the first metal clamping leg and the second metal clamping leg.

[0011] In the above structure, the linkage assembly further comprises a first fixing screw, and the connecting plate is provided with a vertical annular hole, and the first fixing screw passes through the vertical annular hole and is inserted into the cushion block.

[0012] In the above structure, the connecting plate is further provided with a fixed mounting hole, and the linkage assembly further comprises a second fixing screw, and the second fixing screw passes through the fixed mounting hole and is inserted into the sliding block.

[0013] In the above structure, the electroplating chuck further comprises a first mounting plate and a first fixed fastener pulley, and the first mounting plate is fixedly installed on the side of the cushion block away from the first spring; the first fixed fastener pulley is fixed with the first mounting plate.

[0014] In the above structure, the electroplating chuck further comprises a second mounting plate and a second fixed fastener pulley, and the second mounting plate is fixedly installed on the bottom of the connecting plate; the second fixed fastener pulley is fixed with the second mounting plate.

[0015] The utility model discloses an electroplating device, its improvement lies in, the electroplating device includes upper track, lower track and an electroplating chuck as mentioned above, the electroplating chuck is misaligned with the upper track and the lower track sliding connection.

[0016] The first metal clamping leg and the second metal clamping leg are composed of a rubber-coated section and a conductive section, the rubber-coated design of the rubber-coated section can effectively ensure current loss and stable transmission, and the current is transmitted to the surface of the film to the greatest extent, so that the stable current output is effectively ensured; the contact conductive surface and the contact insulating surface of the rubber-coated section of the first metal clamping leg and the second metal clamping leg are designed in a staggered manner, the uniformity of the pressure is effectively ensured, and the copper jointing rate and the risk of belt breakage are reduced; thereby, the belt breakage problem caused by the particles and copper spikes of double-sided copper jointing can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is an overall structure diagram of the electroplating chuck of the utility model Figure 1 ;

[0018] Figure 2 It is a schematic view of the contact conductive surface and the contact insulating surface of the electroplating chuck of the utility model

[0019] Figure 3 It is an overall structure diagram of the electroplating chuck of the utility model Figure 2 ;

[0020] Figure 4 It is an overall structure diagram of the electroplating device of the utility model. DETAILED DESCRIPTION

[0021] The utility model will be further described below in combination with the drawings and examples.

[0022] The concept, specific structure and technical effects of the utility model will be described clearly and completely in combination with examples and drawings to fully understand the purpose, features and effects of the utility model. Obviously, the described examples are only part of the examples of the utility model, not all examples, and other examples obtained by those skilled in the art without creative labor based on the examples of the utility model all belong to the protection scope of the utility model. In addition, all the coupling / connection relations involved in the patent do not mean that the components are directly connected, but means that a better coupling structure can be composed by adding or reducing coupling auxiliary parts according to the specific implementation situation. The technical features in the creation of the utility model can be combined interactively without mutual contradiction and conflict.

[0023] REFERENCE Figure 1 and Figure 2The utility model discloses a kind of electroplating chuck, electroplating chuck includes down pressure subassembly, linkage subassembly, first metal clamp leg 1 and second metal clamp leg 2;Down pressure subassembly is fixedly installed at the top of linkage subassembly;First metal clamp leg 1 and second metal clamp leg 2 are fixedly installed at the bottom of linkage subassembly, and first metal clamp leg 1 and second metal clamp leg 2 are mutually parallelly arranged;First metal clamp leg 1 and second metal clamp leg 2 all include conducting section and rubber-coated section;Conducting section is close to linkage subassembly;The bottom of rubber-coated section is mutually close horizontal surface and is provided with contact conducting surface 17 and contact insulating surface 18, and contact conducting surface 17 and contact insulating surface 18 of first metal clamp leg 1 and contact conducting surface 17 and contact insulating surface 18 of second metal clamp leg 2 are staggered and arranged.

[0024] It should be noted that in the embodiment, the downward pressing assembly is used to apply downward pressure, so that the first metal clamping leg 1 and the second metal clamping leg 2 can clamp the film; the linkage assembly is used to transmit the pressure applied by the downward pressing assembly to the first metal clamping leg 1 and the second metal clamping leg 2, so that the first metal clamping leg 1 and the second metal clamping leg 2 can approach each other; the first metal clamping leg 1 and the second metal clamping leg 2 are used to clamp the film to electroplate the film. Specifically, the first metal clamping leg 1 and the second metal clamping leg 2 each include a conductive section and a rubber-coated section. When the first metal clamping leg 1 and the second metal clamping leg 2 approach each other, the conductive sections of the first metal clamping leg 1 and the second metal clamping leg 2 contact each other. At this time, the first metal clamping leg 1 and the second metal clamping leg 2 are in electrical communication with each other, and current is output from the contact conductive surface 17 of the rubber-coated sections of the first metal clamping leg 1 and the second metal clamping leg 2 to the surface of the film to electroplate the film. In the implementation of the present application, the entire electroplating chuck is applied to a horizontal double-sided electroplating line device and is fixedly installed on a steel belt. The electroplating chuck translates with the operation of the steel belt. When the electroplating chuck runs below the track with the steel belt, the track applies pressure to the downward pressing assembly of the electroplating chuck, and the electroplating chuck continues to move forward. The linkage assembly, the first metal clamping leg 1, and the second metal clamping leg 2 will synchronously react to press the film tightly between the first metal clamping leg 1 and the second metal clamping leg 2. At this time, the first metal clamping leg 1 and the second metal clamping leg 2 are in electrical communication, and current is transmitted from the conductive sections of the first metal clamping leg 1 and the second metal clamping leg 2 to the contact conductive surface 17 of the rubber-coated sections of the first metal clamping leg 1 and the second metal clamping leg 2 and is output to the surface of the film to deposit a metal plating layer on the surface of the film. After electroplating is completed, the downward pressing assembly is separated from the downward pressing of the track, and the linkage assembly, the first metal clamping leg 1, and the second metal clamping leg 2 will synchronously react, and the first metal clamping leg 1 and the second metal clamping leg 2 will move away from each other. In this process, the first metal clamping leg 1 and the second metal clamping leg 2 are composed of rubber-coated sections and conductive sections. The rubber-coated design of the rubber-coated sections can effectively ensure current loss and stable transmission, and can maximize the transmission of current to the surface of the film to effectively ensure stable current output. The contact conductive surface 17 and the contact insulating surface 18 of the rubber-coated sections of the first metal clamping leg 1 and the second metal clamping leg 2 are designed in a staggered manner to effectively ensure pressure uniformity and reduce copper deposition rate and the risk of belt breakage. Thus, the problem of belt breakage caused by double-sided copper deposition and copper spikes can be reduced.

[0025] Reference Figure 1As shown in the figure, the pressing assembly comprises a pressing wheel 3, a pressing wheel mounting seat 20, a movable block 19, a pressing shaft 6, a first spring 4, a second spring 7 and a cushion block 8; the pressing wheel 3 is rotationally connected with the pressing wheel mounting seat 20, and the pressing wheel 3 is located at one end of the pressing wheel mounting seat 20 close to the movable block 19; one end of the pressing wheel mounting seat 20 is fixedly connected with the top of the movable block 19, and the other end is fixedly connected with the top of the pressing shaft 6; the bottom of the pressing shaft 6 is fixedly connected with the linkage assembly; the first spring 4 is fixedly connected between the movable block 19 and the linkage assembly; the second spring 7 is fixedly connected between the movable block 19 and the cushion block 8; the cushion block 8 is fixed with the linkage assembly and is located at one side of the first spring 4 away from the pressing shaft 6.

[0026] It should be noted that in the present embodiment, the pressing wheel 3 is used to transmit the pressure applied downward by the track; the movable block 19 is used to transmit the pressure from the pressing wheel 3 to the first spring 4, the second spring 7 and the pressing shaft 6; the first spring 4 is used to rebound after the pressing wheel 3 is released from the pressure of the track, so as to realize the mutual separation of the first metal clamping leg 1 and the second metal clamping leg 2; the pressing shaft 6 is used to transmit the pressure to the linkage assembly; the design of the second spring 7 and the cushion block 8 plays a limiting and buffering role in the path of the pressing wheel 3. Referring to Figure 3 As shown in the figure, in other embodiments, the pressing wheel 3 is located at one end of the pressing wheel mounting seat 20 close to the pressing shaft 6, and other technical features are the same as those of the above-mentioned embodiment and can achieve the same technical effects, which will not be described in detail here.

[0027] Continuing to refer to Figure 1 and Figure 3 As shown in the figure, the linkage assembly comprises a connecting plate 5, a pressing block, a sliding block 9, a first fixing screw 12 and a second fixing screw 10; the connecting plate 5 is slidingly connected with one side surface of the cushion block 8 and is fixedly connected with one side surface of the sliding block 9; the top of the pressing block is fixed with the first spring 4 and the cushion block 8, and the bottom of the pressing block is fixed with the top of the sliding block 9; the top of the sliding block 9 is fixed with the pressing shaft 6, and the bottom is fixed with the first metal clamping leg 1 and the second metal clamping leg 2; the connecting plate 5 is provided with a vertical annular hole 11, and the first fixing screw 12 passes through the vertical annular hole 11 and is inserted into the cushion block 8; the connecting plate 5 is also provided with a fixed mounting hole, and the second fixing screw 10 passes through the fixed mounting hole and is inserted into the sliding block 9.

[0028] It should be noted that in the present embodiment, the connecting plate 5 is designed to connect the cushion block 8 and the sliding block 9, and the design of the first fixing screw 12 and the vertical annular hole 11 allows the sliding block 9 to slide in the vertical direction; the pressing block is used to receive the downward pressure from the first spring 4 and transmit it to the sliding block 9; the sliding block 9 is used to transmit the pressure from the pressing shaft 6 and the pressing block, so that the first metal clamping leg 1 and the second metal clamping leg 2 are close to each other and conductive, so as to clamp and electroplate the film; the design of the second fixing screw 10 is to fixedly connect the connecting plate 5 and the sliding block 9.

[0029] With reference to the accompanying drawings Figure 1 and Figure 3 As shown in the figure, the electroplating clamp head further comprises a first mounting plate 14, a first fixed fastener pulley 13, a second mounting plate 16 and a second fixed fastener pulley 15, the first mounting plate 14 is fixedly installed on the side of the cushion block 8 away from the first spring 4, the first fixed fastener pulley 13 is fixed with the first mounting plate 14, the second mounting plate 16 is fixedly installed on the bottom of the connecting plate 5, and the second fixed fastener pulley 15 is fixed with the second mounting plate 16.

[0030] It should be noted that in the embodiment, the first mounting plate 14 is designed to install the first fixed fastener pulley 13, the second mounting plate 16 is designed to install the second fixed fastener pulley 15, and the first fixed fastener pulley 13 and the second fixed fastener pulley 15 are designed to fix the entire electroplating clamp head on the steel belt to ensure that the electroplating clamp head translates with the steel belt.

[0031] Referring to the figure Figure 4 The utility model discloses further disclose an electroplating device, electroplating device includes the upper track 21, lower track 22 and like above-mentioned embodiment an electroplating clamp head, and electroplating clamp head is in staggered with upper track 21 and lower track 22 sliding connection.

[0032] In the copper electroplating of the thin film, the size of the current density directly affects the thickness of the copper layer deposited on the surface of the thin film. Generally speaking, the higher the current density, the faster the deposition speed, but it may also lead to uneven plating layer thickness and burning hole defects. Therefore, when electroplating copper, low current density is needed for plating layer filling, and high current density is needed for thickening. In this process, it is particularly important to control the current density reasonably. In the embodiment, the bottom of the upper track 21 and the lower track 22 forms a stepped running track. The bottom of the upper track 21 is slidingly connected with the pressure roller 3 located at one end of the pressure roller mounting seat 20 close to the pressure shaft 6. The bottom of the lower track 22 is slidingly connected with the pressure roller 3 located at one end of the pressure roller mounting seat 20 close to the movable block 19. The pressure rollers 3 passing through the upper track 21 and the lower track 22 are arranged in a staggered manner. When the electroplating clamp head enters the upper track 21 and the lower track 22, the electroplating clamp head passing through the upper track 21 is in an open state, and the electroplating clamp head passing through the lower track 22 is in a closed state. This design makes the electroplating clamp head jump between the open and closed states when passing through the upper track 21 and the lower track 22, which can lengthen the distance between the clamping points of the electroplating clamp head, effectively reduce the current density, and ensure the uniformity of the plating layer thickness during the plating layer filling process. After ensuring the uniformity of the plating layer of the thin film by using low current density, the thin film can withstand a larger current density in the high current area slot to quickly and stably achieve plating layer thickening.

[0033] The above is a specific description of the preferred embodiment of the present application, but the present application is not limited to the described embodiment, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the present application, and these equivalent modifications or replacements are all included in the scope defined by the claims of the present application.

Claims

1. An electroplating collet, characterized by, The electroplating clamp head comprises a pressing assembly, a linkage assembly, a first metal clamp leg and a second metal clamp leg; the pressing assembly is fixedly installed on the top of the linkage assembly; the first metal clamp leg and the second metal clamp leg are fixedly installed on the bottom of the linkage assembly, and the first metal clamp leg and the second metal clamp leg are arranged in parallel with each other; The first metal clamp leg and the second metal clamp leg each comprise a conductive section and a rubber-coated section; the conductive section is close to the linkage assembly; the bottom of the rubber-coated section is provided with a contact conductive surface and a contact insulating surface on a horizontal plane close to each other, and the contact conductive surface and the contact insulating surface of the first metal clamp leg are arranged in a staggered manner with the contact conductive surface and the contact insulating surface of the second metal clamp leg.

2. An electroplating collet according to claim 1, wherein The pressing assembly comprises a pressing wheel, a pressing wheel mounting seat, a movable block, a pressing shaft and a first spring; the pressing wheel is rotationally connected with the pressing wheel mounting seat, and the pressing wheel is located at the end of the pressing wheel mounting seat; one end of the pressing wheel mounting seat is fixedly connected with the top of the movable block, and the other end is fixedly connected with the top of the pressing shaft; the bottom of the pressing shaft is fixedly connected with the linkage assembly; the first spring is fixedly connected between the movable block and the linkage assembly.

3. An electroplating collet according to claim 2, wherein, The pressing assembly further comprises a second spring and a pad; the second spring is fixedly connected between the movable block and the pad; the pad is fixed with the linkage assembly, and is located on the side of the first spring away from the pressing shaft.

4. A plating collet according to claim 3, wherein The linkage assembly comprises a connecting plate, a pressing block and a sliding block; the connecting plate is slidingly connected with one side of the pad, and is fixedly connected with one side of the sliding block; the top of the pressing block is fixed with the first spring and the pad, and the bottom of the pressing block is fixed with the top of the sliding block; The top of the sliding block is fixed with the pressing shaft, and the bottom is fixed with the first metal clamp leg and the second metal clamp leg.

5. An electroplating collet according to claim 4, wherein, The connecting plate is further provided with a vertical annular hole, and the first fixing screw passes through the vertical annular hole and is inserted into the pad.

6. The electroplating collet of claim 4, wherein, The connecting plate is further provided with a fixed mounting hole, and the linkage assembly further comprises a second fixing screw, which passes through the fixed mounting hole and is inserted into the sliding block.

7. The electroplating collet of claim 4, wherein, The electroplating clamp head further comprises a first mounting plate and a first fixed buckle pulley; the first mounting plate is fixedly installed on the side of the pad away from the first spring; and the first fixed buckle pulley is fixed with the first mounting plate.

8. An electroplating collet according to claim 7, wherein, The electroplating clamp head further comprises a second mounting plate and a second fixed buckle pulley; the second mounting plate is fixedly installed on the bottom of the connecting plate; and the second fixed buckle pulley is fixed with the second mounting plate.

9. An electroplating apparatus characterized by comprising: The electroplating device comprises an upper track, a lower track and an electroplating clamp head according to any one of claims 1-8, and the electroplating clamp head is slidingly connected with the upper track and the lower track in a staggered manner.

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