Sealing device of magnetron sputtering cathode

Abstract

The utility model belongs to the field of sealing equipment, and discloses a sealing device of a magnetron sputtering cathode, which comprises a shell sleeve sleeved on the outer side of a main shaft, the diameter of the inner side of the shell sleeve is greater than that of the main shaft; a skeleton seal which is coaxially arranged is fixed on the peripheral wall of the inner side of the shell sleeve; three bearing rings are sequentially arranged on the inner side of the framework seal in the axis direction of the main shaft, a gap is reserved between every two adjacent bearing rings, the inner side circumferential walls of the bearing rings make extrusion contact with the outer side wall of the main shaft, and the outer side circumferential walls of the bearing rings are fixed to the inner side circumferential wall of the framework seal. Any end of the sealing device is in contact with cooling water, and a gap between two adjacent bearing rings close to the end, in contact with the cooling water, of the sealing device is filled with lubricating grease; through the matched arrangement of the three layers of bearing rings and the lubricating grease, the sealing effect is improved through the lubricating grease, and meanwhile the problem that in the prior art, the sealing effect is reduced due to the fact that the framework seal and the main shaft are prone to abrasion is solved.

Description

Technical Field

[0001] This utility model belongs to the field of sealing equipment, specifically relating to a sealing device for a magnetron sputtering cathode. Background Technology

[0002] Magnetron sputtering cathodes carry high voltage during operation, and leakage can cause local short circuits and leakage current, so the sealing requirements are very high. The skeleton oil seal is the main component of the sealing structure of the magnetron sputtering cathode. It is installed at the cathode water seal. By using the fit between the skeleton oil seal and the spindle, it is ensured that the spindle and the skeleton oil seal can seal the cooling water when the magnetron sputtering cathode is rotating, thus preventing cooling water leakage.

[0003] However, in actual use, due to the rotation of the spindle, the skeleton seal is prone to wear during long-term operation, which causes the skeleton seal to not fit tightly with the spindle, resulting in a reduced sealing effect and easy leakage of cooling water, posing certain safety hazards. The skeleton seal usually needs to be replaced regularly. Therefore, the existing technology has the problem that the sealing effect between the skeleton seal and the spindle is easily reduced due to wear. Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a sealing device for a magnetron sputtering cathode, which solves the problem that the sealing effect is easily reduced due to wear between the skeleton seal and the spindle in the prior art.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] A sealing device for a magnetron sputtering cathode includes a housing sleeve fitted over the outside of a spindle;

[0007] The housing and the main shaft are placed on the same axis, and the inner diameter of the housing is larger than the diameter of the main shaft;

[0008] A coaxially placed skeleton seal is fixed on the inner peripheral wall of the casing;

[0009] Three bearing rings are arranged sequentially along the axis of the main shaft on the inner side of the skeleton seal. A gap is left between each pair of adjacent bearing rings. The inner peripheral walls of the bearing rings are in contact with the outer peripheral walls of the main shaft, and the outer peripheral walls of the bearing rings are fixed to the inner peripheral walls of the skeleton seal.

[0010] Either end of the sealing device is used for contact with cooling water, and the gap between the two adjacent bearing rings near the end of the sealing device that contacts the cooling water is filled with lubricating grease.

[0011] The principle and effect of the above technical solution are as follows:

[0012] During operation, the spindle rotates, and one end of the sealing device comes into contact with the cooling water. The bearing ring closest to the end of the sealing device that contacts the cooling water directly contacts the cooling water, simultaneously providing a certain degree of sealing to reduce leakage. The lubricating grease in the gap between the two adjacent bearing rings near the cooling water end fits tightly with the spindle, achieving a good oil seal effect and further sealing the cooling water. When the lubricating grease fails due to prolonged lack of replacement and leakage occurs, the bearing ring furthest from the end in contact with the cooling water provides an emergency seal in such cases. Through the coordinated arrangement of the three bearing rings and lubricating grease, the sealing effect is improved by the lubricating grease while preventing wear on the skeleton seal caused by spindle rotation. This solves the problem in existing technologies where wear between the skeleton seal and the spindle easily reduces the sealing effect.

[0013] Multiple injection holes are provided on the outer peripheral wall of the casing. All injection holes penetrate the skeleton seal and extend into the space between two adjacent bearing rings for filling lubricating grease.

[0014] Each injection hole is equipped with a detachable plug;

[0015] The plug includes a bolt;

[0016] The injection holes are all provided with threaded grooves on the peripheral wall away from the spindle end, and the injection holes are all connected to bolts through the threaded grooves;

[0017] Multiple annular grooves are provided on the outer peripheral wall of the skeleton seal. The annular grooves are all placed coaxially with the main shaft. A sealing ring is placed in each annular groove. The outer side of the sealing ring is in contact with the inner peripheral wall of the shell, and the inner side of the sealing ring is in contact with the groove wall of the annular groove.

[0018] The housing is provided with a drain hole, which passes through the skeleton seal and extends into the gap between two adjacent bearing rings away from the lubricating grease end;

[0019] The support ring is made of rubber or silicone material.

[0020] The beneficial effects of this utility model are:

[0021] 1. One end of the sealing device contacts the cooling water. The bearing ring closest to the end of the sealing device that contacts the cooling water directly contacts the cooling water, providing a certain degree of sealing to reduce leakage. The lubricating grease in the gap between the two adjacent bearing rings near the cooling water end fits tightly with the spindle, achieving a good oil seal effect and further sealing the cooling water. When the lubricating grease fails due to prolonged lack of replacement and leakage occurs, the bearing ring furthest from the cooling water end provides an emergency seal in such cases. Through the coordinated arrangement of the three bearing rings and lubricating grease, the sealing effect is improved by the lubricating grease while preventing wear on the skeleton seal caused by spindle rotation. This solves the problem in existing technologies where wear between the skeleton seal and the spindle easily reduces the sealing effect.

[0022] 2. The combination of the injection hole and the plug facilitates the filling and injection of lubricating grease, while preventing leakage during use and effectively ensuring the stability of the internal lubricating grease; the lubricating grease can be easily replaced after the plug is removed.

[0023] 3. By setting the sealing ring, the sealing performance between the skeleton seal and the shell is further improved. At the same time, the opening of the annular groove effectively improves the stability of the sealing ring placement.

[0024] 4. By opening the drain hole, when the lubricating grease fails and liquid leakage occurs, the leaked liquid can be discharged in an emergency through the drain hole, improving the safety performance of the sealing device. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0027] Figure 2 This is a schematic diagram of the cross-sectional structure of the shell of this utility model;

[0028] Figure 3 This is a schematic cross-sectional view of the overall structure of this utility model;

[0029] Figure 4 This is a cross-sectional schematic diagram of the skeleton sealing part of this utility model; Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0031] like Figures 1 to 4 As shown, a sealing device for a magnetron sputtering cathode includes a housing 200 sleeved on the outside of the spindle 100.

[0032] The housing 200 and the main shaft 100 are placed on the same axis, and the inner diameter of the housing 200 is larger than the diameter of the main shaft 100.

[0033] A skeleton seal 300 is fixed on the inner peripheral wall of the housing 200, which is placed coaxially.

[0034] Three bearing rings 400 are arranged sequentially along the axis of the main shaft 100 on the inner side of the skeleton seal 300. There is a gap between each pair of adjacent bearing rings 400. The inner peripheral wall of the bearing ring 400 is in contact with the outer peripheral wall of the main shaft 100, and the outer peripheral wall of the bearing ring 400 is fixed to the inner peripheral wall of the skeleton seal 300.

[0035] Either end of the sealing device is used for contact with cooling water, and the gap between two adjacent bearing rings 400 near the end of the sealing device that contacts the cooling water is filled with lubricating grease.

[0036] During operation, the spindle 100 rotates, and one end of the sealing device comes into contact with the cooling water. The bearing ring 400 closest to the end of the sealing device that contacts the cooling water directly contacts the cooling water, simultaneously providing a certain degree of sealing to reduce leakage. The lubricating grease in the gap between the two adjacent bearing rings 400 near the cooling water end fits tightly with the spindle 100, achieving a good oil seal effect and further sealing the cooling water. When the lubricating grease fails due to prolonged lack of replacement and leakage occurs, the bearing ring 400 furthest from the end in contact with the cooling water provides an emergency seal in such cases. Through the coordinated arrangement of the three bearing rings 400 and the lubricating grease, the sealing effect is improved by the lubricating grease while preventing wear on the skeleton seal 300 caused by the rotation of the spindle 100. This solves the problem in the prior art where wear between the skeleton seal 300 and the spindle 100 easily reduces the sealing effect.

[0037] Preferably, the lubricating grease can be selected from various types such as polytetrafluoroethylene grease, fully synthetic grease, and fluorocarbon grease.

[0038] Multiple injection holes 201 are provided on the outer peripheral wall of the housing 200. The injection holes 201 all penetrate the skeleton seal 300 and extend into the space between two adjacent bearing rings 400 for filling with lubricating grease. The multiple injection holes 201 facilitate the filling and injection of lubricating grease.

[0039] Each injection hole 201 is equipped with a detachable plug 500; the plug 500 is used to seal the injection hole 201 to prevent the lubricating grease from flowing out, while ensuring the stability of the lubricating grease inside.

[0040] The 500 plug includes a bolt;

[0041] Each injection hole 201 has a threaded groove on its peripheral wall at the end away from the main shaft 100. Each injection hole 201 is connected to a bolt through the threaded groove. The bolts are used to seal each injection hole 201, preventing the lubricating grease from flowing out and ensuring the stability of the lubricating grease inside. When the lubricating grease needs to be replaced, the bolts can be unscrewed to replace the lubricating grease in the sealing device.

[0042] Multiple annular grooves 301 are formed on the outer peripheral wall of the skeleton seal 300. All annular grooves 301 are placed coaxially with the main shaft 100. A sealing ring 600 is placed in each annular groove 301. The outer side of the sealing ring 600 is in contact with the inner peripheral wall of the housing 200, and the inner side of the sealing ring 600 is in contact with the groove wall of the annular groove 301. The opening of the annular grooves 301 can improve the stability of the placement of the sealing ring 600. The setting of multiple sealing rings 600 can further improve the sealing performance between the skeleton seal 300 and the housing 200.

[0043] Preferably, the sealing ring 600 is made of rubber or silicone material.

[0044] The housing 200 has a drain hole 202, which penetrates the skeleton seal 300 and extends into the gap between two adjacent bearing rings 400 away from the lubricating grease end. When the lubricating grease fails and a small amount of cooling water leaks to the bearing ring 400 away from the lubricating grease end, the cooling water can be discharged through the drain hole 202. The drain hole 202 is normally open and is an emergency protection measure.

[0045] The bearing ring 400 is made of rubber or silicone material; during installation, the inner side of the bearing ring 400 can be squeezed into contact with the spindle 100, which effectively improves the sealing effect.

[0046] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims of this utility model.

Claims

1. A sealing device for a magnetron sputtering cathode, comprising a housing (200) sleeved on the outside of a main shaft (100), characterized in that: The housing (200) and the main shaft (100) are placed on the same axis, and the inner diameter of the housing (200) is larger than the diameter of the main shaft (100); A skeleton seal (300) is fixed on the inner peripheral wall of the shell (200) and placed on the same axis. Three bearing rings (400) are arranged sequentially along the axis of the main shaft (100) on the inner side of the skeleton seal (300). There is a gap between each pair of adjacent bearing rings (400). The inner peripheral wall of the bearing ring (400) is in contact with the outer peripheral wall of the main shaft (100), and the outer peripheral wall of the bearing ring (400) is fixed to the inner peripheral wall of the skeleton seal (300). Either end of the sealing device is used for contact with cooling water, and the gap between two adjacent bearing rings (400) near the end of the sealing device that contacts the cooling water is filled with lubricating grease.

2. The sealing device for the magnetron sputtering cathode according to claim 1, characterized in that, Multiple injection holes (201) are provided on the outer peripheral wall of the housing (200). The injection holes (201) all penetrate the housing (200) and the skeleton seal (300), and the injection holes (201) lead to the gap between two adjacent bearing rings (400) that need to be filled with lubricating grease.

3. The sealing device for the magnetron sputtering cathode according to claim 2, characterized in that, Each injection hole (201) is equipped with a detachable plug (500).

4. The sealing device for the magnetron sputtering cathode according to claim 3, characterized in that, The plug (500) includes a bolt; Each injection hole (201) has a threaded groove on the peripheral wall at the end away from the main shaft (100), and each injection hole (201) is threaded with a bolt through the threaded groove.

5. The sealing device for the magnetron sputtering cathode according to claim 4, characterized in that, Multiple annular grooves (301) are provided on the outer peripheral wall of the skeleton seal (300). The annular grooves (301) are all placed coaxially with the main shaft (100). A sealing ring (600) is placed in each annular groove (301). The outer side of the sealing ring (600) is in contact with the inner peripheral wall of the shell (200), and the inner side of the sealing ring (600) is in contact with the groove wall of the annular groove (301).

6. The sealing device for the magnetron sputtering cathode according to claim 5, characterized in that, The housing (200) has a drain hole (202) that penetrates the skeleton seal (300) and extends into the gap between two adjacent bearing rings (400) away from the lubricating grease end.

7. The sealing device for the magnetron sputtering cathode according to claim 6, characterized in that, The support ring (400) is made of rubber or silicone material.

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