PVD coating equipment cavity vacuum degree detection device

Abstract

The utility model discloses a PVD (Physical Vapor Deposition) coating equipment cavity vacuum degree detection device, which relates to the technical field of vacuum degree detection, and comprises a machine body and a detection box, and the detection box is arranged at the upper end of the machine body; the air inlet pipe is installed on one side of the exterior of the detection box and communicates with the interior of the detection box, an air outlet pipe is arranged on the exterior of the other side of the detection box and communicates with the interior of the detection box, a filter box is connected to the end, away from the detection box, of the air inlet pipe, and the filter box is arranged between the connecting pipe and the air inlet pipe; the other end of the connecting pipe is connected with a cavity of the coating equipment, gas in the cavity is introduced into the detection box through the connecting pipe and the gas inlet pipe, and when the gas passes through the filter box, fine impurities contained in the gas are isolated through the filter element, so that the gas smoothly enters the detection box to be detected; therefore, fine impurities in the gas are prevented from entering the detection box to influence the detection result.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum degree detection technical field, concretely is a kind of PVD coating equipment cavity vacuum degree detection device. BACKGROUND

[0002] PVD coating equipment cavity vacuum degree detection device is used to measure the key equipment of PVD (physical vapor deposition) coating equipment cavity vacuum degree, when the gas to be measured enters detection device, gas molecules are ionized to produce ion flow, the intensity of ion flow is proportional to the pressure of the gas to be measured. By observing the ion flow intensity or pressure value displayed on the detection device, the vacuum degree of the cavity can be judged.

[0003] The existing detection device introduces the gas in the cavity into the detection device for detection, and discharges the gas after detection processing, however, the gas inside the cavity may contain fine impurities, which may affect the accuracy of detection after being introduced into the detection device; therefore, we propose a PVD coating equipment cavity vacuum degree detection device to solve the problems raised in the above background. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of PVD coating equipment cavity vacuum degree detection device to solve the problem that the gas inside the cavity may contain fine impurities, which may affect the accuracy of detection after being introduced into the detection device as described in the above background.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of PVD coating equipment cavity vacuum degree detection device, including body and detection box, the detection box is installed at the upper end of body;

[0006] Further comprising:

[0007] Gas inlet pipe is installed at the outer side of detection box, and the gas inlet pipe is communicated with the inside of detection box, the other side of detection box is provided with gas outlet pipe outside, and the gas outlet pipe is communicated with the inside of detection box, the end of gas inlet pipe away from detection box is connected with filter box, and the gas inlet pipe is communicated with the inside of filter box, the inside of filter box is integrally provided with inner groove, and the upper end of inner groove is open type, the other end of filter box is connected with connecting pipe, and the connecting pipe is communicated with the inside of filter box, the inside of inner groove is installed with filter core, and the filter core is installed at the end of inner groove inside close to gas inlet pipe, the upper end surface of filter box is installed with cover plate, and the cover plate is opened and closed by connecting shaft.

[0008] Preferably, the inner groove is provided with a limiting block near one side of the air inlet pipe, the inner side of the limiting block is integrally provided with a clamping groove, the upper end of the clamping groove is open, the filter core is provided with a connecting ring at one end near the air inlet pipe, the connecting ring is clamped in the clamping groove, and the filter core is installed in the filter box through the connecting ring.

[0009] Preferably, one side of the cover plate is provided with a second connecting piece, the surface of the second connecting piece is provided with a round hole, one side of the filter box is provided with a first connecting piece, the first connecting piece is attached to the second connecting piece when the cover plate is closed, the surface of the first connecting piece is provided with a round hole, and the first connecting piece and the second connecting piece are connected and fixed through a connecting bolt.

[0010] Preferably, the other end of the exhaust pipe is provided with a one-way plate, the upper end of the one-way plate is provided with a connecting block, the upper side of the other end of the exhaust pipe is provided with a connecting seat, the connecting seat and the connecting block are connected through a rotating shaft, and the connecting part between the connecting seat and the connecting block is provided with a reset spring.

[0011] Preferably, the bottom of the machine body is provided with a shock pad.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] (1), by setting the filter box between the connecting pipe and the air inlet pipe, the other end of the connecting pipe is connected with the cavity of the coating equipment, the gas in the cavity is introduced into the inside of the detection box through the connecting pipe and the air inlet pipe, when the gas passes through the filter box, the fine impurities contained in the gas are isolated by the filter core, so that the gas can smoothly enter the detection box for detection, thereby preventing the fine impurities in the gas from entering the inside of the detection box and affecting the detection result.

[0014] (2), by installing the cover plate on the upper end of the filter box, the cover plate is opened and closed through the rotating shaft, and the cover plate is locked and closed through the connecting bolt, when the filter core needs to be replaced, the cover plate can be opened, the filter core can be taken out, the filter core can be quickly replaced, and the inner groove on one side of the filter box is provided with a limiting block, which can be clamped and connected with the connecting ring at the front end of the filter core, so that the filter core is fixed. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a first view schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a second view schematic diagram of the overall structure of the utility model;

[0017] Figure 3 It is an exhaust pipe structure schematic diagram of the utility model;

[0018] Figure 4 The filter box internal structure schematic view of the utility model;

[0019] In the drawing: 1, machine body; 2, detection box; 3, shock pad; 4, exhaust pipe; 5, air inlet pipe; 6, connecting pipe; 7, filter box; 8, one-way board; 9, connecting seat; 10, connecting block; 11, filter core; 12, cover plate; 13, inner groove; 14, limit clamping block; 15, connecting ring; 16, first connecting piece; 17, second connecting piece; 18, connecting bolt; 19, clamping groove. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0021] The utility model provides a kind of PVD coating equipment cavity vacuum degree detection device, and the device includes machine body 1 and detection box 2, detection box 2 is installed in the upper end of machine body 1.The utility model mainly solves the problem that gas in cavity interior can contain fine impurities, and after introducing detection device, it is easy to produce influence on the accuracy of detection.

[0022] For the device provided by the utility model, please refer to Figures 1-4 , specific introduction is made as follows.

[0023] The air inlet pipe 5 is installed on the outer side of the detection box 2, and the air inlet pipe 5 is in communication with the inside of the detection box 2, the other outer side of the detection box 2 is provided with an air outlet pipe, and the air outlet pipe is in communication with the inside of the detection box 2, the end of the air inlet pipe 5 away from the detection box 2 is connected with the filter box 7, and the air inlet pipe 5 is in communication with the inside of the filter box 7, the inside of the filter box 7 is integrally provided with an inner groove 13, and the upper end of the inner groove 13 is provided in an open manner, the other end of the filter box 7 is connected with the connecting pipe 6, and the connecting pipe 6 is in communication with the inside of the filter box 7, the inner groove 13 is installed with a filter core 11, and the filter core 11 is installed at one end of the inner groove 13 close to the air inlet pipe 5, the upper end surface of the filter box 7 is installed with a cover plate 12, and the cover plate 12 is opened and closed by a connecting shaft, the bottom of the machine body 1 is installed with a shock pad 3, which can play a damping role when the machine body 1 vibrates, the other end of the air outlet pipe 4 is installed with a one-way plate 8, the upper end of the one-way plate 8 is provided with a connecting block 10, the other end of the air outlet pipe 4 is provided with a connecting seat 9 above, and the connecting seat 9 and the connecting block 10 are connected through a rotating shaft, and a reset spring is arranged between the connecting seat 9 and the connecting block 10, so that the front end of the air outlet pipe 4 forms a one-way structure to prevent gas backflow, the filter box 7 is arranged between the connecting pipe 6 and the air inlet pipe 5, the other end of the connecting pipe 6 is connected with the cavity of the coating equipment, the gas in the cavity is introduced into the inside of the detection box 2 through the connecting pipe 6 and the air inlet pipe 5, when the gas passes through the filter box 7, the filter core 11 separates the fine impurities contained in the gas, so that the gas smoothly enters the detection box 2 for detection, thereby preventing fine impurities in the gas from entering the inside of the detection box 2 and affecting the detection result.

[0024] Further illustrate, the inner groove 13 is close to the side of the air inlet pipe 5 is provided with a limit card block 14, the inner side of the limit card block 14 is integrally formed with a clamping groove 19, and the upper end of the clamping groove 19 is open, the filter element 11 is installed with a connecting ring 15 close to one end of the air inlet pipe 5, the connecting ring 15 is clamped in the inside of the clamping groove 19, and the filter element 11 is installed in the inside of the filter box 7 through the connecting ring 15, the filter element 11 can be disassembled and replaced, one side of the cover plate 12 is provided with a second connecting piece 17, and the surface of the second connecting piece 17 is provided with a round hole, one side of the filter box 7 is provided with a first connecting piece 16, the first connecting piece 16 is attached to the second connecting piece 17 when the cover plate 12 is closed, and the surface of the first connecting piece 16 is provided with a round hole, the first connecting piece 16 and the second connecting piece 17 are connected and fixed through the connecting bolt 18, the cover plate 12 can be closed through the connecting bolt 18, the cover plate 12 is installed on the upper end of the filter box 7, the cover plate 12 is opened and closed through the rotating shaft, and the cover plate is locked and closed through the connecting bolt 18, when the filter element 11 needs to be replaced, the cover plate 12 can be opened, the filter element 11 can be taken out, the filter element 11 can be quickly replaced, and the limit card block 14 is arranged on one side of the inner groove 13 in the filter box 7, so that the connecting ring 15 at the front end of the filter element 11 can be clamped and connected, so that the filter element 11 is conveniently fixed.

[0025] It will be apparent to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Thus, the embodiments should be considered in all respects as illustrative and not restrictive, the scope of the present application being indicated by the appended claims rather than by the above description, and it is intended to be encompassing of all equivalents within the meaning and range of equivalents of the claims. Any reference signs in the claims should not be construed as limiting the claims to the figures in which the reference signs are used.

Claims

1. A PVD coating equipment cavity vacuum degree detection device, comprising a machine body (1) and a detection box (2), the detection box (2) is installed at the upper end of the machine body (1); characterized in that Further comprising: An air inlet pipe (5) is installed on the outer side of the detection box (2), and the air inlet pipe (5) is in communication with the inside of the detection box (2), the other outer side of the detection box (2) is provided with an air outlet pipe (4), and the air outlet pipe (4) is in communication with the inside of the detection box (2), one end of the air inlet pipe (5) away from the detection box (2) is connected with a filter box (7), and the air inlet pipe (5) is in communication with the inside of the filter box (7), an inner groove (13) is integrally formed in the inside of the filter box (7), and the upper end of the inner groove (13) is open, the other end of the filter box (7) is connected with a connecting pipe (6), and the connecting pipe (6) is in communication with the inside of the filter box (7), a filter element (11) is installed in the inside of the inner groove (13), and the filter element (11) is installed at one end of the inner groove (13) close to the air inlet pipe (5), a cover plate (12) is installed on the upper end surface of the filter box (7), and the cover plate (12) is opened and closed by a connecting shaft.

2. The vacuum degree detection device for the chamber of the PVD coating equipment according to claim 1, characterized in that: The side of the inner groove (13) close to the air inlet pipe (5) is provided with a limiting clamping block (14), the inner side of the limiting clamping block (14) is integrally formed with a clamping groove (19), and the upper end of the clamping groove (19) is open, one end of the filter element (11) close to the air inlet pipe (5) is provided with a connecting ring (15), the connecting ring (15) is movably clamped in the inside of the clamping groove (19), and the filter element (11) is installed in the inside of the filter box (7) through the connecting ring (15).

3. The vacuum degree detection device for the chamber of the PVD coating machine according to claim 1, wherein: The side of the cover plate (12) is provided with a second connecting piece (17), and the surface of the second connecting piece (17) is provided with a circular hole, the side of the filter box (7) is provided with a first connecting piece (16), the first connecting piece (16) is attached to the second connecting piece (17) when the cover plate (12) is closed, and the surface of the first connecting piece (16) is provided with a circular hole, the first connecting piece (16) and the second connecting piece (17) are connected and fixed by a connecting bolt (18).

4. The vacuum degree detection device for the chamber of the PVD coating machine according to claim 1, characterized in that: The other end of the air outlet pipe (4) is provided with a one-way plate (8), the upper end of the one-way plate (8) is provided with a connecting block (10), the other end of the air outlet pipe (4) is provided with a connecting seat (9), and the connecting seat (9) and the connecting block (10) are connected by a rotating shaft, and a reset spring is arranged at the connection between the connecting seat (9) and the connecting block (10).

5. The vacuum degree detection device for the chamber of the PVD coating machine according to claim 1, characterized in that: The bottom of the machine body (1) is provided with a shock pad (3).

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