Butt joint mechanism for high-temperature nitrogen blowing test probe card

Abstract

The utility model discloses a butt joint mechanism for a high-temperature nitrogen blowing test probe card, which relates to the technical field of semiconductor test equipment and comprises a lower butt joint seat, an upper butt joint seat, a butt joint groove, a butt joint plate, a first sealing mechanism arranged on the lower butt joint seat, a second sealing mechanism arranged on the upper butt joint seat, an air groove and a pressure detection mechanism. The upper butt-joint seat is arranged on the lower butt-joint seat, the fixing mechanism is fixedly arranged on the positioning ring, and the circulating mechanism is arranged on the upper butt-joint seat; through the cooperation of the first sealing mechanism, the second sealing mechanism and the circulation mechanism, external air is prevented from entering the docking mechanism, thereby reducing the oxidation of the probe card, and improving the reliability of the test structure. And the circulating mechanism continuously supplies constant-temperature nitrogen, so that the stability of the ambient temperature around the probe card is ensured, and the measurement error caused by temperature fluctuation is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and in particular to a docking mechanism for a high-temperature nitrogen blowing test probe card. Background Technology

[0002] In semiconductor manufacturing, probe cards are typically used to electrically connect to the device under test (DUT) to ensure the stability and accuracy of the testing environment, especially when testing semiconductor devices under high-temperature conditions. However, under high-temperature conditions, probe cards are susceptible to adverse effects such as oxidation, which can affect the reliability of test results. Furthermore, existing probe cards struggle to maintain a stable operating temperature in high-temperature testing environments, potentially leading to thermal stress damage or test data deviations. Therefore, improvements are urgently needed. Utility Model Content

[0003] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a docking mechanism for a high-temperature nitrogen blowing test probe card, which aims to solve the above-mentioned technical problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A docking mechanism for a high-temperature nitrogen blowing test probe card includes a lower docking seat and an upper docking seat, and further includes:

[0006] Two docking slots are provided, and the two docking slots are symmetrically arranged on the lower docking seat;

[0007] The docking plate has two docking plates symmetrically arranged on the upper docking seat and fixedly connected to the upper docking seat;

[0008] A first sealing mechanism is disposed on the lower docking seat;

[0009] The second sealing mechanism is disposed on the upper docking seat and is fixedly connected to the upper docking seat;

[0010] An air trough is provided on the lower docking seat;

[0011] The pressure detection mechanism is fixedly mounted on the lower docking seat;

[0012] A positioning ring is disposed on the upper docking seat and is fixedly connected to the positioning ring;

[0013] The system includes four fixing mechanisms, which are fixedly mounted on the positioning ring.

[0014] A circulation mechanism is disposed on the upper docking seat and fixedly connected to the upper docking seat.

[0015] Preferably, the first sealing mechanism includes:

[0016] The first sealing groove is provided on the lower mating seat;

[0017] The first sealing ring is disposed within the first sealing groove;

[0018] The second sealing groove is provided on the lower mating seat;

[0019] The second sealing ring is disposed within the second sealing groove.

[0020] Preferably, the second sealing mechanism includes:

[0021] A first sealing plate is disposed on the upper docking seat and is fixedly connected to the upper docking seat; the first sealing plate is slidably connected to the lower docking seat.

[0022] The second sealing plate is fixedly mounted on the upper docking seat.

[0023] Preferably, the pressure detection mechanism includes:

[0024] A pressure testing instrument is installed inside the air tank and is fixedly connected to the lower docking seat;

[0025] The alarm light is fixedly installed on the lower docking seat.

[0026] Preferably, the fixing mechanism includes:

[0027] Four fixing blocks are provided, which are fixedly connected to the positioning ring.

[0028] Four springs are provided, and the four springs are disposed inside the block, with one end of each spring fixedly connected to the fixed block.

[0029] The movable plate is provided with four movable plates, which are disposed inside the fixed block and slidably connected to the fixed block. The movable plates are fixedly connected to the other end of the spring.

[0030] Four movable columns are provided, and the four movable columns are fixedly installed on the movable plate;

[0031] Four rubber clamping plates are provided, and the four rubber clamping plates are set on the movable column and fixedly connected to the movable column.

[0032] Preferably, the circulation mechanism includes:

[0033] A circulating pump is fixedly mounted on the upper docking seat;

[0034] A nitrogen supply box is mounted on the upper docking seat and is fixedly connected to the upper docking seat;

[0035] The heating box is fixedly mounted on the upper docking seat.

[0036] Preferably, the circulation mechanism further includes:

[0037] A first connecting pipe is disposed on the upper docking seat, one end of the first connecting pipe is fixedly connected to the upper docking seat, and the other end of the first connecting pipe is fixedly connected to the circulating pump.

[0038] A second connecting pipe is provided on the circulating pump. One end of the second connecting pipe is fixedly connected to the circulating pump, and the other end of the second connecting pipe is fixedly connected to the nitrogen supply box.

[0039] A third connecting pipe is provided on the nitrogen supply box, one end of the third connecting pipe is fixedly connected to the nitrogen supply box, and the other end of the third connecting pipe is fixedly connected to the heating box.

[0040] A fourth connecting pipe is disposed on the heating box, one end of the fourth connecting pipe is fixedly connected to the heating box, and the other end of the fourth connecting pipe is fixedly connected to the upper docking seat.

[0041] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0042] The cooperation between the first sealing mechanism, the second sealing mechanism, and the circulation mechanism prevents outside air from entering the docking mechanism, thereby reducing the oxidation of the probe card and improving the reliability of the test structure. In addition, the circulation mechanism continuously supplies constant-temperature nitrogen gas, ensuring the stability of the ambient temperature around the probe card and reducing measurement errors caused by temperature fluctuations. Attached Figure Description

[0043] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 A three-dimensional structural schematic diagram of a docking mechanism for a high-temperature nitrogen blowing test probe card is shown.

[0045] Figure 2 A partial three-dimensional structural schematic diagram of a docking mechanism for a high-temperature nitrogen blowing test probe card is shown.

[0046] Figure 3 It shows Figure 2 The front view.

[0047] Figure 4 It shows Figure 3Cross-sectional view of AA.

[0048] Figure 5 A three-dimensional structural schematic diagram of the lower docking seat, docking groove, air groove, first sealing mechanism and pressure detection mechanism is shown.

[0049] Legend:

[0050] 1. Lower docking seat; 2. Upper docking seat; 3. Dating groove; 4. Dating plate; 5. Air groove; 6. Positioning ring; 7. First sealing groove; 8. First sealing ring; 9. Second sealing groove; 10. Second sealing ring; 11. First sealing plate; 12. Second sealing plate; 13. Pressure tester; 14. Alarm light; 15. Fixing block; 16. Spring; 17. Moving plate; 18. Moving column; 19. Rubber clamping plate; 20. Circulation pump; 21. Nitrogen supply box; 22. Heating box; 23. First connecting pipe; 24. Second connecting pipe; 25. Third connecting pipe; 26. Fourth connecting pipe. Detailed Implementation

[0051] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0052] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0053] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0055] Reference Figures 1 to 5 The present invention provides a further description of an embodiment of a docking mechanism for a high-temperature nitrogen blowing test probe card.

[0056] A docking mechanism for a high-temperature nitrogen blowing test probe card includes a lower docking seat 1 and an upper docking seat 2, and further includes:

[0057] Two docking slots 3 are provided, and the two docking slots 3 are symmetrically arranged on the lower docking seat 1; they are used for the movement of the docking plate 4, thereby restricting the position of the docking plate 4, and thus restricting the position of the upper docking seat 2.

[0058] Two docking plates 4 are symmetrically arranged on the upper docking seat 2 and fixedly connected to the upper docking seat 2; they are used to connect the lower docking seat 1 and the upper docking seat 2, thereby restricting the positions of the lower docking seat 1 and the upper docking seat 2.

[0059] Reference Figure 5 In a preferred embodiment, a first sealing mechanism is disposed on the lower docking seat 1; the first sealing mechanism includes:

[0060] The first sealing groove 7 is disposed on the lower docking seat 1; it is used to limit the position of the first sealing ring 8 and provide the first sealing plate 11 with a moving position, thereby achieving a sealing effect and preventing air outside the docking mechanism from entering the docking mechanism and oxidizing the high-temperature probe card.

[0061] The first sealing ring 8 is disposed in the first sealing groove 7; it is used to cooperate with the first sealing plate 11 to form a sealing effect.

[0062] The second sealing groove 9 is disposed on the lower docking seat 1; it is used to limit the position of the second sealing ring 10 and provide a moving position for the second sealing plate 12, so that the second sealing plate 12 and the second sealing ring 10 cooperate to achieve a sealing effect, prevent nitrogen leakage in the docking mechanism, avoid unnecessary waste of resources, and reduce harm to workers.

[0063] The second sealing ring 10 is disposed in the second sealing groove 9.

[0064] Reference Figure 2In a preferred embodiment, the second sealing mechanism is disposed on the upper docking seat 2 and fixedly connected to the upper docking seat 2; it is used to cooperate with the first sealing mechanism to achieve a sealing effect; the second sealing mechanism includes:

[0065] The first sealing plate 11 is disposed on the upper docking seat 2 and is fixedly connected to the upper docking seat 2. The first sealing plate 11 is slidably connected to the lower docking seat 1.

[0066] The second sealing plate 12 is fixedly mounted on the upper docking seat 2.

[0067] Air tank 5 is disposed on the lower docking seat 1; providing testing space for pressure tester 13;

[0068] Reference Figure 5 In a preferred embodiment, a pressure detection mechanism is fixedly mounted on the lower docking seat 1; the pressure detection mechanism includes:

[0069] The pressure tester 13 is installed in the air tank 5 and fixedly connected to the lower docking seat 1; it is used to test the pressure in the air tank 5 to determine whether there is a leak in the docking mechanism or whether air has entered the docking mechanism.

[0070] The alarm light 14 is fixedly installed on the lower docking seat 1.

[0071] A positioning ring 6 is disposed on the upper docking seat 2 and is fixedly connected to the positioning ring 6; it is used to fix the position of the fixing mechanism.

[0072] Reference Figure 4 In a preferred embodiment, four fixing mechanisms are provided, and the four fixing mechanisms are fixedly disposed on the positioning ring 6; the fixing mechanisms include:

[0073] Four fixing blocks 15 are provided, and the four fixing blocks 15 are disposed on the positioning ring 6 and fixedly connected to the positioning ring 6.

[0074] Four springs 16 are provided, and the four springs 16 are disposed inside the block. One end of each spring 16 is fixedly connected to the fixed block 15.

[0075] There are four movable plates 17, which are disposed inside the fixed block 15 and are slidably connected to the fixed block 15. The movable plates 17 are fixedly connected to the other end of the spring 16.

[0076] There are four movable columns 18, which are fixedly mounted on the movable plate 17.

[0077] Four rubber clamping plates 19 are provided, and the four rubber clamping plates 19 are disposed on the movable column 18 and fixedly connected to the movable column 18.

[0078] During operation, the test probe card is manually moved to the rubber clamping plate 19, and the rubber clamping plate 19 is pushed to move. The rubber clamping plate 19 drives the moving column 18 to move, and the moving column 18 drives the moving plate 17 to move. The moving plate 17 and the fixing block 15 work together to compress the spring 16, releasing the test probe card. The spring 16 releases its elastic potential energy and drives the moving plate 17 to move. The moving plate 17 drives the moving column 18 to move, and the moving column 18 drives the rubber clamping plate 19 to move. The rubber clamping plate 19 then fixes the test probe card.

[0079] Reference Figure 1 and Figure 3 In a preferred embodiment, a circulation mechanism is disposed on the upper docking seat 2 and fixedly connected to the upper docking seat 2. The circulation mechanism is used to blow in hot nitrogen gas to maintain a stable working environment for the probe card in a high-temperature testing environment, and simultaneously prevents oxidation of the probe card; the circulation mechanism includes:

[0080] A circulation pump 20 is fixedly mounted on the upper docking seat 2; it is used to drive the flow of nitrogen gas within the docking mechanism.

[0081] A nitrogen supply box 21 is mounted on the upper docking seat 2 and is fixedly connected to the upper docking seat 2.

[0082] A heating chamber 22 is fixedly mounted on the upper docking seat 2. The circulation mechanism further includes a method for heating nitrogen gas.

[0083] A first connecting pipe 23 is disposed on the upper docking seat 2. One end of the first connecting pipe 23 is fixedly connected to the upper docking seat 2, and the other end of the first connecting pipe 23 is fixedly connected to the circulation pump 20. It is used to connect the upper docking seat 2 and the circulation pump 20, as well as the flow of nitrogen.

[0084] A second connecting pipe 24 is disposed on the circulating pump 20. One end of the second connecting pipe 24 is fixedly connected to the circulating pump 20, and the other end of the second connecting pipe 24 is fixedly connected to the nitrogen supply box 21. It is used to connect the circulating pump 20 and the nitrogen supply box 21, and to facilitate the flow of nitrogen.

[0085] A third connecting pipe 25 is disposed on the nitrogen supply box 21. One end of the third connecting pipe 25 is fixedly connected to the nitrogen supply box 21, and the other end of the third connecting pipe 25 is fixedly connected to the heating box 22; it is used to connect the nitrogen supply box 21 and the heating box 22.

[0086] A fourth connecting pipe 26 is disposed on the heating box 22. One end of the fourth connecting pipe 26 is fixedly connected to the heating box 22, and the other end of the fourth connecting pipe 26 is fixedly connected to the upper docking seat 2. It is used to connect the heating box 22 and the upper docking seat 2, and to allow the flow of nitrogen gas.

[0087] Working principle: The test probe card is manually moved to the rubber clamping plate 19, pushing the rubber clamping plate 19 to move it. The rubber clamping plate 19 drives the moving column 18 to move, and the moving column 18 drives the moving plate 17 to move. The moving plate 17 and the fixing block 15 compress the spring 16, releasing the test probe card. The spring 16 releases its elastic potential energy, driving the moving plate 17 to move. The moving plate 17 drives the moving column 18 to move, and the moving column 18 drives the rubber clamping plate 19 to move, thus fixing the test probe card. The docking plate 4 is manually moved into the docking groove 3, thus positioning the upper docking seat 2 and the lower docking seat 1. At this time, the first sealing plate 11 moves... The first sealing plate 12 moves into the first sealing groove 7 and engages with the first sealing ring 8 to prevent outside air from entering the docking mechanism. The second sealing plate 12 moves into the second sealing groove 9 and engages with the second sealing ring 10 to prevent nitrogen leakage from the docking mechanism. The circulation pump 20 is started, which drives the gas circulation in the circulation mechanism to circulate, so that the nitrogen in the nitrogen supply box 21 enters the heating box 22 through the third connecting pipe 25. The heating box 22 is started, and the heating box 22 heats the nitrogen and reaches the probe card through the fourth connecting pipe 26. Then the nitrogen reaches the circulation pump 20 through the first connecting pipe 23. The circulation pump 20 then puts the nitrogen into the nitrogen supply box 21 through the second connecting pipe 24 to achieve circulation.

[0088] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A docking mechanism for a high-temperature nitrogen blowing test probe card, comprising a lower docking seat (1) and an upper docking seat (2), characterized in that, Also includes: Two docking slots (3) are provided, and the two docking slots (3) are symmetrically arranged on the lower docking seat (1); The docking plate (4) is provided with two docking plates (4) symmetrically arranged on the upper docking seat (2) and fixedly connected to the upper docking seat (2); The first sealing mechanism is disposed on the lower docking seat (1); The second sealing mechanism is disposed on the upper docking seat (2) and is fixedly connected to the upper docking seat (2); An air trough (5) is provided on the lower docking seat (1); The pressure detection mechanism is fixedly installed on the lower docking seat (1); A positioning ring (6) is disposed on the upper docking seat (2) and is fixedly connected to the positioning ring (6); The fixing mechanism is provided in four parts, and the four fixing mechanisms are fixedly installed on the positioning ring (6); The circulation mechanism is disposed on the upper docking seat (2) and is fixedly connected to the upper docking seat (2).

2. The docking mechanism for a high-temperature nitrogen blowing test probe card according to claim 1, characterized in that, The first sealing mechanism includes: The first sealing groove (7) is provided on the lower docking seat (1); The first sealing ring (8) is disposed in the first sealing groove (7); The second sealing groove (9) is provided on the lower docking seat (1); The second sealing ring (10) is disposed in the second sealing groove (9).

3. The docking mechanism for a high-temperature nitrogen blowing test probe card according to claim 2, characterized in that, The second sealing mechanism includes: The first sealing plate (11) is disposed on the upper docking seat (2) and is fixedly connected to the upper docking seat (2). The first sealing plate (11) is slidably connected to the lower docking seat (1). The second sealing plate (12) is fixedly installed on the upper docking seat (2).

4. The docking mechanism for a high-temperature nitrogen blowing test probe card according to claim 3, characterized in that, The pressure detection mechanism includes: The pressure tester (13) is set in the air tank (5) and fixedly connected to the lower docking seat (1); The alarm light (14) is fixedly installed on the lower docking seat (1).

5. The docking mechanism for a high-temperature nitrogen blowing test probe card according to claim 4, characterized in that, The fixing mechanism includes: There are four fixing blocks (15), which are fixed on the positioning ring (6) and fixedly connected to the positioning ring (6); Four springs (16) are provided, and the four springs (16) are disposed inside the block. One end of each spring (16) is fixedly connected to the fixed block (15). There are four movable plates (17), which are disposed inside the fixed block (15) and are slidably connected to the fixed block (15). The movable plates (17) are fixedly connected to the other end of the spring (16). There are four movable columns (18), which are fixedly mounted on the movable plate (17); There are four rubber clamping plates (19), which are fixedly connected to the movable column (18).

6. The docking mechanism for a high-temperature nitrogen blowing test probe card according to claim 5, characterized in that, The circulation mechanism includes: A circulating pump (20) is fixedly mounted on the upper docking seat (2); A nitrogen supply box (21) is mounted on the upper docking seat (2) and is fixedly connected to the upper docking seat (2); The heating box (22) is fixedly mounted on the upper docking seat (2).

7. The docking mechanism for a high-temperature nitrogen blowing test probe card according to claim 6, characterized in that, The circulation mechanism further includes: The first connecting pipe (23) is disposed on the upper docking seat (2), one end of the first connecting pipe (23) is fixedly connected to the upper docking seat (2), and the other end of the first connecting pipe (23) is fixedly connected to the circulating pump (20); The second connecting pipe (24) is provided on the circulating pump (20). One end of the second connecting pipe (24) is fixedly connected to the circulating pump (20), and the other end of the second connecting pipe (24) is fixedly connected to the nitrogen supply box (21). The third connecting pipe (25) is installed on the nitrogen supply box (21). One end of the third connecting pipe (25) is fixedly connected to the nitrogen supply box (21), and the other end of the third connecting pipe (25) is fixedly connected to the heating box (22). The fourth connecting pipe (26) is disposed on the heating box (22). One end of the fourth connecting pipe (26) is fixedly connected to the heating box (22), and the other end of the fourth connecting pipe (26) is fixedly connected to the upper docking seat (2).

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