Horizontal graphite boat suitable for horizontal furnace
By using a graphite boat design with horizontally placed silicon wafers, the problem of silicon wafer warping at high temperatures is solved, achieving high-winding process adaptability on existing equipment and avoiding wafer warping.
Patent Information
- Application Number
- CN202423189203.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2034-12-24
AI Technical Summary
In existing horizontal PECVD furnace tube equipment, silicon wafers are prone to warping at high temperatures, resulting in poor reverse coating and failing to meet the requirements of high-winding processes.
The design employs a horizontal graphite boat, which places the silicon wafer horizontally within the wafer groove on the surface of the graphite boat. This prevents warping by the silicon wafer's own weight, and the overall layout has been redesigned to ensure equipment compatibility.
It effectively avoids silicon wafer warping, meets the requirements of high-winding processes, and maintains equipment compatibility without requiring adjustments to existing equipment.
Smart Images
Figure CN223786461U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of graphite boat technology, and in particular relates to a horizontal graphite boat suitable for horizontal furnaces. Background Technology
[0002] A graphite boat is a piece of equipment used in PECVD coating of solar cells. It consists of a ceramic boat lathe, ceramic tube, locking points, nuts, and other accessories. Insulating ceramic tubes connect the graphite boat lathes.
[0003] Currently, horizontal PECVD furnace tube equipment is commonly used. The graphite boat's position within the furnace tube is as shown in the attached instruction manual. Figure 1 As shown, the graphite boat is mounted perpendicular to the horizontal plane. The vertical insertion of the silicon wafer is fixed by three points on the boat. Under high temperatures, the silicon wafer is prone to warping, resulting in defective products due to the coating layer being deposited on the reverse side. Consequently, it cannot meet the increasingly stringent requirements for winding in current processes. Therefore, to address the above problems, the horizontal graphite boat suitable for horizontal furnaces provided by this utility model is of great significance. Utility Model Content
[0004] This invention provides a horizontal graphite boat suitable for horizontal furnaces. The design of the graphite boat allows the silicon wafers to be placed horizontally in the wafer grooves on the surface of the graphite boat, thereby effectively preventing wafer warping by the weight of the silicon wafers themselves. Compared with existing graphite boat structures, the overall layout has been redesigned, while also ensuring compatibility with current equipment. This allows the horizontal graphite boat to be used without adjusting the equipment, thus solving the problems in the background technology.
[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:
[0006] This utility model discloses a horizontal graphite boat suitable for a horizontal furnace, comprising a graphite base plate, a pair of ceramic boat feet on both sides of the bottom of the graphite base plate, and several sets of graphite support blocks on both sides of the top of the graphite base plate. Each set of graphite support blocks consists of several graphite support blocks placed vertically, and a graphite inner boat sheet is provided between two adjacent graphite support blocks in each set. A graphite electrode block is provided at one end of each graphite support block and the graphite base plate, and a graphite outer sheet is provided on the top of the uppermost graphite support block. Several positioning grooves are formed on the surface of the graphite base plate, and several positioning holes are formed on the surfaces of the graphite outer sheet and the graphite inner boat sheet. A ceramic support tube is inserted into each positioning hole. The outer wall of the bottom end of the ceramic support tube and the inner wall of the positioning groove are respectively engraved with mutually mating external threads and internal threads, and the outer wall of the top end of the ceramic support tube is engraved with external threads and threadedly connected to a matching graphite locking nut.
[0007] Furthermore, the graphite inner boat sheets are placed horizontally, and the spacing between any two adjacent graphite inner boat sheets is equal.
[0008] Furthermore, each of the graphite inner boats has several silicon wafer slots on its surface, and the silicon wafer slots are rectangular and arranged in a linear array.
[0009] Furthermore, the number of positioning grooves and positioning holes is the same, and their diameters are all equal to the outer diameter of the ceramic support tube. The center of each positioning groove corresponds one-to-one with the center of each positioning hole.
[0010] The present invention has the following advantages over the prior art:
[0011] (1) When using the horizontal graphite boat suitable for horizontal furnace in this utility model, the graphite boat is designed to be horizontal, so that the silicon wafer is placed horizontally in the silicon wafer groove on the surface of the graphite boat, thereby effectively avoiding the warping of the wafer by the weight of the silicon wafer itself.
[0012] (2) The horizontal graphite boat suitable for horizontal furnaces in this utility model has a redesigned overall layout compared with the existing graphite boat structure, while ensuring the compatibility of the current equipment, so that this horizontal graphite boat can be used without adjusting the equipment.
[0013] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description
[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0015] Figure 1 This is a schematic diagram of a graphite boat structure in the prior art;
[0016] Figure 2 A schematic diagram of a graphite boat silicon wafer installation in the prior art;
[0017] Figure 3 This is a schematic diagram of the structure of a horizontal graphite boat suitable for a horizontal furnace according to this utility model.
[0018] Figure 4 This is a schematic diagram of the graphite base plate in this utility model;
[0019] Figure 5 This is a schematic diagram of the graphite inner boat sheet in this utility model.
[0020] The components represented by the numbers in the drawings are listed as follows:
[0021] 1, graphite base plate; 2, ceramic boat foot; 3, graphite support block; 4, graphite inner boat piece; 5, graphite electrode block; 6, graphite outer piece; 7, positioning groove; 8, positioning hole; 9, ceramic support tube; 10, graphite locking nut; 11, silicon wafer groove. DETAILED DESCRIPTION
[0022] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0023] In the description of the present application, it should be understood that the terms "relative", "one end", "internal", "transverse", "end", "two ends", "two sides", "front", "one end surface", "the other end surface" and the like indicate the orientation or positional relationship, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
[0024] Please refer to Figures 1-5 As shown in the drawings, the horizontal graphite boat suitable for the horizontal furnace of the present application comprises a graphite base plate 1, a pair of ceramic boat feet 2 is arranged on both sides of the bottom of the graphite base plate 1, and a plurality of groups of graphite support blocks 3 are arranged on both sides of the top of the graphite base plate 1, each group of graphite support blocks 3 is vertically placed by a plurality of graphite support blocks 3, a graphite inner boat piece 4 is arranged between each group of adjacent two graphite support blocks 3, a graphite electrode block 5 is arranged at one end of the graphite support block 3 and the graphite base plate 1, a graphite outer piece 6 is arranged on the top of the uppermost graphite support block 3, a plurality of positioning grooves 7 are formed on the surface of the graphite base plate 1, a plurality of positioning holes 8 are formed on the surface of the graphite outer piece 6 and the graphite inner boat piece 4, a ceramic support tube 9 is inserted into each positioning hole 8, external threads and internal threads matched with each other are respectively formed on the outer wall of the bottom end of the ceramic support tube 9 and the inner wall of the positioning groove 7, and external threads are formed on the outer wall of the top end of the ceramic support tube 9 and a graphite locking nut 10 matched therewith is threadedly connected.
[0025] Among them, the graphite inner boat piece 4 is horizontally placed, and the spacing between each adjacent two graphite inner boat pieces 4 is equal, and the silicon wafer can be horizontally placed on each graphite inner boat piece 4 under the action of gravity, thereby effectively avoiding the situation of wafer warping.
[0026] The surface of each graphite inner boat piece 4 is provided with a plurality of silicon wafer grooves 11, the silicon wafer grooves 11 are rectangular and linearly arranged, when the silicon wafer is horizontally placed on the graphite inner boat piece 4, the silicon wafer can be aligned and attached in the corresponding silicon wafer groove 11, so as to limit the position of the silicon wafer, thereby preventing the position of the silicon wafer from deviating.
[0027] The number of the positioning grooves 7 is the same as that of the positioning holes 8, the diameter of each of the positioning grooves 7 and the positioning holes 8 is equal to the outer diameter of the ceramic supporting pipe 9, the center of each of the positioning grooves 7 and the positioning holes 8 correspond to each other, each of the ceramic supporting pipes 9 can be aligned and pass through the corresponding positioning holes 8 on the surface of the graphite outer sheet 6 and the graphite inner boat piece 4, the bottom of each of the ceramic supporting pipes 9 is screw-connected in the corresponding positioning groove 7, then the graphite locking nut 10 is screw-connected at the top end of each of the ceramic supporting pipes 9 and is tightened, so that the graphite outer sheet 6 and each of the graphite inner boat pieces 4 are positioned and fixed through the cooperation of the ceramic supporting pipe 9, the positioning hole 8, the positioning groove 7 and the graphite locking nut 10.
[0028] The standard parts used in the application file can be purchased from the market, all the parts in the application file can be ordered according to the description and the drawings, and the specific connection mode of each part adopts the conventional screw, rivet and welding means in the prior art, and the mechanical parts and equipment adopt the conventional type in the prior art.
[0029] The working principle of the utility model is:
[0030] In use, a plurality of silicon wafers can be horizontally placed on each graphite inner boat piece 4 and aligned and attached in the corresponding silicon wafer groove 11, then the graphite inner boat piece 4 is placed between each adjacent two graphite supporting blocks 3 together with the silicon wafers, then each ceramic supporting pipe 9 is aligned and passes through the corresponding positioning hole 8 on the surface of the graphite outer sheet 6 and the graphite inner boat piece 4, the bottom of each ceramic supporting pipe 9 is screw-connected in the corresponding positioning groove 7, then the graphite locking nut 10 is screw-connected at the top end of each ceramic supporting pipe 9 and is tightened, so that the graphite outer sheet 6 and each graphite inner boat piece 4 are positioned and fixed through the cooperation of the ceramic supporting pipe 9, the positioning hole 8, the positioning groove 7 and the graphite locking nut 10, when the graphite boat is placed in the furnace pipe for processing, the silicon wafers can be horizontally placed on each graphite inner boat piece 4 under the action of gravity, thereby effectively avoiding the wafer warping.
[0031] The preferred embodiments disclosed above are only used to help describe the utility model. The preferred embodiments do not describe all the details and do not limit the utility model to the specific embodiments. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that the persons skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the entire scope and equivalents thereof.
Claims
1. A horizontal graphite boat suitable for use in a horizontal furnace, characterized by, The utility model provides a graphite boat, including graphite bottom plate (1), both sides of bottom of graphite bottom plate (1) are provided with a pair of ceramic boat foot (2), and both sides of top of graphite bottom plate (1) are provided with several groups of graphite support block (3), every group graphite support block (3) is by several graphite support blocks (3) vertical placement, and every group between two adjacent graphite support block (3) is provided with graphite inner boat piece (4), graphite support block (3) and graphite bottom plate (1) one end are provided with graphite electrode block (5), and the top of the uppermost graphite support block (3) is provided with graphite outer piece (6), the surface of graphite bottom plate (1) is provided with several positioning grooves (7), the surface of graphite outer piece (6) and graphite inner boat piece (4) are provided with several positioning holes (8), every positioning hole (8) is inserted with ceramic support pipe (9), the outer wall of bottom end of ceramic support pipe (9) and the inner wall of positioning groove (7) are engraved with the external thread and internal thread of mutual cooperation respectively, and the outer wall of top end of ceramic support pipe (9) is engraved with external thread and is connected with graphite locking nut (10) of cooperation with its external thread.
2. A horizontal graphite boat suitable for use in a horizontal furnace as claimed in claim 1, wherein, The graphite inner boat piece (4) is horizontally placed, and the spacing between every two adjacent graphite inner boat pieces (4) is equal.
3. A horizontal graphite boat for use in a horizontal furnace as claimed in claim 1, wherein The surface of every graphite inner boat piece (4) is provided with several silicon wafer grooves (11), the silicon wafer groove (11) is rectangular, and is linear array distribution.
4. A horizontal graphite boat for use in a horizontal furnace as defined in claim 1, wherein The number of the positioning groove (7) and the positioning hole (8) is same, and the diameter thereof is equal to the outer diameter of the ceramic support pipe (9), and the center of every positioning groove (7) and the center of every positioning hole (8) one to one correspondence.