Double-acting mechanism for jacking rotation

Abstract

The utility model relates to the field of semiconductor wafer processing technology, in particular to a double-acting mechanism for jacking rotation, which comprises a fixed support assembly, a synchronous wheel fixedly connected with a servo motor rotates under the transmission action of a synchronous belt when the synchronous wheel rotates, and then a magnetofluid body is driven to rotate. The air cylinder extends out, so that the output end of the air cylinder pushes the jacking rod to move upwards, compact and cooperative overall structure is realized by means of integrated cooperative work, and synchronous transmission and air cylinder jacking respectively have reliability and stability; by means of the design, a series of problems are solved, the requirements for rotary jacking and sealing are met at the same time through one mechanism, space is greatly saved, convenience of installation and maintenance is improved, complex structures are reduced, stability of the whole mechanism is improved, and cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer processing technology, specifically a double-acting mechanism for lifting and rotating. Background Technology

[0002] The semiconductor wafer fabrication process includes weighing, melting, crystal pulling, slicing (wafers), measurement, spray coating and electroplating, granulation, die screening, application of conductive wafers, soldering, mold placement, mold closing, soldering, wire bonding, and inspection. Semiconductor dies require N-type and P-type phases to be soldered in series to generate significant cooling. Since direct soldering of semiconductor materials is very difficult, it is usually necessary to pre-coat the surface of the cooling material with nickel and then electroplate nickel-tin.

[0003] A semiconductor vacuum coating apparatus, with publication number CN221235649U, includes a vacuum coating machine. The vacuum coating machine has an internally formed coating cavity for sputtering. A material conveying mechanism is provided between the vacuum coating machine and the coating cavity. A cleaning mechanism is located at the bottom of the coating cavity inside the vacuum coating machine. An air exchange mechanism is also provided between the material conveying mechanism and the vacuum coating machine. Firstly, the coordinated material conveying mechanism ensures both vacuum inside the coating cavity and material loading / unloading, effectively improving work efficiency. Furthermore, in conjunction with the air exchange mechanism, it further reduces the impact on the vacuum inside the vacuum coating machine. Secondly, the cleaning mechanism can conveniently and promptly remove contaminants splashed onto the sputtering conveyor belt, thus ensuring continuous operation.

[0004] Existing semiconductor coating equipment has the following main drawbacks:

[0005] In semiconductor vacuum coating equipment, there are often many requirements for rotation and lifting. However, to meet the requirements of lifting, rotation and sealing at the same time, a very complex and demanding mechanism is required, which leads to a series of difficulties such as increased cost, space, installation and maintenance. Utility Model Content

[0006] The purpose of this utility model is to provide a solution to the problems mentioned in the background art.

[0007] To achieve the above-mentioned objectives, the present invention adopts the following technical solution:

[0008] A double-acting mechanism for lifting and rotating is provided, comprising a fixed support assembly, a drive assembly fixedly connected to the fixed support assembly, a magnetofluid assembly rotatably connected to the fixed support assembly, the lower end of the magnetofluid assembly being fixedly connected to the drive assembly, and a connecting assembly being fixedly connected to the lower end of the magnetofluid assembly. The connecting assembly is rotatably connected to the fixed support assembly, and a lifting assembly is fixedly connected to the lower end of the connecting assembly.

[0009] A double-acting mechanism for lifting and rotating according to claim 1, characterized in that:

[0010] The fixed support assembly includes:

[0011] The fixed bracket body has its two sides fixedly connected to one end of each of the two connecting pieces.

[0012] Furthermore, the driving component includes:

[0013] A servo motor is fixedly mounted on a fixed bracket body, and the output end of the servo motor is fixedly connected to a synchronous pulley.

[0014] Furthermore, the magnetofluid assembly includes:

[0015] The magnetic fluid body has a rotating shaft fixedly connected to it. The lower end of the rotating shaft is fixedly connected to a synchronous pulley. The rotating shaft is rotatably connected to a fixed support body. The two synchronous pulleys are driven by a synchronous belt. A guide hole is opened on the rotating shaft, and a lifting rod is slidably connected in the guide hole.

[0016] Furthermore, the connection component includes:

[0017] A locking ring is fixedly connected to the lower end of the rotating shaft. The locking ring is fixedly connected to the connecting block by a pin. The connecting block has a guide hole. A sealing ring is fixedly connected to the upper end of the connecting block. A decoder is fixedly connected to the outer side of the connecting block. The connecting block is rotatably connected to the lower end of the fixed bracket body.

[0018] Furthermore, the lifting assembly includes:

[0019] The cylinder has its output end fixedly connected to the lower end of the lifting rod, and its lower end fixedly connected to the connecting block via a fixing column. The cylinder is also fixedly connected to the lower end of the bellows, and the upper end of the bellows is fixedly connected to the lower end of the connecting block.

[0020] Compared with the prior art, the beneficial effects of this utility model are:

[0021] When the synchronous pulley, fixedly connected to the servo motor, rotates, the synchronous belt drives the synchronous pulley, which is also fixedly connected to the shaft, to rotate. This, in turn, drives the magnetofluid body to rotate, thus fulfilling the rotation requirement of the components connected to the magnetofluid body. The cylinder extends, causing its output to push the lifting rod upwards. The extension and retraction of the cylinder drives the lifting rod up and down, thus fulfilling the lifting requirement of the components it works with. This device ensures the rotational accuracy of the magnetofluid body and connected components through the synchronous pulley and synchronous belt drive. It utilizes the characteristics of the servo motor and the flexible adjustment of the cylinder to meet the requirements of motion control flexibility. Through integrated collaborative work, it achieves a compact and coordinated overall structure. Furthermore, the synchronous drive and cylinder lifting respectively possess reliability and stability, thus demonstrating its advantages in various application scenarios. This design solves a series of problems, simultaneously meeting the requirements of rotational lifting and sealing through a single mechanism. This significantly saves space, improves the convenience of installation and maintenance, reduces complex structures, enhances the stability of the entire mechanism, and lowers costs. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the overall three-dimensional structure of the drive component of this utility model;

[0024] Figure 3 This is a schematic diagram of the overall three-dimensional structure of the magnetohydrodynamic component of this utility model;

[0025] Figure 4 This is an exploded three-dimensional structural diagram of the connecting component of this utility model;

[0026] Figure 5 This is a schematic diagram of the overall three-dimensional structure of the lifting component of this utility model.

[0027] The attached diagram lists the components represented by each number as follows:

[0028] 1. Fixing bracket assembly; 11. Fixing bracket body; 12. Connecting piece;

[0029] 2. Drive components; 21. Servo motor; 22. Synchronous pulley; 23. Synchronous belt;

[0030] 3. Magnetofluid assembly; 31. Magnetofluid body; 32. Rotating shaft; 33. Guide hole one; 34. Lifting rod;

[0031] 4. Connecting components; 41. Locking ring; 42. Pin; 43. Connecting block; 431. Guide hole two; 44. Sealing ring; 45. Decoder;

[0032] 5. Lifting assembly; 51. Cylinder; 52. Fixing column; 53. Bellows. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Reference Figure 1 As shown, a double-acting mechanism for lifting and rotating includes a fixed support assembly 1, a drive assembly 2 fixedly connected to the fixed support assembly 1, a magnetofluid assembly 3 rotatably connected to the fixed support assembly 1, the lower end of the magnetofluid assembly 3 being fixedly connected to the drive assembly 2, a connecting assembly 4 being fixedly connected to the lower end of the magnetofluid assembly 3, the connecting assembly 4 being rotatably connected to the fixed support assembly 1, and a lifting assembly 5 being fixedly connected to the lower end of the connecting assembly 4.

[0035] By activating the drive component 2, the drive component 2 drives the magnetofluid component 3, the connecting component 4 and the lifting component 5 that are fixedly connected to it to rotate. By activating the lifting component 5, the magnetofluid component 3 is lifted.

[0036] The fixed bracket assembly 1 includes:

[0037] The fixed bracket body 11 is fixedly connected to one end of two connecting pieces 12 on both sides.

[0038] The drive component 2 rotates on the fixed support body 11, which in turn drives the magnetic fluid component 3, the connecting component 4, and the lifting component 5 to rotate together.

[0039] Reference Figure 2 As shown, the driving component 2 includes:

[0040] Servo motor 21 is fixedly mounted on the fixed bracket body 11, and the output end of servo motor 21 is fixedly connected to a synchronous pulley 22.

[0041] Start the servo motor 21, so that the servo motor 21 drives the synchronous wheel 22 which is fixedly connected to it to rotate.

[0042] Reference Figure 3 As shown, the magnetofluid assembly 3 includes:

[0043] The magnetic fluid body 31 has a rotating shaft 32 fixedly connected to it. The lower end of the rotating shaft 32 is fixedly connected to a synchronous pulley 22. The rotating shaft 32 is rotatably connected to the fixed bracket body 11. The two synchronous pulleys 22 are driven by a synchronous belt 23. A guide hole 33 is provided on the rotating shaft 32. A lifting rod 34 is slidably connected in the guide hole 33.

[0044] When the synchronous wheel 22, which is fixedly connected to the servo motor 21, rotates, the synchronous belt 23 drives the synchronous wheel 22, which is fixedly connected to the rotating shaft 32, to rotate, thereby driving the magnetofluid body 31 to rotate, thus meeting the requirement of rotating the components connected to the magnetofluid body 31.

[0045] Reference Figure 4 As shown, the connection component 4 includes:

[0046] A locking ring 41 is fixedly connected to the lower end of the rotating shaft 32. The locking ring 41 is fixedly connected to the connecting block 43 by a pin 42. The connecting block 43 has a guide hole 431. A sealing ring 44 is fixedly connected to the upper end of the connecting block 43. A decoder 45 is fixedly connected to the outer side of the connecting block 43. The connecting block 43 is rotatably connected to the lower end of the fixed bracket body 11.

[0047] Since the locking ring 41 is fixedly connected to the lower end of the rotating shaft 32, the rotating shaft 32 drives the locking ring 41 to rotate when it rotates. The locking ring 41 is fixedly connected to the connecting block 43 through the pin 42. Therefore, when the locking ring 41 rotates, it can drive the connecting block 43 to rotate, thereby driving the decoder 45, which is fixedly connected to the connecting block 43, to rotate.

[0048] Reference Figure 5 As shown, the lifting assembly 5 includes:

[0049] The cylinder 51 has its output end fixedly connected to the lower end of the lifting rod 34. The cylinder 51 is fixedly connected to the lower end of the connecting block 43 via a fixing column 52. The cylinder 51 is also fixedly connected to the lower end of the bellows 53, and the upper end of the bellows 53 is fixedly connected to the lower end of the connecting block 43.

[0050] The cylinder 51 extends, causing its output end to push the lifting rod 34 upward. The extension and retraction of the cylinder 51 can drive the lifting rod 34 to move up and down, thereby meeting the lifting requirements of the components it works with.

[0051] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A double-acting mechanism for lifting and rotating, characterized in that: The device includes a fixed support assembly (1), on which a drive assembly (2) is fixedly connected, and a magnetic fluid assembly (3) is rotatably connected. The lower end of the magnetic fluid assembly (3) is fixedly connected to the drive assembly (2), and the lower end of the magnetic fluid assembly (3) is also fixedly connected to a connecting assembly (4). The connecting assembly (4) is rotatably connected to the fixed support assembly (1), and the lower end of the connecting assembly (4) is fixedly connected to a lifting assembly (5).

2. The double-acting mechanism for lifting and rotating according to claim 1, characterized in that: The fixed support assembly (1) includes: The fixed bracket body (11) is fixedly connected to one end of two connecting pieces (12) on both sides.

3. A double-acting mechanism for lifting and rotating according to claim 2, characterized in that: The driving component (2) includes: Servo motor (21) is fixedly mounted on the fixed bracket body (11), and the output end of the servo motor (21) is fixedly connected to a synchronous pulley (22).

4. A double-acting mechanism for lifting and rotating according to claim 3, characterized in that: The magnetohydrodynamic assembly (3) includes: A magnetic fluid body (31) is fixedly connected to a rotating shaft (32). The lower end of the rotating shaft (32) is fixedly connected to a synchronous pulley (22). The rotating shaft (32) is rotatably connected to the fixed support body (11). The two synchronous pulleys (22) are driven by a synchronous belt (23). A guide hole (33) is opened on the rotating shaft (32). A lifting rod (34) is slidably connected in the guide hole (33).

5. A double-acting mechanism for lifting and rotating according to claim 4, characterized in that: The connection component (4) includes: Locking ring (41) is fixedly connected to the lower end of rotating shaft (32). Locking ring (41) is fixedly connected to connecting block (43) by pin (42). A guide hole (431) is provided on the connecting block (43). A sealing ring (44) is fixedly connected to the upper end of the connecting block (43). A decoder (45) is fixedly connected to the outer side of the connecting block (43). The connecting block (43) is rotatably connected to the lower end of the fixed bracket body (11).

6. A double-acting mechanism for lifting and rotating according to claim 5, characterized in that: The lifting assembly (5) includes: The cylinder (51) is fixedly connected to the lower end of the lifting rod (34) at its output end. The cylinder (51) is fixedly connected to the lower end of the connecting block (43) via a fixing column (52). The cylinder (51) is fixedly connected to the lower end of the bellows (53). The upper end of the bellows (53) is fixedly connected to the lower end of the connecting block (43).

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