Wafer basket clamping mechanism

Abstract

The utility model relates to a wafer basket clamping mechanism, which comprises a clamping execution mechanism, rotating support arms and two groups of clamping claws, wherein the rotating support arms are arranged in parallel and are driven by the clamping execution mechanism to rotate in opposite directions; the two groups of clamping claws are respectively arranged on the two rotating support arms and are in symmetrical positions; each group of clamping claws comprises at least two symmetrically arranged claw arms; the claw arm comprises a tubular hook claw, a sensor mounted at the head of the tubular hook claw, and a protective sleeve for sleeving the tubular hook claw and the sensor in the protective sleeve; and a signal line of the sensor is in signal connection with a control module of the clamping execution mechanism through the tubular hook claw and a hollow pipeline in the rotary support arm in sequence. The wafer basket monitoring device is simple in structure, can comprehensively monitor the state of the wafer basket, and timely monitors and stops running when the wafer basket is inclined, stacked and other dangerous states, so that the wafer is prevented from being damaged, and the loss is prevented from being further expanded.

Description

Technical Field

[0001] This utility model relates to a wafer basket clamping mechanism, belonging to the field of semiconductor processing equipment technology. Background Technology

[0002] In semiconductor wet process equipment, wafer basket grippers are typically used to hold the wafer baskets containing them for stable clamping and transport. However, due to the structural design limitations of existing wafer basket gripper mechanisms, most manufacturers currently only perform single-sided basket inspection, detecting only the center of the basket. This only detects the clamping status and not the actual condition of the basket, such as tilting or stacking. When the basket is in these states, it can damage the wafers inside during subsequent clamping or processing, resulting in significant losses. Therefore, to avoid these problems, there is an urgent need for a wafer basket gripper mechanism with a simple structure that can comprehensively monitor the basket's condition. Summary of the Invention

[0003] The purpose of this invention is to overcome the above-mentioned shortcomings and provide a wafer basket clamping mechanism with a simple structure that can comprehensively monitor the state of the wafer basket. When the wafer basket is in a dangerous state such as tilting or stacking, it can be monitored in time and the operation can be stopped to prevent damage to the wafer and avoid further loss.

[0004] The purpose of this utility model is achieved as follows:

[0005] A wafer basket clamping mechanism includes a clamping actuator, parallel rotating arms that are driven by the clamping actuator to rotate in opposite directions, and two sets of clamping claws respectively mounted on the two rotating arms and in a symmetrical position; each set of clamping claws includes at least two symmetrically arranged claw arms.

[0006] The claw arm includes a tubular claw, a sensor mounted on the head of the tubular claw, and a protective sleeve that houses the tubular claw and the sensor. The signal line of the sensor is connected to the control module of the clamping actuator via the hollow tube inside the tubular claw and the rotating arm.

[0007] Furthermore, the heads of both the tubular hook and the protective sleeve are universal adjustment tubes.

[0008] Furthermore, the tubular hook is made of corrosion-resistant stainless steel, and the protective sleeve is made of corrosion-resistant engineering plastic.

[0009] Furthermore, the head of the protective sleeve is provided with an observation window for observing the sensor's working status indicator light.

[0010] Furthermore, the sensor is a magnetic switch or a light-controlled switch.

[0011] Furthermore, the claw arm end of the gripper has an L-shaped bent structure.

[0012] Furthermore, at least one of the two sets of gripping claws is equipped with a center position sensor in the middle to monitor the actual state of the center of the tray.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This invention employs a clamping claw with multiple claw arms to clamp different parts of the wafer basket. Each claw arm has a sensor at its end that can detect the wafer basket's physical state, thereby enabling comprehensive monitoring of the wafer basket's actual condition. This allows for timely detection of abnormalities such as wafer basket tilting or stacking, and prompts the equipment to stop operating immediately to prevent damage to the wafers and reduce losses. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a wafer basket clamping mechanism according to the present invention.

[0016] Figure 2 This is a cross-sectional view of the claw arm structure of a wafer basket clamping mechanism according to the present invention.

[0017] Figure 3 This is a perspective view of the claw arm structure of a wafer basket clamping mechanism according to the present invention.

[0018] in:

[0019] 1. Clamping claw; 2. Rotating support arm; 3. Clamping actuator; 4. Claw arm; 5. Tubular hook; 6. Sensor; 7. Protective sleeve; 8. Observation window; 9. Center position sensor. Detailed Implementation

[0020] See Figures 1-3 This utility model relates to a wafer basket clamping mechanism, comprising a clamping execution mechanism 3, rotating arms 2 arranged in parallel and driven by the clamping execution mechanism 3 to rotate in opposite directions, and two sets of clamping claws 1 respectively mounted on the two rotating arms 2 and in a symmetrical position; at least one set of clamping claws 1 has a center position sensor 9 in the middle of its middle part, which is used to monitor and sense the actual state of the middle part of the wafer basket; each set of clamping claws 1 includes at least two symmetrically arranged claw arms 4;

[0021] The claw arm 4 includes a tubular hook 5, a sensor 6 mounted on the head of the tubular hook 5, and a protective sleeve 7 that houses the tubular hook 5 and the sensor 6. Both the heads of the tubular hook 5 and the protective sleeve 7 are universal adjustable tubes, allowing them to be simultaneously bent to corresponding angles and maintain their shapes according to the shape and size of the tray. For example, the head of the claw arm 4 can be L-shaped or V-shaped to better fit the tray, facilitating gripping and release. In this embodiment, the end of the claw arm 4 is bent into an L-shaped structure. The tubular hook 5 is made of high-strength, corrosion-resistant stainless steel, and the protective sleeve 7 is made of corrosion-resistant engineering plastic, ensuring that the claw arm 4 is not corroded by process gases or liquids. The sensor 6 is a magnetic switch or a photosensitive switch used to monitor and sense the position and angle of the tray. The head of the protective sleeve 7 is provided with an observation window 8 for observing the working status indicator light of the sensor 6, facilitating observation of the sensor 6's working status.

[0022] The signal lines of the sensor 6 are sequentially connected to the control module of the clamping actuator 3 via the hollow pipes inside the tubular claw 5 and the rotating support arm 2. The sensor 6 of each claw arm 4 monitors and senses the corners and edges of the wafer basket, making up for the deficiency of the center sensor 9 which can only monitor the center of the wafer basket. This allows for accurate perception of the actual state of the wafer basket, including whether there are any abnormalities such as tilting or stacking. Once an abnormality is detected, the clamping actuator 3 immediately stops operating to prevent damage to the semiconductor wafer and avoid further losses.

[0023] Additionally, it should be noted that the above-described specific implementation is merely an optimized solution of this patent, and any modifications or improvements made by those skilled in the art based on the above concept are within the scope of protection of this patent.

Claims

1. A wafer basket clamping mechanism, characterized in that: It includes a clamping actuator (3), a rotating support arm (2) arranged in parallel and driven by the clamping actuator (3) to rotate in opposite directions, and two sets of clamping claws (1) respectively mounted on the two rotating support arms (2) and in a symmetrical position; each set of clamping claws (1) includes at least two symmetrically arranged claw arms (4); The claw arm (4) includes a tubular claw (5), a sensor (6) installed on the head of the tubular claw (5), and a protective sleeve (7) that houses the tubular claw (5) and the sensor (6); the signal line of the sensor (6) is connected to the control module of the clamping actuator (3) through the hollow pipe inside the tubular claw (5) and the rotating arm (2).

2. The wafer basket clamping mechanism according to claim 1, characterized in that: The heads of the tubular claw (5) and the protective sleeve (7) are both universal adjustment tubes.

3. The wafer basket clamping mechanism according to claim 1, characterized in that: The tubular hook (5) is made of corrosion-resistant stainless steel, and the protective sleeve (7) is made of corrosion-resistant engineering plastic.

4. The wafer basket clamping mechanism according to claim 1, characterized in that: The head of the protective sleeve (7) is provided with an observation window (8) for observing the working status indicator light of the sensor (6).

5. The wafer basket clamping mechanism according to claim 1, characterized in that: The sensor (6) is a magnetic switch or a light-controlled switch.

6. The wafer basket clamping mechanism according to claim 1, characterized in that: The end of the claw arm (4) of the clamping claw has an L-shaped bent structure.

7. The wafer basket clamping mechanism according to claim 1, characterized in that: At least one of the two sets of gripping claws (1) is equipped with a center position sensor (9) in the middle to monitor the actual state of the center of the tray.

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