Glass cleaning device and glass cleaning equipment
By combining chemical cleaning, drying, and mechanical cleaning techniques, the problem of cleaning stubborn contaminants on the surface of filters in semiconductor packaging has been solved, achieving efficient and automated glass cleaning and ensuring packaging quality and reliability.
Patent Information
- Application Number
- CN202423213083.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2026-01-13
- Estimated Expiration
- 2034-12-25
AI Technical Summary
In the semiconductor packaging process, particulate contaminants remaining on the surface of the filter after molding are difficult to remove, affecting the performance and reliability of the packaging structure.
By combining chemical cleaning, drying and mechanical cleaning modules, along with technologies such as ultrasonic removal, heated air blowing and rotating brushes, multi-layer cleaning of glass surfaces can be achieved.
It effectively removes stubborn contaminants, ensuring a high level of cleanliness on the glass surface, meeting the stringent requirements of lidar chips, improving cleaning efficiency, and reducing the impact of human factors.
Smart Images
Figure CN223789161U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor packaging technology and discloses a glass cleaning device and glass cleaning equipment. Background Technology
[0002] In semiconductor packaging processes, some package structures have glass surfaces. To ensure performance, these glass surfaces require extremely high cleanliness. However, during the packaging process, especially in the glass bonding step, particulate contaminants often fall onto the glass surface. These contaminants become stubborn and difficult to remove during subsequent molding processes due to high-temperature baking. As a result, particulate contaminants remain on the glass surface after a series of packaging steps, affecting the performance and reliability of the package structure. Therefore, there is an urgent need for an efficient and precise automated glass cleaning device to solve the problem of cleaning particulate contaminants remaining on the filter surface after molding, ensuring the quality and reliability of the package structure. Utility Model Content
[0003] The purpose of this invention is to solve the problem of cleaning particulate contaminants remaining on the surface of the filter after plastic sealing, and to provide a glass cleaning device and glass cleaning equipment.
[0004] To achieve the above objectives, this utility model provides a glass cleaning device, comprising:
[0005] The chemical cleaning module is used to chemically clean the glass surface of the encapsulation structure.
[0006] The drying module is used to dry the glass surface of the encapsulation structure after cleaning;
[0007] The mechanical cleaning module is used to mechanically clean the glass surface of the encapsulation structure after drying.
[0008] In some embodiments, the chemical cleaning module performs chemical cleaning on the glass surface by: using a cleaning solution to dissolve and remove particulate contaminants on the glass surface by immersion or spraying.
[0009] In some embodiments, the chemical cleaning module includes a cleaning solution storage tank for holding the cleaning solution.
[0010] In some embodiments, the chemical cleaning module further includes a temperature control mechanism for adjusting the temperature of the cleaning solution.
[0011] In some embodiments, the chemical cleaning module includes an ultrasonic generator for ultrasonically removing particulate contaminants from the glass surface.
[0012] In some embodiments, the drying module includes at least one heating and blowing mechanism, the heating and blowing mechanism and the encapsulation structure are spaced apart, the heating and blowing mechanism is used to evaporate liquid residue on the glass surface by blowing hot air, wherein the temperature of the hot air blown by the heating and blowing mechanism is adjustable.
[0013] In some embodiments, the mechanical cleaning module includes a rotatable brush, a retractable fixing mechanism, and a lint-free cloth. The retractable fixing mechanism is used to fix the lint-free cloth, and the rotatable brush and the lint-free cloth are used to remove particulate residue from the glass surface.
[0014] In some embodiments, a sensor is used to detect the degree of contamination on the glass surface.
[0015] In some embodiments, the sensor is a lidar detector.
[0016] Accordingly, this utility model also provides a glass cleaning device including the glass cleaning device, including an operating table, a sealed space provided in the operating table, the glass cleaning device installed in the sealed space, and the encapsulation structure placed in the sealed space.
[0017] In some embodiments, the operating console is equipped with a PLC control module, which includes a display screen and an actuator. The actuator is used to automatically control the execution process of the chemical cleaning module, the drying module, and the mechanical cleaning module, and the display screen is used to display the cleaning effect and human-machine interaction.
[0018] In some embodiments, the device further includes a movable telescopic support for moving the glass cleaning device.
[0019] The beneficial effects of this utility model are:
[0020] This invention provides a glass cleaning device and equipment. By employing a combination of chemical cleaning, drying, and mechanical cleaning, it can effectively remove particulate contaminants and other pollutants from the glass surface from multiple aspects, significantly improving the cleaning effect and efficiency.
[0021] This invention combines chemical cleaning with mechanical cleaning, effectively removing stubborn contaminants that traditional cleaning methods cannot handle. This ensures the glass surface meets high cleanliness standards, satisfying the stringent requirements of LiDAR chips for photosensitive glass. It is applicable to cleaning various types of glass during LiDAR chip packaging, exhibiting strong adaptability and the ability to handle different contaminants and cleaning requirements.
[0022] This invention uses a PLC control module to precisely adjust each cleaning step, optimizing cleaning parameters according to actual conditions to ensure that each step in the cleaning process achieves the best results.
[0023] This invention reduces reliance on manual labor through a PLC control module and an efficient cleaning process, which not only improves production efficiency but also reduces the impact of human factors on cleaning quality.
[0024] This invention uses environmentally friendly chemical cleaning solutions and recyclable cleaning processes, which helps reduce environmental pollution during the production process. Attached Figure Description
[0025] Figure 1 Schematic diagram of a glass cleaning device provided in some embodiments of this utility model;
[0026] Figure 2 This is a schematic diagram of a glass cleaning device provided for some embodiments of the present invention. Detailed Implementation
[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0028] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0029] In some embodiments, see Figure 1 and Figure 2 A glass cleaning device 4 is provided, comprising:
[0030] A chemical cleaning module is used to chemically clean the surface of the glass 61 of the encapsulation structure 6;
[0031] A drying module is used to dry the surface of the glass 61 of the encapsulation structure 6 after cleaning;
[0032] A mechanical cleaning module is used to mechanically clean the surface of the glass 61 of the encapsulation structure 6 after drying.
[0033] In some embodiments, the chemical cleaning module performs chemical cleaning on the glass surface by: using a cleaning solution to dissolve and remove particulate contaminants on the glass 61 surface by soaking, spraying, or soaking followed by ultrasonic vibration. For example, for FM white spots (i.e., white particulate contamination caused by external impurities or improper operation), a suitable cleaning solution for removing FM white spots (e.g., detergent, solvent, etc.) can be used to dissolve and remove the contaminants on the glass 61 surface by soaking or spraying.
[0034] In some embodiments, the chemical cleaning module includes an ultrasonic generator for ultrasonically removing particulate contaminants from the surface of the glass 61.
[0035] In some embodiments, the packaging structure 6 can be a lidar chip structure, and the glass 61 can be a filter, etc. In some embodiments, such as in the lidar chip structure packaging process using a multi-layer chip structure, the filter is a core component of the photosensitive module and is usually exposed to the external environment. To ensure its performance, the glass surface needs to achieve extremely high cleanliness. However, during the packaging process, especially in the glass bonding process, particulate contaminants such as FM white spots (i.e., white particulate contamination caused by external impurities or improper operation) often fall onto the glass surface. These contaminants become stubborn and cannot be easily removed after high-temperature baking in the subsequent molding process, resulting in FM white spots remaining on the glass surface after a series of packaging processes, affecting the performance and reliability of the lidar chip. This embodiment, by using a combination of chemical cleaning, drying treatment, and mechanical cleaning, can effectively remove particulate contaminants and other contaminants from the glass surface from multiple aspects, significantly improving the cleaning effect and cleaning efficiency.
[0036] In some embodiments, see Figure 1 The chemical cleaning module includes a cleaning solution storage tank 10 for holding the cleaning solution. In some embodiments, the chemical cleaning module further includes a temperature control mechanism for adjusting the temperature of the cleaning solution to improve the cleaning effect and efficiency.
[0037] In some embodiments, liquid residue may remain on the surface of the cleaned glass 61. Therefore, the cleaned glass 61 will enter the drying module's processing stage. See [link to relevant documentation]. Figure 1The drying module includes at least one heating and blowing mechanism 12. The heating and blowing mechanism 12 and the encapsulation structure are spaced apart. Hot air is blown onto the surface of the glass 61 by the heating and blowing mechanism 12 to evaporate any residual liquid on the glass 61 surface, preventing chemical residue and ensuring the cleanliness of the glass 61 surface. In some embodiments, the residual liquid includes cleaning fluid residue. In some embodiments, the baking temperature and time of the drying module can be adjusted. For example, the baking temperature of the drying module can be adjusted by controlling the temperature of the hot air blown by the heating and blowing mechanism, ensuring that the baking effect does not affect the physical properties of the glass 61.
[0038] In some embodiments, particulate matter residue may remain on the dried glass surface. See [link to relevant documentation] Figure 1 The mechanical cleaning module includes a rotatable brush 8, a retractable fixing mechanism 6, and a lint-free cloth 9. The retractable fixing mechanism 6 is used to fix the lint-free cloth 9, and the rotatable brush 8 and the lint-free cloth 9 are used to remove particulate residue from the surface of the glass 61. Specifically, the dried glass 61 will undergo a mechanical cleaning stage, using a rotating brush and a lint-free cloth to further remove stubborn particulate contaminant residue. In some embodiments, the rotating brush part adopts a flexible material and precise speed adjustment and angle design to ensure that it does not scratch the glass surface, while effectively removing difficult-to-remove particles.
[0039] In some embodiments, the glass cleaning device 4 further includes a sensor 11 for detecting the degree of contamination on the glass surface. In some embodiments, the sensor is a lidar detector. The lidar detector is used to emit a laser beam and receive the returned laser beam to scan and sense contaminants.
[0040] In some embodiments, a glass cleaning device including the glass cleaning device 4 is also provided, including an operating table 1, a sealed space 3 is provided in the operating table 1, the glass cleaning device 4 is installed in the sealed space 3, and the sealed space 3 is also used to place the encapsulation structure 6.
[0041] In some embodiments, the operating console 1 is equipped with a PLC control module 2, which includes a display screen and an actuator. The actuator is used to automatically control the execution processes of the chemical cleaning module, drying module, and mechanical cleaning module. The display screen is used to display the cleaning effect and facilitate human-machine interaction. Specifically, the PLC control module 2 is electrically connected to the chemical cleaning module, drying module, and mechanical cleaning module, respectively. The entire cleaning process is scheduled and monitored by the PLC control module to achieve automation and enable timely feedback on the cleaning effect. For example, in some embodiments, the PLC control module can control the baking temperature and time of the drying module; in some embodiments, the PLC control module has a timed cleaning function, which can control the chemical cleaning module, drying module, and mechanical cleaning module to perform timed cleaning; in some embodiments, the PLC control module can also receive the detection results from the sensor 11, identify the degree of contamination on the surface of the glass 61, display it on the display screen, and adjust the cleaning intensity and time.
[0042] In some embodiments, the glass cleaning equipment further includes a movable telescopic bracket 5, which is connected to the glass cleaning device 4 and is used to move the glass cleaning device 4. In some embodiments, the movable telescopic bracket 5 can extend vertically and move laterally to move the glass cleaning device 4 to different positions on the surface of the glass 61 for cleaning the surface of the glass 61.
[0043] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make possible changes and modifications to the technical solution of the present invention by utilizing the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope of the technical solution of the present invention.
Claims
1. A glass cleaning device, characterized by, The application relates to a glass cleaning device for cleaning a glass surface of a packaging structure. The glass cleaning device comprises: a chemical cleaning module for chemically cleaning the glass surface of the packaging structure; a drying module for drying the glass surface of the packaging structure after cleaning; 2. The glass cleaning device of claim 1, wherein, a mechanical cleaning module for mechanically cleaning the glass surface of the packaging structure after drying.
3. The glass cleaning device of claim 2, wherein, The chemical cleaning module chemically cleans the glass surface by using a cleaning liquid to dissolve and remove the particulate contaminants on the glass surface through immersion or spraying.
4. The glass cleaning device of claim 3, wherein, The chemical cleaning module comprises a cleaning liquid storage tank for storing the cleaning liquid.
5. The glass cleaning device of claim 2, wherein, The chemical cleaning module further comprises a temperature control mechanism for adjusting the temperature of the cleaning liquid.
6. The glass cleaning device of claim 1, wherein, The chemical cleaning module comprises an ultrasonic generator for ultrasonic removal of the particulate contaminants on the glass surface.
7. The glass cleaning device of claim 1, wherein, The drying module comprises at least one heating blowing structure, the heating blowing structure and the packaging structure have a spacing, and the heating blowing structure is used for evaporating the liquid residues on the glass surface by blowing hot air.
8. The glass cleaning device of claim 1, wherein, The mechanical cleaning module comprises a rotatable brush, a telescopic fixing mechanism and a dust-free cloth, the telescopic fixing mechanism is used for fixing the dust-free cloth, and the rotatable brush and the dust-free cloth are used for removing the particulate residues on the glass surface. The application further relates to:
9. The glass cleaning device of claim 8, wherein, a sensor for detecting the contamination degree of the glass surface.
10. A glass cleaning apparatus comprising the glass cleaning device of any one of claims 1-9, wherein, The sensor is a laser radar detector.
11. The glass cleaning apparatus of claim 10, wherein, The application further relates to:
12. The glass cleaning apparatus of claim 10, wherein, an operation table, the operation table is provided with a sealed space, the glass cleaning device is installed in the sealed space, and the sealed space is used for placing the packaging structure. The operation table is provided with a PLC control module, the PLC control module comprises a display screen and an actuator, the actuator is used for automatically controlling the execution process of the chemical cleaning module, the drying module and the mechanical cleaning module, and the display screen is used for displaying the cleaning effect and man-machine interaction. The application further relates to: a movable telescopic support for moving the glass cleaning device.