Laser processing device and equipment

Abstract

The utility model discloses a laser processing device and equipment, the laser processing device comprises a laser, two lens assemblies, a first transflective mirror and a second transflective mirror, the two lens assemblies are symmetrically arranged in a spaced mode in the first direction, and the laser emitting directions face each other; the lens assembly comprises a galvanometer and field lenses, the first transflective mirror is arranged on one side of one field lens, the second transflective mirror is arranged on one side of the other field lens, and the first transflective mirror and the second transflective mirror can enable reflected laser to be emitted downwards. The laser device comprises two light outlets, lasers output by the two light outlets are mutually independent and correspond to the two galvanometers in a one-to-one mode, the two beams of lasers emitted independently can independently machine workpieces below, and the machining efficiency is improved. The lens assembly, the first transflective mirror, the second transflective mirror and the other lens assembly are sequentially arranged in the first direction and keep symmetrical, arrangement is very compact, the equipment space is further saved, the two laser beams emitted vertically downwards can keep a small distance, and the machining blind area can be reduced.

Description

Technical Field

[0001] This application relates to the field of laser processing, and in particular to a laser processing apparatus and equipment. Background Technology

[0002] With the maturation of ultraviolet (UV) ultrafast laser technology, UV ultrafast laser processing offers significant advantages over conventional lasers in precision micromachining: higher peak power, smaller heat-affected zone, and higher pulse frequency. In the 3C consumer electronics industry, the superior processing performance of UV ultrafast lasers has led to increased acceptance and explosive growth. This industry demands high processing efficiency, aiming to produce as many finished products as possible within a limited space and time. Conventional single-path ultrafast lasers, due to their large size, suffer from low space-to-output ratio compared to the small dimensions of 3C products, resulting in low space efficiency. Utility Model Content

[0003] This application proposes a laser processing apparatus and equipment that adopts a dual-optical-path structure, resulting in higher space efficiency.

[0004] This application discloses a laser processing apparatus, comprising:

[0005] Two lens assemblies, each comprising a galvanometer and a field lens, are arranged symmetrically and spaced apart along a first direction, with the laser emission direction facing each other;

[0006] A first reflective mirror is disposed on one side of one of the field mirrors and is used to reflect the laser emitted from one of the field mirrors;

[0007] A second reflector is disposed on one side of the other field mirror and is used to reflect the laser emitted from the other field mirror;

[0008] The laser includes two output ports, the lasers output from the two output ports are independent of each other, and the two output ports are configured in a one-to-one correspondence with the two galvanometers;

[0009] The first and second reflective mirrors are arranged along a first direction and symmetrically positioned between the two field mirrors. The first and second reflective mirrors enable the reflected laser to be emitted downwards.

[0010] In some embodiments, the laser processing apparatus further includes:

[0011] The first vision component includes a first camera disposed on the upper side of the first reflective mirror, and the first reflective mirror is also used to transmit light entering the first camera from below;

[0012] The second vision component includes a second camera disposed above the second reflective mirror, and the second reflective mirror is also used to transmit light entering the second camera from below.

[0013] In some embodiments, the laser includes two independent resonant cavities, each corresponding to a light output port.

[0014] In some embodiments, the lens assembly further includes an entrance port corresponding to the galvanometer; the laser processing apparatus further includes an optical path protection component connecting the entrance port and the exit port, and reflectors disposed at both ends of the optical path protection component.

[0015] In some embodiments, the laser processing apparatus includes two optical path protection components, which are symmetrically arranged in a first direction.

[0016] In some embodiments, the laser processing apparatus further includes a protective cover for accommodating the first reflective mirror, the second reflective mirror, the first vision component, and the second vision component, wherein the lower end of the protective cover is provided with through holes corresponding to the first reflective mirror and the second reflective mirror.

[0017] In some embodiments, the laser processing apparatus further includes a mounting bracket disposed in the protective cover, wherein the first camera and the second camera are disposed on the mounting bracket and their positions in the first direction and the vertical direction are adjustable.

[0018] In some embodiments, the laser processing apparatus further includes a light-blocking member disposed between the first reflective mirror and the second reflective mirror, the light-blocking member being used to block the first reflective mirror and the second reflective mirror.

[0019] This application also proposes a laser processing apparatus, including the aforementioned laser processing device, and a machine base for mounting the laser processing device.

[0020] In some embodiments, the laser processing equipment includes a marble base mounted on the machine platform, and the laser processing device is mounted on the marble base.

[0021] The laser processing apparatus in this embodiment includes a laser, two lens assemblies, a first reflective mirror, and a second reflective mirror. The two lens assemblies are spaced apart and symmetrically arranged along a first direction, with the laser emission direction facing each other. Each lens assembly includes a galvanometer and a field mirror. The first reflective mirror is located on one side of one field mirror, and the second reflective mirror is located on the other side of the field mirror. The first and second reflective mirrors enable the reflected laser to be emitted downwards. The laser includes two output ports, and the lasers output from the two output ports are independent of each other and correspond one-to-one with the two galvanometers. The two independently emitted laser beams can independently process the workpiece below, improving processing efficiency. The lens assemblies, the first reflective mirror, the second reflective mirror, and the other lens assembly are arranged sequentially and symmetrically along the first direction, resulting in a very compact layout that further saves equipment space. Furthermore, the two vertically downward-emitting laser beams maintain a small distance between them, reducing the processing blind zone. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a laser processing apparatus in one embodiment of this application;

[0023] Figure 2 for Figure 1 A structural schematic diagram from another perspective of the embodiment;

[0024] Figure 3 This is a schematic diagram of the structure of a laser processing apparatus in another embodiment of this application.

[0025] Label Explanation:

[0026] 10. Lens assembly; 11. Galvanometer; 12. Field lens; 21. First mirror; 22. Second mirror; 31. First camera; 32. Second camera; 33. First connector; 40. Protective housing; 41. Optical path protection assembly; 42. Connector; 43. Connecting plate; 51. Vertical plate; 52. First mounting plate; 53. Second mounting plate; 54. Base; 60. Laser;

[0027] The purpose, features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0028] The solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments in this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0029] It should be noted that all directional indications in the embodiments of this application, such as up, down, left, right, front, back, etc., are only used to explain the relative positional relationship and movement of the components in a specific posture as shown in the attached figure. If the specific posture changes, the directional indication will also change accordingly.

[0030] It should also be noted that when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component present. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component present.

[0031] Furthermore, the descriptions involving "first," "second," etc., in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0032] This application discloses a laser processing apparatus, with reference to... Figures 1 to 3 The laser processing apparatus includes: two lens assemblies 10, each comprising a galvanometer 11 and a field lens 12, the two lens assemblies 10 being spaced apart and symmetrically arranged along a first direction, with the laser emission direction facing each other; a first reflective mirror 21, disposed on one side of one of the field lenses 12, for reflecting the laser emitted from one of the field lenses 12; a second reflective mirror 22, disposed on one side of the other field lens 12, for reflecting the laser emitted from the other field lens 12; and a laser 60, including two output ports, the lasers output from the two output ports being independent of each other, the two output ports being arranged one-to-one with the two galvanometers 11; the first reflective mirror 21 and the second reflective mirror 22 are arranged along the first direction and symmetrically disposed between the two field lenses 12, the first reflective mirror 21 and the second reflective mirror 22 enabling the reflected laser to be emitted downwards. In this embodiment, the lasers output from the two output ports are independent of each other and correspond one-to-one with the two galvanometers 11, the two independently emitted laser beams can independently process the workpiece below, improving processing efficiency. The lens assembly 10, the first reflective mirror 21, the second reflective mirror 22 and another lens assembly 10 are arranged sequentially and symmetrically in the first direction, and the arrangement is very compact, which further saves equipment space. The two laser beams emitted vertically downward can maintain a small gap, which can reduce the blind zone of processing.

[0033] In some embodiments, the laser processing apparatus further includes: a first vision component, including a first camera 31 disposed above a first reflective mirror 21, the first reflective mirror 21 also being used to transmit light rays entering the first camera 31 from bottom to top; and a second vision component, including a second camera 32 disposed above a second reflective mirror 22, the second reflective mirror 22 also being used to transmit light rays entering the second camera 32 from bottom to top. In this embodiment, after passing through the galvanometer 11 and the field mirror 12, the laser is focused onto the processing surface for processing. A reflective mirror is located between the field mirror 12 and the processing surface, and the laser beam path undergoes a 45° bend at the reflective mirror surface and is emitted vertically downwards for processing the workpiece. The other side of the reflective mirror is the vision component. By setting the reflective mirror, the center of the field mirror 12 can be kept coaxial with the center of the camera for visual positioning, reducing positioning deviation. The first reflective mirror 21 and the first vision component form one module, and the second reflective mirror 22 and the second vision component form another module, which can respectively perform visual positioning of the processing fields of the two laser beams.

[0034] In some embodiments, the laser 60 includes two independent resonant cavities, each corresponding to a light output port. To achieve independent control of the two laser beams, two independent resonant cavities can be configured within the laser 60, with each cavity generating one laser beam. This design ensures that the two laser beams can be independently controlled in terms of wavelength, power, and phase. Alternatively, two independent lasers 60 can be used for separate light output and individual control. Dual-head independent light output control ensures synchronous light output and processing even for products with different contours, enabling high-efficiency mass production.

[0035] In some embodiments, the lens assembly 10 further includes an entrance port corresponding to the galvanometer 11; the laser processing apparatus further includes an optical path protection component 41 connecting the entrance port and the exit port, and reflectors disposed at both ends of the optical path protection component 41. In this embodiment, after the laser beam is emitted from the laser 60 along the second direction, it is reflected by the reflector at one end of the optical path protection component 41, transmitted within the optical path protection component 41, and reflected by the reflector at the other end, and then enters the galvanometer 11 along the second direction. The laser processing apparatus includes two optical path protection components 41, which are symmetrically arranged in the first direction. The optical path protection component 41 can be a tube, and a connector 42 is also provided between the optical path protection component 41 and the galvanometer 11. The connector 42 serves to connect the laser 60 and the galvanometer 11, and also protects the laser beam passing through it.

[0036] In some embodiments, the laser processing apparatus further includes a protective cover 40 accommodating a first reflective mirror 21, a second reflective mirror 22, a first vision component, and a second vision component. The lower end of the protective cover 40 has through holes corresponding to the first reflective mirror 21 and the second reflective mirror 22. In this embodiment, the laser processing apparatus also includes a connecting plate 43 connecting two connectors 42. The first reflective mirror 21 and the second reflective mirror 22 are disposed on the connecting plate 43, and the first vision component and the second vision component are connected to the connecting plate 43. The protective cover 40 can be a square box structure, which is mounted on the connecting plate 43, and the lower end opening forms the aforementioned through hole to allow the reflected laser to be emitted downwards. Since the galvanometer 11 and the field lens 12 generally have their own square protective shells, the protective cover 40 is disposed between the two lens assemblies 10, and the lower end of the protective cover 40 near the side wall of the lens assembly 10 has an installation notch adapted to the lens assembly 10. By setting the protective cover 40 shell, a certain protective effect is provided for the reflective mirror and the vision component in the external optical path of the apparatus.

[0037] In some embodiments, the laser processing apparatus further includes a mounting bracket disposed in the protective cover 40, on which the first camera 31 and the second camera 32 are mounted, and their positions are adjustable in a first direction and a vertical direction. In this embodiment, the mounting bracket includes two upright plates 51 disposed on a connecting plate 43, a first mounting plate 52 disposed on the upright plates 51 and extending along a second direction, and a second mounting plate 53 disposed on the first mounting plate 52 and extending along a first direction. The aforementioned first vision component and second vision component are respectively disposed on the two second mounting plates 53. In addition, the upright plates 51 are provided with a groove disposed along a vertical direction, and the bottom of the groove is provided with a strip-shaped hole extending along a vertical direction. One end of the first mounting plate 52 is slidably disposed in the groove and is secured by a screw passing through the strip-shaped hole. This allows the position of the first mounting plate 52 in the vertical direction to be adjusted. The first mounting plate 52 is provided with a strip-shaped hole extending along a second direction, and one end of the second mounting plate 53 is secured to the first mounting plate 52 by a screw passing through the strip-shaped hole. The second mounting plate 53 is also provided with a strip-shaped hole extending along a first direction. The first camera 31 and the second camera 32 described above can be locked onto the second mounting plate 53 by screws passing through the strip hole. Therefore, by loosening the screws, the positions of the first camera 31 and the second camera 32 in the vertical direction, the first direction, and the second direction can be adjusted. After adjustment, the screws can be tightened to lock them in place. The adjustment process is very convenient so as to maintain visual coaxiality with the field lens 12.

[0038] In some embodiments, the laser processing apparatus further includes a light-blocking component disposed between the first reflective mirror 21 and the second reflective mirror 22, which is used to block the first reflective mirror 21 and the second reflective mirror 22. In this embodiment, the light-blocking component can be used to prevent the laser from entering the opposite lens assembly 10 and thus damaging the laser 60 after the reflective mirror fails or selectively transmits the laser. It is worth noting that the light-blocking component can be a light-blocking plate disposed on the connecting plate 43, and the light-blocking plate can be made of stainless steel.

[0039] This application also proposes a laser processing apparatus, including the aforementioned laser processing device and a machine base for mounting the laser processing device. Further, the laser processing apparatus includes a marble base 54 mounted on the machine base, and the laser processing device is mounted on the marble base 54. The overall optical components are fixed to the marble base, providing good structural stability and resistance to creep and impact.

[0040] In this embodiment, the working principle of the laser processing device is as follows: The laser 60 can independently output two ultraviolet lasers. The external optical paths of the two lasers are independently designed and reflected into the galvanometer 11 through corresponding reflector groups. After passing through the galvanometer 11 and the field lens 12, the laser is focused onto the processing surface for processing. There is a reflective mirror between the field lens 12 and the processing surface, and the laser optical path is turned at 45° on the reflective mirror surface. The other side of the reflective mirror is a vision component (camera, light source, and support, etc.), which allows the laser to be focused by the field lens 12 and coaxial with the camera. The reflective mirror and vision component are partially enclosed by a dust cover, only open on the processing surface, so that the reflective mirror component and vision component can achieve a certain degree of dust protection. The overall optical component is fixed on a marble base, which has good structural stability and resistance to creep and impact. The overall optical structure has a compact design. Compared with the single-path output of the laser 60, the size is not significantly increased, but the processing surface and processing range are directly doubled, thereby improving the processing efficiency.

[0041] This laser processing device is characterized by its multifunctionality, high integration, and high precision. Besides general laser processing, it is particularly suitable for the mass production of high-precision micro-machined products. Equipped with a vision module and controlled by a host computer, it achieves high positioning accuracy and high repeatability. Dual-head independent beam control ensures synchronized beam output even when processing products with different contours, enabling high-efficiency mass production.

[0042] The above are only some or preferred embodiments of this application. Neither the text nor the drawings should limit the scope of protection of this application. All equivalent structural transformations made using the content of this application's specification and drawings under the overall concept of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application.

Claims

1. A laser processing apparatus, characterized in that, include: Two lens assemblies, each comprising a galvanometer and a field lens, are arranged symmetrically and spaced apart along a first direction, with the laser emission direction facing each other; A first reflective mirror is disposed on one side of one of the field mirrors and is used to reflect the laser emitted from one of the field mirrors; A second reflector is disposed on one side of the other field mirror and is used to reflect the laser emitted from the other field mirror; The laser includes two output ports, the lasers output from the two output ports are independent of each other, and the two output ports are configured in a one-to-one correspondence with the two galvanometers; The first and second reflective mirrors are arranged along a first direction and symmetrically positioned between the two field mirrors. The first and second reflective mirrors enable the reflected laser to be emitted downwards.

2. The laser processing apparatus according to claim 1, characterized in that, The laser processing device also includes: The first vision component includes a first camera disposed on the upper side of the first reflective mirror, and the first reflective mirror is also used to transmit light entering the first camera from below; The second vision component includes a second camera disposed above the second reflective mirror, and the second reflective mirror is also used to transmit light entering the second camera from below.

3. The laser processing apparatus according to claim 2, characterized in that, The laser includes two independent resonant cavities, each corresponding to a light output port.

4. The laser processing apparatus according to claim 3, characterized in that, The lens assembly also includes an entrance port corresponding to the galvanometer; the laser processing device also includes an optical path protection assembly connecting the entrance port and the exit port, and reflectors disposed at both ends of the optical path protection assembly.

5. The laser processing apparatus according to claim 4, characterized in that, The laser processing apparatus includes two optical path protection components, which are symmetrically arranged in a first direction.

6. The laser processing apparatus according to claim 5, characterized in that, The laser processing apparatus further includes a protective cover for housing the first reflective mirror, the second reflective mirror, the first vision component, and the second vision component. The lower end of the protective cover is provided with through holes corresponding to the first reflective mirror and the second reflective mirror.

7. The laser processing apparatus according to claim 6, characterized in that, The laser processing device also includes a mounting bracket disposed in the protective cover, and the first camera and the second camera are disposed on the mounting bracket and their positions in the first direction and the vertical direction are adjustable.

8. The laser processing apparatus according to claim 1, characterized in that, The laser processing apparatus further includes a light-blocking component disposed between the first and second mirrors, the light-blocking component being used to block the first and second mirrors.

9. A laser processing device, characterized in that, The laser processing apparatus includes any one of claims 1 to 8, and a machine base for mounting the laser processing apparatus.

10. The laser processing equipment according to claim 9, characterized in that, It includes a marble base mounted on the machine platform, and the laser processing device is mounted on the marble base.

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