Test station capable of rapidly replacing test piece for semiconductor

Abstract

The utility model relates to the technical field of test piece replacement jigs, and discloses a test station used for semiconductors and capable of rapidly replacing test pieces, which comprises a base, the right side of the base is fixedly connected with a fixing mechanism, the top of the fixing mechanism is provided with an installation mechanism, and the installation mechanism is internally provided with a bolt. The top end of the left side of the base is fixedly connected with a fixed baffle; the mounting mechanism comprises a test piece fixing seat; and the test piece fixing seat is arranged at the top of the base. According to the test station capable of rapidly replacing the test piece for the semiconductor, through the arrangement of the mounting mechanism, the fixed barrier strip can be firmly fixed on the side surface of the test piece fixing seat under the elastic acting force of the spring, a test piece workpiece can be clamped and clamped, and the operation is convenient and rapid; and meanwhile, the test piece can be conveniently and correspondingly disassembled, and corresponding deviation easily caused in the test piece mounting process can be avoided, so that the phenomena that the test time is too long and the test result is inaccurate are effectively avoided.

Description

Technical Field

[0001] This utility model relates to the field of test chip replacement fixture technology, specifically a test station for semiconductor test chips that can be quickly replaced. Background Technology

[0002] IC semiconductor test wafers play a crucial role in the semiconductor manufacturing process. They are dummy wafers used to evaluate and test equipment and other production conditions throughout the production line before formal production, thereby improving production stability and yield.

[0003] In addition, during the testing of IC semiconductor test pieces, engineers may experience misalignment during test piece installation when replacing test pieces. This can lead to open circuits or short circuits in the test results, resulting in excessively long testing times and inaccurate results. Therefore, it is necessary to design a test fixture that allows for stable installation of semiconductor test pieces and quick test piece replacement. Utility Model Content

[0004] The purpose of this invention is to provide a test station for semiconductors with rapidly replaceable test wafers, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a test station for quick-change test wafers of semiconductors, comprising a base, a fixing mechanism fixedly connected to the right side of the base, an installation mechanism provided on the top of the fixing mechanism, a pin provided inside the installation mechanism, and a fixing baffle fixedly connected to the top left side of the base;

[0006] The installation mechanism includes a test piece fixing seat, which is located on the top of the base. Fixing strips are provided on the front and rear sides of the test piece fixing seat. Sliding strips are fixedly connected to both ends of the fixing strips. A T-shaped plate is fixedly connected to the top of the test piece fixing seat. A spring is fixedly connected to one side of the T-shaped plate. A T-shaped insert is fixedly connected to one end of the spring. A short rod is rotatably connected to one end of the T-shaped insert. U-shaped brackets are fixedly connected to both ends of the short rod. A curved bracket is fixedly connected to the top of the sliding strip.

[0007] Preferably, the test piece holder has a groove inside, and the surface of the slide bar is slidably connected to the inside of the groove, so that the slide bar can slide under the limiting position inside the groove.

[0008] Preferably, the curved card holder has a hanging groove on its side, and the surface of the U-shaped frame is located inside the hanging groove.

[0009] Preferably, the T-shaped plate has a through hole inside, and the surface of the T-shaped insert has a through hole extending through the T-shaped plate, so that the T-shaped insert can move accordingly within the through hole.

[0010] Preferably, the fixing mechanism includes a support base, which is fixedly connected to the middle of the top of the base. A plug rod is fixedly connected to the right side of the support base, and a threaded rod is fixedly connected to the right end of the plug rod. A bolt is threaded onto the surface of the threaded rod, and a rear push rod is provided on the surface of the plug rod. A blocking strip is fixedly connected to the top right end of the rear push rod.

[0011] Preferably, a through hole is formed inside the rear push rod, and the surface of the insert rod is slidably connected to the inside of the through hole.

[0012] Preferably, the support base has an insertion hole at its top, the pin surface matches the inside of the insertion hole, and the test piece fixing base has a slot in the middle of its top, with the pin surface located inside the slot, so as to facilitate the use of the pin to limit the position of the test piece fixing base.

[0013] Compared with the prior art, this utility model provides a test station for semiconductor quick-change test wafers, which has the following beneficial effects:

[0014] 1. This test station for quick-change semiconductor test pieces utilizes a mounting mechanism that allows the slider at one end of the fixed stop to be inserted into the side of the test piece holder. Pulling the U-shaped frame moves the T-shaped insert after overcoming the elastic force of the spring, thus hanging the U-shaped frame on the curved bracket at the top of the slider. Under the elastic force of the spring, the fixed stop is firmly fixed to the side of the test piece holder, clamping and holding the test piece. The operation is convenient and quick, and disassembly is also easy. It avoids misalignment during test piece installation, effectively preventing excessively long testing times and inaccurate test results.

[0015] 2. This test station for quick-change semiconductor test pieces uses a fixed mechanism to fit bolts onto the surface of a threaded rod and rotate them, thereby clamping the stop bar at the top of the rear push rod with the right end of the test piece fixing seat. The bolts are then tightened to further clamp the test piece workpiece. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a perspective view of the overall structure of this utility model;

[0018] Figure 2 This is a three-dimensional exploded view of the installation mechanism of this utility model;

[0019] Figure 3 This is a three-dimensional exploded view of the installation mechanism parts of this utility model;

[0020] Figure 4 This is a three-dimensional exploded view of the fixing mechanism of this utility model;

[0021] Figure 5 This is a perspective view of the base and fixing baffle of this utility model.

[0022] In the diagram: 1. Base; 2. Mounting mechanism; 21. Test piece holder; 22. Sliding bar; 23. Fixing stop bar; 24. T-shaped plate; 25. Spring; 26. T-shaped insert; 27. Short rod; 28. U-shaped frame; 29. ​​Bent bracket; 3. Fixing mechanism; 31. Support base; 32. Insert rod; 33. Threaded rod; 34. Bolt; 35. Rear push rod; 36. Blocking bar; 4. Fixing baffle; 5. Pin. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0025] This utility model provides the following technical solution:

[0026] Example 1

[0027] Combination Figures 2 to 5A test station for quick-change test wafers for semiconductors includes a base 1, a fixing mechanism 3 fixedly connected to the right side of the base 1, an installation mechanism 2 provided on the top of the fixing mechanism 3, a pin 5 provided inside the installation mechanism 2, and a fixing baffle 4 fixedly connected to the top left side of the base 1.

[0028] The mounting mechanism 2 includes a test piece fixing seat 21, which is located on the top of the base 1. Fixing bars 23 are respectively provided on the front and rear sides of the test piece fixing seat 21. Slide strips 22 are fixedly connected to both ends of the surface of the fixing bars 23. A T-shaped plate 24 is fixedly connected to the top of the test piece fixing seat 21. A spring 25 is fixedly connected to one side of the T-shaped plate 24. A T-shaped insert 26 is fixedly connected to one end of the spring 25. A short rod 27 is rotatably connected to one end of the T-shaped insert 26. U-shaped frames 28 are fixedly connected to both ends of the short rod 27. A curved bracket 29 is fixedly connected to the top of the slide strip 22. A sliding groove is opened inside the test piece fixing seat 21, and the surface of the slide strip 22 is slidably connected to the inside of the sliding groove. A hanging groove is opened on the side of the curved bracket 29, and the surface of the U-shaped frame 28 is located inside the hanging groove.

[0029] Furthermore, a through hole is opened inside the T-shaped plate 24, and the surface of the T-shaped insert 26 passes through the through hole inside the T-shaped plate 24, allowing the slide bar 22 at one end of the fixing strip 23 to be inserted into the side of the test piece fixing seat 21. At this time, pulling the U-shaped frame 28 causes the T-shaped insert 26 to move after overcoming the elastic force of the spring 25, thereby hanging the U-shaped frame 28 on the curved card seat 29 at the top of the slide bar 22. Under the elastic force of the spring 25, the fixing strip 23 can be firmly fixed to the side of the test piece fixing seat 21 and perform the clamping and clamping function of the test piece workpiece. The operation is convenient and quick, and it is also convenient to disassemble it. It can also avoid the corresponding displacement during the installation of the test piece, thereby effectively avoiding the phenomenon of excessive test time and inaccurate test results.

[0030] Example 2

[0031] See Figure 1-5 Furthermore, based on Embodiment 1, the fixing mechanism 3 includes a support base 31, which is fixedly connected to the top middle of the base 1. A rod 32 is fixedly connected to the right side of the support base 31, and a threaded rod 33 is fixedly connected to the right end of the rod 32. A bolt 34 is threadedly connected to the surface of the threaded rod 33. A rear push rod 35 is provided on the surface of the rod 32. A blocking strip 36 is fixedly connected to the top right end of the rear push rod 35. A through hole is opened inside the rear push rod 35, and the surface of the rod 32 is slidably connected to the inside of the through hole.

[0032] Furthermore, the support base 31 has an insertion hole at its top, and the surface of the pin 5 matches the inside of the insertion hole. The test piece fixing base 21 has a slot in the middle of its top, and the surface of the pin 5 is located inside the slot. The bolt 34 is fitted onto the surface of the threaded rod 33 and rotated by the thread, thereby clamping the blocking strip 36 at the top of the rear push rod 35 with the right end of the test piece fixing base 21. The bolt 34 is then tightened by threading, thus enabling further clamping of the test piece workpiece.

[0033] In actual operation, when this device is used, during the installation of the test piece, the middle of the test piece fixing seat 21 is inserted into the pin 5, and then the rear push rod 35 is inserted into the surface of the insert rod 32 and pushed forward to support the right end of the test piece fixing seat 21. Then, the test piece is inserted into the slot on the side of the test piece fixing seat 21, and the slide bar 22 at one end of the fixing bar 23 is inserted into the inside of the side of the test piece fixing seat 21. At this time, the U-shaped frame 28 is pulled to drive the T-shaped insert bar 26 to move after overcoming the elastic force of the spring 25, so that the U-shaped frame 28 is hung on the curved seat 29 at the top of the slide bar 22. Under the elastic force of the spring 25, the fixing bar 23 can be firmly fixed to the side of the test piece fixing seat 21 and clamp the test piece. The operation is convenient and quick, and it is also convenient to disassemble it.

[0034] In addition, after the rear push rod 35 is inserted into the surface of the insertion rod 32, the bolt 34 is put on the surface of the threaded rod 33 and rotated by thread, so that the blocking strip 36 at the top of the rear push rod 35 can be locked with the right end of the test piece fixing seat 21, and the bolt 34 is tightened by thread, so that the test piece workpiece can be further clamped.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A test station for quick-change semiconductor test wafers, comprising a base (1), characterized in that: A fixing mechanism (3) is fixedly connected to the right side of the base (1), and an installation mechanism (2) is provided on the top of the fixing mechanism (3). A pin (5) is provided inside the installation mechanism (2), and a fixing baffle (4) is fixedly connected to the top left side of the base (1). The installation mechanism (2) includes a test piece fixing seat (21), which is located on the top of the base (1). The test piece fixing seat (21) is provided with fixing bars (23) on the front and rear sides respectively. Slide bars (22) are fixedly connected to both ends of the surface of the fixing bars (23). A T-shaped plate (24) is fixedly connected to the top of the test piece fixing seat (21). A spring (25) is fixedly connected to one side of the T-shaped plate (24). A T-shaped insert (26) is fixedly connected to one end of the spring (25). A short rod (27) is rotatably connected to one end of the T-shaped insert (26). A U-shaped frame (28) is fixedly connected to both ends of the short rod (27). A curved card seat (29) is fixedly connected to the top of the slide bar (22).

2. A test station for quickly replaceable semiconductor test wafers according to claim 1, characterized in that: The test piece holder (21) has a groove inside, and the surface of the slide bar (22) is slidably connected to the inside of the groove.

3. A test station for quickly replaceable semiconductor test wafers according to claim 1, characterized in that: The curved card holder (29) has a hanging groove on its side, and the surface of the U-shaped frame (28) is located inside the hanging groove.

4. A test station for quickly replaceable semiconductor test wafers according to claim 1, characterized in that: The T-shaped plate (24) has a through hole inside, and the T-shaped insert (26) has a through hole inside the T-shaped plate (24) through its surface.

5. A test station for quickly replaceable semiconductor test wafers according to claim 1, characterized in that: The fixing mechanism (3) includes a support base (31), which is fixedly connected to the top middle of the base (1). A plug rod (32) is fixedly connected to the right side of the support base (31). A threaded rod (33) is fixedly connected to the right end of the plug rod (32). A bolt (34) is threadedly connected to the surface of the threaded rod (33). A rear push rod (35) is provided on the surface of the plug rod (32). A blocking strip (36) is fixedly connected to the top right end of the rear push rod (35).

6. A test station for quickly replaceable semiconductor test wafers according to claim 5, characterized in that: The rear push rod (35) has a through hole inside, and the surface of the insert rod (32) is slidably connected to the inside of the through hole.

7. A test station for quickly replaceable semiconductor test wafers according to claim 5, characterized in that: The support base (31) has an insertion hole at the top, and the surface of the pin (5) matches the inside of the insertion hole. The test piece fixing base (21) has a slot in the middle of the top, and the surface of the pin (5) is located inside the slot.

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