Test device

Abstract

The utility model relates to the technical field of semiconductor testing, and provides testing equipment. The testing equipment comprises a testing module, a fan, a heating module and a refrigerating module which are located in a testing cavity, the fan is used for forming circulating temperature control airflow modulated by the heating module and the refrigerating module in the testing cavity so that the testing module can test the semiconductor device at the set temperature, and an in-cavity water receiving disc is arranged below the refrigerating module. The in-cavity water receiving disc is used for receiving condensate water on the refrigeration module; the test equipment further comprises a drainage structure which is communicated with the in-cavity water pan and used for draining condensate water on the in-cavity water pan out of the test cavity. According to the test equipment, water in the water pan can be effectively discharged, and the problem that accumulated water becomes more and more and even escapes in the water discharging process is solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a testing device. Background Technology

[0002] In semiconductor high and low temperature testing, the heater serves as the system heat source, while the evaporator is connected to the refrigerant circuit to serve as the system cold source. The air inside the test chamber is circulated by a circulating fan to achieve temperature control through heat exchange.

[0003] In practice, to meet some extreme testing conditions, it is necessary to maintain a low-temperature testing environment for an extended period. However, after an extremely long period of low-temperature testing, the surface temperature of the evaporator becomes extremely low, causing moisture in the air to condense on the evaporator surface. When the temperature inside the testing chamber rises again, the condensation on the evaporator surface melts.

[0004] In related technologies, a drip tray is typically installed at the bottom of the evaporator to collect melted frost water. Hot air is then blown into the drip tray to evaporate the water, thus circulating water molecules within the test chamber. However, the airflow creates a negative pressure within the test chamber, causing outside air to enter. Moisture in this air continuously condenses on the evaporator surface. As the frost melts upon rewarming, the amount of frost water in the drip tray increases, exceeding its capacity. Utility Model Content

[0005] Therefore, it is necessary to provide a testing device that can effectively drain water from the water collection tray and alleviate the problem of water accumulating and even overflowing during the drainage process.

[0006] A testing device includes a testing module, a fan, a heating module, and a cooling module located within a testing chamber. The fan is used to generate a circulating temperature-controlled airflow modulated by the heating and cooling modules within the testing chamber, allowing the testing module to test semiconductor devices at a set temperature. A water collection tray is provided below the cooling module to collect condensate from the cooling module. The testing device also includes a drainage structure connected to the water collection tray to drain condensate from the water collection tray into the testing chamber.

[0007] Understandably, due to temperature changes within the test chamber, the frost that condenses on the surface of the cooling module at low temperatures melts into water upon warming up and falls onto the water collection tray at the bottom of the chamber. The drainage structure then drains the water from the collection tray into the test chamber. Compared to related technologies that utilize hot airflow to evaporate water, this embodiment uses an independent drainage structure to directly drain the water, eliminating the need for a phase change in the water. Furthermore, the amount of water in the collection tray is not affected by moisture in the outside air during drainage, improving drainage efficiency and mitigating the problem of water accumulating and overflowing during the drainage process.

[0008] In some embodiments, the drainage structure includes a gas source assembly, a vacuum generator, and a drainage assembly. The vacuum generator has a first interface, a second interface, and a third interface. The gas source assembly is used to deliver gas and has at least one delivery channel. The delivery channel is connected to the first interface of the vacuum generator. The second interface of the vacuum generator is connected to the water collection tray inside the cavity. The third interface of the vacuum generator is connected to the drainage assembly. The vacuum generator is configured to generate negative pressure in response to the gas flow from the gas source assembly to adsorb the accumulated liquid in the water collection tray inside the cavity.

[0009] In some embodiments, the conveying channel includes a first conveying channel and a second conveying channel connected in parallel; the air source assembly includes a pneumatic source and a first distributor, the first distributor having a first inlet and a plurality of first outlets, the first inlet being connected to the pneumatic source, a portion of the first outlets defining the first conveying channel, and another portion of the first outlets defining the second conveying channel.

[0010] In some embodiments, a water suction pipe is connected to the second interface of the vacuum generator; the drainage structure also includes a first fixing frame, which is connected to the water suction pipe and is used to install the water suction pipe at the water receiving tray inside the cavity.

[0011] In some embodiments, the first fixing frame includes a fixing frame body and a water suction connector connected to the fixing frame body. The fixing frame body is disposed in the water receiving tray and / or test chamber inside the cavity. The water suction connector is suspended in the water receiving tray inside the cavity and at least partially extends into the water receiving tray inside the cavity. The water suction connector is connected to the water suction pipe.

[0012] In some embodiments, the drainage assembly includes at least an external water receiving tray, which is located outside the test chamber and has a drain outlet. The vacuum generator is located at the external water receiving tray, and the third interface is positioned facing the external water receiving tray.

[0013] In some embodiments, the drainage structure further includes a second fixing frame connected to the vacuum generator for suspending the vacuum generator above the external water receiving tray.

[0014] In some embodiments, an air inlet pipe is connected to the first interface of the vacuum generator, the air inlet pipe is connected to the air source assembly, and the air inlet pipe is provided with a flow regulating element.

[0015] In some embodiments, the testing device has at least two spaced-apart test chambers, each test chamber is provided with a corresponding water receiving tray, each water receiving tray is connected to a second interface of a vacuum generator, the first interface of each vacuum generator is connected to the gas source assembly, and the third interface is connected to the drainage assembly.

[0016] In some embodiments, the drainage structure further includes a second diverter having a second inlet and at least two second outlets, the second inlet being connected to the first delivery channel, and each of the second outlets being connected to a first interface of the vacuum generator. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of a test device provided in one embodiment of this application;

[0019] Figure 2 This is a first partial schematic diagram of a test device provided in an embodiment of this application;

[0020] Figure 3 This is a second partial schematic diagram of a test device provided in an embodiment of this application;

[0021] Figure 4 This is a simplified schematic diagram of a drainage structure provided in one embodiment of this application;

[0022] Figure 5 This is a first partial schematic diagram of a drainage structure provided in an embodiment of this application;

[0023] Figure 6 for Figure 5 A magnified view of a section at point A in the middle;

[0024] Figure 7 This is a second partial schematic diagram of a drainage structure provided in an embodiment of this application;

[0025] Figure 8 This is a third partial schematic diagram of a drainage structure provided in an embodiment of this application;

[0026] Figure 9 for Figure 8 A magnified view of a section at point B in the middle;

[0027] Figure 10 This is a simplified schematic diagram of a drainage structure provided for another embodiment of this application.

[0028] Reference numerals: 100, Drainage structure; 110, Air source assembly; 111, Pneumatic source; 112, First distributor; 120, Vacuum generator; 120a, First vacuum generator; 120b, Second vacuum generator; 121, Suction pipe; 122, Air inlet pipe; 130, Drainage assembly; 131, External water receiving tray; 150, Air terminal; 160, First fixing frame; 161, Fixing frame body; 162, Suction connector; 170, Second fixing frame; 171, Fixing part; 17 2. Connecting part; 173. Connecting part; 190. Second distributor; 200. Test chamber; 210. Test frame; 300. Fan; 400. Cooling module; 500. Heating module; 600. Water receiving tray inside the chamber; 600a. First water receiving tray inside the chamber; 600b. Second water receiving tray inside the chamber; 700. Back plate; 800. Air duct; 900. Temperature control sensor; 1101. First conveying channel; 1102. Second conveying channel; 1611. First frame; 1612. Second frame. Detailed Implementation

[0029] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0030] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0034] Please see Figures 1 to 3 One embodiment of this application provides a testing device, specifically an aging testing device, which includes a test chamber surrounding a test cavity 200. The testing device also includes a test module, a heating module 500, a cooling module 400, and a fan 300 located within the test cavity 200. The fan 300 is used to generate a circulating temperature-controlled airflow modulated by the heating module 500 and the cooling module 400 within the test cavity 200, so that the test module can perform aging tests on semiconductor devices at a set temperature. A water receiving tray 600 is provided below the cooling module 400 to collect condensate from the cooling module 400.

[0035] The testing equipment also includes a drainage structure 100, which is connected to the water receiving tray 600 inside the cavity, and is used to drain the condensate on the water receiving tray 600 inside the cavity from the test cavity 200.

[0036] During use, the temperature changes within the test chamber 200 cause frost that condenses on the surface of the cooling module 400 at low temperatures to melt into water upon warming up, which then falls onto the water collection tray 600 at the bottom of the chamber. The drainage structure then drains the water from the water collection tray 600 into the test chamber 200. Compared to related technologies that utilize hot airflow to evaporate water, this embodiment uses an independent drainage structure to directly drain the water, eliminating the need for a phase change in the water. Furthermore, the amount of water in the water collection tray 600 is not affected by moisture in the air outside the test chamber 200 during drainage, thus improving drainage efficiency and mitigating the problem of excessive water accumulation or even overflow during the drainage process.

[0037] The testing equipment has an air duct 800 between the fan 300 and the test chamber 200 for the circulation of temperature-controlled airflow, and a temperature sensor 900 is installed in the test chamber 200 to detect the temperature inside the test chamber 200 for timely control.

[0038] The drainage structure 100 is described in detail below.

[0039] Please see Figures 2 to 4 For example, the drainage structure 100 includes a gas source assembly 110, a vacuum generator 120, and a drainage assembly 130. The gas source assembly 110 is used to deliver gas and has at least one delivery channel. The vacuum generator 120 has a first interface, a second interface, and a third interface. The first interface of the vacuum generator 120 is connected to the delivery channel, the second interface of the vacuum generator 120 is connected to the water receiving tray 600 inside the cavity, and the third interface of the vacuum generator 120 is connected to the drainage assembly 130. The vacuum generator 120 is configured to generate a negative pressure in response to the gas supply from the gas source assembly 110 to absorb the accumulated liquid (i.e., water) in the water receiving tray 600 inside the cavity.

[0040] Understandably, when gas is introduced through the gas source assembly 110, it flows along the delivery channel to the vacuum generator 120. The gas flowing through the vacuum generator 120 causes it to generate negative pressure. Since the second port of the vacuum generator 120 is connected to the water collection tray 600 inside the cavity, the negative pressure generated by the vacuum generator 120 can draw out the accumulated liquid in the water collection tray 600 through the second port, and then discharge the accumulated liquid through the third port to the drainage assembly 130, where it is finally drained.

[0041] In some specific embodiments, the gas source assembly 110 can be used to deliver dry gas. The delivery channels of the gas source assembly 110 include a first delivery channel 1101 and a second delivery channel 1102. The first delivery channel 1101 is connected to the first interface of the vacuum generator 120, and the second delivery channel 1102 is used to connect to the gas terminal 150. The gas terminal 150 can be the backplate 700 corresponding to the aforementioned test chamber 200. The dry gas is introduced into the test chamber 200 through the second delivery channel 1102 to reduce the moisture content in the test chamber 200 and at the backplate 700, maintain the dew point temperature, reduce the risk of condensation and dew on the semiconductor device during low-temperature testing, and reduce the risk of condensation and dew on the backplate 700.

[0042] like Figure 4As shown, optionally, the gas source assembly 110 includes a pneumatic source 111 and a first distributor 112. The first distributor 112 has a first inlet and multiple first outlets. The first inlet is connected to the pneumatic source 111, a portion of the first outlets defines a first conveying channel 1101, and another portion of the first outlets defines a second conveying channel 1102. The pneumatic source 111 can be a polymer membrane air dryer, or it can be connected to a dryer. The dried gas in the pneumatic source flows to the first distributor 112, and is then split by the first distributor 112 into the first conveying channel 1101 and the second conveying channel 1102, thus enabling the use of gas in the aforementioned drainage structure 100 and gas terminal 150.

[0043] The first diverter 112 can also be a Y-type three-way valve with three ports. One port is connected to the pneumatic source 111, another port is connected to the second interface of the vacuum generator 120, and the third port is connected to the aforementioned gas terminal 150.

[0044] Please see Figure 2 , Figure 4 , Figure 5 , Figure 6 and Figure 7 Furthermore, a suction pipe 121 is connected to the second interface of the vacuum generator 120. The drainage structure 100 also includes a first fixing bracket 160, which is connected to the suction pipe 121 and used to install the suction pipe 121 at the water receiving tray 600 inside the cavity. Connecting the water receiving tray 600 inside the cavity and the second interface of the vacuum generator 120 using the suction pipe 121 facilitates the vacuum generator 120 in absorbing the accumulated liquid in the water receiving tray 600 inside the cavity under negative pressure. Moreover, this arrangement allows the vacuum generator 120 to be installed outside the test chamber 200, protecting it from the temperature effects of high and low temperature tests, extending the service life of the vacuum generator 120, and reducing material costs. Simultaneously, the first fixing bracket 160 improves the installation reliability of the suction pipe 121 and facilitates its arrangement. Since the suction pipe 121 needs to extend into the test chamber 200, it can be made of a material resistant to high and low temperatures, such as a fluoropolymer tube.

[0045] In practical use, the first fixing frame 160 includes a fixing frame body 161 and a water suction connector 162 connected to the fixing frame body 161. The fixing frame body 161 is located in the water receiving tray 600 inside the cavity. The water suction connector 162 is suspended in the water receiving tray 600 inside the cavity and at least partially extends into the water receiving tray 600 inside the cavity. The water suction connector 162 is connected to the water suction pipe 121. The water suction connector 162 needs a certain rigidity. It is directly installed in the water receiving tray 600 inside the cavity through the fixing frame body 161. Only the connection between the water suction pipe 121 and the water suction connector 162 needs to be adjusted, making assembly more convenient.

[0046] The water suction connector 162 has a through hole, and the end of the water suction tube 121 can be directly inserted into the through hole. Alternatively, the water suction tube 121 can also be directly fixed to the wall of the test chamber 200 via the first fixing bracket 160, with one end extending into the water receiving tray 600 inside the chamber.

[0047] like Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, in some specific embodiments, the testing equipment includes a test frame 210, with a test housing covering the outside of the test frame 210. The test frame 210 can be used to support the aforementioned fan 300, cooling module 400, heating module 500, etc. A water receiving tray 600 can also be disposed within the test frame 210. The fixing frame 161 includes a first frame 1611 and a second frame 1612, which are fastened to the uprights of the test frame 210. For example, the second frame 1612 includes a U-shaped portion and a first connecting arm connected to the U-shaped portion. The first connecting arm can be connected to the test housing surrounding the test cavity 200, or to the water receiving tray 600 within the cavity. The uprights of the test frame 210 are secured within the U-shaped groove surrounding the U-shaped portion. The first frame 1611 is attached to the side of the column away from the U-shaped groove and connected to one side wall of the U-shaped part. The first frame 1611 extends towards the water receiving tray 600 in the cavity and has a horizontally bent support arm. The water suction connector 162 is provided on the support arm to ensure that the axis of the water suction connector 162 is perpendicular to the water receiving tray 600 in the cavity.

[0048] Both the first frame 1611 and the second frame 1612 are formed by bending sheet metal.

[0049] like Figure 2 , Figure 7 , Figure 8 and Figure 9 As shown, further, an air inlet pipe 122 is connected to the first interface of the vacuum generator 120. The air inlet pipe 122 communicates with the first delivery channel 1101, and a flow regulating element is provided on the air inlet pipe 122. The air inlet pipe 122 is conveniently connected directly to the first distributor 112 in the aforementioned gas source assembly 110. When the first distributor 112 has multiple first outlets, the air inlet pipe 122 includes a main pipe and multiple branch pipes connected to the main pipe. Each branch pipe is connected to a corresponding first outlet to ensure that the gas flowing out through the corresponding first outlet can flow along the air inlet pipe to the vacuum generator 120 to generate negative pressure. The flow regulating element is convenient for adjusting the flow rate of the air inlet pipe 122. The flow rate can be increased or decreased according to actual needs. A larger flow rate generates a larger negative pressure, and a smaller flow rate generates a smaller negative pressure. When the flow regulating element is closed, the air inlet pipe is cut off.

[0050] In actual use, the air source assembly 110 is mostly located on the outside of the test chamber 200, so the air inlet pipe 122 is also located on the outside of the test chamber 200. It can be made of conventional materials, such as rubber tubes, silicone tubes, resin tubes, etc.

[0051] Please see Figure 2 , Figure 3 , Figure 7 , Figure 8 and Figure 9 As another example, the drainage assembly 130 includes at least an external water receiving tray 131, which is located outside the test chamber 200 and has a drain outlet. A vacuum generator 120 is located outside the external water receiving tray 131, with its third interface facing the external water receiving tray 131, for discharging the accumulated liquid absorbed by the internal water receiving tray 600 to the external water receiving tray 131. It is understood that the external water receiving tray 131 serves to collect and temporarily store the accumulated liquid, and then discharges the liquid from the external water receiving tray 131 through the drain outlet, facilitating the continuous collection of liquid from the internal water receiving tray 600. Since the third interface of the vacuum generator 120 faces the external water receiving tray 131, the accumulated liquid absorbed by the vacuum generator 120 can be directly discharged to the external water receiving tray 131 through the third interface, improving the drainage effect.

[0052] Since the vacuum generator 120 is located at the water receiving tray 131 outside the cavity, the water suction pipe 121 is relatively long. A fixing plate can be set on the test chamber to lay and fix the water suction pipe 121, reducing the risk of messy water suction pipe 121.

[0053] like Figure 9 As shown, the drainage structure further includes a second fixing bracket 170, which is connected to the vacuum generator 120 and is used to suspend the vacuum generator 120 above the external water receiving tray 131. The second fixing bracket 170 maintains the assembly reliability of the vacuum generator 120 and facilitates the adjustment of the assembly position of the vacuum generator 120.

[0054] In practical use, the second mounting bracket 170 includes a fixing part 171 and a connecting part 173 connected to the fixing part 171. The fixing part 171 is connected to the external water receiving tray 131, and the connecting part 173 is connected to the vacuum generator 120, thereby satisfying the assembly of the vacuum generator 120 relative to the external water receiving tray 131 and ensuring that the third interface can be directly aligned with the external water receiving tray 131. In this way, the accumulated liquid sucked in by the vacuum generator 120 can fall directly into the external water receiving tray 131 under its own gravity, reducing splashing and other problems.

[0055] The end of the vacuum generator 120 near the third interface can extend into the external water receiving tray 131, reducing the distance between the third interface and the bottom of the external water receiving tray 131, thereby reducing the gravitational potential energy of the falling liquid; and this setting can prevent too much water in the external water receiving tray 131 from affecting the suction operation of the vacuum generator 120.

[0056] Optionally, the second mounting bracket 170 further includes a connecting portion 172, which connects the mounting portion 171 and the connecting portion 173 to increase the distance between the connecting portion 173 and the mounting portion 171, reduce the installation interference of the side wall of the external water receiving tray 131 to the vacuum generator 120, and reduce liquid splashing. The mounting portion 171 can be L-shaped and fitted onto the edge of the external water receiving tray 131; and the connecting portion 173 is U-shaped and fitted onto the outer side wall of the vacuum generator 120, maintaining contact and connection of the three side walls and improving connection reliability. The mounting portion 171 has a waist-shaped hole to facilitate fine-tuning of the mounting position of the second mounting bracket 170 relative to the external water receiving tray 131. Screws can be used to connect the mounting portion 171 to the external water receiving tray and the connecting portion 173 to the vacuum generator 120. The mounting portion 171 and the connecting portion 173 are located at opposite ends of the connecting portion 172 in the vertical direction, reducing assembly interference.

[0057] The second fixing frame 170 is formed by bending sheet metal.

[0058] like Figures 6 to 9 As shown, in some specific embodiments, the bottom of the external water receiving tray 131 is provided with a drain outlet to drain the accumulated liquid in the external water receiving tray 131, which facilitates the continuous collection of accumulated liquid drawn by the vacuum generator 120 and ensures sufficient drainage of the accumulated liquid in the internal water receiving tray 600. The drain outlet can be located away from the vacuum generator 120, and the bottom of the external water receiving tray 131 can be inclined downwards towards the drain outlet to facilitate guiding the water flow out of the drain outlet. The drain outlet can be connected to the plant's drainage pipeline through a drain pipe.

[0059] Please see Figure 1 and Figure 10 Optionally, the testing equipment includes at least two spaced-apart test chambers 200, each of which is equipped with a test module, a heating module 500, a cooling module 400, and a fan 300. Each test chamber 200 can be used independently for high and low temperature testing of semiconductor devices. The heating module 500 and cooling module 400 ensure temperature adjustment during high and low temperature testing, and the corresponding fan 300 forms a circulating temperature-controlled airflow within the corresponding test chamber 200. Each cooling module 400 has an internal water receiving tray 600 below it, and each internal water receiving tray 600 corresponds to a vacuum generator 120. The cooling module 400 can be an evaporator, and the heating module 500 can be a heater.

[0060] The second interface of each vacuum generator 120 is connected to the corresponding water receiving tray 600 in the cavity via its respective suction pipe 121. Each suction pipe 121 is provided with a first fixing bracket 160 for fixation. Furthermore, the first interface of each vacuum generator 120 is connected to the first delivery channel 1101 of the gas source assembly 110, and the third interface of each vacuum generator 120 is connected to the drainage assembly 130. Two vacuum generators 120 can be connected to the same drainage assembly 130, or they can be provided with separate drainage assemblies 130.

[0061] Taking two test chambers 200 as an example, the vacuum generators 120 corresponding to each of the two test chambers 200 can share a single gas source assembly 110. The two vacuum generators 120 are a first vacuum generator 120a and a second vacuum generator 120b, respectively, and their corresponding water receiving trays 600a and 600b are respectively a first water receiving tray 600a and a second water receiving tray 600b. The first vacuum generator 120a is connected to the first water receiving tray 600a through a corresponding suction pipe 121, and the second vacuum generator 120b is connected to the second water receiving tray 600b through a corresponding suction pipe 121.

[0062] Furthermore, the drainage structure 100 also includes a second diverter 190, which has a second inlet and at least two second outlets. The second inlet is connected to the first conveying channel 1101, and each second outlet is connected to a second interface of a vacuum generator 120. In other words, the second diverter 190 can divert the gas corresponding to the first conveying channel 1101, causing a portion to flow to the second interface of the first vacuum generator 120a and another portion to flow to the second interface of the second vacuum generator 120b, thereby satisfying the drainage of accumulated liquid from the water receiving trays 600 corresponding to the two test chambers 200.

[0063] Among them, a two-position three-way solenoid valve and a throttle valve are respectively installed on the two channels that are diverted through the first diverter 112, and the two-position three-way solenoid valve and the throttle valve on each channel are connected in series.

[0064] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0065] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A testing device, characterized in that, The device includes a test module, a fan (300), a heating module (500), and a cooling module (400) located within a test chamber (200). The fan is used to generate a circulating temperature-controlled airflow modulated by the heating module (500) and the cooling module (400) within the test chamber (200) for the test module to test semiconductor devices at a set temperature. A water receiving tray (600) is provided below the cooling module (400) to collect condensate from the cooling module (400). as well as A drainage structure (100) is connected to the water receiving tray (600) inside the cavity, and is used to discharge the condensate on the water receiving tray (600) inside the cavity into the test cavity (200).

2. The testing equipment according to claim 1, characterized in that, The drainage structure (100) includes a gas source assembly (110), a vacuum generator (120), and a drainage assembly (130). The vacuum generator (120) has a first interface, a second interface, and a third interface. The gas source assembly (110) is used to transport gas and is provided with at least one transport channel. The delivery channel is connected to the first interface of the vacuum generator (120), the second interface of the vacuum generator (120) is connected to the water receiving tray (600) inside the cavity, and the third interface of the vacuum generator (120) is connected to the drainage assembly (130). The vacuum generator (120) is configured to generate negative pressure in response to the gas supply assembly (110) to adsorb the accumulated liquid in the water receiving tray (600) inside the cavity.

3. The testing equipment according to claim 2, characterized in that, The conveying channel includes a first conveying channel (1101) and a second conveying channel (1102), which are connected in parallel; The air source assembly (110) includes a pneumatic source (111) and a first distributor (112); The first distributor (112) has a first inlet and a plurality of first outlets, the first inlet being connected to the pneumatic source (111), a portion of the first outlets defining the first delivery channel (1101), and another portion of the first outlets defining the second delivery channel (1102).

4. The testing equipment according to claim 2, characterized in that, A water suction pipe (121) is connected to the second interface of the vacuum generator (120); The drainage structure (100) further includes a first fixing frame (160), which is connected to the water suction pipe (121) and is used to install the water suction pipe (121) at the water receiving tray (600) inside the cavity.

5. The testing equipment according to claim 4, characterized in that, The first fixing frame (160) includes a fixing frame body (161) and a water suction connector (162) connected to the fixing frame body (161). The fixing frame body (161) is disposed in the water receiving tray (600) and / or the test chamber (200) inside the cavity. The water suction connector (162) is suspended in the water receiving tray (600) inside the cavity and at least partially extends into the water receiving tray (600) inside the cavity. The water suction connector (162) is connected to the water suction pipe (121).

6. The testing equipment according to claim 2, characterized in that, The drainage assembly (130) includes at least an external water receiving tray (131), which is located outside the test chamber (200) and has a drain outlet. The vacuum generator (120) is located at the external water receiving tray (131), and the third interface is positioned facing the external water receiving tray (131).

7. The testing equipment according to claim 6, characterized in that, The drainage structure (100) further includes a second fixing frame (170), which is connected to the vacuum generator (120) and is used to suspend the vacuum generator (120) above the external water receiving tray (131).

8. The testing equipment according to claim 2, characterized in that, The vacuum generator (120) is connected to an air inlet pipe (122) at its first interface. The air inlet pipe (122) is connected to the air source assembly (110), and the air inlet pipe (122) is provided with a flow regulating element.

9. The testing equipment according to claim 2, characterized in that, The testing equipment is provided with at least two spaced test chambers (200), each test chamber (200) is provided with a corresponding water receiving tray (600), each water receiving tray (600) is connected to a second interface of a vacuum generator (120), the first interface of each vacuum generator (120) is connected to the gas source assembly (110), and the third interface is connected to the drainage assembly (130).

10. The testing equipment according to claim 9, characterized in that, The drainage structure (100) further includes a second diverter (190) having a second inlet and at least two second outlets. The second inlet is connected to the gas source assembly (110), and each of the second outlets is connected to a first interface of the vacuum generator (120).

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