Adjustable flow-equalizing partitioned air suction device

Abstract

The utility model discloses an adjustable flow-equalizing partition air suction device which comprises a suction cup assembly, a first switch valve module and an air exhaust module, at least a first air cavity and a second air cavity which are isolated from each other are arranged in the suction cup assembly, and the suction cup assembly is provided with a first air outlet communicated with the first air cavity and a second air outlet communicated with the second air cavity. The bearing surface of the suction cup assembly is provided with a first suction hole set and a second suction hole set which are located in different areas, the first suction hole set communicates with the first air cavity, the second suction hole set communicates with the second air cavity, the first switch valve module at least comprises a first valve assembly and a second valve assembly, and the head end of the first valve assembly is in butt joint with the first air outlet. According to the design, the air suction area is adjusted according to the size of a plate, it is guaranteed that reasonable suction force is provided, the plate is prevented from loosening, and use is reliable.

Description

TECHNICAL FIELD

[0001] The utility model relates to circuit board processing and manufacturing equipment technical field, especially a kind of adjustable current partition suction device. BACKGROUND

[0002] Laser direct writing type photoetching equipment is to use the exposure intensity controllable laser beam of certain wavelength, and the image information of circuit layer or solder mask layer is engraved on circuit board, and the desired pattern is obtained after development. During the exposure process of the laser direct writing type photoetching equipment on the circuit board, the circuit board needs to be fixed so that the image information can be accurately engraved on the circuit board.

[0003] The existing circuit board is fixed by the suction device, and the suction device is provided with a suction disc assembly and a suction pump. The bearing surface of the suction disc assembly is provided with a plurality of suction holes, each suction hole is communicated with the suction cavity in the suction disc assembly, and the suction pump and the suction cavity are connected to discharge the gas in the suction cavity. When the circuit board is placed on the bearing surface, it can be adsorbed by each suction hole.

[0004] However, in the actual production process, there are circuit boards of various sizes. When the circuit board with small size is placed on the bearing surface, only a small part of the suction holes can be covered, and most of the suction holes are exposed to communicate with the outside. At this time, when the suction pump works, the outside gas can still enter the suction cavity from the exposed suction hole, so that the negative pressure cannot be formed in the suction cavity, and the suction force generated at the suction hole covered by the circuit board is insufficient, so the circuit board cannot be firmly adsorbed. UTILITY MODEL CONTENTS

[0005] The utility model aims to solve one of the technical problems in the prior art. Therefore, the utility model provides an adjustable current partition suction device, which adjusts the suction area according to the size of the board, provides reasonable suction force, prevents the board from loosening, and is reliable to use.

[0006] According to the first aspect of the utility model discloses an adjustable current sharing partition suction device, including: sucking disc subassembly, the bearing surface of sucking disc subassembly is used for holding the plate spare of processing, at least the first gas cavity and second gas cavity of mutual isolation are arranged in sucking disc subassembly, sucking disc subassembly is provided with the first gas outlet of intercommunication with first gas cavity and the second gas outlet of intercommunication with second gas cavity, the bearing surface of sucking disc subassembly is provided with the first suction hole group and second suction hole group in different regions, first suction hole group is connected with first gas cavity, second suction hole group is connected with second gas cavity, first switch valve module, at least including first valve subassembly and second valve subassembly, the first end of first valve subassembly is docked with first gas outlet, the first end of second valve subassembly is docked with second gas outlet, the gas suction module, the gas suction mouth of gas suction module is docked with the tail end of first valve subassembly and the tail end of second valve subassembly respectively.

[0007] According to the first aspect of the utility model discloses an adjustable current sharing partition suction device, at least has following beneficial effect:

[0008] The utility model discloses adjustable current sharing partition suction device, places the plate spare of processing in the bearing surface, and the user can select whether the first valve subassembly corresponding to first gas cavity and / or second valve subassembly corresponding to second gas cavity are opened according to the size of plate spare of processing, for the plate spare of processing of smaller size, possibly only covers first suction hole group, and the user only opens first valve subassembly, and closes second valve subassembly, and the gas suction module runs suction, forms negative pressure in first gas cavity, because second gas cavity and first gas cavity are mutually isolated, and second suction hole group is connected with the outside, and the suction of first suction hole group is also not affected by the size of the force, and first suction hole group can provide suitable suction to the plate spare of processing adsorption, and for the plate spare of processing of larger size, possibly covers most first suction hole group and second suction hole group, at this time, the user opens first valve subassembly and second valve subassembly, and the gas suction module runs suction, forms negative pressure in first gas cavity and second gas cavity, and first suction hole group and second suction hole group can provide suitable suction to the plate spare of processing adsorption, and the design adjusts the suction area according to the size of plate spare, guarantees to provide reasonable suction, prevents the plate spare loose, and reliable in use.

[0009] According to some embodiments of the utility model, the bearing surface of the sucking disc subassembly is provided with at least one scale mark, the bearing surface of the sucking disc subassembly is divided into at least a first area and a second area along the length direction of the scale mark, the first suction hole group is arranged in the first area, and the second suction hole group is arranged in the second area.

[0010] According to some embodiments of the present application, the first air suction hole group comprises a plurality of first air suction micro-holes, and the plurality of first air suction micro-holes are arranged in a row-column type and uniformly distributed in the first area.

[0011] According to some embodiments of the present application, the scale marking members are two and are X-axis scale member and Y-axis scale member respectively, and the X-axis scale member and the Y-axis scale member are perpendicular to each other.

[0012] According to some embodiments of the present application, the air suction module comprises a vacuum degree detection module, a control module and an air suction pump, the air suction port of the air suction pump is respectively connected with the tail end of the first valve assembly and the tail end of the second valve assembly, the vacuum degree detection module is used for detecting the vacuum degree in the air suction pump, the control module is connected with the vacuum degree detection module and the air suction pump respectively, and the control module controls the air suction suction force of the air suction pump according to the vacuum degree.

[0013] According to some embodiments of the present application, the air suction module further comprises a shunt pipe, the shunt pipe is provided with a main flow channel and a plurality of shunt channels, the shunt pipe is provided with an output port and a plurality of input ports, the head end of the main flow channel is communicated with the input port, the tail end of the main flow channel is connected with the head end of each shunt channel respectively, the input port is connected with the air suction port of the air suction pump, and the tail end of each shunt channel is connected with the tail end of the first valve assembly and the tail end of the second valve assembly one by one.

[0014] According to some embodiments of the present application, the adjustable flow equalization partition air suction device further comprises a second switch valve module, the head end of the second switch valve module is connected with the gas source, and the tail end of the second switch valve module is communicated with the first gas cavity and the second gas cavity, so that when the second switch valve module is turned on, the gas flow output by the gas source can enter the first gas cavity and the second gas cavity.

[0015] According to some embodiments of the present application, the second switch valve module comprises an adjusting valve, a first electric control valve and a second electric control valve, the head end of the adjusting valve is connected with the gas source, the tail end of the adjusting valve is connected with the head end of the first electric control valve and the head end of the second electric control valve respectively, the tail end of the first electric control valve is communicated with the first gas cavity, and the tail end of the second electric control valve is communicated with the second gas cavity.

[0016] According to some embodiments of the present application, the adjustable flow equalization partition air suction device further comprises a control module, and the control module is electrically connected with the first switch valve module and the second switch valve module respectively.

[0017] Additional aspects and advantages of the present application will be set forth in part in the following description, and in part will become apparent to those skilled in the art upon examination of the following description, or can be learned by practice of the application. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and be readily appreciated from the following description, taken in conjunction with the accompanying drawings, in which:

[0019] Figure 1 It is a top view of the suction cup assembly of one of the embodiments of the adjustable current-sharing partitioned air suction device of the present application;

[0020] Figure 2 It is a side view structural schematic diagram of the suction cup assembly of one of the embodiments of the adjustable current-sharing partitioned air suction device of the present application;

[0021] Figure 3 It is a structural schematic diagram of the first switch valve module and the air suction module of one of the embodiments of the adjustable current-sharing partitioned air suction device of the present application;

[0022] Figure 4 It is a control principle structural block diagram of one of the embodiments of the adjustable current-sharing partitioned air suction device of the present application.

[0023] REFERENCE NUMERALS:

[0024] Suction cup assembly 100; first air cavity 111; second air cavity 112; third air cavity 113; fourth air cavity 114; first air outlet 121; second air outlet 122; first air suction hole group 130; first air suction micro-hole 131; second air suction hole group 140; second air suction micro-hole 141; third air suction hole group 150; fourth air suction hole group 160; dam plate 170; first switch valve module 200; first valve assembly 210; second valve assembly 220; third valve assembly 230; fourth valve assembly 240; air suction module 300; vacuum degree detection module 310; control module 320; frequency conversion module 321; air suction pump 330; X-axis scale piece 410; Y-axis scale piece 420; shunt pipe piece 500; second switch valve module 600; regulating valve 610; first electric control valve 620; second electric control valve 630. DETAILED DESCRIPTION

[0025] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0026] In the description of the utility model, need understanding, if the direction description, for example the term "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and so on the direction or position relation indicated is based on the direction or position relation shown in the drawing, just is for the convenience of describing the utility model and simplifying the description, and not indicate or imply the device or element indicated must have a particular direction, construct and operate with a particular direction, therefore can not be understood as the restriction of the utility model.

[0027] In the description of the utility model, several mean one or more, multiple mean two or more, greater than, less than, exceed and so on are understood as not including the number, above, below, within and so on are understood as including the number.If there is a description to the first, second is only used for distinguishing the technical features for the purpose, and can not be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0028] In the description of the utility model, it needs to be explained that, unless otherwise expressly provided and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements.For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0029] As shown in Figures 1 to 4 The utility model discloses a kind of adjustable current sharing partition suction devices according to the first aspect embodiment of the utility model, including chuck assembly 100, first switch valve module 200 and suction module 300, the bearing surface of the chuck assembly 100 is used to hold and place the plate piece to be processed, at least first air cavity 111 and second air cavity 112 isolated from each other are provided in the chuck assembly 100, the chuck assembly 100 is provided with first air outlet 121 with the first air cavity 111 communication and second air outlet 122 with the second air cavity 112 communication, the bearing surface of the chuck assembly 100 is provided at least with first suction hole group 130 and second suction hole group 140 located in different regions, the first suction hole group 130 is communicated with the first air cavity 111, the second suction hole group 140 is communicated with the second air cavity 112, first switch valve module 200 at least includes first valve assembly 210 and second valve assembly 220, the first end of the first valve assembly 210 is docked with the first air outlet 121, the first end of the second valve assembly 220 is docked with the second air outlet 122, the suction port of the suction module 300 is respectively docked with the tail end of the first valve assembly 210 and the tail end of the second valve assembly 220.

[0030] The suction disc assembly 100 can be made of resin or alloy material, the bearing surface is smooth and has good flatness, so that the plate to be processed can be placed flat on the bearing surface, and the suction disc assembly 100 has good air tightness. Figure 2 As shown in the drawings, the suction disc assembly 100 is provided with a dam plate 170 to separate the first air cavity 111 and the second air cavity 112. Specifically, as the area of the bearing surface expands, the bearing surface can also be provided with a third suction hole group 150, a fourth suction hole group 160 or even more, and the suction disc assembly 100 can also be correspondingly separated into a third air cavity 113, a fourth air cavity 114 or even more, and the first switch valve module 200 is provided with a third valve assembly 230, a fourth valve assembly 240 or even more, the third valve assembly 230, the third air cavity 113 and the third suction hole group 150 are correspondingly connected, the fourth valve assembly 240, the fourth air cavity 114 and the fourth suction hole group 160 are correspondingly connected, so as to cope with larger plate to be processed, and more third suction hole groups 150 and fourth suction hole groups 160 are used to adsorb the plate to be processed.

[0031] The adjustable flow equalization partition suction device of the utility model can place the plate to be processed on the bearing surface, and the user can select whether to open the first valve assembly 210 corresponding to the first air cavity 111 and / or the second valve assembly 220 corresponding to the second air cavity 112 according to the size of the plate to be processed. For a smaller plate to be processed, only the first suction hole group 130 can be covered, the user only opens the first valve assembly 210 and closes the second valve assembly 220, the air extraction module 300 runs to extract air, and a negative pressure is formed in the first air cavity 111. Since the second air cavity 112 and the first air cavity 111 are isolated from each other, the suction force of the first suction hole group 130 will not be affected by the communication between the second suction hole group 140 and the outside world, and the first suction hole group 130 can provide appropriate suction force to adsorb the plate to be processed. For a larger plate to be processed, most of the first suction hole group 130 and the second suction hole group 140 can be covered. At this time, the user opens the first valve assembly 210 and the second valve assembly 220, the air extraction module 300 runs to extract air, and a negative pressure is formed in the first air cavity 111 and the second air cavity 112. The first suction hole group 130 and the second suction hole group 140 can provide appropriate suction force to adsorb the plate to be processed. The design adjusts the air suction area according to the size of the plate to ensure that appropriate suction force is provided to prevent the plate from loosening. The adjustable flow equalization partition suction device of the utility model can be used to fix the plate to be processed, so that the plate to be processed is fixed and stable, and problems such as exposure pattern deviation, plate warping, pattern defocus and uneven air suction are prevented during exposure, thereby improving the exposure precision and stability of the photolithography equipment.

[0032] In some embodiments of the utility model, as shown in the drawings, Figure 1As shown, the bearing surface of the chuck assembly 100 is provided with at least one scale mark, which divides the bearing surface of the chuck assembly 100 into at least a first area and a second area along the length direction of the scale mark, the first air hole group 130 is arranged in the first area, and the second air hole group 140 is arranged in the second area.

[0033] When the plate to be processed is placed on the bearing surface, the scale mark can serve as a reference, and by comparing with the plate to be processed, the size of the plate to be processed can be roughly obtained, and the boundaries of the first area and the second area are also divided. The user can use the scale mark to roughly obtain the coverage of the first area and the second area by the plate to be processed, as a reference to select the conduction or closing of the first valve assembly 210 and the second valve assembly 220.

[0034] Specifically, the scale mark can have two, which are an X-axis scale 410 and a Y-axis scale 420, and the X-axis scale 410 and the Y-axis scale 420 are perpendicular to each other.

[0035] The X-axis scale 410 and the Y-axis scale 420 are respectively located at the edge positions of the first area and the second area, and the X-axis scale 410 can be used as a reference for the length direction of the plate to be processed, and the Y-axis scale 420 can be used as a reference for the width direction of the plate to be processed.

[0036] Generally, the plate to be processed is roughly rectangular, and in some embodiments of the utility model, the first air hole group 130 includes a plurality of first air micro-holes 131, and the plurality of first air micro-holes 131 are arranged in a row-column manner and uniformly distributed in the first area. The second air hole group 140 includes a plurality of second air micro-holes 141, and the plurality of second air micro-holes 141 are arranged in a row-column manner and uniformly distributed in the second area.

[0037] Therefore, after the plate to be processed is placed on the bearing surface, the plate to be processed can gradually cover the first air micro-holes 131 and the second air micro-holes 141 distributed in the column direction along the length extension of the size of the plate to be processed, and the plate to be processed can gradually cover the first air micro-holes 131 and the second air micro-holes 141 distributed in the row direction along the width extension of the size of the plate to be processed. The user can more easily judge the coverage degree of the plate to be processed on the plurality of first air micro-holes 131 and second air micro-holes 141, so as to select whether to open the first valve assembly 210 or the second valve assembly 220. At the same time, the plate to be processed of a corresponding size can also more easily cover all the first air micro-holes 131 and the second air micro-holes 141, thereby ensuring firm adsorption by the first air micro-holes 131 and the second air micro-holes 141.

[0038] Of course, it can be understood that the plate to be processed in the design does not need to cover all the first air suction micro holes 131 in the first air suction hole group 130 or all the second air suction micro holes 141 in the second air suction hole group 140, even if some of the first air suction micro holes 131 or some of the second air suction micro holes 141 are connected to the outside, because the air extraction module 300 provides sufficient suction, the flow rate of the outside gas flowing into the first air cavity 111 or the second air cavity 112 is less than the flow rate of the air extraction module 300, and the covered first air suction micro holes 131 and the covered second air suction micro holes 141 can also be adsorbed to the plate to be processed. Specifically, the user can manually select the first air suction hole group 130, the second air hole group 140 or other air group holes to adsorb the plate to be processed according to the actual size of the plate to be processed, and the device of the design can also be provided with a control module. The control module automatically selects the first air suction hole group 130, the second air hole group 140 or other air group holes to adsorb the plate to be processed according to the size of the plate to be processed.

[0039] In some embodiments of the utility model, as shown in Figure 4 The air extraction module 300 includes a vacuum degree detection module 310, a control module 320 and an air extraction pump 330, the air extraction port of the air extraction pump 330 is respectively connected with the tail end of the first valve assembly 210 and the tail end of the second valve assembly 220, the vacuum degree detection module 310 is used to detect the vacuum degree in the air extraction pump 330, the control module 320 is connected with the vacuum degree detection module 310 and the air extraction pump 330 respectively, and the control module 320 automatically adjusts the air extraction suction force of the air extraction pump 330 according to the vacuum degree.

[0040] The vacuum degree detection module 310 can include a capacitive vacuum sensor, a thermal conductivity vacuum sensor and a pressure resistance vacuum sensor, for example, the pressure resistance vacuum degree detection module 310 can detect the vacuum degree based on the pressure change of the medium, when the medium pressure directly acts on the diaphragm of the sensor, the diaphragm will produce a micro displacement proportional to the medium pressure, thereby causing the resistance of the sensor to change, and the vacuum degree can be obtained by detecting the resistance change, and the vacuum degree detection module 310 can output data information to the user interface through the 485 interface.

[0041] In the air extraction module 300 of the design, the smaller the vacuum degree, the greater the suction force provided by the first air suction micro holes 131 or the second air suction micro holes 141 connected with the air extraction pump 330, and the greater the vacuum degree, the smaller the suction force provided by the first air suction micro holes 131 or the second air suction micro holes 141.

[0042] The control module 320 can comprise an MCU or a CPU and its attached circuit, and the control module 320 can adjust the output power applied to the air exhaust pump 330 according to the size of the vacuum degree, and when the vacuum degree is large, the output power is increased, so as to speed up the exhaust to increase the suction force of the suction micro-pores, and at the same time, when the vacuum degree reaches the target value, the output power applied to the air exhaust pump 330 can be reduced, so as to save energy consumption.

[0043] In some embodiments of the utility model, as shown in Figure 3 As shown in the drawings, the air exhaust module 300 further comprises a shunt pipe 500, the shunt pipe 500 is provided with a main flow channel and a plurality of shunt channels, the shunt pipe 500 is provided with an output port and a plurality of input ports, the head end of the main flow channel is communicated with the input port, the tail end of the main flow channel is connected with the head end of each shunt channel respectively, the input port is butt jointed with the air exhaust port of the air exhaust pump 330, and the tail end of each shunt channel is butt jointed with the tail end of the first valve assembly 210 and the tail end of the second valve assembly 220 one by one.

[0044] When the plate to be processed is adsorbed, the first valve assembly 210 and the second valve assembly 220 can be opened, the air exhaust pump 330 is operated, the gas in the first gas cavity 111 passes through the first air outlet 121 and the first valve assembly 210 and enters the shunt channel, and finally flows into the main flow channel, and the gas in the second gas cavity 112 passes through the second air outlet 122 and the second valve assembly 220 and enters the shunt channel, and finally flows into the main flow channel, and when the second valve assembly 220 is closed, no gas flows through the shunt channel butt jointed with the second valve assembly 220, and the first gas cavity 111 and the second gas cavity 112 are reasonably arranged to maintain good air tightness, so that the suction force of the first suction hole group 130 and the second suction hole group 140 on the plate to be processed is sufficient.

[0045] When the plate to be processed is processed and needs to be separated from the bearing surface, the first valve assembly 210 and the second valve assembly 220 are closed at this time, and the vacuum adsorption is disconnected, and since the first gas cavity 111 and the second gas cavity 112 are in a negative pressure state, in order to make the separation rapid, in some embodiments of the utility model, the adjustable uniform flow partition suction device further comprises a second switch valve module 600, the head end of the second switch valve module 600 is butt jointed with the gas source, and the tail end of the second switch valve module 600 is communicated with the first gas cavity 111 and the second gas cavity 112, so that when the second switch valve module 600 is turned on, the gas flow output by the gas source can quickly enter the first gas cavity 111 and the second gas cavity 112, thereby breaking the vacuum environment, the air pressure of the first gas cavity 111 or the second gas cavity 112 is balanced with the outside, the plate to be processed is separated from the bearing surface, the production and processing efficiency is improved, and time is saved.

[0046] In some embodiments of the utility model, the second switch valve module 600 includes regulating valve 610, first electric control valve 620 and second electric control valve 630, the first end of regulating valve 610 is connected with the gas source, the tail end of regulating valve 610 is connected with the first end of first electric control valve 620 and the first end of second electric control valve 630 respectively, the tail end of first electric control valve 620 is communicated with first air cavity 111, and the tail end of second electric control valve 630 is communicated with second air cavity 112.

[0047] Regulating valve 610 can control the pressure of the gas source output flow, is not disturbed by the outside world, and reasonably controls the stable input of the flow in first air cavity 111 and second air cavity 112, prevents the flow from being too fast and causes the gas to be output from first air hole group 130 or second air hole group 140, and causes the impact on chuck assembly 100.

[0048] In some embodiments of the utility model, as shown in Figure 4 The control module 320 is electrically connected with the first switch valve module 200 and the second switch valve module 600, and the control module 320 can be shared with the control module 320 in the air extraction module 300, or two control modules 320 are used to control respectively, the control module 320 can automatically control the first valve assembly 210 or the second valve assembly 220 in the first switch valve module 200 according to the control instruction input by a user, and automatically controls the second switch valve module 600 to be turned on after the machining of the workpiece is completed, and the control module 320 can adjust the frequency of the frequency conversion module 321 according to the vacuum value fed back by the vacuum degree detection module 310, so as to adjust the output power of the air extraction pump 330.

[0049] The technical features of the above-described embodiments can be combined arbitrarily, and to make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, it should be considered that the combinations are within the scope of the present application.

[0050] Although the embodiments of the utility model have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and purposes of the utility model, and the scope of the utility model is defined by the claims and their equivalents.

Claims

1. An adjustable zoned throttle getter device, comprising: The application relates to a vacuum chuck assembly and a vacuum pumping system. The vacuum chuck assembly comprises a bearing surface for placing a plate to be processed, at least a first air cavity and a second air cavity arranged in the vacuum chuck assembly and isolated from each other, a first air outlet communicating with the first air cavity and a second air outlet communicating with the second air cavity, a first group of air suction holes and a second group of air suction holes arranged in different regions on the bearing surface of the vacuum chuck assembly, the first group of air suction holes communicating with the first air cavity, and the second group of air suction holes communicating with the second air cavity. The first switch valve module comprises at least a first valve assembly and a second valve assembly, the first end of the first valve assembly is connected to the first air outlet, and the first end of the second valve assembly is connected to the second air outlet. The vacuum pumping system comprises a vacuum pumping module, the air outlet of the vacuum pumping module is connected to the tail end of the first valve assembly and the tail end of the second valve assembly.

2. The adjustable flow sharing partial vacuum device of claim 1, wherein: The bearing surface of the vacuum chuck assembly is provided with at least one scale marker, the bearing surface of the vacuum chuck assembly is divided into at least a first region and a second region along the length direction of the scale marker, the first group of air suction holes is arranged in the first region, and the second group of air suction holes is arranged in the second region.

3. The adjustable flow sharing partial vacuum device of claim 2, wherein: The first group of air suction holes comprises a plurality of first air suction micropores, the first air suction micropores are arranged in a row-column mode and uniformly distributed in the first region, the second group of air suction holes comprises a plurality of second air suction micropores, and the second air suction micropores are arranged in a row-column mode and uniformly distributed in the second region.

4. The adjustable flow sharing partial vacuum device of claim 3, wherein, The scale marker comprises two X-axis scale markers and Y-axis scale markers, and the X-axis scale markers and the Y-axis scale markers are perpendicular to each other.

5. The adjustable flow sharing partial vacuum device of claim 1, wherein, The vacuum pumping module comprises a vacuum degree detection module, a control module and a vacuum pump, the air outlet of the vacuum pump is connected to the tail end of the first valve assembly and the tail end of the second valve assembly, the vacuum degree detection module is used for detecting the vacuum degree in the vacuum pump, the control module is connected to the vacuum degree detection module and the vacuum pump, and the control module controls the air suction force of the vacuum pump according to the vacuum degree.

6. The adjustable flow sharing partial vacuum device of claim 5, wherein, The vacuum pumping module further comprises a shunt pipe, the shunt pipe is provided with a main flow channel and a plurality of branch flow channels, the shunt pipe is provided with an output port and a plurality of input ports, the first end of the main flow channel is connected to the input port, the tail end of the main flow channel is connected to the first end of each branch flow channel, the input port is connected to the air outlet of the vacuum pump, and the tail end of each branch flow channel is connected to the tail end of the first valve assembly and the tail end of the second valve assembly.

7. The adjustable flow sharing partial vacuum device of claim 1, wherein, The application further relates to a second switch valve module, the first end of the second switch valve module is connected to a gas source, and the tail end of the second switch valve module is connected to the first air cavity and the second air cavity, so that the gas flow output by the gas source can enter the first air cavity and the second air cavity when the second switch valve module is turned on.

8. The adjustable flow sharing partial vacuum device of claim 7, wherein, The second switch valve module comprises a regulating valve, a first electric control valve and a second electric control valve, a head end of the regulating valve is connected with the gas source, tail ends of the regulating valve are respectively connected with a head end of the first electric control valve and a head end of the second electric control valve, a tail end of the first electric control valve is communicated with the first gas cavity, and a tail end of the second electric control valve is communicated with the second gas cavity.

9. The adjustable flow sharing partial vacuum device of claim 7, wherein, The control module is electrically connected with the first switch valve module and the second switch valve module.

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