Heater

Abstract

The utility model discloses a heater which comprises a pair of electrode columns, a pair of first electrode plates are installed at the upper ends of the pair of electrode columns, a pair of second motor plates are installed on the pair of first electrode plates, and heating wires are installed at the upper ends of the pair of second motor plates. A C-shaped electrode pin is arranged below the heating wire, and the pair of second motor plates penetrates through a notch of the C-shaped electrode pin. The heater provided by the utility model is formed by assembling a plurality of parts, so that unnecessary working procedures are reduced, and the manufacturing period is shortened; meanwhile, after the machine is used, corresponding parts can be replaced in time if the parts are damaged, and the reversibility of the use effect of the parts is achieved; each part of the heater is processed by a plurality of processing modes, so that the accuracy can be ensured; and the heating wire can be used for a long time in a high-temperature environment, so that the base material is prevented from deforming and cracking, and the service life of the heater is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor, concretely relates to a heater. BACKGROUND

[0002] The heater relied on by the existing PVD, sputtering and coating process is mostly hot disc type, and is integrally formed by welding. When used, the following shortcomings exist:

[0003] The processing technology is complex, involves multiple processes, and the use effect and feedback after the hot disc is formed are often irreversible. The processing precision is high, and the success rate is low. The heating temperature reaches 400 DEG C or above, and the substrate will deform, crack and other phenomena, damaging the service life of the heater.

[0004] The information disclosed in the background section of this document is only intended to increase the understanding of the overall background of the present utility model, and should not be considered as acknowledging or implying in any form that the information constitutes prior art known to those skilled in the art. CONTENT OF THE UTILITY MODEL

[0005] The utility model aims at providing a heater, which can solve the problems of complex processing technology, high processing precision leading to low success rate and low service life due to substrate deformation at high temperature when the existing heater is used.

[0006] In order to achieve the above-mentioned purpose, the technical scheme provided by a specific embodiment of the utility model is as follows:

[0007] A heater comprises an electrode column, the electrode column is provided with a pair, the upper end of the pair of electrode columns is provided with a pair of first electrode plates, a pair of second motor plates is installed on the pair of first electrode plates, and a heating wire is installed at the upper end of the pair of second motor plates. The electrode column is used to connect with the power supply, and the electrode column, the first electrode plate, the second motor plate and the heating wire are communicated with each other, so as to provide power for the heating wire through the electrode column, so that the heating wire generates the required heat in use. At the same time, the electrode column, the first electrode plate, the second motor plate and the heating wire are assembled, unnecessary processes are reduced, and the production cycle is shortened. The lower side of the heating wire is provided with a C-shaped electrode foot, the pair of second motor plates penetrates through the gap of the C-shaped electrode foot, and the side walls of the pair of second motor plates respectively abut on the inner side walls on both sides of the gap of the C-shaped electrode foot, so that the installation of the second motor plate is not affected by the C-shaped electrode foot, and the structure is stable after installation due to the fit between the second motor plate and the C-shaped electrode foot. A plurality of heat insulation plates are installed between the C-shaped electrode foot and the heating wire, and the plurality of heat insulation plates are evenly arranged from top to bottom, so that the C-shaped electrode foot and the heating wire are provided with layer-by-layer heat insulation plates, and the layer-by-layer heat insulation plates can protect the heater and the cavity from being deformed by high temperature.

[0008] In one or more embodiments of the utility model, the lower end of the electrode column is equipped with an electrode joint, and the electrode column is connected with the power supply through the electrode joint. A fixing bolt is installed between the upper end of the electrode column and the first electrode plate, and the first electrode plate and the electrode column are fixed together through the fixing bolt to ensure the communication between the electrode column and the first electrode plate.

[0009] In one or more embodiments of the utility model, the surface of the heating wire is subjected to sand blasting treatment, which increases the roughness of the surface of the heating wire, thereby increasing the heat radiation effect of the heating wire. The material of the heating wire is one or more combinations of tungsten and molybdenum, which makes the heating wire have excellent heat conductivity and a long service life under high temperature conditions. The shape of the heating wire is one or more combinations of an oval shape and a semicircular shape, which increases the heating area of the heating wire, thereby improving the heating effect of the heating wire.

[0010] In one or more embodiments of the utility model, a pressing block is installed between a pair of the second motor plates, and the pressing block is made of ceramic material. The second motor plates are supported by the pressing block to ensure the structural stability of the second motor plates after being heated.

[0011] In one or more embodiments of the utility model, a connecting plate is integrally formed at the upper and lower ends of a pair of the second motor plates. The connecting plates at the upper ends are respectively installed at the two ends of the heating wire, and the connecting plates at the lower ends are respectively installed on a pair of the first electrode plates. The connecting plates at the upper and lower ends of the second motor plates are provided to facilitate the installation of the first electrode plates and the second motor plates and the installation of the second motor plates and the heating wire.

[0012] In one or more embodiments of the utility model, a pressing plate is provided on the upper side of each end of the heating wire. A fixing screw is installed between the pressing plate and the corresponding connecting plate and between the first electrode plate and the corresponding connecting plate. The first electrode plates and the second motor plates and the second motor plates and the heating wire can be stably installed together through the fixing screw.

[0013] In one or more embodiments of the utility model, a plurality of first support columns are installed on the C-shaped electrode foot, and a plurality of heat insulation plates are installed on the plurality of first support columns in a penetrating manner. The plurality of heat insulation plates can be stably installed between the C-shaped electrode foot and the heating wire through the plurality of first support columns.

[0014] In one or more embodiments of the utility model, a support frame is installed at the upper end of each of the plurality of heat insulation plates. The bottom of the heating wire is supported by the plurality of support frames. The heating wire is supported by the plurality of support frames to ensure its stability during use and to prevent it from deforming and collapsing under high temperature conditions.

[0015] In one or more embodiments of the utility model, the lower portion of the C-shaped electrode leg is provided with a support plate, a plurality of second support columns are installed between the C-shaped electrode leg and the support plate and between the first electrode plate and the C-shaped electrode leg, and the upper end structure is stable after installation through the support plate.

[0016] In one or more embodiments of the utility model, the heat insulation plate and the second support column are both made of ceramic material, so that the heat insulation plate and the second support column are not affected by high temperature when supporting.

[0017] Compared with the prior art, the heater provided by the utility model is assembled by multiple components, unnecessary processes are reduced, and the production cycle is shortened; meanwhile, after being used on a machine, corresponding parts can be replaced in time if damaged, so that the reversibility of parts and use effect is achieved; the components of the heater are processed by multiple processing methods, the accuracy can be guaranteed; the heating wire can be used for a long time in a high-temperature environment, the phenomenon of deformation and cracking of the base material is prevented, and the service life of the heater is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments described in the utility model, and for those skilled in the art, other drawings can be obtained according to these drawings without creative labor.

[0019] Figure 1 It is a front view of a heater in an embodiment of the utility model;

[0020] Figure 2 It is a right view of a heater in an embodiment of the utility model;

[0021] Figure 3 It is a perspective view of a heater in an embodiment of the utility model Figure 1 ;

[0022] Figure 4 It is a perspective view of a heater in an embodiment of the utility model Figure 2 ;

[0023] Figure 5 It is a schematic view of A in the utility model Figure 3 .

[0024] MAIN REFERENCE NUMERALS EXPLANATION:

[0025] 1-Electrode post, 101-Electrode connector, 2-First electrode plate, 3-C-shaped electrode foot, 4-Heating wire, 5-Second electrode plate, 501-Connecting plate, 6-First support post, 7-Heat insulation plate, 8-Support frame, 9-Pressure plate, 10-Fixing screw, 11-Pressure block, 12-Support plate, 13-Second support post, 14-Fixing bolt. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0027] like Figures 1-4 As shown in one embodiment of the present invention, a heater can solve the problems of low success rate due to complex processing technology and high processing precision requirements, and short service life due to easy deformation of the substrate at high temperatures when using existing heaters.

[0028] like Figures 1-4 As shown, the heater includes electrode posts 1, of which a pair is provided. A pair of first electrode plates 2 are mounted on the upper end of the pair of electrode posts 1, and a pair of second motor plates 5 are mounted on the pair of first electrode plates 2. A heating wire 4 is mounted on the upper end of the pair of second motor plates 5. The electrode posts 1 are used to connect to a power source. Through the interconnection between the electrode posts 1, the first electrode plates 2, the second motor plates 5, and the heating wire 4, power is supplied to the heating wire 4 through the electrode posts 1, so that the heating wire 4 generates the required heat during use. At the same time, the assembly of the electrode posts 1, the first electrode plates 2, the second motor plates 5, and the heating wire 4 reduces unnecessary processes and shortens the manufacturing cycle. A C-shaped electrode foot 3 is provided below the heating wire 4. The pair of second motor plates 5 pass through the notch of the C-shaped electrode foot 3. One side wall of the pair of second motor plates 5 abuts against the inner side wall on both sides of the notch of the C-shaped electrode foot 3, so that the setting of the C-shaped electrode foot 3 does not affect the installation of the second motor plates 5. At the same time, the fit between the second motor plates 5 and the C-shaped electrode foot 3 ensures the stability of the structure after installation. Multiple heat insulation plates 7 are installed between the C-shaped electrode foot 3 and the heating wire 4. The multiple heat insulation plates 7 are evenly arranged from top to bottom, so that there are layers of heat insulation plates 7 between the C-shaped electrode foot 3 and the heating wire 4. The layers of heat insulation plates 7 can protect the heater and the cavity from deformation caused by high temperature.

[0029] like Figures 1-4As shown, the lower end of the electrode column 1 is provided with an electrode connector 101, and the electrode column 1 is connected with the power supply through the electrode connector 101. The upper end of the electrode column 1 and the first electrode plate 2 are provided with a fixing bolt 14, and the first electrode plate 2 and the electrode column 1 are fixed together through the fixing bolt 14, so as to ensure the communication between the electrode column 1 and the first electrode plate 2.

[0030] Preferably, the surface of the heating wire 4 is sandblasted to increase the roughness of the surface of the heating wire 4, so as to increase the heat radiation effect of the heating wire 4. The material of the heating wire 4 is one or more combinations of tungsten and molybdenum, so that the heating wire 4 has excellent heat conductivity and long service life under high temperature conditions. The heating temperature can reach 1400°C under certain conditions, which completely covers the heating requirement of 400°C-1400°C. The cost of the tungsten and molybdenum heater with the same size is lower than that of the current heating disc, thereby reducing the cost of the heater.

[0031] Further, the shape of the heating wire 4 is one or more combinations of an oval shape and a semicircular shape, which increases the heating area of the heating wire 4, thereby improving the heating effect of the heating wire 4.

[0032] As shown in the drawings, Figure 3 In combination with Figure 5 As shown, the second motor plate 5 is provided with a pressing block 11, and the pressing block 11 is made of ceramic material. The second motor plate 5 is supported by the pressing block 11, so as to ensure the structural stability of the second motor plate 5 after being heated.

[0033] As shown in the drawings, Figure 3 In combination with Figure 5 As shown, the upper and lower ends of the second motor plate 5 are integrally provided with a connecting plate 501. The connecting plate 501 located at the upper end is installed on the two ends of the heating wire 4, and the connecting plate 501 located at the lower end is installed on the pair of first electrode plates 2. The connecting plate 501 provided at the upper and lower ends of the second motor plate 5 is used to install the first electrode plate 2 and the second motor plate 5 and the second motor plate 5 and the heating wire 4 together.

[0034] As shown in the drawings, Figure 3 In combination with Figure 5 As shown, the upper side of the two ends of the heating wire 4 is provided with a pressing plate 9. The pressing plate 9 and the corresponding connecting plate 501 and the first electrode plate 2 and the corresponding connecting plate 501 are provided with a fixing screw 10, and the first electrode plate 2 and the second motor plate 5 and the second motor plate 5 and the heating wire 4 are stably installed together through the fixing screw 10.

[0035] As shown in the drawings, Figures 1-3As shown, multiple first support columns 6 are installed on the C-shaped electrode foot 3, and multiple heat insulation plates 7 are respectively installed on the multiple first support columns 6 in a through manner. Through the multiple first support columns 6, the multiple heat insulation plates 7 can be stably installed layer by layer between the C-shaped electrode foot 3 and the heating wire 4.

[0036] like Figure 1 and Figure 4 As shown, a support frame 8 is installed on the upper end of each of the multiple heat insulation plates 7. The bottom of the heating wire 4 is supported by multiple support frames 8. The support frames 8 support the heating wire 4 to ensure that the heating wire 4 is stable during use and to ensure that the heating wire 4 will not deform or collapse under high temperature conditions.

[0037] like Figures 1-4 As shown, a support plate 12 is provided below the C-shaped electrode foot 3. Multiple second support columns 13 are installed between the C-shaped electrode foot 3 and the support plate 12, as well as between the first electrode plate 2 and the C-shaped electrode foot 3. The support plate 12 makes the upper structure stable after installation.

[0038] Preferably, the heat insulation plate 7 and the second support column 13 are both made of ceramic material, so that the heat insulation plate 7 and the second support column 13 will not be affected by high temperature when they are supporting each other.

[0039] In use, the current flows through the electrode post 1, the first electrode plate 2, and the second motor plate 5, and then to the heating element, the heating wire 4. The heating wire is made of tungsten or molybdenum. The heating wire's current can be adjusted by the power supply to achieve heating within a range of 400℃ to 1400℃, making the heater's temperature adjustable. Furthermore, the heater's related substrate structure remains stable under high-temperature conditions, preventing deformation and cracking, thus extending the heater's lifespan. Additionally, the heat insulation plate 7 can be layered according to specific needs, ensuring the base remains within the heating range and improving the heater's practicality. Moreover, all components provided in this application can be manufactured using conventional turning, milling, and wire cutting methods, guaranteeing precision.

[0040] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0041] Furthermore, it should be understood that although the specification is described in terms of embodiments, not every embodiment includes every feature described. The specification can include implicit combinations of explicitly mentioned features and / or explicit combinations of implicitely mentioned features. Each embodiment depends on the explicit combinations of features and / or the implicit combinations of features made specifically within that embodiment, and each such embodiment can be combined with every other such embodiment to create further embodiments.

Claims

1. A heater comprising an electrode post, characterized by, The electrode column is provided with a pair of upper ends of the electrode column, a pair of first electrode plates are installed on the pair of upper ends of the electrode column, a pair of second motor plates are installed on the pair of first electrode plates, a heating wire is installed on the upper end of the pair of second motor plates, a C-shaped electrode foot is provided below the heating wire, the pair of second motor plates pass through the gap of the C-shaped electrode foot, the side walls of the pair of second motor plates respectively abut on the inner side walls on both sides of the gap of the C-shaped electrode foot, a plurality of heat insulation plates are installed between the C-shaped electrode foot and the heating wire, and the plurality of heat insulation plates are evenly arranged from top to bottom.

2. A heater as claimed in claim 1, wherein The lower end of the electrode column is provided with an electrode joint, and a fixing bolt is installed between the upper end of the electrode column and the first electrode plate.

3. The heater of claim 1, wherein The surface of the heating wire is sandblasted, the material of the heating wire is one or a combination of tungsten and molybdenum, and the shape of the heating wire is one or a combination of oval and semicircle.

4. The heater of claim 1, wherein A pressing block is installed between the pair of second motor plates, and the pressing block is made of ceramic material.

5. A heater as claimed in claim 4, wherein The upper and lower ends of the pair of second motor plates are integrally formed with connecting plates, the connecting plates at the upper end are respectively installed on the two ends of the heating wire, and the connecting plates at the lower end are respectively installed on the pair of first electrode plates.

6. A heater as claimed in claim 5, wherein The upper side of the two ends of the heating wire is provided with a pressing plate, and a fixing screw is installed between the pressing plate and the corresponding connecting plate and between the first electrode plate and the corresponding connecting plate.

7. The heater of claim 1, wherein A plurality of first support columns are installed on the C-shaped electrode foot, and a plurality of heat insulation plates are installed on the plurality of first support columns in a penetrating manner.

8. A heater as claimed in claim 7, wherein The upper end of the plurality of heat insulation plates is provided with a support frame, and the bottom of the heating wire is supported by the plurality of support frames.

9. A heater as claimed in claim 8, wherein A support plate is provided below the C-shaped electrode foot, and a plurality of second support columns are installed between the C-shaped electrode foot and the support plate and between the first electrode plate and the C-shaped electrode foot.

10. A heater as claimed in claim 9, wherein The heat insulation plate and the second support column are made of ceramic material.

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