Sealing cavity with jacking device

Abstract

The utility model discloses a sealed cavity with a jacking device, which is characterized in that when a cavity door needs to be opened to place a workpiece or take the workpiece, a lifting mechanism of the jacking device is firstly used for lifting a workbench module upwards until the workbench module is in contact with a sealed frame body; a feeding and discharging space is formed among the workbench module, the sealing frame and the cavity door, and then a lifting mechanism of the jacking device is jacked by a jacking mechanism of the jacking device, so that after external air enters the feeding and discharging space, the workbench module can be jacked by the jacking mechanism; the situation that the working efficiency of the sealing cavity is reduced due to the fact that the working table module and the sealing frame body are extruded downwards by pressure due to increase of the air pressure of the feeding and discharging space and air leakage occurs between the working table module and the sealing frame body is avoided.

Description

Technical Field

[0001] This utility model relates to a sealed cavity, and more particularly to a sealed cavity with a lifting device inside, which uses the lifting device to support the worktable to prevent external air from entering the sealed cavity due to air pressure changes between the cavity door and the worktable when the cavity door is opened. Background Technology

[0002] In recent years, resin filling technology has been widely used in the printed circuit board industry, such as the POFV process (viaon pad). Resin filling technology refers to the process of using a vacuum printing device to perform the printing circuit board operation under vacuum conditions and filling the through holes with resin by means of pressure difference.

[0003] In current vacuum printing equipment, when performing the feeding and unloading operation, the worktable for placing the workpiece is first moved to a position below the movable and openable cavity door, creating a feeding and unloading space between the worktable and the cavity door. Then, outside air is introduced into the feeding and unloading space. When the air pressure inside the feeding and unloading space is the same as outside, the cavity door can be opened, and the workpiece can be placed on the worktable. Then, the cavity door is closed, and the feeding and unloading space is evacuated. After the air pressure inside the feeding and unloading space returns to the same level as the overall vacuum printing equipment, the worktable can be moved to perform the printing operation.

[0004] However, when external air enters the feeding and discharging space, the air pressure inside the feeding and discharging space will be greater than the air pressure inside the overall vacuum printing device. If the lifting force of the lifting device under the worktable is insufficient, the worktable may descend due to the pressure difference. At this time, the air in the feeding and discharging space may enter the vacuum printing device, resulting in the need to perform vacuuming operations not only in the feeding and discharging space but also in the vacuum printing device before performing the vacuum printing action, thus increasing the overall operation time. Utility Model Content

[0005] The technical problem solved by this utility model is that the inventor, based on years of practical experience and rich professional knowledge, has created a sealed cavity with a lifting device. The technology is simply to set up a lifting device below the cavity door of the sealed cavity. The lifting device is used to lift the worktable below the cavity door, so that the cavity door is ready to open. After the outside air is introduced into the material inlet and outlet space, the lifting device can hold the worktable up, so as to prevent the worktable from being squeezed down due to the air pressure change in the material inlet and outlet space, which would cause outside air to enter the sealed cavity and increase the subsequent operation time.

[0006] The technical means adopted in this utility model are as follows.

[0007] To achieve any of the above objectives, this utility model provides a sealed cavity with a lifting device, comprising a first cavity, a second cavity, a printing module, a worktable module, and a lifting device. The first cavity has an outer wall, a sealing frame, and a cavity door. An inlet / outlet opening is provided at the top of the outer wall. The sealing frame surrounds the inlet / outlet opening and is locked to the outer wall. The cavity door is located above the sealing frame to seal the inlet / outlet opening. The second cavity communicates with the first cavity. The printing module is located within the second cavity. The worktable module is located within both the first and second cavities and can move between them. The lifting device includes a lifting mechanism and a holding mechanism. A portion of the lifting mechanism is located within the first cavity, while another portion is located outside the first cavity. The holding mechanism is located outside the first cavity and below the lifting device. Furthermore, when placing a workpiece on the worktable module or removing a completed workpiece from it, the worktable module moves into the first cavity. Then, the lifting mechanism of the jacking device raises the worktable module until it contacts the sealing frame, creating an inlet / outlet space between the worktable module, the sealing frame, and the cavity door. Next, the jacking mechanism of the jacking device is moved below the lifting mechanism, allowing outside air to enter the inlet / outlet space to equalize the air pressure. The jacking mechanism then holds the lifting mechanism in place, preventing the worktable module and the lifting mechanism from being squeezed downwards due to increased air pressure in the inlet / outlet space, which could cause air leakage between the worktable module and the sealing frame, reducing the efficiency of the sealing cavity.

[0008] In one embodiment of this utility model, the lifting mechanism includes a plurality of support components and a lifting plate, and the plurality of support components are disposed on the lifting plate. Furthermore, each of the plurality of support components includes a crossbar and a plurality of top rods, wherein the crossbar is disposed within a first cavity, and one end of each top rod is located within the first cavity and vertically connected to the crossbar, while the other end of each top rod is located outside the first cavity and vertically connected to the lifting plate outside the first cavity.

[0009] In one embodiment of the present invention, the support assembly further includes a plurality of bushings, which are disposed at the bottom of the outer wall of the first cavity and respectively fitted onto a plurality of top rods, so as to prevent external air from entering the first cavity and the second cavity when the plurality of support assemblies are raised or lowered.

[0010] In one embodiment of the present invention, the lifting mechanism further includes a first power component, which includes a screw, a connecting part, and a first power source. The connecting part is disposed on the screw and connected to the lifting plate, while the first power source is connected to the screw and is used to drive the screw to rotate, so that the screw can drive the connecting part and the lifting plate to perform lifting or lowering actions.

[0011] In one embodiment of this utility model, the first power component is connected to the center of the lifting plate, and the multiple top rods of the multiple support components are respectively connected to the upper surface of the lifting plate and are respectively located near the four sides and four corners of the lifting plate. When the first power component drives the lifting plate to perform lifting or lowering actions, the first power component can apply force evenly to the worktable module through the multiple support components, so that the lifting mechanism can stably lift or lower the worktable module.

[0012] In one embodiment of this utility model, the supporting mechanism includes a plurality of supporting components. Each supporting component includes at least one supporting member, a slider, at least one slide rail, at least one first support portion, and a fixing plate. The supporting member is disposed on the slider, which is slidably disposed on the slide rail. The slide rail and the first support portion are disposed on the upper surface of the fixing plate, and the first support portion is located on one side of the slide rail. Furthermore, when the slider slides on the slide rail, the supporting member is positioned correspondingly at the position of the first support portion, so that the first support portion can support the supporting member.

[0013] In one embodiment of the present invention, each of the supporting mechanisms further includes at least one second support portion, which is disposed on the lower surface of the fixed plate and located below the first support portion.

[0014] In one embodiment of the present invention, the top holding mechanism further includes a second power component, and the second power component includes a second power source and a telescopic mechanism. The second power source is disposed on one side of the second support portion, and the telescopic mechanism is connected to the second power source and the slider. The second power source drives the telescopic mechanism to perform telescopic actions to drive the slider to move horizontally, so that a plurality of top holding members can be moved to the underside of the lifting plate of the lifting mechanism, or moved away from the lifting plate of the lifting mechanism.

[0015] In one embodiment of this utility model, the workbench module includes a first workbench and a second workbench, and two first tracks and two second tracks are provided in the first cavity and the second cavity, respectively. The first workbench is disposed on the two first tracks, and the second workbench is disposed on the two second tracks. The two second tracks are located between the two first tracks, and the width between the two second workbench is less than the width between the two first tracks, and the height of the second workbench is less than the height of the first workbench, so that the first workbench and the second workbench can move out of each other when they move.

[0016] In one embodiment of this utility model, the sealing frame on the first cavity can be fixed to the outer wall of the cavity by a plurality of locking fasteners, and there is a first airtight component between the sealing frame and the outer wall of the cavity, while the workbench module has a second airtight component, and the position of the second airtight component corresponds to the sealing frame, so that the workbench module is lifted by the lifting mechanism of the lifting device and contacts the sealing frame, and when the cavity door is opened, the first airtight component and the second airtight component can prevent external air from entering the first cavity and the second cavity.

[0017] In one embodiment of the present invention, a third airtight component is provided between the cavity door and the outer wall of the cavity. The third airtight component is used to prevent external air from entering the first cavity and the second cavity through the gap between the cavity door and the outer wall of the cavity.

[0018] The technical effects of this utility model are as follows:

[0019] In summary, when a workpiece is placed on the worktable module for printing or when a completed workpiece is removed from the worktable module, the lifting mechanism of the lifting device raises the worktable module so that it contacts the sealing frame. A material inlet / outlet space is formed between the worktable module, the sealing frame, and the cavity door. Then, the supporting mechanism of the lifting device moves below the lifting mechanism and supports it, allowing external air to enter the material inlet / outlet space. Because the supporting mechanism supports the lifting mechanism, it prevents the worktable module from being squeezed downwards due to increased air pressure in the material inlet / outlet space, which would create a gap between the worktable module and the sealing frame, allowing external air to enter the entire sealing cavity. This would require more time for subsequent vacuuming operations, thus reducing work efficiency. Attached Figure Description

[0020] Figure 1 This is an overall side sectional view of the sealed cavity according to an embodiment of the present utility model.

[0021] Figure 2 This is a front sectional view of the first cavity of the sealing cavity in an embodiment of the present invention.

[0022] Figure 3 This is an overall structural diagram of the lifting device according to an embodiment of the present utility model.

[0023] Figure 4 This is a first mechanism diagram of the lifting device's supporting mechanism according to an embodiment of the present utility model.

[0024] Figure 5 This is a second mechanism diagram of the lifting device's supporting mechanism according to an embodiment of the present utility model.

[0025] Figures 6 to 8 The lifting device of this utility model lifts the worktable to the cavity door and holds the worktable in place.

[0026] Figure 9 This is a first enlarged view of the sealing frame installed on the outer wall of the sealing cavity according to an embodiment of the present invention.

[0027] Figure 10 This is a second enlarged view of the sealing frame installed on the outer wall of the sealing cavity according to an embodiment of the present invention.

[0028] Symbol explanation:

[0029] 100: Sealed cavity

[0030] 200: Lifting device

[0031] 1: First cavity

[0032] 11: Outer wall of the cavity

[0033] 111: Inlet / outlet openings

[0034] 12: Sealed frame

[0035] 13: Cavity entrance

[0036] 2: Second cavity

[0037] 3: Printing Module

[0038] 4: Workbench Module

[0039] 41: First workbench

[0040] 411: First Track

[0041] 42: Second workbench

[0042] 421: Second Track

[0043] 5: Lifting mechanism

[0044] 51: Support components

[0045] 511: Crossbar

[0046] 512: Push rod

[0047] 513: Bushing

[0048] 52: Lifting plate

[0049] 521: Protrusion

[0050] 53: First Power Component

[0051] 531: Screw

[0052] 532: Connecting part

[0053] 533: The First Power Source

[0054] 6: Top-supporting institution

[0055] 61, 61': Top support component

[0056] 611: Top Holding Component

[0057] 612: Top Support

[0058] 613: Slider

[0059] 614: Slide rail

[0060] 615: First Support Section

[0061] 616: Fixing plate

[0062] 617: Second Support Section

[0063] 62: Second power component

[0064] 621: Second Power Source

[0065] 622: Telescopic mechanism

[0066] A1: First airtight component

[0067] A2: Second airtight component

[0068] A3: Third airtight component

[0069] L: Locking fastener

[0070] S: Material inlet / outlet space. Detailed Implementation

[0071] <Overall Structural Description of the Sealed Cavity>

[0072] Please refer to Figures 1 to 5 , Figure 9 and Figure 10 , Figure 1 This is an overall side sectional view of the sealed cavity according to an embodiment of the present invention. Figure 2 This is a front sectional view of the first cavity of the sealing cavity according to an embodiment of the present invention. Figure 3 This is an overall structural diagram of the lifting device according to an embodiment of the present invention. Figure 4 This is a first mechanism diagram of the lifting device's supporting mechanism according to an embodiment of the present utility model. Figure 5 This is a second mechanism diagram of the lifting device's supporting mechanism according to an embodiment of the present utility model. Figure 9 This is a first enlarged view of the sealing frame installed on the outer wall of the sealing cavity according to an embodiment of the present invention, and... Figure 10 This is a second enlarged view of the sealing frame installed on the outer wall of the sealing cavity according to an embodiment of the present invention.

[0073] like Figure 1 , Figure 2 , Figure 8 and Figure 9 As shown, the sealed cavity 100 of this utility model includes a first cavity 1 and a second cavity 2, and the first cavity 1 and the second cavity 2 are interconnected. The first cavity 1 has an outer wall 11, a sealing frame 12, and a cavity door 13. An inlet / outlet opening 111 is provided at the top of the outer wall 11, and the sealing frame 12 surrounds the inlet / outlet opening 111 and is locked to the outer wall 11 by a locking fastener L. The cavity door 13 is movably disposed above the inlet / outlet opening 111 by a sliding mechanism 131, and the sliding mechanism 131 is disposed at the top of the outer wall 11. A third airtight component A3 is provided between the cavity door 13 and the outer wall 11, so that when the cavity door 13 covers the inlet / outlet opening 111, the inlet / outlet opening 111 can be sealed by the third airtight component A3.

[0074] The sealed cavity 100 also includes a printing module 3 and a worktable module 4. The printing module 3 is disposed within the second cavity 2. The worktable module 4 is movably disposed within the first cavity 1 and the second cavity 2, and includes a first worktable 41 and a second worktable 42. Within the first cavity 1 and the second cavity 2, two first tracks 411 and two second tracks 421 are arranged across each other, with the two second tracks 421 positioned between the two first tracks 411. The first worktable 41 is disposed on the two first tracks 411, and the second worktable 42 is disposed on the two second tracks 421. The width of the second worktable 42 is smaller than the width between the two first tracks 411, and the height of the second worktable 42 is lower than that of the first worktable 41. Therefore, when the first worktable 41 and the second worktable 42 move in opposite directions, the two worktables will not collide and can move separately.

[0075] Then as Figure 1 , Figure 2 and Figure 3 As shown, the sealed cavity 100 has a lifting device 200, which includes a lifting mechanism 5 and a supporting mechanism 6. The lifting mechanism 5 is used to move the workbench module 4 vertically. The lifting mechanism 5 includes a plurality of support components 51, a lifting plate 52 and a first power component 53. The lifting plate 52 and the first power component 53 are located outside the first cavity 1 and below the first cavity 1. The plurality of support components 51 are partly located inside the first cavity 1 and partly located outside the first cavity 1.

[0076] The support assembly 51 includes a crossbar 511 and a plurality of top rods 512. The crossbar 511 is located on top of the plurality of top rods 512, and each top rod 512 is vertically connected to the bottom of the crossbar 511. The bottom of the top rod 512 is connected to the upper surface of the lifting plate 52. The first power assembly 53 includes a screw 531, a connecting part 532, and a first power source 533. The first power source 533 is connected to the screw 531 and is used to drive the screw 531 to rotate. The connecting part 532 is disposed on the screw 531 and moves vertically according to the direction of rotation of the screw 531. The lifting plate 52 is connected to the connecting part 532, so that after the first power source 533 drives the screw 531 to rotate, the connecting part 532 will drive the lifting plate 52 to move vertically, either lifting or lowering. It should be noted that the first power source 533 is an electric motor, such as a servo motor or a stepper motor, but this invention is not limited to this.

[0077] In addition, a plurality of bushings 513 are respectively fitted on the plurality of push rods 512, and the plurality of bushings 513 are locked to the bottom of the outer wall 11 of the first cavity 1, and are located both inside and outside the first cavity 1. The plurality of bushings 513 can prevent external air from entering through the connection between the push rods 512 and the bottom of the first cavity 1 when the plurality of push rods 512 move vertically up or down inside and outside the first cavity 1, causing the overall sealed cavity to lose its vacuum effect.

[0078] In another embodiment of this utility model, the screw 531 of the first power component 53 is located at the center of the lifting plate 52, and a plurality of support components 51 are arranged at equal distances from each other on the lifting plate 52, and a plurality of top rods 512 are located near the four sides and four corners of the lifting plate 52. When the first power component 53 drives the lifting plate 52 to move vertically by lifting or lowering, the first power component 53 can apply force evenly to the worktable module 4 through the lifting plate 52 and the plurality of support components 51, so that the lifting mechanism 5 can stably move the worktable module 4 vertically by lifting or lowering.

[0079] Then refer to them together. Figure 4 , Figure 5 The supporting mechanism 6 is located outside the first cavity 1 and below the lifting mechanism 5, and is used to support the lifting mechanism 5. The supporting mechanism 6 includes a plurality of supporting components 61 and a second power component 62. The plurality of supporting components 61 are located directly below the four sides and four corners of the lifting plate 52, and the plurality of supporting components 61 have two styles. Figure 4As shown, in one embodiment of this utility model, the supporting assembly 61 includes a plurality of supporting members 611, a slider 613, a plurality of slide rails 614, a plurality of first support portions 615, a fixing plate 616, and a plurality of second support portions 617. The upper surface of the fixing plate 616 is provided with a plurality of slide rails 614 and a plurality of first support portions 615, and the plurality of slide rails 614 and the plurality of first support portions 615 are fixed to the fixing plate 616 in an alternating manner. The slider 613 is located above the fixing plate 616 and connected to the plurality of slide rails 614, allowing the slider 613 to move horizontally on the fixing plate 616. A plurality of supporting members 611 are provided on the upper surface of the slider 613, and the plurality of supporting members 611 are positioned above a plurality of first supporting parts 615 on the fixing plate 616, so that the plurality of first supporting parts 615 can support the plurality of supporting members 611 and prevent the slider 613 from deforming. A plurality of second supporting parts 617 are provided on the lower surface of the fixing plate 616, and the plurality of second supporting parts 617 are positioned below a plurality of first supporting parts 615 to prevent the fixing plate 616 from deforming.

[0080] The second power assembly 62 includes a second power source 621 and a telescopic mechanism 622. The second power source 621 is fixed to one side of the second support portion 617 and is connected to the telescopic mechanism 622. The telescopic mechanism 622 is connected to the slider 613. When the second power source 621 drives the telescopic mechanism 622 to extend and retract, it will cause the slider 613 to move horizontally. It should be noted that the second power source 621 is an electric motor, such as a servo motor, stepper motor, or linear motor, etc., and this invention is not limited to this.

[0081] Then as Figure 5 As shown, in another embodiment of this utility model, the top-holding assembly 61' includes only one top-holding member 611, a slider 613, a slide rail 614, a first support portion 615, a fixing plate 616, and a second support portion 617. The slide rail 614 and the first support portion 615 are disposed on the upper surface of the fixing plate 616. The slider 613 is located above the fixing plate 616 and connected to the slide rail 614. The top-holding member 611 is disposed on the upper surface of the slider 613 and is located above the first support portion 615. The second support portion 617 is disposed on the lower surface of the fixing plate 616 and is located below the first support portion 615. The connection method and operation method of the second power assembly 62 and the slider 613 are the same as those of the first support portion 615. Figure 4 The same applies, so I won't go into further detail.

[0082] Furthermore, both types of top-holding components 61 have a top-holding surface 612 on their tops, and a plurality of protrusions 521 are located on the lower surface of the lifting plate 52 corresponding to the positions of the plurality of top-holding components 61. Before the lifting mechanism 5 performs any action on the worktable module 4, the plurality of top-holding components 611 of the top-holding mechanism 6 are misaligned with the plurality of protrusions 521 under the lifting plate 52, allowing the lifting mechanism 5 to move vertically. After the lifting mechanism 5 raises the worktable module 4 until the worktable module 4 contacts the sealing frame 12, the plurality of top-holding components 611 of the top-holding mechanism 6 move to below the lifting plate 52, so that the top-holding surface 612 of the top-holding component 611 abuts against the protrusions 521 of the lifting plate 52.

[0083] Please refer to the following: Figures 6 to 8 , Figures 6 to 8 The lifting device of this embodiment of the utility model lifts the worktable to the cavity door 13 and holds the worktable in place. (See diagram). Figure 6 As shown, when a workpiece to be printed is placed on the worktable module 4 or when a completed workpiece is removed from the worktable module 4, the worktable module 4 will move to the area directly below the cavity door 13 in the first cavity 1 via the first track 411 or the second track 421. After the worktable module 4 stops moving, the first power source 533 of the lifting mechanism 5 below the worktable module 4 will drive the screw 531 to rotate. Then the screw 531 will drive the connecting part 532 and the lifting plate 52 to rise.

[0084] Then as Figure 7 As shown, after the multiple crossbars 511 of the lifting mechanism 5 contact the workbench module 4, the workbench module 4 will be lifted upward by the lifting mechanism 5 until the upper surface of the workbench module 4 contacts the sealing frame 12. It is worth noting that a first airtight component A1 is provided between the sealing frame 12 and the outer wall 11 of the first cavity 1, while a second airtight component A2 is provided on the workbench module 4. When the workbench module 4 contacts the sealing frame 12, the second airtight component A2 on the workbench module 4 will contact the sealing frame 12, so that a sealed material inlet / outlet space S is formed between the workbench module 4, the sealing frame 12 and the cavity door 13.

[0085] Then as Figure 8As shown, when the workbench module 4 contacts the sealing frame 12, the second power source 621 drives the telescopic mechanism 622, so that the telescopic mechanism 622 drives the slider 613 to move the plurality of top holding members 611, which were originally misaligned with the lifting plate 52, to the bottom of the lifting plate 52, so that the top holding surface 612 of the top holding member 611 contacts the protrusion 521 of the lifting plate 52. Next, to open the cavity door 13, external air must first be introduced into the inlet / outlet space S. During the process of increasing the air pressure in the inlet / outlet space S to the same level as the external air pressure outside the first cavity 1, the plurality of supporting members 611 can support the lifting plate 52, preventing the workbench module 4 from being squeezed downwards due to the pressure difference between the inlet / outlet space S and the first cavity 1, which would cause a gap to form between the workbench module 4 and the sealing frame 12, allowing external air to enter the first cavity 1 and the second cavity 2. After the workpiece placement or removal is completed, time needs to be spent on evacuating the first cavity 1 and the second cavity 2, thus increasing the working time of the sealed cavity and reducing work efficiency.

[0086] In summary, when placing a workpiece on the worktable module for printing or removing a completed workpiece from the worktable module, the sealing cavity with the lifting device of this utility model first moves the worktable module to below the cavity door. Then, the lifting mechanism of the lifting device raises the worktable module so that it contacts the sealing frame, forming an inlet / outlet space between the worktable module, the sealing frame, and the cavity door. Next, the holding mechanism of the lifting device moves below the lifting mechanism and holds it in place, allowing external air to enter the inlet / outlet space. This ensures that the air pressure inside the inlet / outlet space is the same as the air pressure outside the cavity, allowing the cavity door to open smoothly. The holding mechanism holds the lifting mechanism to prevent the worktable module from being squeezed downwards due to increased air pressure in the inlet / outlet space, creating a gap between the worktable module and the sealing frame. This would allow external air to enter the entire sealing cavity, requiring more time for subsequent vacuuming operations and reducing work efficiency.

Claims

1. A sealed chamber having a jacking device, characterized by, The first cavity (1) has a cavity outer wall (11), a sealing frame (12) and a cavity door (13), wherein a top of the cavity outer wall (11) is provided with an inlet and outlet opening (111), the sealing frame (12) is arranged around the inlet and outlet opening (111) and is locked to the cavity outer wall (11), and the cavity door (13) is arranged above the sealing frame (12) to seal the inlet and outlet opening (111). The second cavity (2) is connected to the first cavity (1). The printing module (3) is arranged in the second cavity (2). The workbench module (4) is arranged in the first cavity (1) and the second cavity (2) and moves between the first cavity (1) and the second cavity (2). The lifting device (200) includes a lifting mechanism (5) and a supporting mechanism (6), wherein a part of the lifting mechanism (5) is arranged in the first cavity (1) and another part is arranged outside the first cavity (1), and the supporting mechanism (6) is arranged outside the first cavity (1) and below the lifting device (200). When a workpiece is placed on the workbench module (4) or removed from the workbench module (4), the workbench module (4) moves into the first cavity (1), then the lifting mechanism (5) of the lifting device (200) lifts the workbench module (4) upwards until the workbench module (4) contacts the sealing frame (12), forming an inlet and outlet space (S) between the workbench module (4), the sealing frame (12) and the cavity door (13), then the supporting mechanism (6) of the lifting device (200) moves below the lifting mechanism (5) of the lifting device (200), and external air enters the inlet and outlet space (S) to make the air pressure in the inlet and outlet space (S) the same as the external air pressure, and the supporting mechanism (6) of the lifting device (200) supports the lifting mechanism (5) of the lifting device (200) to prevent the workbench module (4) and the lifting mechanism (5) of the lifting device (200) from being pressed downwards due to the increase of air pressure in the inlet and outlet space (S), causing the workbench module (4) and the sealing frame (12) to leak, resulting in reduced work efficiency of the sealed cavity (100). The lifting mechanism (5) includes a plurality of support assemblies (51) and a lifting plate (52), the plurality of support assemblies (51) are arranged on the lifting plate (52), and each of the plurality of support assemblies (51) includes a crossbar (511) and a plurality of jacks (512), the crossbar (511) is arranged in the first cavity (1), and one end of each of the plurality of jacks (512) is located in the first cavity (1) and is connected perpendicularly to the crossbar (511), and the other end is located outside the first cavity (1) and is connected perpendicularly to the lifting plate (52) outside the first cavity (1).

2. The sealed cavity with jacking device of claim 1, wherein, ​ 3. The sealed cavity with jacking device of claim 2, wherein, The support assembly (51) further comprises a plurality of bushings (513) disposed at a bottom of the cavity outer wall (11) of the first cavity (1), and the plurality of bushings (513) are respectively sleeved on the plurality of jacks (512) of the support assembly (51), so as to prevent external air from entering the first cavity (1) and the second cavity (2) when the plurality of support assemblies (51) are lifted or lowered.

4. The sealed cavity with jacking device of claim 2, wherein, The lifting mechanism (5) further comprises a first power assembly (53), and the first power assembly (53) comprises a screw rod (531), a connecting part (532), and a first power source (533), wherein the connecting part (532) is disposed on the screw rod (531) and connected with the lifting plate (52), and the first power source (533) is connected with the screw rod (531) and used to drive the screw rod (531) to rotate, so that the screw rod (531) drives the connecting part (532) and the lifting plate (52) to be lifted or lowered.

5. The sealed chamber with jacking device of claim 4, wherein, The first power assembly (53) is connected to the center of the lifting plate (52), the plurality of jacks (512) of the plurality of support assemblies (51) are respectively connected to an upper surface of the lifting plate (52) and respectively located close to four sides and four corners of the lifting plate (52), so that when the first power assembly (53) drives the lifting plate (52) to be lifted or lowered, the first power assembly (53) applies an average force to the workbench module (4) through the plurality of support assemblies (51), so that the lifting mechanism (5) stably lifts or lowers the workbench module (4).

6. The sealed chamber with jacking device of claim 1, wherein, The holding mechanism (6) comprises a plurality of holding assemblies (61, 61'), and each of the plurality of holding assemblies (61, 61') comprises at least one holding piece (611), a sliding block (613), at least one sliding rail (614), at least one first support part (615), and a fixed plate (616), wherein the holding piece (611) is disposed on the sliding block (613), the sliding block (613) is slidably disposed on the sliding rail (614), the sliding rail (614) and the first support part (615) are disposed on an upper surface of the fixed plate (616), the first support part (615) is located on one side of the sliding rail (614), and when the sliding block (613) slides on the sliding rail (614), the holding piece (611) is located at a position corresponding to the first support part (615), so that the first support part (615) supports the holding piece (611).

7. The sealed chamber with jacking device of claim 6, wherein, Each of the plurality of holding assemblies (61, 61') of the holding mechanism (6) further comprises at least one second support part (617) disposed on a lower surface of the fixed plate (616) and located below the first support part (615).

8. The sealed chamber with jacking device of claim 7, wherein, The top-holding mechanism (6) further comprises a second power assembly (62), the second power assembly (62) comprises a second power source (621) and a telescopic mechanism (622), the second power source (621) is arranged on one side of the second support portion (617), the telescopic mechanism (622) is connected between the second power source (621) and the sliding block (613), and the second power source (621) is used to drive the telescopic mechanism (622) to perform telescopic action, so as to drive the sliding block (613) to move horizontally, so that the plurality of top-holding pieces (611) move below a lifting plate piece (52) of the lifting mechanism (5) or move away from the lifting plate piece (52) of the lifting mechanism (5).

9. The sealed chamber with jacking device of claim 1, wherein, The workbench module (4) comprises a first workbench (41) and a second workbench (42), and two first rails (411) and two second rails (421) are arranged in the first cavity (1) and the second cavity (2), wherein the first workbench (41) is arranged on the two first rails (411), the second workbench (42) is arranged on the two second rails (421), the two second rails (421) are located between the two first rails (411), the width between the two second workbenches (42) is smaller than the width between the two first rails (411), the height of the second workbench (42) is smaller than the height of the first workbench (41), and the first workbench (41) and the second workbench (42) are staggered when moving.

10. The sealed chamber with jacking device of claim 1, wherein, The sealing frame (12) on the first cavity (1) is fixed on the cavity outer wall (11) by a plurality of locking members (L), and a first air-tight assembly (A1) is arranged between the sealing frame (12) and the cavity outer wall (11), and a second air-tight assembly (A2) is arranged on the workbench module (4), and the position of the second air-tight assembly (A2) corresponds to the sealing frame (12), so that the workbench module (4) is lifted by the lifting mechanism (5) of the jacking device (200) and contacts the sealing frame (12), and when the cavity door (13) is opened, the first air-tight assembly (A1) and the second air-tight assembly (A2) prevent the external air from entering the first cavity (1) and the second cavity (2).

11. The sealed chamber with jacking device of claim 1, wherein, A third air-tight assembly (A3) is arranged between the cavity door (13) and the cavity outer wall (11) to prevent the external air from entering the first cavity (1) and the second cavity (2) from between the cavity door (13) and the cavity outer wall (11).

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