Crystal shearing structure and robot

Abstract

The utility model relates to a crystal shearing structure and a robot. The crystal shearing structure comprises a supporting seat assembly and a fixed support, the linear module comprises an electric push rod installed on one side of the fixed support in the first direction and a sliding push rod which penetrates through the fixed support in the first direction and is in sliding connection with the fixed support. The crystal shearing assembly comprises a crystal shearing support arranged on the other side of the fixed support in the first direction, a sliding seat movably arranged in the crystal shearing support in the first direction, two moving arms fixed to the two sides of the sliding seat in the second direction, and a first shearing part and a second shearing part which are installed on the side, away from the fixed support, of the crystal shearing support in a crossed and hinged mode; the crystal shearing support is fixedly connected with the sliding push rod, and the crystal shearing support is provided with a moving space along a second direction; according to the utility model, the arrangement of a driving source can be reduced, the purpose of reducing the cost is achieved, the crystal shearing structure is used for carrying out crystal shearing operation, the safety risk can be reduced, the crystal shearing efficiency is improved, the crystal bar quality is ensured, and the automation and standardization of production are realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor preparation, especially to a crystal cutting structure and a robot. BACKGROUND

[0002] In the preparation process of semiconductor materials, the growth of crystal rods is a key link. After the growth of crystal rods in a single crystal furnace is completed, the crystal rods need to be taken out. At present, the connection part of the upper end of the crystal rod and the seed crystal is cut off mainly by manual crystal cutting during the crystal taking process.

[0003] Manual crystal cutting has many defects. First, the internal environment of the single crystal furnace is complex, and the operator faces dangerous factors such as high temperature and high radiation during manual operation, which threatens the safety of the operator. Manual crystal cutting is low in efficiency and difficult to realize standardization and automatic control, which is not conducive to the optimization and management of the production process and may also lead to unstable quality of the crystal rods, affecting subsequent processing and product performance. Therefore, it is necessary to develop a new crystal cutting device to replace the traditional manual crystal cutting method. SUMMARY

[0004] Therefore, the utility model wants to overcome the insufficient in prior art, provides a kind of crystal cutting structure and robot, can reduce security risk, improve production efficiency, guarantee crystal rod quality, reduce security risk and realize the automation and standardization of production.

[0005] To solve the above technical problems, the utility model provides a kind of crystal cutting structure, including,

[0006] Support seat component, including fixed support;

[0007] Linear module, including electric push rod installed in the one side of fixed support along the first direction, and sliding push rod along the first direction and being slidably connected with fixed support and being penetrated through fixed support;

[0008] Crystal cutting component, including crystal cutting support being arranged in the other side of fixed support along the first direction, sliding seat being movably arranged in crystal cutting support along the first direction, two moving arms being fixed on both sides of sliding seat along the second direction, and first shear member and second shear member being cross-hinged and installed on the side of crystal cutting support away from fixed support;The crystal cutting support is fixedly connected with the sliding push rod, and the crystal cutting support is provided with moving space along the second direction;The sliding seat is arranged in the moving space, and the sliding seat is elastically connected with the crystal cutting support along the first direction;The first shear member and the second shear member are the same structure, and shear part is formed on the inner side of the intersection of the two, and connecting part is formed on the outer side and is hinged with moving arm;The movable end of electric push rod extends into the moving space of crystal cutting support along the first direction and is fixedly connected with sliding seat.

[0009] In one embodiment of the utility model, the connecting part of the first shearing member and the second shearing member is provided with a waist-shaped through hole, and the two moving arms are hinged to the waist-shaped through holes on the corresponding sides of the first shearing member and the second shearing member.

[0010] In one embodiment of the utility model, the crystal shearing assembly further comprises two crystal shearing clamps detachably connected to the crystal shearing support, and the first shearing member and the second shearing member are arranged between the two crystal shearing clamps and are hinged to the crystal shearing clamps.

[0011] In one embodiment of the utility model, the crystal shearing assembly further comprises an elastic member arranged in the moving space, one end of the elastic member abuts against the sliding seat, and the other end of the elastic member abuts against the crystal shearing support.

[0012] In one embodiment of the utility model, the crystal shearing assembly further comprises an abutting member arranged in the moving space, and the elastic member abuts against the crystal shearing support through the abutting member.

[0013] In one embodiment of the utility model, the support seat assembly further comprises a support top plate, a support bottom plate and a connecting bracket, the support bottom plate and the support top plate are oppositely arranged along the height direction, the fixed support is connected to the support bottom plate and the support top plate and is located at one end of the support bottom plate, the connecting bracket is connected to the support bottom plate and the support top plate and is located at the other end of the support bottom plate, and the end of the electric push rod is mounted on the connecting bracket.

[0014] In one embodiment of the utility model, a visual camera is arranged on the fixed support.

[0015] In one embodiment of the utility model, a detection module is arranged, the detection module comprises two photoelectric sensors and a photoelectric touch piece arranged at the end of the sliding push rod, and the two photoelectric sensors are arranged at the two ends of the sliding push rod along the length direction to detect the movement stroke of the crystal shearing assembly.

[0016] In one embodiment of the utility model, a lifting mechanism is arranged, the lifting mechanism is connected to the support seat assembly to drive the support seat assembly to lift.

[0017] The utility model further provides a robot, which comprises a robot body, a crystal bar tool and a crystal shearing structure as described above, the crystal bar tool is arranged on the robot body, and the crystal shearing structure is mounted on the crystal bar tool.

[0018] Compared with the prior art, the above technical scheme of the utility model has the following advantages:

[0019] The utility model relates to a kind of shearing crystal structure, it is equipped with support seat subassembly, linear module and shearing crystal subassembly, linear module includes electric push rod along first direction installation in support seat subassembly and with the sliding push rod of sliding connection of support seat subassembly, shearing crystal subassembly includes the shearing crystal support of being set in support seat subassembly, sliding seat is moved and set in shearing crystal support along first direction, mobile arm is fixed in the both sides of sliding seat, with the first shear member and second shear member of shearing crystal support hinged. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to make the content of the utility model more easily be clearly understood, the following is according to the specific embodiment of the utility model and combining with the drawings, the utility model is further detailed, wherein.

[0021] Figure 1 It is the structure schematic view of the shearing crystal structure of the preferred embodiment of the utility model.

[0022] Figure 2 It is the structure schematic view of support seat subassembly, linear module and shearing crystal subassembly of the preferred embodiment of the utility model.

[0023] Figure 3 It is Figure 2 The cross-sectional structure schematic view of

[0024] Figure 4 It is the structure schematic view of the shearing crystal subassembly of the preferred embodiment of the utility model.

[0025] Figure 5 It is the schematic view of the robot of the preferred embodiment of the utility model.

[0026] The description reference signs are explained: 1, support seat assembly; 10, fixed support; 11, support top plate; 12, support bottom plate; 13, connecting bracket; 2, linear module; 20, electric push rod; 21, sliding push rod; 210, sliding shaft sleeve; 3, wafer cutting assembly; 30, wafer cutting support; 301, moving space; 31, sliding seat; 32, moving arm; 33, first cutting piece; 34, second cutting piece; 35, cutting part; 36, connecting part; 360, waist-shaped through hole; 37, elastic piece; 38, wafer cutting clamp plate; 39, abutting piece; 4, visual camera; 5, detection module; 50, photoelectric sensor; 51, photoelectric touch piece; 6, lifting mechanism; 60, lifting motor; 61, lifting lead screw; 62, lifting support; 63, lifting slide rod; 64, mounting support; 65, lifting bracket; 7, robot body; 8, wafer attribute tool. DETAILED DESCRIPTION

[0027] The utility model is further explained below in combination with the drawings and specific embodiments, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model. Embodiment one

[0028] Referring to Figure 1 The utility model discloses a wafer cutting structure, including support seat assembly 1, linear module 2 and wafer cutting assembly 3. Wherein, support seat assembly 1 can bear linear module 2 and wafer cutting assembly 3.

[0029] Specifically, according to Figure 2 And Figure 3 As shown in the figure, support seat assembly 1 includes fixed support 10, support top plate 11, support bottom plate 12 and connecting bracket 13. Support top plate 11 and support bottom plate 12 extend along the first direction, and support top plate 11 and support bottom plate 12 are oppositely arranged along the height direction. Fixed support 10 is connected to support bottom plate 12 and support top plate 11 respectively, and is located at one end of support bottom plate 12. Connecting bracket 13 is connected to support bottom plate 12 and support top plate 11, and is located at the other end of support bottom plate 12.

[0030] Further, linear module 2 includes electric push rod 20 installed on one side of fixed support 10 along the first direction, and sliding push rod 21 penetrating through fixed support 10 along the first direction and being slidably connected with fixed support 10. The end of electric push rod 20 is installed on connecting bracket 13. Preferably, sliding push rod 21 is provided with two groups. The two groups of sliding push rods 21 are arranged above and below. Each group of sliding push rods 21 is configured with sliding shaft sleeve 210, and sliding push rod 21 is movably connected with fixed support 10 through sliding shaft sleeve 210 to ensure the stability and reliability of sliding push rod 21 during operation.

[0031] Further, the crystal shearing assembly 3 comprises a shearing support 30 arranged on the other side of the fixed support 10 along the first direction, a sliding seat 31 movably arranged in the shearing support 30 along the first direction, two moving arms 32 fixed on both sides of the sliding seat 31 along the second direction, and a first shearing piece 33 and a second shearing piece 34 crossly and hingedly arranged on the side of the shearing support 30 away from the fixed support 10. Referring to Figure 2 It is to be noted that the second direction is perpendicular to the first direction.

[0032] Specifically, referring to Figure 3 It is to be noted that the shearing support 30 is fixedly connected with the sliding push rod 21. The shearing support 30 is provided with a moving space 301 along the second direction. The sliding seat 31 is arranged in the moving space 301, and the sliding seat 31 is elastically connected with the shearing support 30 along the first direction. The sliding seat 31 is movable along the first direction in the moving space 301. The active end of the electric push rod 20 is fixedly connected with the sliding seat 31 in the moving space 301 of the shearing support 30 along the first direction. Preferably, in combination with Figure 4 It is to be noted that the first shearing piece 33 and the second shearing piece 34 are of the same structure, and a shearing part 35 is formed on the inner side of the cross of the first shearing piece 33 and the second shearing piece 34, and a connecting part 36 is formed on the outer side and hingedly connected with the moving arm 32.

[0033] In further embodiments, in combination with Figure 2 , Figure 3 and Figure 4 It is to be noted that the shearing support 30 is fixedly connected with the sliding push rod 21. The shearing support 30 is provided with a moving space 301 along the second direction. The sliding seat 31 is arranged in the moving space 301, and the sliding seat 31 is elastically connected with the shearing support 30 along the first direction. The sliding seat 31 is movable along the first direction in the moving space 301. The active end of the electric push rod 20 is fixedly connected with the sliding seat 31 in the moving space 301 of the shearing support 30 along the first direction. Preferably, in combination with

[0034] Therefore, it can be known that the shearing structure provided by the embodiments of the present application can drive the crystal shearing assembly 3 to move horizontally by the linear module 2 when working, so that the first shearing piece 33 and the second shearing piece 34 are in contact with the top end of the crystal bar. At this time, the shearing support 30 is blocked, the electric push rod 20 drives the sliding seat 31 to continue to move and drives the moving arm 32 to drive the first shearing piece 33 and the second shearing piece 34 to close, so as to shear the connecting part of the top end of the crystal bar and the seed crystal. By such arrangement, the utility model only needs to set one linear module to complete the two actions of moving and shearing, so that the setting of the driving source can be reduced, thereby achieving the purpose of reducing the cost. In addition, the shearing structure can also effectively reduce the safety risk, improve the shearing efficiency, and ensure the quality of the crystal bar when shearing. Meanwhile, the automation and standardization of production are realized.

[0035] Referring to Figure 4As shown, in order to avoid the situation that the structure is stuck during the cutting process, i.e. to prevent the first shear 33 and the second shear 34 from being unable to close to pinch off the seed crystal, in further embodiments, a waist-shaped through hole 360 is opened on the connecting part 36 of the first shear 33 and the second shear 34, and the two moving arms 32 are respectively hinged with the first shear 33 and the second shear 34 at the waist-shaped through hole 360 on the corresponding side.

[0036] In further embodiments, in combination with Figure 3 As shown, the seed crystal cutting assembly 3 further comprises two seed crystal cutting clamps 38 detachably connected to the seed crystal cutting support 30. The two seed crystal cutting clamps 38 are arranged in an upper and lower spaced manner, and the first shear 33 and the second shear 34 are arranged between the two seed crystal cutting clamps 38 and hinged with the seed crystal cutting clamps 38. In this way, the wear of the seed crystal cutting support 30 can be reduced. After the seed crystal cutting clamps 38, the first shear 33 and the second shear 34 are worn, they can be easily disassembled and replaced.

[0037] In further embodiments, in combination with Figure 3 As shown, the seed crystal cutting assembly further comprises an abutting piece 39. The abutting piece 39 is arranged in the moving space 301. The elastic piece 37 abuts against the seed crystal cutting support 30 through the abutting piece 39.

[0038] In further embodiments, in combination with Figure 2 As shown, the seed crystal cutting structure further comprises a visual camera 4 arranged on the fixed support 10. Through the visual camera 4, the crystal bar can be identified, so as to ensure the accuracy of the seed crystal cutting position, further realize the standardization and automation of the seed crystal cutting process, and improve the seed crystal cutting efficiency and quality.

[0039] In further embodiments, in combination with Figure 2 and Figure 3 As shown, the seed crystal cutting structure further comprises a detection module 5. The detection module 5 comprises two photoelectric sensors 50 and a photoelectric touch piece 51 arranged at the end of the sliding push rod 21. The two photoelectric sensors 50 are respectively arranged at the two ends of the sliding push rod 21 along the length direction to detect the movement stroke of the seed crystal cutting assembly 3.

[0040] In further embodiments, in order to be able to adjust the height of the seed crystal cutting support 30, the linear module 2 and the seed crystal cutting assembly 3 according to the length of the crystal bar, so as to carry out accurate seed crystal cutting, the seed crystal cutting structure further comprises a lifting mechanism 6. The lifting mechanism 6 is connected with the support assembly 1 to drive the support assembly 1 to lift.

[0041] As a preferred embodiment, in combination with Figure 1 and Figure 2The lifting mechanism 6 comprises a lifting motor 60, a lifting screw 61, a lifting support 62, a lifting slide rod 63, a mounting support 64 and a lifting bracket 65. The mounting support 64 extends along the height direction. The lifting screw 61 and the lifting slide rod 63 are mounted on the mounting support 64 along the height direction. The output end of the lifting motor 60 is connected with the lifting screw 61 to drive the lifting screw 61 to act. The lifting support 62 is threadedly connected with the lifting screw 61 through a screw nut. The lifting support 62 is slidably connected with the lifting slide rod 63. The lifting bracket 65 is fixedly connected with the lifting support 62, so that the lifting bracket 65 can move along the height direction under the driving of the lifting support 62. The crystal cutting support 30 is fixedly mounted on the lifting bracket 65, so that the crystal cutting support 30 can be driven to move along the height direction to realize the lifting action of the crystal cutting structure. Embodiment two

[0042] The application further discloses a robot, which comprises a robot body 7, a crystal rod tool 8 and a crystal cutting structure as shown in the embodiment one. Figure 5 As shown in the figure, the crystal rod tool is arranged on the robot body 7, and the crystal cutting structure is arranged on the crystal rod tool 8.

[0043] In a further embodiment, the crystal rod tool 8 can support and clamp the crystal rod. Through the movement of the robot body 7, on one hand, the robot can move between different single crystal furnaces to adapt to the crystal rod cutting requirements of the single crystal furnaces; on the other hand, the cut crystal rod can be moved to a designated position for storage or further processing.

[0044] In the description of the present application, it should be understood that the terms "first", "second" are only used for descriptive purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0045] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixed connection, or detachable connection, or integrated; can be mechanical connection, or electrical connection; can be directly connected, or indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] Obviously, the above embodiments are only examples for clearly illustrating the present application, and are not intended to limit the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments are not required to be exhausted, and the obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A cleaved crystal structure, characterized by, The application relates to a crystal cutting structure. The support seat assembly comprises a fixed support; The linear module comprises an electric push rod installed on one side of the fixed support along a first direction and a sliding push rod penetrating through the fixed support along the first direction and being in sliding connection with the fixed support; The crystal cutting assembly comprises a crystal cutting support arranged on the other side of the fixed support along the first direction, a sliding seat movably arranged in the crystal cutting support along the first direction, two moving arms fixed on both sides of the sliding seat along a second direction and a first cutting piece and a second cutting piece cross-hinged on the side of the crystal cutting support away from the fixed support; the crystal cutting support is fixedly connected with the sliding push rod, the crystal cutting support is provided with a moving space along the second direction; the sliding seat is arranged in the moving space and is elastically connected with the crystal cutting support along the first direction; the first cutting piece and the second cutting piece are identical in structure, form a cutting part on the inner side of the cross and form a connecting part hinged with the moving arms on the outer side; the movable end of the electric push rod extends into the moving space of the crystal cutting support along the first direction and is fixedly connected with the sliding seat.

2. The cleaved structure of claim 1, wherein, Waist-shaped through holes are formed in the connecting parts of the first cutting piece and the second cutting piece, and the two moving arms are hinged with the waist-shaped through holes on the corresponding sides of the first cutting piece and the second cutting piece.

3. The cleaved structure of claim 1, wherein, The crystal cutting assembly further comprises two crystal cutting clamps detachably connected with the crystal cutting support, and the first cutting piece and the second cutting piece are arranged between the two crystal cutting clamps and are hinged with the crystal cutting clamps.

4. The cleaved structure of claim 1, wherein, The crystal cutting assembly further comprises an elastic piece arranged in the moving space; one end of the elastic piece abuts against the sliding seat, and the other end of the elastic piece abuts against the crystal cutting support.

5. The cleaved structure of claim 1, wherein, The crystal cutting assembly further comprises an abutting piece arranged in the moving space, and the elastic piece abuts against the crystal cutting support through the abutting piece.

6. The cleaved structure of claim 1, wherein, The support seat assembly further comprises a support top plate, a support bottom plate and a connecting support; the support bottom plate and the support top plate are oppositely arranged along the height direction, the fixed support is connected with the support bottom plate and the support top plate respectively and is located at one end of the support bottom plate, the connecting support is connected with the support bottom plate and the support top plate and is located at the other end of the support bottom plate, and the end of the electric push rod is installed on the connecting support.

7. The cleaved structure of claim 1, wherein, A visual camera is arranged on the fixed support.

8. The cleaved structure of claim 1, wherein, The detection module comprises two photoelectric sensors and a photoelectric touch piece arranged at the end of the sliding push rod, and the two photoelectric sensors are arranged at the two ends of the sliding push rod along the length direction to detect the movement stroke of the crystal cutting assembly.

9. The cleaved structure of any of claims 1-8, wherein, The lifting mechanism is connected with the support seat assembly to drive the support seat assembly to lift.

10. A robot, characterized in that The application relates to a robot body, a crystal rod accessory and a crystal cutting structure as claimed in any one of claims 1-9, the crystal rod accessory is arranged on the robot body, and the crystal cutting structure is installed on the crystal rod accessory.

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