Soft landing self-adjusting furnace door

Abstract

The utility model discloses a soft landing self-adjusting furnace door which comprises a furnace door and a furnace door support. The furnace door is mounted on the furnace door bracket; a plurality of motor adjusting modules for adjusting local pressure of the furnace door are mounted on the furnace door bracket at intervals; the motor adjusting module comprises a furnace door motor and a force adjusting part; the furnace door motor is mounted on the furnace door bracket; the force adjusting piece is connected with the furnace door and the furnace door motor; and when the furnace door motor is driven, the extrusion force on the furnace door is increased or reduced by the force adjusting piece. According to the soft landing self-adjusting furnace door disclosed by the utility model, through the arrangement of the plurality of motor adjusting modules which are distributed in a multi-point manner, the quick positioning and automatic adjustment of leakage points of the furnace door can be realized, and the time for checking the leakage points and cooling the furnace door is shortened, so that the influence of furnace door adjustment on the equipment startup rate and the equipment productivity is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of diffusion furnace, in particular to a soft landing self -adjusting furnace door. BACKGROUND

[0002] Diffusion furnace is mainly used for diffusion, oxidation process in the manufacture of silicon wafer solar energy device, and the furnace body is the reaction chamber of diffusion and oxidation process, and the structure of the furnace door is very critical.

[0003] At present, the furnace door of the commonly used diffusion furnace adopts the soft landing boat loading mode. When the soft landing furnace door is not well matched with the furnace flange and leaks, the equipment usually does not have the alarm of the furnace door leakage point information, only has the information of high leakage rate, the staff needs to check the leakage point one by one, determines the furnace door reason, and manually adjusts the position of the furnace door. When the high-temperature equipment manually adjusts the furnace door, only cooling operation can be carried out, otherwise the personnel will have the risk of scalding, so that the furnace door adjustment takes a long time, and the equipment opening rate and equipment capacity are affected.

[0004] Based on this, the utility model provides a soft landing self -adjusting furnace door to solve the above -mentioned problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a soft landing self -adjusting furnace door, realizing the rapid positioning and automatic adjustment of the furnace door leakage point, and reducing the influence of furnace door adjustment on the equipment opening rate and equipment capacity.

[0006] In order to solve the above technical problems, the utility model provides a soft landing self -adjusting furnace door, which comprises a furnace door and a furnace door support.

[0007] The furnace door is installed on the furnace door support.

[0008] A plurality of motor adjusting modules for adjusting the local pressure of the furnace door are installed on the furnace door support at intervals.

[0009] The motor adjusting module comprises a furnace door motor and a force adjusting part. The furnace door motor is installed on the furnace door support. The force adjusting part is connected with the furnace door and the furnace door motor. When the furnace door motor is driven, the force adjusting part increases or reduces the extrusion force on the furnace door.

[0010] Further, the middle part of the furnace door is connected with the furnace door support, and a plurality of motor adjusting modules are installed on the furnace door support at a uniform interval around the center of the furnace door.

[0011] Further, the force adjusting part comprises a transmission screw rod, a driving block and a force applying rod.

[0012] The transmission screw rod is drivingly connected with the output shaft of the furnace door motor.

[0013] The driving block is threadedly connected with the transmission screw rod;

[0014] One end of the force applying rod is connected with the driving block, and the other end of the force applying rod is connected with the furnace door.

[0015] Further, a through hole is formed through the furnace door support, and the force applying rod is slidably arranged in the through hole.

[0016] Further, the furnace door motor is mounted on the furnace door support through a motor fixing frame, and the transmission screw rod is rotatably connected with the motor fixing frame and the furnace door support at two ends thereof.

[0017] Further, the transmission screw rod is rotatably connected with the motor fixing frame and the furnace door support through a shaft sleeve.

[0018] Further, the furnace door motor is detachably mounted on the motor fixing frame through bolts.

[0019] Further, the soft landing self-adjusting furnace door further comprises a furnace door fixing plate, the furnace door fixing plate is connected with the furnace door support, and a driving cylinder for driving the furnace door to open and close is connected to the furnace door fixing plate.

[0020] Compared with the prior art, the soft landing self-adjusting furnace door has at least the following beneficial effects:

[0021] The soft landing self-adjusting furnace door provided by the utility model can realize rapid positioning and automatic adjustment of a leakage point of the furnace door, shorten the time for checking the leakage point and processing the furnace door, and thus reduce the influence of furnace door adjustment on equipment starting rate and equipment productivity. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 FIG. 1 is a schematic view of the overall structure of the soft landing self-adjusting furnace door in the embodiment of the utility model;

[0023] Figure 2 FIG. 2 is a schematic view of the installation of the motor adjusting module in the embodiment of the utility model. DETAILED DESCRIPTION

[0024] The soft landing self-adjusting furnace door of the utility model will be described in more detail below with reference to the schematic views, wherein the preferred embodiments of the utility model are shown, and it should be understood that the utility model described herein can be modified by those skilled in the art, and the advantageous effects of the utility model can still be achieved. Therefore, the following description should be understood as extensive knowledge for those skilled in the art, and not as a limitation on the utility model.

[0025] The utility model is described in more detail by way of example with reference to the drawings in the following paragraphs. The advantages and features of the utility model will be more apparent from the following description. It should be noted that the drawings are all in a very simplified form and all use non-precise proportions, merely to facilitate and clarify the purpose of assisting in the description of the embodiments of the utility model.

[0026] As shown in the utility model embodiment, a soft landing self-adjusting furnace door is provided, comprising a furnace door 1 and a furnace door support 2. Figure 1

[0027] Specifically, the furnace door 1 is installed on the furnace door support 2; a plurality of motor adjustment modules 3 for adjusting the local pressure of the furnace door 1 are installed at intervals on the furnace door support 2; the motor adjustment module 3 comprises a furnace door motor 31 and a force adjustment piece; the furnace door motor 31 is installed on the furnace door support 2; the force adjustment piece is connected to the furnace door 1 and the furnace door motor 31; when the furnace door motor 31 is driven, the force adjustment piece increases or decreases the extrusion force on the furnace door 1.

[0028] In this embodiment, the soft landing self-adjusting furnace door further comprises a furnace door fixing plate 4, which is connected to the furnace door support 2, and a driving cylinder is connected to the furnace door fixing plate 4, which drives the furnace door 1 to open or close by starting the driving cylinder.

[0029] After the furnace door is closed, if there is a leak, the device sends a leak reminder, and by collecting the torque of all furnace door motors 31, the leak position can be quickly located through data comparison. At this time, by starting the furnace door motor 31 at the corresponding position, the adjustment piece increases the extrusion force on the furnace door 1 at that position, achieving the purpose of leak elimination. In order to facilitate the understanding of the above embodiments, the following is illustrated by example:

[0030] As shown in the utility model embodiment, a soft landing self-adjusting furnace door is provided, comprising a furnace door 1 and a furnace door support 2. Figure 1 The motor adjustment module 3 has four, which are located at the upper right corner, lower right corner, upper left corner and lower left corner of the furnace door 1. After the furnace door 1 is closed under the action of the driving cylinder, the device sends a leak reminder, at which time the torque information of the four furnace door motors 31 is collected, and it is determined that the torque of the furnace door motor 31 at the upper left corner is not in place, i.e. it is determined that there is a gap between the upper left corner of the furnace door and the flange. At this time, the furnace door motor 31 at the upper left corner is started, the extrusion force of the force adjustment piece corresponding to the furnace door motor 31 on the furnace door 1 is increased, and the upper left corner of the furnace door 1 is pushed to adhere to the flange, achieving the elimination of the leak. When the lower left corner, upper right corner and lower right corner of the furnace door 1 have this problem, the same method can be used to handle it.

[0031] ​In summary, the soft landing self-adjusting furnace door provided by the embodiment can realize rapid positioning and automatic adjustment of the leakage point of the furnace door 1, shorten the time for troubleshooting and cooling treatment of the furnace door 1, and thus reduce the influence of furnace door 1 adjustment on equipment start-up rate and equipment capacity.

[0032] In the above embodiment, the furnace door 1 is connected to the furnace door support 2 in the middle, and a plurality of motor adjustment modules 3 are installed on the furnace door support 2 at a uniform interval in a circle with the center of the furnace door 1 as the center, so as to ensure uniform stress of the furnace door 1.

[0033] In the above embodiment, in combination with reference Figure 2 The force adjusting member includes a transmission screw rod 32, a driving block 33, and a force applying rod 34; the transmission screw rod 32 is in transmission connection with an output shaft of the furnace door motor 31; the driving block 33 is in threaded connection with the transmission screw rod 32; one end of the force applying rod 34 is connected to the driving block 33, and the other end of the force applying rod 34 is connected to the furnace door 1.

[0034] When the leakage problem needs to be solved, the furnace door motor 31 is driven to rotate the transmission screw rod 32, at this time, the driving block 33 will move along the transmission screw rod 32 to the furnace door 1 under the action of the transmission screw rod 32, so as to provide the force applying rod 34 with extrusion force towards the furnace door 1, so as to achieve the purpose of leakage elimination.

[0035] Further, a through hole (not marked in the figure) is provided through the furnace door support 2, and the force applying rod 34 is slidably arranged in the through hole, so as to improve the stability of the force applying rod 34.

[0036] Further, the furnace door motor 31 is installed on the furnace door support 2 through a motor fixing frame 35, both ends of the transmission screw rod 32 are in rotation connection with the motor fixing frame 35 and the furnace door support 2 respectively, so as to realize stable installation of the transmission screw rod 32 on the furnace door support 2.

[0037] Further, the transmission screw rod 32 is in rotation connection with the motor fixing frame 35 and the furnace door support 2 through a shaft sleeve 36, so as to ensure smoothness during operation of the motor adjustment module 3.

[0038] Preferably, the furnace door motor 31 is detachably installed on the motor fixing frame 35 through bolts, so as to facilitate disassembly and maintenance of the furnace door motor 31.

[0039] In summary, compared with the prior art, the utility model has at least the following advantages:

[0040] The soft landing self-adjusting furnace door provided by the utility model can realize quick positioning and automatic adjustment of the leakage point of the furnace door, and shorten the time for checking the leakage point and cooling the furnace door, thereby reducing the influence of furnace door adjustment on equipment starting rate and equipment capacity.

[0041] Obviously, those skilled in the art can make various modifications and variations to the utility model without departing from the spirit and scope of the utility model. Thus, if these modifications and variations of the utility model fall within the scope of the utility model claims and their equivalent technologies, the utility model also intends to include these modifications and variations.

Claims

1. A soft landing self-regulating oven door characterized by, The stove door and the stove door support are included; The stove door is installed on the stove door support; A plurality of motor adjusting modules for adjusting the local pressure of the stove door are installed on the stove door support at intervals; The motor adjusting module includes a stove door motor and a force adjusting piece; the stove door motor is installed on the stove door support; the force adjusting piece is connected to the stove door and the stove door motor; when the stove door motor is driven, the force adjusting piece increases or decreases the extrusion force on the stove door.

2. The soft landing self-regulating oven door of claim 1, wherein, The stove door is connected to the stove door support in the middle, and a plurality of the motor adjusting modules are installed on the stove door support at a uniform interval around the center of the stove door.

3. The soft landing self-regulating oven door of claim 1, wherein, The force adjusting piece includes a transmission screw rod, a driving block, and a force applying rod; The transmission screw rod is in transmission connection with the output shaft of the stove door motor; The driving block is in screw connection with the transmission screw rod; One end of the force applying rod is connected to the driving block, and the other end of the force applying rod is connected to the stove door.

4. The soft landing self-regulating oven door of claim 3, wherein, A through hole is formed through the stove door support, and the force applying rod is slidably arranged in the through hole.

5. The soft landing self-regulating oven door of claim 3, wherein, The stove door motor is installed on the stove door support through a motor fixing frame, and the transmission screw rod is in rotational connection with the motor fixing frame and the stove door support at both ends.

6. The soft landing self-regulating oven door of claim 5, wherein, The transmission screw rod is in rotational connection with the motor fixing frame and the stove door support through a shaft sleeve.

7. The soft landing self-regulating oven door of claim 5, wherein, The stove door motor is detachably installed on the motor fixing frame through bolts.

8. The soft landing self-regulating oven door of claim 1, wherein, A stove door fixing plate is further included, the stove door fixing plate is connected to the stove door support, and a driving cylinder for driving the stove door to open and close is connected to the stove door fixing plate.

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