Fast remodeling filament ion source

Abstract

The utility model relates to a filament ion source capable of rapid remodeling, which comprises a loading plate, a plurality of filament ion source modules are arranged on the loading plate, every two filament ion source modules are arranged in one group, two ends of each group of filament ion source module are connected with a power supply circuit, and an on-off control module is arranged on the power supply circuit connected with one end of the filament ion source module; and one filament ion source module, two filament ion source modules, three filament ion source modules and all filament ion source modules are adaptively selected, and energization is carried out for ion source supply, so that an adaptive-switching rapid-remodeling ion source supply structure is formed.

Description

TECHNICAL FIELD

[0001] The utility model relates to surface coating preparation technology, especially surface plating technology and its using equipment, specifically, it is a quick change's filament ion source. BACKGROUND

[0002] In the surface precision coating preparation process, the ion source density in the plating box needs to be guaranteed, the filament ion source is the main component of the ion source generated in the plating box, and the current size of the filament ion source is improved at the present stage to realize the required ion source density, but the filament ion source is frequently circulated with different currents, is easy to damage and has low service life.

[0003] Therefore, it is necessary to provide a quick change's filament ion source to solve the above problems. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a quick change's filament ion source.

[0005] The utility model realizes the above-mentioned purpose through the following technical schemes:

[0006] A quick change's filament ion source, including loading board, be provided with a plurality of filament ion source module on loading board, every two filament ion source module is set as a group, and the both ends of every group of filament ion source module are connected to power supply circuit, and the power supply circuit of one end is provided with on-off control module;

[0007] Adaptive selection one of filament ion source module, two of filament ion source module, three of filament ion source module, to all filament ion source module, ion source supply is carried out by power on, and the adaptive switching quick change's ion source supply structure is formed.

[0008] Further, the filament ion source module includes a filament protection shell, and the filament protection shell has a filament.

[0009] Further, the filament is a tungsten wire with a diameter of 1mm.

[0010] Further, the length of the filament is 0.5-1.8m.

[0011] Further, the on-off control module is an on and off switch.

[0012] Further, the on-off control module includes a closed end connected to an electromagnet, and a corresponding adsorption part is arranged corresponding to the closed end, the electromagnet is turned on and off, the closed end is controlled to be adsorbed close or not, the closed end is connected to or away from the corresponding interface, and a filament on-off control structure is formed.

[0013] Further, the electromagnet is connected with an elastic recovery member.

[0014] Further, the elastic return member is composed of a tension spring.

[0015] Compared with the prior art, the utility model can correspond to different ion source densities, provide different numbers of filaments for ion source supply, do not need to adjust the current passing through the filaments, and effectively improve the service life of the filament ion source. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a structural schematic view of the embodiment 1 of the utility model.

[0017] Figure 2 It is a structural schematic view of the embodiment 2 of the utility model. DETAILED DESCRIPTION Embodiment 1:

[0018] Referring to Figure 1 , the embodiment shows a quick change type filament ion source, including loading plate, the loading plate is provided with a plurality of filament ion source module 1, every two filament ion source module 1 is set as a group, and the two ends of each group of filament ion source module 1 are connected to power supply circuit 2, wherein the power supply circuit 2 connected to one end is provided with on-off control module 3;

[0019] Adaptive selection one of the filament ion source module 1, two of the filament ion source module 1, three of the filament ion source module 1, to all filament ion source module 1, ion source supply is carried out by power on, and the adaptive switching quick change type ion source supply structure is formed.

[0020] The filament ion source module 1 includes filament protection shell 11, and the filament protection shell 11 is provided with filament 12.

[0021] The filament 12 is tungsten wire with a diameter of 1mm.

[0022] The length of the filament 12 is 0.5-1.8m.

[0023] The on-off control module 3 is an on and off switch. Embodiment 2:

[0024] Referring to Figure 2 , the embodiment shows a quick change type filament ion source, including loading plate, the loading plate is provided with a plurality of filament ion source module 1, every two filament ion source module 1 is set as a group, and the two ends of each group of filament ion source two are connected to power supply circuit 2, wherein the power supply circuit 2 connected to one end is provided with on-off control module 3;

[0025] The filament ion source module 1, the two filament ion source modules 1, the three filament ion source modules 1, or all of the filament ion source modules 1 are selected and powered to supply the ion source, forming an adaptive switching quick-change ion source supply structure.

[0026] The filament ion source module 1 comprises a filament protection shell 11, and a filament 12 is arranged in the filament protection shell 11.

[0027] The filament 12 is a tungsten wire with a diameter of 1 mm.

[0028] The length of the filament 12 is 0.5-1.8 m.

[0029] The on-off control module 3 comprises a closing end 32 connected to an electromagnet 31, and a corresponding adsorption part 33 is arranged corresponding to the closing end 32. The electromagnet 31 is turned on or off to control whether the corresponding closing end 32 is adsorbed close to or not, and the closing end 32 is connected or separated from the corresponding connecting end 34, forming a filament on-off control structure.

[0030] The electromagnet 31 is connected with an elastic recovery part 35.

[0031] The elastic recovery part 35 is composed of a tension spring.

[0032] Compared with the prior art, the utility model can provide different numbers of filaments to supply the ion source corresponding to different ion source densities, without the need of adjusting the current passing through the filament, effectively improving the service life of the filament ion source.

[0033] The above is only some embodiments of the utility model. For ordinary skilled persons in the art, without departing from the creative concept of the utility model, a number of modifications and improvements can be made, which all belong to the protection scope of the utility model.

Claims

1. A quick-change filament ion source, characterized by: The application relates to a filament ion source module, which comprises a loading plate, a plurality of filament ion source modules arranged on the loading plate, and a power supply circuit connected to two ends of each group of filament ion source modules. The filament ion source module is adapted to select one, two, three or all of the filament ion source modules to supply ion source, thereby forming a fast-switching ion source supply structure.

2. The quick-change filament ion source of claim 1, wherein: The filament ion source module comprises a filament protection shell, and a filament arranged in the filament protection shell.

3. The quick-change filament ion source of claim 2, wherein: The filament is a tungsten wire with a diameter of 1 mm.

4. The quick-change filament ion source of claim 3, wherein: The length of the filament is 0.5-1.8 m.

5. The quick-change filament ion source of any one of claims 1-4, wherein: The on-off control module is an on-off switch.

6. A quick-change filament ion source as claimed in any one of claims 1-4, characterized in that: The on-off control module comprises a closing end connected to an electromagnet, and a corresponding adsorption part arranged corresponding to the closing end.

7. The quick-change filament ion source of claim 6, wherein: The electromagnet is turned on or off to control whether the closing end is adsorbed close to the corresponding part, and the closing end is connected to or separated from the corresponding part, thereby forming a filament on-off control structure.

8. The quick-change filament ion source of claim 7, wherein: The electromagnet is connected to an elastic recovery part. The elastic recovery part is composed of a tension spring.

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