Temperature control loading device of scanning electron microscope

Abstract

The utility model discloses a temperature control loading device for a scanning electron microscope, which relates to the technical field of microscopes and comprises a sample chassis, a cooling chamber is fixedly mounted on the sample chassis, a cooling cover is mounted at the top of the cooling chamber in a threaded manner, and an objective table is fixedly mounted on the top surface of the cooling cover. A plurality of air guide holes are uniformly formed in the cooling cover, a temperature sensor is arranged on the objective table, and a temperature control assembly is arranged in the cooling cover. The temperature of the objective table is detected through the temperature sensor and is fed back to a control system of the scanning electron microscope for judgment; if the biological sample is about to exceed the cooling temperature range required by the biological sample, the face gear can be driven to rotate by the driving motor, and the threaded rod can be driven to rotate by the meshing straight gear, so that the baffle can slide along the sliding chute to gradually shield or open the air guide hole, and the cooling temperature is controlled by controlling the size of the air guide hole; the device is suitable for different biological samples.

Description

TECHNICAL FIELD

[0001] The utility model relates to microscope technical field more specifically, the utility model relates to a scanning electron microscope temperature control carrier device. BACKGROUND

[0002] The scanning electron microscope is the equipment for understanding the component distribution and micro image of sample, including sample chamber and vacuum system, wherein, the sample chamber is used to place sample, the vacuum system is through vacuum pump and so on Equipment, the air in sample chamber and electron optical system is extracted, forms high vacuum environment, to guarantee the normal transmission of electron beam and the accurate detection of signal, and for some biological samples, because the heat is produced by the interaction of electron beam and sample, in order to guarantee the accuracy of sample test, need to cool down the sample.

[0003] Such as existing patent (disclose (announcement) number: CN220821466U) discloses a scanning electron microscope's low temperature biological sample platform, fixes the conical block between the inner wall of glass storage cover, then sets up the diaphragm on the top of conical block, so that can store sample on the diaphragm, simultaneously with the fixed cover and external mounting seat butt joint, so that cold gas can be introduced into the inside of fixed cover, and the cold gas flows to the bottom of conical block in the inside of fixed cover, then from the side hole on the flow guide groove flows into the inside of inner cavity, and the cold gas at the edge is discharged to the outside through the exhaust hole, in the process of cold gas flow, the side wall of glass storage cover and conical block are cooled, so that the stored sample is cooled and cooled.

[0004] The above-mentioned device is cooled and cooled to the biological sample by flowing into the inside of inner cavity through the side hole on the flow guide groove, but for different biological samples, the required cooling temperature is different, and the above-mentioned low temperature biological sample platform cannot control the cooling temperature of the sample, so it is difficult to be applicable to the biological samples with different required cooling temperatures. UTILITY MODEL CONTENT

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a scanning electron microscope temperature control carrier device to solve the problem that for different biological samples, the required cooling temperature is different, and the above-mentioned low temperature biological sample platform cannot control the cooling temperature of the sample, so it is difficult to be applicable to the biological samples with different required cooling temperatures.

[0006] To solve the above technical problems, the utility model provides the following technical scheme: a scanning electron microscope temperature control carrier device, including sample base plate, the fixed installation of cooling chamber is installed on the sample base plate, the top of cooling chamber is screw mounted with cooling cover, the top surface of cooling cover is fixedly installed with carrier, a plurality of air guide holes are uniformly arranged on the cooling cover, a temperature sensor is arranged on the carrier, and a temperature control assembly is arranged in the cooling cover.

[0007] The temperature control assembly comprises a driving motor fixedly installed in a cooling cover, a face gear is fixedly connected to an output end of the driving motor, a threaded rod is rotationally connected in the cooling cover, a straight gear is fixedly installed at one end of the threaded rod close to the face gear, the face gear is engaged with the straight gear, a baffle is in threaded transmission with the outer surface of the threaded rod, and a sliding groove is further formed in the cooling cover, and the baffle can slide linearly along the sliding groove.

[0008] Preferably, the air inlet hole, the threaded rod, the straight gear, the baffle and the sliding groove are in one-to-one correspondence, and the diameter of the baffle is greater than the diameter of the air inlet hole.

[0009] Preferably, a plurality of exhaust pipes are uniformly fixedly connected in the circumferential direction of the object table, and the exhaust pipes are arranged in an inverted U-shaped structure, and the height of one end of the exhaust pipe away from the object table is lower than the height of the top surface of the object table.

[0010] Preferably, a cooling cavity is arranged between the cooling cover and the object table, and the air inlet hole, the cooling cavity and the exhaust pipe are sequentially connected.

[0011] Preferably, a lifting assembly is arranged in the cooling chamber, the lifting assembly comprises a tray, the tray can vertically slide up and down along the inner wall of the cooling chamber, a vertical spring is arranged between the bottom surface of the tray and the bottom of the cooling chamber, and the two ends of the spring are fixedly connected with the tray and the cooling chamber, respectively.

[0012] Preferably, the middle part of the spring is arranged in a concave structure for placing the coolant.

[0013] Preferably, a temperature insulation layer is arranged on the outer side of the cooling chamber, the cooling cover and the object table, and anti-skid lines are uniformly distributed on the outer side of the temperature insulation layer.

[0014] Compared with the prior art, the utility model has the advantages that:

[0015] The utility model discloses a temperature sensor detects the temperature of the object table, and feedbacks to the control system of the scanning electron microscope and judges whether the cooling temperature range required by the biological sample is about to be exceeded, if about to be exceeded, the face gear can be driven to rotate through the driving motor, the straight gear is engaged to drive the threaded rod to rotate, so that the baffle can slide along the sliding groove, the air inlet hole is gradually shielded or opened, the size of the air inlet hole is controlled to control the cooling temperature, and different biological samples are applicable.

[0016] The utility model discloses the setting of the exhaust pipe can discharge the cold air generated by the coolant downward, avoids the direct contact of the cold air and the biological sample, and causes the sample to be damaged.

[0017] The utility model discloses when the weight of coolant reduces along with consumption, utilize the elastic potential energy of spring, and the tray of placing coolant is lifted upwards, make it always keep relatively close distance with the object table to maintain the cooling effect of being more stable to a certain extent, ensure that the sample is in the suitable low temperature environment.

[0018] The utility model discloses through the setting of temperature insulation layer, when the staff screws cooling chamber, cooling cover, hand will not be directly contacted with cooling chamber, cooling cover and object table, thereby avoiding the staff hand frostbite caused by low temperature environment, can also reduce the consumption of coolant in cooling chamber simultaneously, can increase friction through the anti -skid line, and the staff is convenient for screwing and opening cooling chamber, cooling cover. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is the main body structure schematic diagram of the utility model;

[0020] Figure 2 It is the utility model Figure 1 Related structure part cutaway schematic diagram;

[0021] Figure 3 It is the temperature control subassembly related structure schematic diagram of the utility model;

[0022] Figure 4 It is the lifting assembly related structure schematic diagram of the utility model.

[0023] REFERENCE NUMERALS

[0024] 1, sample base plate;2, cooling chamber;3, cooling cover;4, object table;5, air guide hole;6, temperature sensor;7, temperature control subassembly;71, drive motor;72, face gear;73, threaded rod;74, straight gear;75, baffle;76, sliding slot;8, exhaust pipe;9, lifting assembly;91, tray;92, spring;10, temperature insulation layer;11, anti -skid line;12, cooling cavity. DETAILED DESCRIPTION

[0025] In order to make the technical problem, technical scheme and advantage that the utility model is going to solve more clear, below will combine the drawing and specific embodiment and carry out the detailed description.

[0026] As the drawing Figure 1 To the drawing Figure 4 The embodiment of the utility model provides a kind of scanning electron microscope temperature control object table device, including sample base plate 1, cooling chamber 2 is fixedly installed on sample base plate 1, the top of cooling chamber 2 is screw mounted with cooling cover 3, the top surface of cooling cover 3 is fixedly installed with object table 4, a plurality of air guide holes 5 are evenly provided on cooling cover 3, temperature sensor 6 is provided on object table 4, cooling cover 3 is provided with temperature control subassembly 7;

[0027] The temperature control assembly 7 comprises a driving motor 71 fixedly installed in the cooling cover 3, an output end of the driving motor 71 is fixedly connected with a face gear 72, a threaded rod 73 is rotationally connected in the cooling cover 3, one end of the threaded rod 73 close to the face gear 72 is fixedly installed with a straight gear 74, the face gear 72 is engaged with the straight gear 74, the outer surface of the threaded rod 73 is threadedly driven with a baffle 75, and the cooling cover 3 is further provided with a sliding groove 76, and the baffle 75 can slide linearly along the sliding groove 76.

[0028] The cooling cover 3 is rotatable to open the top of the cooling chamber 2, and the coolant (such as liquid nitrogen, dry ice, etc.) can be placed in the cooling chamber 2, and the top surface of the object table 4 is a biological sample placement area.

[0029] Specifically, the temperature of the object table 4 is detected by the temperature sensor 6 and fed back to the control system of the scanning electron microscope to determine whether the cooling temperature range required by the biological sample is about to be exceeded. If it is about to be exceeded, the face gear 72 can be driven to rotate by the driving motor 71, the straight gear 74 is engaged to drive the threaded rod 73 to rotate, so that the baffle 75 can slide along the sliding groove 76 to gradually block or open the air guide hole 5. The size of the air guide hole 5 is controlled to control the cooling temperature to adapt to different biological samples. When the air guide hole 5 is large, the cooling capacity of the coolant (such as liquid nitrogen, dry ice, etc.) generated per unit time is large, so that the temperature of the sample on the object table 4 decreases rapidly, and the cooling temperature is low. When the air guide hole 5 is blocked by the baffle 75 and becomes small, the cooling capacity of the coolant released per unit time is small, and the temperature of the sample on the object table 4 decreases slowly, and the final cooling temperature is relatively high.

[0030] Preferably, the air guide hole 5, the threaded rod 73, the straight gear 74, the baffle 75 and the sliding groove 76 are one-to-one corresponding, and the diameter of the baffle 75 is greater than the diameter of the air guide hole 5, so that the baffle 75 can completely block the air guide hole 5.

[0031] Preferably, a plurality of exhaust pipes 8 are uniformly fixedly connected to the object table 4 in the circumferential direction, and the exhaust pipes 8 are arranged in an inverted U-shaped structure, and the height of the end of the exhaust pipe 8 away from the object table 4 is lower than the height of the top surface of the object table 4.

[0032] Specifically, through the above arrangement, the cold air generated by the coolant can be discharged downward to avoid direct contact between the cold air and the biological sample.

[0033] Preferably, a cooling cavity 12 is arranged between the cooling cover 3 and the object table 4, and the cold air can be stored in the cooling cavity 12 for a period of time, so that the cooling temperature of the object table 4 is more uniform, and the air guide hole 5, the cooling cavity 12 and the exhaust pipe 8 are sequentially connected.

[0034] Preferably, the cooling chamber 2 is provided with a lifting assembly 9, the lifting assembly 9 comprises a tray 91, the tray 91 can slide vertically up and down along the inner wall of the cooling chamber 2, and a vertical spring 92 is arranged between the bottom surface of the tray 91 and the bottom of the cooling chamber 2, and the two ends of the spring 92 are fixedly connected with the tray 91 and the cooling chamber 2 respectively.

[0035] Preferably, the middle part of the spring 92 is provided in a concave structure for placing the coolant.

[0036] Specifically, when the weight of the coolant decreases with consumption, the distance between the coolant and the object table 4 will gradually increase, which may cause the cooling effect to decrease, at this time, by using the elastic potential energy of the spring 92, the pressure on the spring 92 is reduced, and the spring 92 gradually recovers the deformation, so as to lift the tray 91 for placing the coolant upward, so that the tray 91 always maintains a relatively close distance with the object table 4, thereby maintaining a relatively stable cooling effect to a certain extent, and ensuring that the sample is in a suitable low-temperature environment.

[0037] Preferably, the outer sides of the cooling chamber 2, the cooling cover 3 and the object table 4 are all provided with a thermal insulation layer 10, and the outer side of the thermal insulation layer 10 is uniformly distributed with anti-skid lines 11, so that when the staff rotates the cooling chamber 2 and the cooling cover 3, the hands are not in direct contact with the cooling chamber 2, the cooling cover 3 and the object table 4, thereby avoiding the staff's hands from being frozen in the low-temperature environment, and the consumption of the coolant in the cooling chamber 2 can also be reduced, and the anti-skid lines 11 can increase the friction, thereby facilitating the staff to rotate and open the cooling chamber 2 and the cooling cover 3.

[0038] The working process of the utility model is as follows:

[0039] In use, the sample is installed on the object table 4, the coolant is placed in the cooling chamber 2, and the cooling temperature range required by the sample is set according to the control system, at this time, the temperature of the object table 4 is detected by the temperature sensor 6 and fed back to the control system of the scanning electron microscope for judgment whether it is about to exceed the cooling temperature range required by the biological sample, if it is about to exceed, the baffle 75 is driven to slide along the sliding groove 76 by the driving motor 71, the air guide hole 5 is gradually blocked or opened, and the size of the air guide hole 5 is controlled to control the cooling temperature, so as to adapt to different biological samples.

[0040] Finally, it should be pointed out that: first of all, in the description of the present application, it should be pointed out that, unless otherwise specified and limited, the terms "installation", "connection", "connection" should be understood broadly, which can be mechanical connection or electrical connection, or the communication between the two elements, or direct connection, "up", "down", "left", "right" and the like are only used to represent the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may change;

[0041] Secondly: the utility model discloses the embodiment in the drawing, only relate to the structure with the embodiment of the present disclosure, other structures can refer to the usual design, under the condition of not conflict, the same embodiment and different embodiments of the utility model can be combined with each other.

[0042] Finally: the above only for the preferred embodiment of the utility model has, and does not for limiting the utility model, any modification, equivalent replacement, improvement etc. that is made within the spirit and principle of the utility model, should be contained in the protection scope of the utility model.

Claims

1. A temperature controlled sample holder for a scanning electron microscope comprising a sample platen (1) characterised in that, The sample tray (1) is fixedly installed with a cooling chamber (2), the top of the cooling chamber (2) is threadedly installed with a cooling cover (3), the top surface of the cooling cover (3) is fixedly installed with a sample stage (4), a plurality of air guide holes (5) are uniformly formed in the cooling cover (3), and a temperature sensor (6) is arranged on the sample stage (4); and a temperature control assembly (7) is arranged in the cooling cover (3). The temperature control assembly (7) comprises a driving motor (71) fixedly installed in the cooling cover (3), the output end of the driving motor (71) is fixedly connected with a face gear (72), a threaded rod (73) is rotatably connected in the cooling cover (3), one end of the threaded rod (73) close to the face gear (72) is fixedly installed with a spur gear (74), the face gear (72) is engaged with the spur gear (74), and the outer surface of the threaded rod (73) is threadedly driven with a baffle (75); and a sliding groove (76) is further formed in the cooling cover (3), and the baffle (75) can slide linearly along the sliding groove (76).

2. The scanning electron microscope temperature-controlled sample holder of claim 1, wherein, The air guide hole (5), the threaded rod (73), the spur gear (74), the baffle (75) and the sliding groove (76) are in one-to-one correspondence, and the diameter of the baffle (75) is greater than the diameter of the air guide hole (5).

3. The scanning electron microscope temperature-controlled sample holder of claim 1, wherein, A plurality of exhaust pipes (8) are fixedly and uniformly communicated in the circumferential direction of the sample stage (4), and the exhaust pipes (8) are arranged in an inverted U-shaped structure, and the height of one end of the exhaust pipes (8) away from the sample stage (4) is lower than the height of the top surface of the sample stage (4).

4. The scanning electron microscope temperature-controlled sample holder of claim 3, wherein, A cooling cavity (12) is arranged between the cooling cover (3) and the sample stage (4), and the air guide hole (5), the cooling cavity (12) and the exhaust pipe (8) are sequentially communicated.

5. The scanning electron microscope temperature-controlled sample holder of claim 1, wherein, A lifting assembly (9) is arranged in the cooling chamber (2), the lifting assembly (9) comprises a tray (91), the tray (91) can vertically slide up and down along the inner wall of the cooling chamber (2), a vertical spring (92) is arranged between the bottom surface of the tray (91) and the bottom of the cooling chamber (2), and the two ends of the spring (92) are fixedly connected with the tray (91) and the cooling chamber (2) respectively.

6. The scanning electron microscope temperature-controlled sample holder of claim 5, wherein, The middle part of the spring (92) is arranged in a concave structure for placing a coolant.

7. The scanning electron microscope temperature-controlled sample holder of claim 1, wherein, The outer sides of the cooling chamber (2), the cooling cover (3) and the sample stage (4) are all provided with a temperature insulation layer (10), and the outer side of the temperature insulation layer (10) is uniformly distributed with anti-skid lines (11).

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