Piezoelectric phase shifter

Abstract

The utility model relates to the technical field of phase shifters, and discloses a piezoelectric phase shifter, which comprises a table top, a table body, piezoelectric ceramics and a flexible hinge. The table body is arranged below the table top. A cavity is arranged in the table body, and the piezoelectric ceramic is arranged in the cavity. The fixed end of the piezoelectric ceramic is connected with the table body, and the movable end is connected with the table top. The flexible hinges are arranged on the two sides of the piezoelectric ceramics. The two ends of the flexible hinge are connected with the table top and the table body respectively. The piezoelectric ceramics and the flexible hinges on the two sides form a driving unit, and at least three driving units are evenly distributed around the center of the table top and used for jointly driving the table top to linearly move along the Z axis. According to the utility model, a direct-driven structure of multiple groups of piezoelectric ceramics is adopted, and the structural design of the flexible hinge and the pre-tightening assembly is matched, so that the phase shifter has the advantages of large output, high precision and good reliability, nanoscale stepping phase shifting is realized, and the precision of optical detection is remarkably improved. Meanwhile, the control circuit board is integrated into the table body, the overall structure is compact and simple, and space is saved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of phase shifter, more particularly to piezoelectric phase shifter. BACKGROUND

[0002] The phase shifter is designed for optical detection phase shift application, and is also a very important component in the phase shift interferometer. The phase shift interference technology is widely used in precise optical measurement and calibration and quality control of interferometer. The phase shift interference technology introduces a known phase shift to produce interference images with phase difference. By analyzing these interference images, the performance parameters of optical elements or systems, such as surface shape, displacement, refractive index, etc. The function of the phase shifter is to produce micron-level accurate movement to produce accurate phase difference of interference image. The measurement error of the phase shift interferometer depends largely on the error of the phase shift, that is, the movement error of the phase shifter. The existing phase shifter has the following problems: 1. Low repeatability, poor reliability; 2. Small output, installation limited, poor versatility; 3. The controller is separated from the table body, the structure is complex, and the space occupation is large.

[0003] Based on the above, the problems to be solved at present are: to provide a piezoelectric phase shifter with high precision, good reliability, large output and compact structure. SUMMARY

[0004] The utility model discloses a piezoelectric phase shifter, aims at solving the problem of low repeatability, poor reliability, small output and complex structure of the piezoelectric phase shifter in the prior art.

[0005] The utility model discloses a piezoelectric phase shifter, aims at solving the problem of low repeatability, poor reliability, small output and complex structure of the piezoelectric phase shifter in the prior art.

[0006] The table top is arranged on the table body, and the piezoelectric ceramic is arranged in the cavity.

[0007] The table body is arranged below the table top, and the cavity is arranged in the table body.

[0008] The piezoelectric ceramic is arranged in the cavity, and the fixed end of the piezoelectric ceramic is connected with the table body, and the moving end of the piezoelectric ceramic is connected with the table top.

[0009] The flexible hinge is arranged in the cavity and on both sides of the piezoelectric ceramic, and the two ends of the flexible hinge are connected with the table top and the table body respectively, and the flexible hinge is arranged between the table top and the table body.

[0010] The piezoelectric ceramic and the flexible hinge on both sides are a driving unit, and at least three driving units are uniformly distributed around the center of the table top, and are used for driving the table top to move linearly along the Z axis; the Z axis is perpendicular to the table top.

[0011] Further, the top of the piezoelectric ceramic is provided with a gasket, the gasket is provided with a ball above, the ball is provided with a top wire above, the ball is on the top wire below, and the top wire is fixed on the table top.

[0012] Further, the table top and the middle part of the table body are correspondingly provided with a through hole with a size for light transmission.

[0013] Further, the through hole is circular or rectangular.

[0014] Further, the plurality of driving units are arranged in a circular array or a rectangular array.

[0015] Further, a pre-tightening assembly is further arranged between the table top and the table body, the pre-tightening assembly comprises a first bolt and a disc spring, and the disc spring is arranged between the top of the first bolt and the table top, and the lower part of the first bolt is connected with the table body through screw threads.

[0016] Further, at least three pre-tightening assemblies are arranged, and the plurality of pre-tightening assemblies are uniformly distributed around the center of the table top.

[0017] Further, the number of the pre-tightening assemblies is the same as that of the driving units, and the pre-tightening assemblies and the driving units are arranged at intervals.

[0018] Further, a control circuit board is further arranged in the cavity, the control circuit board is connected with a USB plug, the USB plug extends to the outside of the table body, and is used for being connected with an external power supply.

[0019] The piezoelectric phase shifter has the following beneficial effects.

[0020] First, the piezoelectric phase shifter adopts a direct drive structure of multiple piezoelectric ceramics, ensures high output, high resolution, fast response speed and high reliability, and the mechanical structure of the flexible hinge and the pre-tightening assembly structure also protects the piezoelectric ceramic and ensures the service life.

[0021] Second, the piezoelectric phase shifter has reasonable, compact and stable structure, can be horizontally installed, vertically installed and invertedly installed, is suitable for different application scenes, and has high universality.

[0022] Third, the piezoelectric phase shifter integrates the control circuit board into the table body, is more simple compared with an external controller, and greatly saves space. DRAWINGS

[0023] Figure 1 The utility model provides a piezoelectric phase shifter's three -dimensional structure schematic diagram;

[0024] Figure 2 The utility model provides a piezoelectric phase shifter's explosion map;

[0025] Figure 3 The utility model provides a piezoelectric phase shifter's plan view;

[0026] Figure 4 The utility model provides Figure 3 A-A direction cut structure schematic diagram of the of the utility model provides;

[0027] Figure 5 The utility model provides Figure 3 B-B direction cut structure schematic diagram of the of the utility model provides;

[0028] Figure 6 The utility model provides drive unit's three -dimensional structure schematic diagram;

[0029] Figure 7 The utility model provides pre -tightening subassembly's front view;

[0030] In the drawing, 1 is a table, 2 is a table body, 21 is a cavity, 3 is a piezoelectric ceramic, 31 is a gasket, 32 is a ball, 33 is a top screw, 4 is a flexible hinge, 5 is a drive unit, 6 is a through hole, 7 is a pre -tightening subassembly, 71 is a first bolt, 72 is a disc spring, 8 is a control circuit board, 9 is a USB plug. DETAILED DESCRIPTION

[0031] In order to make the utility model's purpose, technical scheme and advantage more clearly clear, following combining with the drawing and example, this utility model carries out further detailed description.Should understand, the specific example described here is only used to explain the utility model, and is not used to limit the utility model.

[0032] The implementation of the utility model is described in detail below in conjunction with specific examples.

[0033] The same or similar reference numerals in the drawings of the embodiment correspond to the same or similar parts;In the description of the utility model, it should be understood that if the orientation or position relationship indicated by the terms "upper", "lower", "left", "right" etc. is based on the orientation or position relationship shown in the drawing, it is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, therefore the terms describing the position relationship in the drawing are only used for example, and can not be understood as limiting the patent, for ordinary skilled in the art, the specific meaning of the above terms can be understood according to the specific situation.

[0034] Referring to Figures 1-7 The preferred embodiment provided by the utility model.

[0035] The piezoelectric phase shifter comprises a table top 1, a table body 2, a piezoelectric ceramic 3 and a flexible hinge 4, referring to Figures 1-2 The table top 1 is a moving surface. The table top 1 can be circular or polygonal such as rectangular. The table body 2 is arranged below the table top 1, and the size of the table body 2 matches the size of the table top 1. The table body 2 and the table top 1 are arranged correspondingly. The table body 2 is internally provided with a cavity 21, i.e. the cavity 21 is arranged between the table top 1 and the table body 2, and the cavity 21 is used for accommodating the piezoelectric ceramic 3 and the flexible hinge 4. The middle part of the table top 1 and the table body 2 is correspondingly provided with a through hole 6 of a size comparable to that of the through hole 6 for light transmission. The through hole 6 can be circular or rectangular.

[0036] The piezoelectric ceramic 3 comprises a fixed end and a moving end. The fixed end of the piezoelectric ceramic 3 is connected with the table body 2, and the moving end of the piezoelectric ceramic 3 is connected with the table top 1, referring to Figures 3-5 . According to the principle of inverse piezoelectric effect, the piezoelectric ceramic 3 will push the table top 1 to move linearly after being electrified. The flexible hinge 4 is arranged in the cavity 21 and on both sides of the piezoelectric ceramic 3. The two ends of the flexible hinge 4 are fixedly connected with the table top 1 and the table body 2 respectively. The flexible hinge 4 is provided with a pre-tightening force between the table top 1 and the table body 2. The flexible hinge 4 can be fixedly connected with the table top 1 and the table body 2 through bolts. The two ends of the flexible hinge 4, the table top 1 and the table body 2 are respectively provided with threaded holes. The bolt penetrates the threaded hole of one end of the flexible hinge 4 and the threaded hole of the table top 1 to fix the flexible hinge 4 with the table top 1. The bolt penetrates the threaded hole of the other end of the flexible hinge 4 and the threaded hole of the table body 2 to fix the flexible hinge 4 with the table body 2. The flexible hinge 4 can be elastically deformed and reversible. The table top 1 can realize stable and high-precision nanometer-level movement under the pushing of the piezoelectric ceramic 3 and the cooperation of the flexible hinge 4.

[0037] One piezoelectric ceramic 3 and the flexible hinges 4 on both sides form one driving unit 5, referring to Figure 6 . The utility model is provided with at least three driving units 5. The three driving units 5 are uniformly distributed around the center of the table top 1 and jointly drive the table top 1 to move linearly along the Z-axis, i.e. to move close to or away from the table body 2. The Z-axis is perpendicular to the plane where the table top 1 is located. Preferably, the driving units 5 are arranged in a circular array or a rectangular array.

[0038] The fixed end of the piezoelectric ceramic 3 can be fixedly connected with the table body 2 through a bolt. The moving end of the piezoelectric ceramic 3 can be connected with the table top 1 through a gasket 31, a ball 32 and a top screw 33. Specifically, the top of the piezoelectric ceramic 3 is provided with the gasket 31, which can effectively protect the piezoelectric ceramic 3. The gasket 31 can be a tungsten steel sheet. The ball 32 is arranged above the gasket 31, the top screw 33 is arranged above the ball 32, and the ball 32 is arranged below the top screw 33. The top screw 33 is fixed to the table top 1.

[0039] A pre-tightening assembly 7 is also provided between the tabletop 1 and the platform 2. The pre-tightening assembly 7 includes a first bolt 71 and a disc spring 72, as shown in the figure. Figure 7 The number of disc springs 72 can be set to 1, 2, 3, etc., depending on the stroke requirements. Several disc springs 72 are abutted between the top of the first bolt 71 and the platform 1. The lower part of the first bolt 71 passes through the platform 1 and is fixedly connected to the platform body 2 by threads. At least 3 preload components 7 are provided, and the preload components 7 are evenly distributed around the center of the platform 1. Preferably, the number of preload components 7 is the same as that of the drive unit 5, and the preload components 7 and drive unit 5 are spaced apart and evenly distributed. The evenly distributed preload components 7 and drive unit 5 make the entire structure compact and stable, with low motion coupling, enabling high-precision and high-reliability linear motion in the Z-axis direction. The piezoelectric ceramic 3 adopts a direct-drive method, resulting in fast response speed.

[0040] A control circuit board 8 is also housed within the cavity 21. The control circuit board 8 is connected to a USB plug 9. The USB plug 9 extends to the outside of the platform 2 for connection to an external power source. This invention integrates the control circuit board 8 into the platform 2, which is simpler and saves considerable space compared to an external controller.

[0041] To effectively address the impact of nonlinearity, creep characteristics, and hysteresis characteristics of piezoelectric ceramic 3 on phase shift accuracy, this invention incorporates a strain sensor on the surface of the piezoelectric ceramic 3. A closed-loop feedback control based on voltage and displacement is employed to achieve adaptive micron-level drive positioning control, significantly improving nonlinearity, reducing external influences and interference, and further enhancing the measurement accuracy of phase shift.

[0042] This utility model has a reasonable, compact, and stable structure, and can be installed horizontally, vertically, or upside down, making it suitable for various application scenarios and highly versatile. For horizontal installation, the platform 1 (movable surface) is parallel to the horizontal plane and faces upwards. For upside-down horizontal installation, the platform 1 (movable surface) is parallel to the horizontal plane and faces downwards. For vertical installation, the platform 1 (movable surface) is parallel to the direction of gravity. This utility model has high output power and strong versatility.

[0043] This invention is not intended to limit the scope of this invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention shall be included within the protection scope of this invention.

Claims

1. A piezoelectric phase shifter, characterized by, The utility model relates to a kind of piezoelectric ceramic driving table, including: Tabletop (1); Table body (2) is located below the tabletop (1), and the cavity (21) is arranged in the table body (2); Piezoelectric ceramic (3) is arranged in the cavity (21), and the fixed end of the piezoelectric ceramic (3) is connected with the table body (2), and the moving end of the piezoelectric ceramic (3) is connected with the tabletop (1); Flexible hinge (4) is arranged in the cavity (21), both sides of the piezoelectric ceramic (3), both ends of the flexible hinge (4) are connected with the tabletop (1) and the table body (2) respectively, for pre-tightening force between the tabletop (1) and the table body (2); The piezoelectric ceramic (3) and the flexible hinge (4) on both sides are 1 drive unit (5), and at least three drive units (5) are evenly distributed around the center of the tabletop (1), for jointly driving the tabletop (1) to move linearly along the Z axis;The Z axis is perpendicular to the tabletop (1).

2. The piezoelectric phase shifter of claim 1, wherein, The top of the piezoelectric ceramic (3) is provided with a gasket (31), and the gasket (31) is provided with a ball (32) above. The ball (32) is provided with a top wire (33) above, and the ball (32) is on the top of the top wire (33). The top wire (33) is fixed on the tabletop (1).

3. The piezoelectric phase shifter of claim 1, wherein, The tabletop (1) and the middle part of the table body (2) are provided with a through hole (6) corresponding in size, for light transmission.

4. The piezoelectric phase shifter of claim 3, wherein, The through hole (6) is circular or rectangular.

5. The piezoelectric phase shifter of claim 1, wherein, Several drive units (5) are circular array or rectangular array.

6. The piezoelectric phase shifter of claim 1, wherein, A pre-tightening assembly (7) is further arranged between the tabletop (1) and the table body (2), the pre-tightening assembly (7) includes a first bolt (71) and a disc spring (72). The top of the first bolt (71) is provided with a disc spring (72) between the tabletop (1), and the lower part of the first bolt (71) penetrates the tabletop (1) and is connected with the table body (2) by screw thread.

7. The piezoelectric phase shifter of claim 6, wherein, At least three pre-tightening assemblies (7) are provided, and several pre-tightening assemblies (7) are evenly distributed around the center of the tabletop (1).

8. The piezoelectric phase shifter of claim 7, wherein, The number of the pre-tightening assembly (7) is the same as that of the drive unit (5), and the pre-tightening assembly (7) and the drive unit (5) are spaced and arranged uniformly.

9. The piezoelectric phase shifter of claim 1, wherein, A control circuit board (8) is further arranged in the cavity (21), and the control circuit board (8) is connected with a USB plug (9), which extends to the outside of the table body (2), for connecting with external power supply.

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