Electrostatic elimination device for substrate conveying and substrate conveying device

Abstract

When a substrate is conveyed along a first direction, first conductive rollers corresponding to a plurality of first conductive roller assemblies are in contact with the back surface of the substrate, and second conductive rollers corresponding to at least part of second roller assemblies are in contact with the front surface of the substrate; and the projection of each second conductive roller in contact with the substrate in the vertical direction is overlapped with one of the plurality of first conductive rollers, so that accumulated charges on the front surface and the back surface of the substrate can be effectively released, the pattern design of electronic elements on the front surface of the substrate is not influenced, and bad products are avoided.

Description

Technical Field

[0001] This utility model relates to the field of substrate conveying, and in particular to an electrostatic elimination device and a substrate conveying device for substrate conveying. Background Technology

[0002] Micro-LED (Micro-Light-Emitting Diode) displays have become the most promising next-generation display technology due to their advantages such as independent pixel control, self-illumination, high brightness, wide color gamut, stable material properties, and long lifespan. Micro-LED displays involve miniaturizing existing LEDs to below 100μm, making the LED size approximately 1% of the current LED size. Then, through mass transfer technology, micron-sized R, G, and B color Micro-LEDs are transferred onto a driving substrate, thus forming Micro-LED displays of various sizes. During the manufacturing process of the driving substrate, taking a substrate as an example, static electricity is inevitably generated due to contact and friction between the substrate and the transport mechanism. This static electricity accumulates on the substrate over a long period. During subsequent electrical testing of the driving substrate, the charge on the front and back sides cannot be effectively released, causing malfunctions in the TFT elements on the driving substrate, resulting in product defects in the Micro-LED display, such as uneven brightness.

[0003] To eliminate static electricity on the substrate, electrostatic ion bars or ion fans can be installed on the substrate conveying mechanism to neutralize the accumulated static electricity. These electrostatic ion bars or ion fans are typically located on one side of the glass panel. However, when the substrate is on the conveying mechanism, static electricity on the side of the glass panel furthest from the electrostatic ion bars or ion fans cannot be eliminated, resulting in poor overall static electricity elimination for the substrate.

[0004] Currently, the rollers used to transport the substrate can also be configured as conductive rollers. During substrate transport, the conductive rollers are evenly supported on and in contact with the back of the substrate. The conductive rollers, the shafts connecting the conductive rollers, and the frame for fixing the shafts are grounded to form a static discharge path, which can eliminate the static electricity accumulated on the back of the substrate. However, the charge release path on the front of the substrate is relatively long and cannot be effectively released, which can still cause TFT element malfunctions.

[0005] Therefore, how to design an electrostatic discharge device that can effectively release the accumulated charge on both sides of the driving substrate without affecting the electronic component pattern design on the front side of the driving substrate has become a technical problem that urgently needs to be solved in this field. Utility Model Content

[0006] The purpose of this invention is to provide an electrostatic elimination device and a substrate conveying device for substrate conveying, which can effectively release the accumulated charge on both sides of the driving substrate without affecting the electronic component pattern design on the front side of the driving substrate, thus avoiding product defects.

[0007] To achieve the above objectives, this utility model provides an electrostatic elimination device for substrate transport. The substrate is transported along a first direction. The electrostatic elimination device includes a first electrostatic elimination unit and a second electrostatic elimination unit. The first electrostatic elimination unit includes a rotating shaft extending along a second direction and a plurality of first conductive roller assemblies disposed on the rotating shaft along the second direction. Each first conductive roller assembly includes at least one first conductive roller. The second direction intersects the first direction, and each first conductive roller is electrically connected to the rotating shaft, which is grounded. The second electrostatic elimination unit is located above the first electrostatic elimination unit. The second electrostatic elimination unit includes a guide rod extending along the second direction and a guide rod extending along the second direction. A plurality of second roller assemblies are disposed on the guide rod. Each second roller assembly includes a bracket, a second conductive roller mounted on the bracket, and a linkage component. The linkage component is connected to the bracket and is movably disposed on the guide rod. The second conductive roller, the bracket, and the guide rod are electrically connected, and the guide rod is grounded. When the substrate is conveyed along the first direction, the first conductive rollers corresponding to the plurality of first conductive roller assemblies contact the back side of the substrate, and at least some of the second conductive rollers corresponding to the second roller assemblies contact the front side of the substrate. The projection of each second conductive roller in contact with the substrate in the vertical direction overlaps with one of the plurality of first conductive rollers.

[0008] As an optional technical solution, each second roller assembly has two second conductive rollers installed on its corresponding bracket along the first direction, and the two second conductive rollers, the bracket, and the guide rod are electrically connected.

[0009] As an optional technical solution, the first static elimination unit includes a plurality of rotating shafts arranged along the first direction, and each rotating shaft is provided with a plurality of first conductive roller assemblies.

[0010] As an optional technical solution, the linkage component includes a first driving member, which is used to drive the linkage component to slide along the guide rod, thereby driving the second conductive roller corresponding to the linkage component to move horizontally along the second direction.

[0011] As an optional technical solution, the second static elimination unit also includes a PLC control component that is communicatively connected to the first drive unit.

[0012] As an optional technical solution, the linkage component further includes a lifting component, the bracket is connected to the lifting component, and the lifting component is used to drive the corresponding second conductive roller to move up and down in the vertical direction.

[0013] As an optional technical solution, when one of the plurality of second roller assemblies is in the first position, the second conductive roller corresponding to one of the plurality of second roller assemblies is in contact with the front surface of the substrate; when the lifting assembly drives one of the plurality of second roller assemblies to move upward in the vertical direction to the second position, the second conductive roller corresponding to one of the plurality of second roller assemblies is not in contact with the front surface of the substrate.

[0014] As an optional technical solution, the lifting assembly includes a track, a slider, and a second driving member. The track is arranged vertically in the linkage assembly. The bracket is connected to the slider, and the slider is slidably arranged in the track. The second driving member is used to drive the slider to slide along the track, thereby driving the second conductive roller corresponding to the slider to move up and down vertically.

[0015] As an optional technical solution, each first roller assembly includes a first bracket, a first conductive roller mounted on the first bracket, and a first linkage component. The first linkage component is connected to the first bracket and is movably disposed on the rotating shaft. The first conductive roller, the first bracket, and the rotating shaft are electrically connected.

[0016] This utility model also provides a substrate conveying device, which includes the above-mentioned static electricity elimination device for substrate conveying.

[0017] The present invention relates to an electrostatic elimination device and a substrate conveying device for substrate conveying, which can effectively release the accumulated charge on both sides of the driving substrate without affecting the electronic component pattern design on the front side of the driving substrate, thus avoiding product defects.

[0018] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Attached Figure Description

[0019] Figure 1 This is a partial cross-sectional view of the front of the static electricity elimination device of this utility model;

[0020] Figure 2 This is a partial cross-sectional view of the side of the static electricity elimination device of this utility model;

[0021] Figure 3 This is a partial top view of the static electricity elimination device of this utility model. Detailed Implementation

[0022] To provide a better understanding of the purpose, structure, features and functions of this utility model, detailed descriptions are provided below with reference to the embodiments.

[0023] Please refer to Figure 1 and Figure 2 , Figure 1 This is a partial cross-sectional view of the front of the static electricity elimination device of this utility model; Figure 2 This is a partial cross-sectional view of the side of the static electricity elimination device of this utility model. Figure 1 and Figure 2 As shown, this utility model provides an electrostatic discharge device for substrate transport. The substrate 30 is transported along a first direction F1. In actual operation, the substrate 30 is, for example, a driving substrate for a Micro-LED (Micro-Light-Emitting Diode) display. The electrostatic discharge device includes a first electrostatic discharge unit 10 and a second electrostatic discharge unit 20. The first electrostatic discharge unit 10 includes a rotating shaft 11 extending along a second direction F2 and a plurality of first conductive roller assemblies 12 disposed (or arranged) on the rotating shaft 11 along the second direction F2. Each first conductive roller assembly 12 includes at least one first conductive roller 13. The second direction F2 intersects the first direction F1. In this embodiment, the second direction F2 is perpendicular to the first direction F1, and each first conductive roller 13 is electrically connected to the rotating shaft 11. The rotating shaft 11 is grounded to form an electrostatic discharge path. When the substrate 30 is transported along the first direction F1, the plurality of first conductive rollers 13 can effectively release the accumulated charge on the back side of the substrate 30 while transporting the substrate 30.

[0024] The second static electricity elimination unit 20 is located above the first static electricity elimination unit 10. The second static electricity elimination unit 20 includes a guide rod 21 extending along the second direction F2 and a plurality of second roller assemblies 22 disposed on the guide rod 21 along the second direction F2. Each second roller assembly 22 includes a bracket 23, a second conductive roller 24 mounted on the bracket 23, and a linkage assembly 25. The bracket 23 is assembled on the linkage assembly 25. Specifically, the second conductive roller 24 is mounted on one end of the bracket 23, and the other end of the bracket 23 is assembled on the linkage assembly 25. The linkage assembly 25 is movably disposed on the guide rod 21, and the second conductive roller 24, the bracket 23, and the guide rod 21 are electrically connected. The guide rod 21 is grounded to form a static electricity discharge path. When the substrate 30 is transported along the first direction F1, the accumulated charge on the front side of the substrate 30 can be effectively released through the plurality of second conductive rollers 23, etc.

[0025] When the substrate 30 is conveyed along the first direction F1, the first conductive rollers 13 corresponding to the plurality of first conductive roller assemblies 12 contact the back side of the substrate 30. Typically, the plurality of first conductive rollers 13 are evenly distributed on the back side of the substrate 30. At least some of the second conductive rollers 24 corresponding to the second roller assemblies 22 contact the front side of the substrate 30, and the vertical projection of each second conductive roller 24 in contact with the substrate 30 overlaps with one of the plurality of first conductive rollers 13, thus avoiding shearing forces that could damage the substrate 30. The electrostatic discharge device for substrate conveying of this invention, by respectively setting a first electrostatic discharge unit 10 and a second electrostatic discharge unit 20, can effectively release the accumulated charge at various positions on both sides of the substrate 30. Simultaneously, by setting a linkage component 25 corresponding to the second conductive roller 24, the horizontal position of the second conductive roller 24 can be adjusted to avoid the electronic component pattern design on the front side of the substrate 30, preventing damage to the electronic component pattern on the front side of the substrate 30 during conveying and thus avoiding product defects.

[0026] In practice, the array distribution of tiny electronic components on driving substrates of different sizes or types often varies. Please refer to [reference needed]. Figure 3 , Figure 3 This is a partial top view of the electrostatic elimination device of this invention. The front side of the substrate 30 (usually a large plate) is arrayed with multiple electronic components 31. After the substrate 30 is manufactured, it can be split into multiple independent driving substrates via a cutting process. Each driving substrate has one of the aforementioned electronic components 31, and each electronic component 31 includes an array of pixel circuits, etc. There are gaps between adjacent electronic components 31. In this invention, by moving the linkage component 25 along the guide rod 21, the position of the corresponding second conductive roller 24 in contact with the front side of the substrate 30 can be adjusted, so that the second conductive roller 24 moves to a position corresponding to the gap on the front side of the substrate 30, avoiding the second conductive roller 24 affecting the electronic components 31 on the front side of the substrate 30, thereby improving product yield. In this embodiment, at least three second roller assemblies 22 are provided on the guide rod 21 (… Figure 3 Taking three second roller assemblies 22 as an example (but not limited to this), and distributed dispersedly in the middle part and both sides of the substrate 30, the release path of accumulated charge at different positions on the front of the substrate 30 can be shortened, thereby improving the overall static elimination effect of the substrate 30.

[0027] In this embodiment, reference continues to be made to Figure 1Each second roller assembly 22 has two second conductive rollers 24 mounted on its corresponding bracket 23 along the first direction F1, and the two second conductive rollers 24, the bracket 23, and the guide rod 21 are electrically connected. By placing two symmetrical second conductive rollers 24 at both ends of the bracket 23, the stability of the second roller assembly 24 structure and its electrostatic elimination effect on the front side of the substrate 30 can be further improved.

[0028] In this embodiment, the first static elimination unit 10 includes a plurality of rotating shafts 11 arranged along a first direction F1. Each rotating shaft 11 is provided with a plurality of first roller assemblies 12, thereby increasing the contact area between the first conductive rollers 13 and the back surface of the substrate 30, thus further optimizing the static elimination effect. In actual operation, the plurality of first conductive rollers 13 are equally spaced on the rotating shafts 11, and the cross-section of the first conductive rollers 13 on the rotating shafts 11 forms a support surface for supporting the substrate 30. The first conductive rollers 13 are fixedly mounted on the corresponding rotating shafts 12, and there is no relative movement between the first conductive rollers 13 and the rotating shafts 11. For example, mounting holes can be provided on the first conductive rollers 13, and the first conductive rollers 13 are sleeved on the rotating shafts 12 through the mounting holes.

[0029] In one embodiment, the first conductive roller 13 and the second conductive roller 24 can be rollers made of metal materials, such as copper or aluminum. The rotating shaft 11, guide rod 21, and bracket 23 can all be made of stainless steel. In another embodiment, the first conductive roller 13 and the second conductive roller 24 in this invention can be conductive silicone rubber rollers, which, while discharging the accumulated charge on the substrate 30, make flexible contact with the front and back surfaces of the substrate 30 to avoid damaging the substrate 30.

[0030] In one embodiment, the linkage component 25 includes a first driving member (not shown) for driving the linkage component 25 to slide along the guide rod 21, thereby driving the second conductive roller 24 corresponding to the linkage component 25 to move horizontally in the second direction to the target position (avoiding the position of the electronic component 31 on the substrate 30).

[0031] In one embodiment, the linkage component 25 further includes a lifting component 26, with a bracket 23 connected to the lifting component 26. The lifting component 26 drives the corresponding second conductive roller 24 to move up and down vertically. When one of the plurality of second roller components 22 is in a first position, the second conductive roller 24 corresponding to one of the plurality of second roller components 22 is in contact with the front surface of the substrate 30. When the lifting component 26 drives one of the plurality of second roller components 22 to move vertically upward to a second position, the second conductive roller 24 corresponding to one of the plurality of second roller components 22 is not in contact with the front surface of the substrate 30. The electrostatic elimination device of this invention can control whether the second conductive roller 24 is in contact with the front surface of the substrate 30 by using the lifting component 26, thereby flexibly adjusting the number of second conductive rollers 24 in contact with the front surface of the substrate 30. This ensures the electrostatic dissipation effect while avoiding affecting the electronic component pattern design on the front surface of the substrate 30.

[0032] In one embodiment, the lifting assembly 26 includes a track, a slider, and a second driving member (not shown). The track is arranged vertically on the linkage assembly 25. The bracket 23 is connected to the slider, and the slider is slidably arranged in the track. The second driving member is used to drive the slider to slide along the track, thereby driving the second conductive roller 24 corresponding to the slider to move up and down vertically.

[0033] In one embodiment, the second electrostatic elimination unit 20 further includes a PLC control component communicatively connected to both the first and second driving components. The PLC control component sends a first control signal to the first driving component, which then controls the moving speed and path of the linkage component 25 according to the first control signal. The PLC control component also sends a second control signal to the second driving component, which then controls the moving speed and path of the slider according to the second control signal. The PLC control component enables precise control over whether the second conductive roller 24 contacts the front surface of the substrate 30 and the contact position, saving manpower and improving efficiency.

[0034] In another embodiment, each first roller assembly may include a first bracket, a first conductive roller mounted on the first bracket, and a first linkage component. The first linkage component is connected to the first bracket and is movably disposed on a rotating shaft. The first conductive roller, the first bracket, and the rotating shaft are electrically connected. That is, compared with the electrostatic elimination device of the aforementioned embodiments, the structure of the first electrostatic elimination unit in this embodiment is similar to the structure of the second electrostatic elimination unit. When the substrate 30 is conveyed along the first direction F1, the first linkage component corresponding to the first conductive roller and the linkage component corresponding to the second conductive roller cause the projections of the first and second conductive rollers on both sides of the substrate to overlap in the vertical direction and simultaneously contact the substrate, thereby avoiding shearing force that could damage the substrate.

[0035] This utility model also provides a substrate conveying device, which includes the above-mentioned static electricity elimination device for substrate conveying.

[0036] The present invention relates to an electrostatic elimination device and a substrate conveying device for substrate conveying, which can effectively release the accumulated charge on both sides of the driving substrate without affecting the electronic component pattern design on the front side of the driving substrate, thus avoiding product defects.

[0037] Of course, there may be other embodiments of this utility model. Without departing from the spirit and essence of this utility model, those skilled in the art can make various corresponding changes and modifications based on this utility model, but these corresponding changes and modifications should all fall within the protection scope of the appended claims of this utility model.

Claims

1. An electrostatic elimination device for transporting a substrate, wherein the substrate is transported along a first direction, characterized in that, The static electricity elimination device includes: A first static electricity elimination unit, comprising a rotating shaft extending along a second direction and a plurality of first conductive roller assemblies disposed on the rotating shaft along the second direction, each first conductive roller assembly comprising at least one first conductive roller, the second direction intersecting the first direction, and each first conductive roller being electrically connected to the rotating shaft, the rotating shaft being grounded; and The second static electricity elimination unit is located above the first static electricity elimination unit. The second static electricity elimination unit includes a guide rod extending along the second direction and a plurality of second roller assemblies disposed on the guide rod along the second direction. Each second roller assembly includes a bracket, a second conductive roller mounted on the bracket, and a linkage component. The linkage component is connected to the bracket and is movably disposed on the guide rod. The second conductive roller, the bracket, and the guide rod are electrically connected. The guide rod is grounded. When the substrate is conveyed along the first direction, the first conductive rollers corresponding to the plurality of first conductive roller assemblies contact the back side of the substrate, at least some of the second conductive rollers corresponding to the second roller assemblies contact the front side of the substrate, and the projection of each second conductive roller in contact with the substrate in the vertical direction overlaps with one of the plurality of first conductive rollers.

2. The static electricity elimination device as described in claim 1, characterized in that, Each second roller assembly has two second conductive rollers mounted on its corresponding bracket, which are arranged along the first direction, and the two second conductive rollers, the bracket, and the guide rod are electrically connected.

3. The static electricity elimination device as described in claim 1, characterized in that, The first static elimination unit includes a plurality of rotating shafts arranged along the first direction, and each rotating shaft is provided with a plurality of first conductive roller assemblies.

4. The static electricity elimination device as described in claim 1, characterized in that, The linkage component includes a first driving member, which drives the linkage component to slide along the guide rod, thereby causing a second conductive roller corresponding to the linkage component to move horizontally in the second direction.

5. The static electricity elimination device as described in claim 4, characterized in that, The second static electricity elimination unit also includes a PLC control component that is communicatively connected to the first drive unit.

6. The static electricity elimination device as described in claim 1, characterized in that, The linkage assembly also includes a lifting assembly, the bracket is connected to the lifting assembly, and the lifting assembly is used to drive the corresponding second conductive roller to move up and down in the vertical direction.

7. The static electricity elimination device as described in claim 6, characterized in that, When one of the plurality of second roller assemblies is in the first position, the second conductive roller corresponding to one of the plurality of second roller assemblies is in contact with the front surface of the substrate; when the lifting assembly drives one of the plurality of second roller assemblies to move upward in the vertical direction to the second position, the second conductive roller corresponding to one of the plurality of second roller assemblies is not in contact with the front surface of the substrate.

8. The static electricity elimination device as described in claim 6, characterized in that, The lifting assembly includes a track, a slider, and a second driving member. The track is arranged vertically in the linkage assembly. The bracket is connected to the slider, and the slider is slidably disposed within the track. The second driving member is used to drive the slider to slide along the track, thereby driving the second conductive roller corresponding to the slider to move up and down vertically.

9. The static electricity elimination device as described in claim 1, characterized in that, Each first roller assembly includes a first bracket, a first conductive roller mounted on the first bracket, and a first linkage component. The first linkage component is connected to the first bracket and is movably disposed on the rotating shaft. The first conductive roller, the first bracket, and the rotating shaft are electrically connected.

10. A substrate conveying device, characterized in that... It includes an electrostatic elimination device for substrate transport as described in any one of claims 1 to 9.

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