Crystal growing device

Abstract

The embodiment of the specification provides a crystal growth device, comprising: a furnace body in which a furnace chamber is formed; the crucible is arranged in the furnace chamber; the upper heat preservation cover is arranged at the opening of the crucible in a covering mode, and an observation hole is formed in the upper heat preservation cover; a shielding member; and the driving assembly is connected with the shielding piece and selectively drives the shielding piece to shield or open the observation hole.

Description

TECHNICAL FIELD

[0001] The present specification relates to the field of crystal growth, in particular to a crystal growth device. BACKGROUND

[0002] In the solution method of growing silicon carbide, the seeding step is crucial, and the quality of the crystal is significantly affected by the temperature, flow and carbon concentration in the solution. During the growth process, as the temperature rises, the saturation vapor pressure of the substances in the cosolvent (such as Al elements) is low and is easy to volatilize. In addition, due to the large temperature difference at the position of the observation hole of the upper heat preservation cover, the volatilized substances are easy to cool and enrich at the observation hole, causing the observation hole to be blocked, and the liquid level condition cannot be effectively and accurately observed and the liquid level temperature cannot be measured, which greatly interferes with the accuracy of the seeding operation, making it difficult to control the subsequent growth layer.

[0003] The upper heat preservation cover can adopt a main body assembly heat preservation structure and a split assembly support structure. The split assembly is constructed with a temperature measurement hole and a collection part. The temperature measurement hole has a large temperature gradient, and the volatilized substance atmosphere flowing with the airflow will be preferentially adsorbed or condensed at the annular cavity to avoid the volatilized substance from blocking the temperature measurement hole. However, this structure does not fundamentally solve the above-mentioned problem. When the amount of volatilized substance is large, this structure may not be able to collect it in time or may not have enough capacity, thereby still easily causing the temperature measurement hole to be blocked.

[0004] Therefore, it is desirable to provide a crystal growth device that can effectively reduce heat dissipation at the upper heat preservation cover and avoid blocking the observation hole. SUMMARY

[0005] One of the embodiments of the present specification provides a crystal growth device, comprising: a furnace body, wherein a furnace cavity is constructed; a crucible, which is placed inside the furnace cavity; an upper heat preservation cover, which is provided at the opening of the crucible and is provided with an observation hole; a shielding piece; a driving assembly, which is connected with the shielding piece and can selectively drive the shielding piece to shield or open the observation hole.

[0006] In some embodiments, the driving assembly comprises a driving device and a graphite transmission rod, wherein the driving device is arranged outside the furnace body, one end of the graphite transmission rod is in transmission connection with the driving device, and the other end is connected with the shielding piece.

[0007] In some embodiments, the shielding piece is a heat preservation plug, which can enter or be separated from the observation hole under the driving of the driving assembly.

[0008] In some embodiments, the driving device has a first driving state and a second driving state; in the first driving state, the driving device drives the graphite transmission rod to drive the heat preservation plug to move in a first direction, the heat preservation plug enters or leaves the observation hole; in the second driving state, the driving device drives the graphite transmission rod to drive the heat preservation plug to move in a second direction, the heat preservation plug moves away from or approaches the central axis of the observation hole.

[0009] In some embodiments, the observation hole comprises a guide part and a matching part connected with each other, the guide part is an open slope, and the shape of the matching part matches the heat preservation plug.

[0010] In some embodiments, the shielding part is a shielding cover, and the driving assembly has a pressure maintaining state, when the shielding cover shields the observation hole, the driving assembly is in the pressure maintaining state.

[0011] In some embodiments, the device further comprises a seed rod, a seed holder and a seed rod transmission device.

[0012] In some embodiments, the device further comprises a temperature measuring assembly, the temperature measuring assembly is arranged on the furnace body, and the temperature measuring assembly obtains the temperature in the crucible through the observation hole.

[0013] In some embodiments, the device further comprises an imaging assembly, the imaging assembly is arranged on the furnace body, and the imaging assembly obtains the image in the crucible through the observation hole.

[0014] In some embodiments, the device further comprises a heating assembly and a side heat preservation assembly, and the heating assembly and the side heat preservation assembly are arranged on the side of the crucible. BRIEF DESCRIPTION OF DRAWINGS

[0015] The present specification will be further illustrated in the manner of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not restrictive, and in these embodiments, the same numbers represent the same structures, wherein:

[0016] Figure 1 is an exemplary cross-sectional schematic view of a crystal growth device according to some embodiments of the present specification;

[0017] Figure 2 is an exemplary cross-sectional schematic view of an observation hole according to some embodiments of the present specification. DETAILED DESCRIPTION

[0018] The exemplary embodiments or implementations will be described in detail herein with reference to the attached drawings. The description of the exemplary embodiments or implementations is not meant to limit the scope of the application. Rather, the description is intended to be an example of devices and methods consistent with some aspects of the present application.

[0019] The terminology used in this description is for the purpose of describing particular embodiments only and is not intended to limit the application. As used in this description and the appended claims, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0020] It should be understood that the use of "first", "second", and "third" words of similar effect in this specification and the claims are used only to distinguish one element from another and are not intended to imply a spatial or chronological order. Similarly, the use of "one" or "a" or "the" or similar referents is not intended to limit the quantity of elements to one unless the context clearly indicates otherwise. The use of "front", "back", "lower", and / or "upper" words of similar effect in this description and the claims is used for convenience and is not intended to limit the apparatus or method to a particular position or spatial orientation. The use of "include" or "comprise" or similar words of similar effect is intended to encompass elements or objects that follow the "include" or "comprise" word, as well as equivalents thereof, and does not exclude other elements or objects.

[0021] In the process of growing crystals, in order to avoid the enrichment of volatiles in the crucible at the observation hole, resulting in difficulty in observing the growth of the liquid surface or accurately measuring the temperature of the liquid surface, some embodiments of the present specification provide a crystal growth device, by adding a movable shielding piece at the observation hole of the upper heat preservation cover, so that in the process of heating, when the liquid surface condition does not need to be observed, the shielding piece is used to shield the inside of the observation hole, when the liquid surface condition needs to be observed, the shielding piece is moved to be out of position with the observation hole, so as to accurately observe or measure the related conditions of the liquid surface, so as to better control the growth process of the crystal.

[0022] It should be understood that the application scenarios of the crystal growth device of the present specification are only some examples or embodiments of the present application, and for those skilled in the art, the crystal growth device can also be applied to other similar scenarios without creative labor according to the drawings.

[0023] Figure 1 is an exemplary cross-sectional schematic diagram of the crystal growth device according to some embodiments of the present specification.

[0024] In some embodiments, referring to Figure 1The crystal growth device 100 can include a furnace body 110, a crucible 120, an upper heat-insulating cover 130, a shielding member 140, and a driving assembly 150.

[0025] The furnace body 110 is a main structure for isolating the atmosphere inside and outside the crystal growth device 100. In some embodiments, a furnace cavity 111 is formed in the furnace body 110.

[0026] The furnace cavity 111 is a cavity enclosed by the furnace body 110, used to accommodate the crucible 120 and related components for heating or heat insulation.

[0027] In some embodiments, the furnace body 110 and the furnace cavity 111 can be cuboids, cylinders, etc., and can be designed according to requirements.

[0028] The crucible 120 is a container for growing crystals. In some embodiments, the crucible 120 is placed inside the furnace cavity 111.

[0029] In some embodiments, the crucible 120 can be a cuboid, a cylinder, etc., and can be designed according to requirements.

[0030] The upper heat-insulating cover 130 is a structure for heat insulation of the crucible 120. In some embodiments, the upper heat-insulating cover 130 is provided at the opening of the crucible 120. In some embodiments, the upper heat-insulating cover 130 is provided with an observation hole. The observation hole is a hole for obtaining the internal state of the crucible 120 from the outside of the crucible.

[0031] By providing the observation hole in the upper heat-insulating cover, it is convenient for technicians to observe the internal state of the crucible (such as the growth of the liquid surface or the temperature of the liquid surface) during the crystal growth process, which helps to more accurately perform the crystal pulling operation.

[0032] The shielding member 140 is a component for shielding the observation hole.

[0033] By providing the shielding member, the heat loss of the observation hole can be reduced, and the temperature in the crucible can be maintained stable. When it is necessary to observe the liquid surface in the crucible, the shielding member can be removed, which is convenient for observation.

[0034] The driving assembly 150 is an assembly for driving the shielding member. In some embodiments, the driving assembly 150 is at least partially located outside the furnace body 110.

[0035] In some embodiments, the driving assembly 150 is connected with the shielding piece 140, and can selectively drive the shielding piece 140 to shield or open the observation hole. For example, the driving assembly 150 can be connected with the shielding piece 140 in a manner of adhesion, riveting or screwing, etc., and the driving assembly 150 can selectively drive the shielding piece 140 to move, so as to shield or open the observation hole. Here, the term "selectively" means that the driving assembly 150 can be pre-set or operated in real time by the technician to move the shielding piece 140, so as to shield or open the observation hole when needed.

[0036] By setting the driving assembly, the technician can control the shielding piece to shield or open the observation hole, which is beneficial for observation during the crystal growth process.

[0037] In some embodiments, as shown in FIG. 1, the driving assembly 150 can include a driving device 151 and a graphite transmission rod 152. Figure 1

[0038] The driving device 151 is a device for providing driving force. For example, the driving device 151 can be a motor or other mechanical device capable of providing driving force. In some embodiments, the driving device 151 is arranged outside the furnace body 110.

[0039] The graphite transmission rod 152 is a graphite rod-shaped component for transmitting driving force to the shielding piece 140.

[0040] In some embodiments, one end of the graphite transmission rod 152 is in transmission connection with the driving device 151, and the other end is connected with the shielding piece 140. For example, one end of the graphite transmission rod 152 is in transmission connection with the driving device 151 through gears, chains or shaft couplings, and the other end is in adhesion, riveting or screwing connection with the shielding piece 140.

[0041] In some embodiments of the present specification, by setting the driving assembly to include the driving device and the graphite transmission rod, the shielding piece can be more conveniently moved, and meanwhile, the graphite material has good high-temperature resistance and strength, performs excellently in a high-temperature environment, and does not introduce impurities.

[0042] In some embodiments, the shielding piece 140 can be a heat preservation plug.

[0043] The heat preservation plug is a component for closing the observation hole by plugging. In some embodiments, the heat preservation plug can be a graphite material, and can generate pressure by plugging into the observation hole to close the observation hole, and no additional external force is needed after plugging.

[0044] In some embodiments, the heat preservation plug can enter or leave the observation hole under the driving of the driving assembly 150.

[0045] ​In some embodiments of the present disclosure, the temperature in the crucible can be better maintained by setting the shielding member as a heat preservation plug, and the observation hole can be closed without external force after the heat preservation plug enters the observation hole, preventing impurities from entering the observation hole during crystal growth and causing blockage.

[0046] In some embodiments, the driving device 151 has a first driving state and a second driving state.

[0047] The first driving state refers to the driving state of the driving device 151 when driving the heat preservation plug to enter or exit the observation hole. In some embodiments, in the first driving state, the driving device 151 drives the graphite transmission rod 152 to move the heat preservation plug in a first direction, so that the heat preservation plug enters or exits the observation hole. The first direction refers to the direction along the axis of the observation hole.

[0048] The second driving state refers to the driving state of the driving device 151 when driving the heat preservation plug away from or close to the observation hole. In some embodiments, in the second driving state, the driving device 151 drives the graphite transmission rod 152 to move the heat preservation plug in a second direction, so that the heat preservation plug is away from or close to the central axis of the observation hole. The second direction refers to the direction perpendicular to the first direction.

[0049] In some embodiments of the present disclosure, by setting the first driving state and the second driving state of the driving device, the heat preservation plug can be easily controlled to be inserted into the observation hole by a more convenient operation.

[0050] Figure 2 is an exemplary cross-sectional view of the observation hole shown in some embodiments of the present disclosure.

[0051] In some embodiments, the observation hole includes a guide portion 210 and a fitting portion 220 connected to each other.

[0052] The guide portion 210 is a structure for guiding the insertion of the heat preservation plug 230 into the observation hole. In some embodiments, the guide portion 210 can be an open inclined surface. For example, as shown in Figure 2 , the guide portion 210 can be an open inclined surface structure with a large upper part and a small lower part similar to a funnel, i.e., the side wall of the guide portion 210 is an inclined wall inclined from the upper part of the observation hole to the fitting portion 220.

[0053] The fitting portion 220 is a structure for fitting the heat preservation plug to close the observation hole. In some embodiments, the shape of the fitting portion 220 matches the heat preservation plug 230. For example, as shown in Figure 2 , the shape of the fitting portion 220 can match the profile of the heat preservation plug 230.

[0054] In some embodiments of the present disclosure, by setting the guide portion and the fitting portion connected to each other in the observation hole, the execution of the insertion operation of the heat preservation plug can be simplified, and the success rate of the operation can be improved.

[0055] In some embodiments, the shield 140 may be a shield cover.

[0056] The shielding cover is a component that seals the observation hole by covering and pressing it down. In some embodiments, the shielding cover may be made of the same material as the upper insulation cover 130, for example, both being graphite. In some embodiments, the area of ​​the shielding cover may be larger than the area of ​​the observation hole, and the shielding cover may cover the surface of the observation hole to seal it. In some embodiments, the thickness of the shielding cover may be greater than the thickness of the upper insulation cover 130 to ensure uniform temperature distribution near the upper insulation cover.

[0057] In some embodiments, the drive assembly 150 has a pressure-maintaining state, which is when the cover blocks the observation hole.

[0058] The pressure maintenance state refers to the state in which the pressure of the cover is maintained at a certain level to close the observation hole. In some embodiments, in the pressure maintenance state, the drive assembly 150 can continuously apply pressure to the cover to keep the cover closed to the observation hole.

[0059] In some embodiments of this specification, by setting the shielding member as a shielding cover, the shielding member does not need to be inserted into the observation hole, making the operation of the driving component to drive the shielding member to shield the observation hole simpler.

[0060] In some embodiments, such as Figure 1 As shown, the crystal growth apparatus 100 also includes a seed crystal rod 161, a seed crystal holder 162, and a seed crystal rod drive device 163.

[0061] The seed crystal rod 161 is a structure that assists in moving the seed crystal holder 162. In some embodiments, the seed crystal rod 161 may be made of graphite material.

[0062] In some embodiments, one end of the seed crystal rod 161 can be connected to the seed crystal rod drive device 163, and the other end can be connected to the seed crystal holder 162. For example, one end of the seed crystal rod 161 is connected to the seed crystal rod drive device 163 via gears, chains, or couplings, and the other end is riveted or threaded to the seed crystal holder 162.

[0063] The seed crystal holder 162 is a device for fixing the seed crystal. In some embodiments, the seed crystal holder 162 may be made of graphite material. The seed crystal is a material used to guide crystal growth. When the seed crystal comes into contact with the raw material in the crucible, a crystal can grow on the seed crystal under suitable conditions.

[0064] The seed crystal rod drive device 163 is a device for controlling the movement of the seed crystal holder 162. For example, the seed crystal rod drive device 163 can be a motor or other mechanical device capable of providing driving force. In some embodiments, the seed crystal rod drive device 163 is disposed outside the furnace body 110. In some embodiments, the seed crystal rod drive device 163 can control the seed crystal holder 162 to move up and down or rotate, etc., via the seed crystal rod 161.

[0065] In some embodiments of this specification, by providing a seed crystal rod, a seed crystal holder, and a seed crystal rod transmission device in the crystal growth apparatus, the contact between the seed crystal holder and the raw material in the crucible can be controlled from the outside, thereby making it easier to control the crystal growth process.

[0066] In some embodiments, such as Figure 1 As shown, the crystal growth apparatus 100 may also include a temperature measuring component 170.

[0067] Temperature sensing component 170 is a component used to acquire the temperature inside crucible 120. For example, temperature sensing component 170 may include a temperature sensor, infrared thermometer, etc.

[0068] In some embodiments, the temperature sensing component 170 is disposed on the furnace body 110. For example, the temperature sensing component 170 may be disposed on the inner wall of the furnace body 110, and its position may be aligned with the observation hole, such as... Figure 1 As shown, the temperature measuring component 170 can be disposed on the inner wall directly above the observation hole. In some embodiments, the temperature measuring component 170 obtains the temperature inside the crucible 120 through the observation hole. For example, when the observation hole is opened, the temperature measuring component 170 can measure the temperature above the liquid surface inside the crucible 120 through the observation hole and transmit the measured temperature to an external device (e.g., a display screen), from which a technician can obtain the temperature inside the crucible 120.

[0069] In some embodiments of this specification, by setting a temperature measuring component in the crystal growth apparatus, the temperature inside the crucible can be obtained more conveniently at any time, so as to better control the crystal growth process.

[0070] In some embodiments, such as Figure 1 As shown, the crystal growth apparatus 100 may also include an imaging component 180.

[0071] Imaging component 180 is a component used to acquire images within crucible 120. For example, imaging component 180 may include a visual camera or an infrared camera, etc.

[0072] In some embodiments, the imaging component 180 may be disposed on the furnace body 110. For example, the imaging component 180 may be disposed on the inner wall of the furnace body 110, and its position may be aligned with the observation hole, such as... Figure 1As shown, the imaging assembly 180 can be disposed at the inner wall right above the observation hole. In some embodiments, the imaging assembly 180 can acquire images of the inside of the crucible 120 through the observation hole. For example, when the observation hole is opened, a portion of the inside of the crucible 120 is exposed to the field of view of the imaging assembly 180, the imaging assembly 180 can acquire images of the portion of the inside of the crucible 120 through the observation hole, and transmit the acquired images to an external device (e.g., a display screen), from which a technician can acquire images of the inside of the crucible 120.

[0073] In some embodiments, by disposing the imaging assembly, it is easier for a technician to observe the state of the liquid surface in the crucible, so as to better control the crystal growth.

[0074] In some embodiments, as shown, Figure 1 The crystal growth device 100 can further include a heating assembly 191 and a side insulation assembly 192.

[0075] The heating assembly 191 is an assembly for raising the temperature in the crucible. In some embodiments, the heating assembly 191 can convert electrical energy into heat energy to heat the inside of the crucible 120. For example, the heating assembly 191 can be an induction coil. In some embodiments, the heating assembly 191 can be disposed around the side of the crucible 120.

[0076] The side insulation assembly 192 is an assembly for maintaining the temperature in the crucible stable. For example, the side insulation assembly 192 can be made of graphite material.

[0077] In some embodiments, the side insulation assembly 192 can be disposed around the side of the crucible 120.

[0078] In some embodiments, the size of the heating assembly 191 and the side insulation assembly 192 can be larger than that of the crucible. For example, as shown, Figure 1 The length of the heating assembly 191 and the side insulation assembly 192 in the direction perpendicular to the upper insulation cover 130 can exceed the length of the crucible 120 in the direction, i.e., the side of the upper part of the upper insulation cover 130 can also be provided with the heating assembly 191 and the side insulation assembly 192, so that the temperature difference between the inside and the outside of the crucible 120 is smaller, and the observation hole is less likely to be blocked by the volatilization of the material.

[0079] In some embodiments of the present disclosure, by disposing the heating assembly and the side insulation assembly in the crystal growth device, the radial temperature distribution of the growth interface can be more uniform while reducing heat loss at the upper insulation cover and reducing costs.

[0080] For example, the process of growing a silicon carbide (SiC) crystal using the crystal growth device 100 can include the following steps:

[0081] 1) The raw materials Six-Cry-Alz cosolvent are weighed in proportion and mixed uniformly several times and then put into the crucible 120, and the crucible 120 is placed in the furnace cavity 111.

[0082] 2) The surface of the seed crystal holder 162 is uniformly coated with a special adhesive for silicon carbide, and is bonded with the seed crystal Si surface, and then heat pressing is carried out. The seed crystal holder 162 with the bonded seed crystal is rotatably connected to the seed crystal rod 161.

[0083] 3) The heating assembly 191 and the side heat preservation assembly 192 around the crucible 120 are assembled, and the shielding piece 140 is placed at the observation hole of the upper heat preservation cover 130, and the shielding piece 140 is bonded and fixed on the graphite transmission rod 152.

[0084] 4) The observation hole of the upper heat preservation cover 130 is blocked by the shielding piece 140 before the heating and melting stage. When it is necessary to observe the liquid level (before crystal pulling), the shielding piece 140 is lifted away from the observation hole by using the driving assembly 150, and then the liquid level is observed by using the imaging assembly 180, and the liquid level temperature is measured by using the temperature measuring assembly 170.

[0085] 5) The crystal pulling operation is carried out, and the seed crystal is slowly lowered until it is in contact with the liquid level. After the contact, the liquid level is lowered by a certain height, the surface of the seed crystal is remelted, and the observation hole is opened. After the crystal pulling is completed, the observation hole is shielded by the shielding piece 140 again.

[0086] 6) After the crystal growth is completed, the crystal is pulled up by a certain height (for example, 20-40 mm) from the liquid level, and the cooling is carried out at a certain rate. After the crystal is cooled, it is taken out.

[0087] The above has described the basic concepts. Obviously, for those skilled in the art, the above detailed disclosure is only used as an example, and does not constitute a limitation on the present specification. Although it is not explicitly stated here, those skilled in the art can make various modifications, improvements and corrections to the present specification. Such modifications, improvements and corrections are suggested in the present specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of the present specification.

[0088] At the same time, specific words are used in the present specification to describe the embodiments of the present specification. As "one embodiment", "an embodiment", and / or "some embodiments" means a certain feature, structure or characteristic related to at least one embodiment of the present specification. Therefore, it should be emphasized and noted that the "an embodiment" or "one embodiment" or "one alternative embodiment" mentioned in different places in the present specification does not necessarily refer to the same embodiment. In addition, certain features, structures or characteristics in one or more embodiments of the present specification can be properly combined.

[0089] Furthermore, the order of the processing elements and sequences described in this specification are not intended to be construed as a limitation, unless specifically stated, but are included to provide a complete description of one or more embodiments of the present application. Regardless of the particular sequence of processing elements and sequences, however, the methods described in this specification can be completed. Although the present application has been described in connection with various embodiments thereof, it will be understood that the application is capable of further modifications. This application is intended to cover any variations, uses or adaptations of the application including such departures from the present disclosure as come within known or customary practice in the art to which the application pertains.

[0090] It should also be noted that, as used in the specification and the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to "a component" or "the component" can include a plurality of such components unless the context clearly dictates otherwise. Similarly, the words "plurality" or "a plurality" means two or more, for example, two or more of the same component. It is further noted that the claims can be drafted to exclude any optional element. As such, any elements can be present or absent, and not merely discretionary, and the claims should not be drafted to suggest that discrete elements are discretionary or not mandatory unless the ingredient addition modulates one or more parameters described herein. Furthermore, the description herein of any elements in all claims includes that the elements are present, but in many cases one or more of these elements are not required for the practice of the application.

[0091] Numerical ranges described herein are intended to include the endpoints and all intermediate values. Numerical ranges include all possible sub-ranges. For example, a range of "1 to 10" is intended to include any possible subrange between (and the end-points) of the explicitly listed range, e.g., 2-4, 3-5, 4-6, 5-7, 6-8, etc.

[0092] Every patent, patent application, publication, document, article, book, or thing referenced in this specification is hereby incorporated herein by reference in its entirety for all purposes. To the extent that any publication, document, article, book, or thing is incorporated herein by reference for the purpose of art availability, the reference is only incorporated to the extent that the incorporated material does not conflict with the description, claims or drawings of the present application. Any conflict between the incorporated material and the description, claims or drawings of the present application should be resolved in favor of the instant description, claims and drawings. Further, more recent publications or documents that are incorporated by reference are only incorporated to the extent that the incorporated material does not conflict with the description, claims or drawings of the present application. Any conflict between the incorporated material and the description, claims or drawings of the present application should be resolved in favor of the instant description, claims and drawings.

[0093] Finally, it should be understood that the embodiments described herein are only given by way of example and that other modifications can occur to persons skilled in the art. Therefore, the scope of the present description is not intended to be limited to the embodiments described herein but is only limited by the claims that follow.

Claims

1. A crystal growing apparatus, characterized by comprising: The device comprises: a furnace body, in which a furnace cavity is formed; a crucible, which is placed inside the furnace cavity; an upper heat-insulating cover, which is arranged at the opening of the crucible and is provided with an observation hole; a shielding member; a driving assembly, which is connected with the shielding member and selectively drives the shielding member to shield or open the observation hole.

2. The crystal growing apparatus of claim 1, wherein The driving assembly comprises a driving device arranged outside the furnace body and a graphite transmission rod, one end of which is in transmission connection with the driving device and the other end of which is connected with the shielding member.

3. The crystal growing apparatus of claim 2, wherein The shielding member is a heat-insulating plug, which can enter or leave the observation hole under the driving of the driving assembly.

4. The crystal growing apparatus of claim 3, wherein The driving device has a first driving state and a second driving state. In the first driving state, the driving device drives the graphite transmission rod to drive the heat-insulating plug to move in a first direction, so that the heat-insulating plug enters or leaves the observation hole. In the second driving state, the driving device drives the graphite transmission rod to drive the heat-insulating plug to move in a second direction, so that the heat-insulating plug moves away from or approaches the central axis of the observation hole.

5. The crystal growing apparatus of claim 3, wherein The observation hole comprises a guide part and a matching part connected with each other, the guide part is an open inclined surface, and the shape of the matching part matches the heat-insulating plug.

6. The crystal growing apparatus of claim 2, wherein The shielding member is a shielding cover, and the driving assembly has a pressure maintaining state, when the shielding cover shields the observation hole, the driving assembly is in the pressure maintaining state.

7. The crystal growing apparatus of claim 1 wherein, The device further comprises a seed rod, a seed holder and a seed rod transmission device.

8. The crystal growing apparatus of claim 1 wherein, The device further comprises a temperature measuring assembly arranged on the furnace body, which obtains the temperature in the crucible through the observation hole.

9. The crystal growing apparatus of claim 1 wherein, The device further comprises an imaging assembly arranged on the furnace body, which obtains the image in the crucible through the observation hole.

10. The crystal growing apparatus of claim 1 wherein, The device further comprises a heating assembly and a side heat-insulating assembly, both of which are arranged on the side of the crucible.

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