Heating jacket for heating semiconductor pipeline and heating pipeline

Abstract

The utility model discloses a heating jacket for semiconductor pipeline heating and a heating pipeline, the heating jacket comprises a flexible jacket body and a heating member located in the flexible jacket body, the flexible jacket body is provided with a separation portion to form a first open end portion and a second open end portion which are opposite to each other, the first open end part and the second open end part are detachably connected through a coupling structure; the coupling structure comprises a first connecting part fixed to the first open end and a second connecting part fixed to the second open end, and the first connecting part and the second connecting part are detachably connected and used for limiting the first open end and the second open end to be separated from each other when the heating sleeve wraps the periphery of the pipeline. The condition that the separation part is further enlarged due to shrinkage and inward rolling is avoided, the flexible sleeve body covers the surface of the pipeline around the convex object as much as possible, and non-uniform heating and heat dissipation of the heating sleeve to the pipeline are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor heating, especially to a heating jacket and heating pipeline for semiconductor pipeline heating. BACKGROUND

[0002] In the preparation process of semiconductor wafers, it is necessary to deposit a thin film on the wafer surface using a chemical vapor deposition (CVD) system; this is one of the key steps in manufacturing semiconductor devices, specifically, by chemical reaction at high temperature, gaseous precursors react on the wafer surface and form a solid thin film. In this process, temperature control is very critical, and heating the processing equipment downstream and upstream of the chemical vapor deposition (CVD) system is beneficial to the preparation of semiconductor wafers, especially by heating the downstream part of the chemical vapor deposition (CVD) chamber, it can ensure that the deposited material still maintains sufficient energy state after leaving the reaction zone, which helps to improve the deposition uniformity of the thin film on the entire wafer; it can also help to reduce the condensation of deposited materials during transportation, avoid or significantly reduce the condensation of compounds such as silicon nitride, ammonium and dichlorodimethylbenzene from gaseous to crystalline state, thereby facilitating their recovery and / or further use in the ongoing process reaction.

[0003] In the prior art, a heating jacket for processing containers is disclosed in US5883364A, which can be used to heat the processing equipment downstream and upstream of the chemical vapor deposition (CVD) system; the heating jacket includes a flexible inner liner engaged with the container, a flexible insulating intermediate layer, and a flexible heating element located between the inner liner and the insulating intermediate layer, the heating jacket is assembled into a flip cover structure to be repeatedly mounted on and removed from the processing container.

[0004] In actual application, the pipeline downstream and upstream of the chemical vapor deposition (CVD) system may be bent, the pipeline surface has protrusions, or has several branches, then an open slit needs to be provided on the heating jacket to avoid the protrusions or branch pipelines when the heating jacket is installed, so that the heating jacket can be as close as possible to the outer wall of the pipe body.

[0005] However, the heating jacket generally includes a flexible fabric, which will shrink and curl inward due to temperature rise after long-time heating, thus causing the heating jacket to shrink to the middle, not only unable to cover the end of the pipeline, but also the gap at the open slit will become larger due to the shrinkage of the fabric; in addition, generally in this case, the staff may manually pull the heating jacket outward to cover the end of the pipe again, but such operation will further enlarge the open slit, so that the heating jacket cannot cover the local area corresponding to the two ends of the open slit, resulting in uneven heating and heat loss. SUMMARY

[0006] In view of the deficiencies of the prior art, the heating sleeve and the heating pipeline for semiconductor pipeline heating are provided to solve the problem of the excessive exposure of the pipeline outer surface at the open seam of the existing heating sleeve.

[0007] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0008] A heating sleeve for semiconductor pipeline heating, the heating sleeve comprises a flexible sleeve body and a heating element located in the flexible sleeve body;

[0009] The flexible sleeve body has a separation part to form opposite first and second open end parts, the separation part is used for passing the convex on the pipeline when the heating sleeve is wrapped around the outer periphery of the pipeline, and the first and second open end parts are detachably connected through a coupling structure;

[0010] The coupling structure comprises a first connecting part fixed to the first open end part and a second connecting part fixed to the second open end part, the first connecting part is detachably connected with the second connecting part, and is used for limiting the mutual separation of the first and second open end parts when the heating sleeve is wrapped around the outer periphery of the pipeline.

[0011] The heating sleeve of the utility model is used for covering the outer periphery of the pipeline and uniformly heating the pipeline, and because the surface of the pipeline is not necessarily smooth, there may be convex such as branch pipelines, joints and valve bodies, which causes the heating sleeve to be unable to be flatly sleeved on the outer periphery of the pipeline, thereby affecting the heating effect of the heating sleeve on the pipeline. Therefore, the flexible sleeve body has a separation part in the state of no installation of the heating sleeve, the convex can pass through the separation part or be exposed between the first and second open end parts, the size of the corresponding separation part can be different based on the size of the convex, the convex is facilitated to pass through and the flexible sleeve body is kept to be attached to the outer periphery of the pipeline. In the working process, the flexible sleeve body is curled by heat, the first and second open end parts are separated away from each other, more pipeline surfaces around the convex are exposed, the first and second connecting parts of the coupling structure can pull the first and second open end parts to limit the mutual separation of the first and second open end parts in the connected state, the first and second open end parts are kept to be relatively close to each other, the flexible sleeve body covers as many pipeline surfaces around the convex as possible, and the flexible sleeve body is also made to be more flat, the heating element is made to be as flat as possible to be attached to and heated by the outer periphery of the pipeline, and the uneven heating and heat dissipation of the heating sleeve on the pipeline are avoided.

[0012] Preferably, the first connecting part comprises a hook-shaped part, the second connecting part comprises a ring-shaped part, the hook-shaped part passes through and hooks the ring-shaped part, so that the first and second open end parts are effectively hooked and pulled to each other, the connection mode is simple and reliable, and is not easy to be detached.

[0013] Preferably, the first connecting part is a strip-shaped metal bent and formed into a fixing part and the hook-shaped part, and the fixing part is fixedly connected with the first open end part by sewing thread.

[0014] The second connecting part is a strip-shaped metal bent and formed into a fixing part and the ring-shaped part, and the fixing part is fixedly connected with the second open end part by sewing thread.

[0015] In this way, the first connecting part and the second connecting part are both strip-shaped metal bent, which can enhance the structural strength of the first connecting part and the second connecting part, and avoid damage to the first connecting part and the second connecting part, so that the first open end part and the second open end part are axially away from the pipeline. On the other hand, although metal has high mechanical strength, it also has good heat conduction performance. Therefore, the first connecting part and the second connecting part are made of strip-shaped metal, which has a small contact area with the heating element, reduces heat conduction and dissipation, and is beneficial to improve the utilization rate of heat.

[0016] Preferably, the flexible sleeve is made of fabric, and the flexible sleeve includes an inner layer and an outer layer. The edges of the inner layer and the outer layer are folded inward and overlapped together to form a thickened part. The first connecting part and the second connecting part are fixedly connected with the thickened part, respectively.

[0017] In this way, the purpose of the thickened part is to fold the edges of the inner layer and the outer layer to avoid the edges of the inner layer and the outer layer of the fabric exposed, and at the same time provide a more solid and stable mounting position for mounting the first connecting part and the second connecting part, improve the connection strength of the first connecting part and the second connecting part with the flexible sleeve, avoid the first connecting part and the second connecting part from falling off when the flexible sleeve is pulled, and also be beneficial to improve the first connecting part and the second connecting part to exert the force along the axial direction of the pipeline on the first open end part and the second open end part.

[0018] Preferably, the flexible sleeve includes a first part extending along the length direction and at least two second parts located on one side of the first part in the width direction. The second parts are spaced apart along the length direction of the first part, and the adjacent second parts form the separation part opening in the width direction of the flexible sleeve. The first open end part and the second open end part are located at opposite ends of the adjacent second parts, respectively. The coupling structure is used to connect the first open end part and the second open end part, and can exert the force along the axial direction of the pipeline on the first open end part and the second open end part.

[0019] In this way, when the flexible sleeve is sleeved on the outer periphery of the pipeline, the first part corresponds to the side of the pipeline without the protrusion, and the whole has good adhesion with the outer periphery of the pipeline; the second part corresponds to the side of the pipeline provided with the protrusion; due to the presence of the first part, the separation part between adjacent second parts does not penetrate the flexible sleeve in the width direction of the flexible sleeve, and the flexible sleeve is still an integral structure, facilitating installation.

[0020] Preferably, the flexible sleeve comprises a plurality of small sections in a split manner, the separation part is formed between adjacent small sections and extends through in the width direction of the flexible sleeve, the first open end and the second open end are respectively located at opposite ends of adjacent small sections, and a plurality of coupling structures are used to connect the first open end and the second open end.

[0021] In this way, the flexible sleeve has a plurality of small sections which are relatively independent of each other, so that it can more flexibly cope with the protrusions at different positions and protruding directions on the pipeline, and is more flexible to use. At the same time, the coupling structure is used to keep the connection between the small sections, while avoiding the exposure of more surface of the pipeline due to the dispersion of the small sections, so that the heating of the heating sleeve on the pipeline is more uniform, and the heat dissipation is less.

[0022] Preferably, the heating sleeve is provided with a groove for accommodating the protrusion on the pipeline in communication with the separation part, and the shape of the groove is matched with the protrusion.

[0023] In this way, for some protrusions with larger volume, a groove with matching shape can be provided, so that the separation part facilitates the protrusion to enter the groove more easily, and the flexible sleeve is more conveniently sleeved on the outer periphery of the pipeline, while the axial distance between the first open end and the second open end is controlled to reduce the surface area of the pipeline exposed at the separation part.

[0024] Preferably, the heating element comprises a reinforcing part located at the first open end and the second open end, and the reinforcing part is distributed along the outer periphery of the separation part, so as to increase the heating amount of the heating element at the separation part, to make up for the heat dissipation at the separation part, and to improve the uniformity of the heating sleeve in heating the pipeline.

[0025] Preferably, the flexible sleeve is a sheet-shaped lining cloth.

[0026] The flexible sleeve comprises an inner layer and an outer layer, the heating element is located between the inner layer and the outer layer, when the flexible sleeve forms a cylindrical structure and is attached to the outer surface of the pipeline, a bandage is wound around the outer periphery of the flexible sleeve to fix the flexible sleeve, and the bandage comprises a heat preservation material.

[0027] Or, the flexible sleeve body comprises an inner layer and an outer layer, the outer layer is provided with heat preservation material, the heating element is located in the inner layer, and the heat preservation material is located outside the heating element.

[0028] In this way, the structure of different flexible sleeve bodies is suitable for different temperature requirements, for some pipelines with low temperature requirements, the flexible sleeve body can not comprise heat preservation material or only be provided with heat preservation material in specific areas, so as to reduce the cost of the flexible sleeve body, and for some pipelines with high temperature requirements, the heat preservation material can correspond to the area of the heating element and is located outside the heating element, so that heat dissipation is inhibited, the utilization rate of heat is high, and the heating of the pipeline is more uniform and stable.

[0029] In order to achieve the above object, the utility model still adopts the following technical scheme:

[0030] A heating pipeline comprises a pipeline, the heating sleeve is sleeved on the pipeline, the convex on the pipeline penetrates or is located in the separation part of the flexible sleeve body, and the coupling structure is located on at least one side of the circumferential direction of the convex.

[0031] The heating pipeline of the utility model, because of setting the heating sleeve with coupling structure, make the flexible sleeve body more comprehensive and complete to the outer periphery of the pipeline, especially the pipeline heating effect near the convex, be favorable to improve the heating efficiency and effect of the heating sleeve to the pipeline, make the temperature in the pipeline more uniform and stable, thereby help to improve the deposition uniformity of the thin film on the whole wafer, help to reduce the condensation of the deposition material in the transmission process.

[0032] In conclusion, compared with the prior art, the utility model at least has the following beneficial effects:

[0033] The heating sleeve of the utility model, its function is to cover the outer periphery of the pipeline and uniformly heat the pipeline, because the surface of the pipeline is not necessarily smooth structure, there may be branch pipelines, joints, valve bodies and other convex objects, which cause the heating sleeve to be unable to be evenly sleeved on the outer periphery of the pipeline, affecting the heating effect of the heating sleeve on the pipeline, therefore, in the state of not installing the heating sleeve, the flexible sleeve body has a separation part, the convex object can pass through the separation part or expose from between the first open end part and the second open end part, based on the size of the convex object, the corresponding size of the separation part can be different, facilitating the passing of the convex object and keeping the adhesion of the flexible sleeve body and the outer periphery of the pipeline, and in the working process, the flexible sleeve body is curled by heat, intensifying the separation of the first open end part and the second open end part, exposing more pipeline surfaces around the convex object, the first connecting part and the second connecting part of the coupling structure can pull the first open end part and the second open end part in the connected state, so that the first open end part and the second open end part keep the state of relatively closing to each other, the flexible sleeve body covers as many pipeline surfaces around the convex object as possible, and the flexible sleeve body can also be more flat, the heating piece is as flat as possible to adhere to and heat the outer periphery of the pipeline, avoiding the uneven heating and heat dissipation of the heating sleeve on the pipeline.

[0034] The heating pipeline of the utility model, because the heating sleeve with the coupling structure is arranged, the flexible sleeve body covers the outer periphery of the pipeline more completely and integrally, is favorable for improving the heating efficiency and effect of the heating sleeve on the pipeline, makes the temperature in the pipeline more uniform and stable, thereby helping to improve the deposition uniformity of the thin film on the whole wafer and helping to reduce the condensation of the deposition material in the transmission process. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the specific embodiment of the utility model or the technical scheme in the prior art, the drawings needed to be used in the specific embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating labor.

[0036] Figure 1 It is the structure schematic view of the heating sleeve of the utility model embodiment one.

[0037] Figure 2 It is the flat view schematic view of the heating sleeve of the utility model embodiment one.

[0038] Figure 3 It is the partial section schematic view of the heating sleeve of the utility model embodiment one.

[0039] Figure 4 It is the structure schematic view of the heating sleeve of the utility model embodiment two.

[0040] Figure 5It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0041] Figure 6 It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0042] Figure 7 It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0043] Figure 8 It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0044] Figure 9 It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0045] Figure 10 It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0046] Figure 11 It is the laying diagram of the heating sleeve of the second embodiment of the utility model.

[0047] Explanation of reference signs

[0048] 10, flexible sleeve body; 11, separation part; 12, first open end part; 13, second open end part; 14, first part; 15, second part; 16, small section; 17, groove; 18, inner layer; 19, outer layer; 191, thickened part;

[0049] 20, heating part; 21, reinforcing part;

[0050] 30, coupling structure; 31, first connecting part; 311, hook-shaped part; 32, second connecting part; 321, ring-shaped part;

[0051] 40, pipeline; 41, convex;

[0052] 50, bandage; 51, heat-insulating material. DETAILED DESCRIPTION

[0053] The technical scheme of the utility model will be described clearly and completely in combination with the drawings. Obviously, the described embodiments are some embodiments of the utility model, instead of all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the person skilled in the art without creative labor fall within the protection scope of the utility model.

[0054] In the description of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element must have a particular orientation, construct and operate in a particular orientation, therefore, it cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0055] In the description of the utility model, it needs to explain, unless otherwise explicitly provided and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected, it can be mechanical connection, or electrical connection, it can be directly connected, or indirectly connected through intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0056] As Figures 1 to 3 The embodiment one shown in the figure, the heating sleeve for semiconductor pipeline heating of the embodiment, including flexible sleeve body 10 and heating piece 20 located in flexible sleeve body 10, pipeline 40 based on cylinder, flexible sleeve body 10 can be fabric, silicone rubber and other deformable and cover on the surface of pipeline 40, heating piece 20 can be heating wire or metal heating sheet or graphene heating film and other flexible materials that can follow the deformation of flexible sleeve body 10, it can also be several non-deformable heating rods, uniformly distributed in flexible sleeve body 10 and follow flexible sleeve body 10 circumferentially around the outer periphery of pipeline 40 to heat pipeline 40. It needs to be noted that in each embodiment, based on the heating sleeve having the flat state before being mounted to the pipeline and the wrapping / winding state after being mounted to the pipeline, wherein the length direction and the width direction are both said for the flat state, and the axial direction and the circumferential direction are both said for the wrapping / winding state, therefore, the length direction of flexible sleeve body 10 is the same as the axial direction of pipeline 40, and the width direction is the direction perpendicular to the length direction when flexible sleeve body 10 is laid flat, and is also the circumferential direction when flexible sleeve body 10 is sleeved on the outer periphery of pipeline 40.

[0057] Flexible sleeve body 10 has a separation part 11 opened along the width direction to form opposite first open end part 12 and second open end part 13, separation part 11 is used for the convex 41 on pipeline 40 to pass through when the heating sleeve is wrapped on the outer periphery of pipeline 40, and first open end part 12 and second open end part 13 are detachably connected through coupling structure 30.

[0058] Since the outer surface of the pipeline 40 is not necessarily smooth structure, there can be protrusions 41 such as branch pipelines, joints, valves, etc. The interference of the protrusions 41 with the heating sleeve can cause the heating sleeve to be unable to be evenly sleeved on the outer periphery of the pipeline 40, affecting the heating effect of the heating sleeve on the pipeline 40. Therefore, the flexible sleeve body 10 has a separation portion 11 opened in the width direction, and the protrusions 41 are exposed or passed through between the first open end portion 12 and the second open end portion 13. Based on the size of the protrusions 41, the corresponding size of the separation portion 11 can be different, so that the protrusions 41 can pass through and the flexible sleeve body 10 can be kept in close contact with the outer periphery of the pipeline 40.

[0059] It should be noted that the separation portion 11 is not connected on the flexible sleeve body 10, that is, the first open end portion 12 and the second open end portion 13 can be relatively moved or separated, as shown in Figure 1 The first open end portion 12 and the second open end portion 13 in the embodiment are in a small gap, i.e. an open gap, in the axial direction of the pipeline 40 in the initial state. In other embodiments, the first open end portion 12 and the second open end portion 13 can be closely adjacent in the initial state (i.e. only cutting the flexible sleeve body 10 to form the separation portion 11) or the first open end portion 12 and the second open end portion 13 are overlapped in the initial state. Regardless of the state of the first open end portion 12 and the second open end portion 13 in the initial state, the first open end portion 12 and the second open end portion 13 can be separated and opened to allow the protrusions 41 to pass in and out or be kept therein. The separation portion 11 of the above-mentioned specific embodiments meets the function that the protrusions 41 can pass in and out of the separation portion 11 in the width direction of the flexible sleeve body 10 or be kept therein. The separation portion 11 formed by the above-mentioned methods will expand due to the shrinkage and inward rolling of the first open end portion 12 and the second open end portion 13 caused by the heating of the flexible sleeve body 10. The reason for the shrinkage and inward rolling of the flexible sleeve body 10 can be the shrinkage and inward rolling caused by the different shrinkage rates in the radial and weft directions and / or the shrinkage and inward rolling caused by the different expansion coefficients between the layers.

[0060] In addition, the extension direction of the separation portion 11 can be in the width direction of the flexible sleeve body 1, as shown in Figure 2 The extension direction of the separation portion 11 can be at an angle to the width direction of the flexible sleeve body 1 or consistent with the length direction of the flexible sleeve body 1, as shown in Figure 11 The specific extension direction of the separation portion 11 can be set according to the position of the protrusions and the wrapping direction of the heating sleeve. Regardless of the direction in which the separation portion 11 extends, the coupling structure 30 can play a role in pulling the separation portion, avoiding the further expansion of the separation portion due to shrinkage and inward rolling.

[0061] Specifically, the coupling structure 30 comprises a first connecting part 31 fixed to the first open end 12 and a second connecting part 32 fixed to the second open end 13, the first connecting part 31 is detachably connected with the second connecting part 32, for limiting the first open end 12 and the second open end 13 from separating from each other when the heating sleeve is wrapped around the outer periphery of the pipeline 40, and capable of applying a force along the axial direction of the pipeline 40 to the first open end 12 and the second open end 13 when the heating sleeve is wrapped around the outer periphery of the pipeline 40, so that the first open end 12 and the second open end 13 are moved towards each other, thereby preventing the inner volume of the separation part 11 from being enlarged due to the contraction of the flexible sleeve body 1 itself caused by heating.

[0062] Specifically, the separation part 11 in the embodiment extends along the width direction of the flexible sleeve body 1, when the heating sleeve is wrapped around the outer periphery of the pipeline 40, the heating causes the flexible sleeve body 10 to contract towards the middle, so that the end part of the pipeline 40 is exposed and cannot be heated, and the worker will try to pull the flexible sleeve body 10 axially to pull the flexible sleeve body 10 towards the end part of the pipeline 40, during the pulling process, the first open end 12 and the second open end 13 are subjected to forces in opposite axial directions of the pipeline 40, and at the same time, the first connecting part 31 and the second connecting part 32 are connected with each other to offset the pulling forces on both axial sides, so that the first open end 12 and the second open end 13 remain close to each other or the degree of separation between them is greatly reduced; the flexible sleeve body 10 covers as much as possible the outer surface of the pipeline 40 around the protrusions 41, and at the same time, the flexible sleeve body 10 can be made more flat, and the heating element 20 is as flat as possible to fit and heat the outer periphery of the pipeline 40, avoiding uneven heating of the heating sleeve to the pipeline 40 and heat dissipation.

[0063] The coupling structure 30 can have various forms, in the embodiment, the first connecting part 31 comprises a hook-shaped part 311, the second connecting part 32 comprises a ring-shaped part 321, the hook-shaped part 311 passes through the ring-shaped part 321 and hooks the ring-shaped part 321, so that the first open end 12 and the second open end are hooked to each other, the connection mode is simple and reliable, and is not easy to be detached. Figure 1As shown, the first connecting part 31 is a strip-shaped metal bending forming, forming a fixing part and a hook-shaped part 311, the fixing part is fixedly connected with the first open end part 12 through sewing thread; the second connecting part 32 is a strip-shaped metal bending forming, forming a fixing part and a ring-shaped part 321, the fixing part is fixedly connected with the second open end part 13 through sewing thread. The first connecting part 31 and the second connecting part 32 are both strip-shaped metal bending forming, on the one hand, it can enhance the structural strength of the first connecting part 31 and the second connecting part 32, avoid the first connecting part 31 and the second connecting part 32 damage, and cause the first open end part 12 and the second open end part to be axially away from the pipeline 40, on the other hand, although the metal has high mechanical strength, but at the same time has good heat conduction performance, therefore, the first connecting part 31 and the second connecting part 32 adopt strip-shaped metal, the contact area with the heating piece 20 is small, the heat conduction and dissipation is reduced, which is beneficial to improve the utilization rate of heat.

[0064] In other embodiments, the coupling structure 30 can be a magic tape or a snap, when the magic tape, the first connecting part 31 is a rough surface, and the second connecting part 32 is a hook surface; or, the coupling structure 30 is a rope structure, the first connecting part 31 and the second connecting part 32 are both ropes or strips, or other conventional detachable connection structures, but the connection strength of the conventional detachable connection structure is far less than that of the cooperation of the hook-shaped part 311 and the ring-shaped part 321.

[0065] Different flexible sleeve 10 structures are suitable for different temperature requirements. For some pipelines 40 with low temperature requirements, such as heating temperature of 40℃, the flexible sleeve 10 can not include the heat preservation material 51, so that the heating sleeve becomes only a single heating sheet, or the heat preservation material 51 is arranged only in a specific area, so as to reduce the cost of the flexible sleeve 10, for example, as shown in the figure, Figure 3 As shown, the flexible sleeve 10 of the embodiment includes an inner layer 18 and an outer layer 19. In the embodiment, the inner layer 18 and the outer layer 19 are both single-layer sheet-shaped lining cloth, which can be one or more of PTFE machine cloth, tetrafluoro cloth, silica gel cloth, solder cloth, PI film and aramid fiber cloth, and the edges are sewn and fixed. The heating piece 20 is located between the inner layer 18 and the outer layer 19. When the flexible sleeve 10 forms a cylindrical structure and is attached to the outer surface of the pipeline 40, the two ends of the flexible sleeve 10 in the width direction can have a circumferential gap, or be tightly close or partially overlap, which is determined according to the actual size of the pipeline 40. The fixing mode of the flexible sleeve 10 on the pipeline 40 includes but is not limited to circumferentially winding the flexible sleeve 10 outside the outer periphery through the binding belt 50, and arranging magic tape, button, snap and other fixing parts at the two ends in the width direction.

[0066] In other embodiments, the flexible sleeve 10 is wrapped with a bandage 50 to fix the flexible sleeve 10, the bandage 50 comprises a thermal insulation material 51, which can be felt, cotton, silicone rubber, glass wool, polyurethane foam, aerogel blanket and other composite thermal insulation material 51, for example, the thermal insulation material 51 can be filled in the bandage body or the bandage 50 itself is made of thermal insulation material 51. The bandage 50 is provided with a detachable connecting component such as magic tape or snap fastener, and the detachable connecting component is wound and driven to pass over the end of the flexible sleeve 10 in the width direction and close to the bundle, and the thermal insulation material 51 is arranged on the side close to the flexible sleeve 10, so that the bandage 50 acts as a thermal insulation layer to reduce heat loss, and is also convenient to install, which can be regarded as a semi-split type heating sleeve, such as Figure 10 Embodiment six is shown in the figure.

[0067] In other embodiments, for some pipes 40 with higher temperature requirements, such as heating temperature of 200-300℃, the flexible sleeve 10 comprises an inner layer 18 and an outer layer 19, and the inner layer 18 and the outer layer 19 are both a sandwich structure sewn by inner and outer linings on the outer edges, the outer layer 19 is provided with a thermal insulation material 51, and the heating element 20 is located in the inner layer 18, and the thermal insulation material 51 is located outside the heating element 20, and the thermal insulation material 51 can be felt, cotton, silicone rubber, glass wool, polyurethane foam, aerogel blanket and other composite thermal insulation material 51. The thermal insulation material 51 can correspond to the area of the heating element 20 and is located outside the heating element 20, so as to inhibit heat dissipation and improve the utilization rate of heat and the uniformity and stability of heating of the pipe 40.

[0068] As shown in Figure 3 In this embodiment, the edges of the inner layer 18 and the outer layer 19 are folded inward and overlapped together to form a thickened portion 191 corresponding to the positions of the first open end 12 and the second open end 13, and the first connecting portion 31 and the second connecting portion 32 are fixedly connected with the thickened portion 191. The purpose of arranging the thickened portion 191 is to fold the edges of the inner layer 18 and the outer layer 19 to avoid the trivial lines of the edges of the fabric flexible sleeve 10 exposed outside, and at the same time to provide a more solid and stable mounting position for mounting the first connecting portion 31 and the second connecting portion 32, to improve the connection strength of the first connecting portion 31 and the second connecting portion 32 with the flexible sleeve 10, to avoid the first connecting portion 31 and the second connecting portion 32 from falling off when the flexible sleeve 10 is pulled, and to facilitate the first connecting portion 31 and the second connecting portion 32 to exert the force along the axial direction of the pipe 40 on the first open end 12 and the second open end 13.

[0069] As shown in Figure 2As shown in the embodiment, the flexible sleeve 10 includes a first portion 14 extending along the length direction and at least two second portions 15 located at one side of the first portion 14 in the width direction, the second portions 15 are spaced apart along the length direction of the first portion 14, and a separation portion 11 is formed between adjacent second portions 15, the first open end 12 and the second open end 13 are respectively located at opposite ends of the adjacent second portions 15, and at least one coupling structure 30 is used to connect the first open end 12 and the second open end 13.

[0070] When the flexible sleeve 10 is sleeved on the outer periphery of the pipeline 40, the first portion 14 corresponds to the side of the pipeline 40 without the protrusions 41, and the whole has good fit with the outer periphery of the pipeline 40, and the second portion 15 corresponds to the side of the pipeline 40 provided with the protrusions 41, and due to the existence of the first portion 14, the separation portion 11 between the adjacent second portions 15 does not penetrate the whole flexible sleeve 10 in the width direction of the flexible sleeve 10, and the flexible sleeve 10 is still an integral structure, which is convenient for installation.

[0071] In the embodiment, the relative positions of the first portion 14 and the second portion 15 are fixed, that is, the second portions 15 are all extended from the same side of the first portion 14 in the width direction.

[0072] As shown in the embodiment five, Figure 9 The difference between the embodiment five and the embodiment one is that the extension directions of the separation portions 11 on the flexible sleeve 10 are different, that is, some separation portions 11 extend to one side edge in the width direction of the flexible sleeve 10, and the other separation portions 11 extend to the other side edge in the width direction of the flexible sleeve 10, and these separation portions 11 all do not penetrate the flexible sleeve 10 in the width direction, so the flexible sleeve 10 is still an integral structure, and the specific extension direction and position of the separation portions 11 are related to the position of the protrusions 41 on the pipeline 40, which is not limited here. The other structures of the embodiment can refer to the embodiment one and other embodiments.

[0073] As shown in the embodiment two, Figure 4 and Figure 5 The difference between the embodiment two and the embodiment one is that the heating sleeve is provided with a groove 17 in communication with the separation portion 11 for accommodating the protrusions 41 on the pipeline 40, and the shape of the groove 17 is matched with the protrusions 41, such as circular or square or other shapes. Specifically, for some protrusions 41 with larger volume, a groove 17 with matching shape can be arranged, so that the separation portion 11 facilitates the protrusions 41 to enter the groove 17 more easily, and the flexible sleeve is more convenient to be sleeved on the outer periphery of the pipeline 40, and the axial distance between the first open end 12 and the second open end 13 is controlled to reduce the surface area of the pipeline 40 exposed at the separation portion 11.

[0074] Preferably, as shown in the embodiment, Figure 6As shown, the heating element 20 includes a reinforcing portion 21 located at the first open end 12 and the second open end 13. The reinforcing portion 21 is distributed along the outer periphery of the separation portion 11, thereby increasing the heating amount of the heating element 20 in the separation portion 11 to compensate for the heat dissipated in the separation portion 11 and improve the uniformity of heating of the pipe 40 by the heating sleeve. When the separation portion 11 is connected to the groove 17, the reinforcing portion 21 can also be distributed along the outer periphery of the groove 17. When the heating element 20 is a heating wire, part of the heating wire extends along one side edge of the separation portion 11 and extends around the groove to the other side edge of the separation portion 11, thereby forming the reinforcing portion 21.

[0075] like Figure 7 In Embodiment 3, the difference from Embodiment 1 is that the flexible sleeve 10 includes multiple segmented sections 16, with a separation portion 11 formed between adjacent sections 16. The separation portion 11 extends through the flexible sleeve 10 along its width direction. The first open end 12 and the second open end 13 are located at opposite ends of adjacent sections 16, and multiple coupling structures 30 are used to connect the first open end 12 and the second open end 13. The flexible sleeve 10 has several relatively independent sections 16, which allows for more flexible handling of protrusions 41 at different positions and in different directions on the pipe 40, making it more flexible to use. At the same time, the coupling structures 30 maintain the connection between the sections 16, while preventing the sections 16 from being too dispersed and exposing more of the surface of the pipe 40, resulting in more uniform heating of the pipe 40 by the heating sleeve and less heat loss.

[0076] Preferably, the heating element 20 includes a reinforcing portion 21 located at the first open end 12 and the second open end 13. The reinforcing portion 21 is distributed along the outer periphery of the separation portion 11, that is, it is arranged circumferentially along the first open end 12 and the second open end 13, thereby increasing the heating amount of the heating element 20 in the separation portion 11 to compensate for the heat dissipated in the separation portion 11 and improve the uniformity of heating of the pipe 40 by the heating sleeve. In this embodiment, since the separation portion 11 extends through the flexible sleeve 10 along the width direction, independent reinforcing portions 21 are provided in the first open end 12 and the second open end 13. Taking the heating portion 21 as a heating wire as an example, part of the heating wire extends circumferentially along the edge of the first open end 12 to form the reinforcing portion 21, and another part of the heating wire extends circumferentially along the edge of the second open end 13 to form another reinforcing portion 21.

[0077] like Figure 8In the shown fourth embodiment, a heating pipe is shown, which comprises a pipe 40 and a heating sleeve sleeved on the pipe 40, the heating sleeve can be in the structure of the above-mentioned embodiments, the protrusion 41 on the pipe 40 penetrates through or is located in the separation part 11 of the flexible sleeve body 10, the coupling structure 30 is located on the circumferential side of the protrusion 41 to limit the mutual separation of the first open end part 12 and the second open end part 13, and can exert an axial force along the pipe 40 on the first open end part 12 and the second open end part 13, so that the first open end part 12 and the second open end part 13 are close to each other.

[0078] The pipe 40 can be a straight pipe, an elbow pipe or a tee pipe, etc., the heating sleeves of the above-mentioned embodiments can be combined for use to improve the fitting degree of the heating sleeve to the outer periphery of the pipe 40, thereby improving the heating uniformity, and at the same time, due to the heating sleeve provided with the coupling structure 30, the flexible sleeve body 10 covers the outer periphery of the pipe 40 more completely and integrally, which is beneficial to improve the heating efficiency and effect of the heating sleeve on the pipe 40, so that the temperature in the pipe 40 is more uniform and stable, thereby helping to improve the deposition uniformity of the thin film on the whole wafer and helping to reduce the condensation of the deposition material in the transmission process.

[0079] In the heating pipe of other embodiments, the heating sleeve comprises a plurality of small sections, as shown in the third embodiment, the coupling structure 30 is located on the circumferential two sides of the protrusion 41, and exerts an axial force along the pipe 40 on the first open end part 12 and the second open end part 13, so that the first open end part 12 and the second open end part 13 are close to each other.

[0080] The above-mentioned embodiments are only preferred embodiments of the present application, and cannot be used to limit the scope of protection of the present application, and any non-essential changes and replacements made by those skilled in the art on the basis of the present application all belong to the scope of protection required by the present application.

Claims

1. A heating jacket for heating a semiconductor pipe, the heating jacket comprising a flexible jacket body and a heating element located in the flexible jacket body; characterized in that, the flexible jacket body has a separation portion to form opposite first and second open end portions, the separation portion being used for passing a protrusion on the pipe when the heating jacket is wrapped around the outer periphery of the pipe, the first and second open end portions being detachably connected by a coupling structure; the coupling structure comprises a first connecting portion fixed to the first open end portion and a second connecting portion fixed to the second open end portion, the first connecting portion being detachably connected with the second connecting portion for limiting the first and second open end portions from separating from each other when the heating jacket is wrapped around the outer periphery of the pipe.

2. The heating mantle as claimed in claim 1, characterized in that the first connecting portion comprises a hook portion, and the second connecting portion comprises a loop portion, the hook portion passing through and hooking the loop portion.

3. The heating mantle as claimed in claim 2, characterized in that the first connecting portion is a strip-shaped metal bent to form a fixing portion and the hook portion, the fixing portion being fixedly connected with the first open end portion by sewing thread; the second connecting portion is a strip-shaped metal bent to form a fixing portion and the loop portion, the fixing portion being fixedly connected with the second open end portion by sewing thread.

4. A heating mantle as claimed in any of claims 1 to 3, characterized in that the flexible jacket body is made of fabric, and the flexible jacket body comprises an inner layer and an outer layer, the edges of the inner layer and the outer layer being inwardly folded and superimposed together to form a thickened portion, the first and second connecting portions being fixedly connected with the thickened portion, respectively.

5. A heating mantle as claimed in any of claims 1 to 3, characterized in that the flexible jacket body comprises a first portion extending along a length direction and at least two second portions located at one side of the first portion in a width direction, the second portions being spaced apart along the length direction of the first portion, and the separation portions being formed between adjacent second portions along the width direction of the flexible jacket body, the first and second open end portions being located at opposite ends of adjacent second portions, respectively, at least one coupling structure being used for connecting the first and second open end portions and capable of applying a force to the first and second open end portions along the pipe axial direction to move towards each other.

6. A heating mantle as claimed in any of claims 1 to 3, characterized in that the flexible jacket body comprises a plurality of small sections in a split type, the separation portions being formed between adjacent small sections and extending through along the width direction of the flexible jacket body, the first and second open end portions being located at opposite ends of adjacent small sections, respectively, a plurality of coupling structures being used for connecting the first and second open end portions.

7. The heating mantle as claimed in claim 1, characterized in that a groove for accommodating the protrusion on the pipe is provided on the heating jacket and communicates with the separation portion, the groove being shaped to match the protrusion.

8. The heating mantle as claimed in claim 1, characterized in that the heating element comprises a reinforcing portion located at the first and second open end portions, the reinforcing portion being distributed along the outer periphery of the separation portion.

9. The heating mantle as claimed in claim 1, characterized in that the flexible jacket body is a sheet-shaped lining cloth. The flexible sleeve comprises an inner layer and an outer layer, the heating element is located between the inner layer and the outer layer, when the flexible sleeve forms a cylindrical structure and is attached to the outer surface of the pipeline, a bandage is wound around the outer periphery of the flexible sleeve to fix the flexible sleeve, and the bandage comprises a heat preservation material. Alternatively, the flexible sleeve comprises an inner layer and an outer layer, the outer layer is provided with a heat preservation material, the heating element is located in the inner layer, and the heat preservation material is located outside the heating element.

10. A heated pipeline, comprising a pipeline, characterized in that the pipeline is provided with the heating sleeve according to any one of claims 1 to 9, a protrusion on the pipeline penetrates through or is located in the separation part of the flexible sleeve, and the coupling structure is located on at least one side of the periphery of the protrusion.

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