Clamping jig

Abstract

The utility model relates to the technical field of semiconductor material processing, in particular to a clamping jig which comprises a top plate and a bottom plate which are oppositely arranged, and each of the top plate and the bottom plate is provided with two crossed guide rails; the clamping column comprises a first end and a second end, and the first end and the second end of the clamping column are slidably connected to the guide rails of the top plate and the bottom plate respectively; the number of the clamping columns is four, every two clamping columns form a group, and the clamping columns in the same group are arranged on the same guide rail; the driving devices are respectively arranged at the end parts of the guide rails and are used for driving the clamping columns to slide along the guide rails; the driving device drives the clamping columns to slide oppositely to form clamping force. The clamping jig provided by the utility model is suitable for clamping liquid medicine barrels with different shapes and specifications, so that the polishing liquid can be automatically shaken up.

Description

Technical Field

[0001] This application relates to the field of semiconductor material processing technology, and in particular to a clamping fixture. Background Technology

[0002] In the field of semiconductor device manufacturing, composite substrates obtained by bonding homogeneous or heterogeneous wafers using bonding technology have extremely wide applications. One of the key steps in bonding technology is polishing the two wafers to be bonded, aiming to achieve atomic-level flatness on the bonding surfaces. Currently, chemical mechanical polishing (CMP) is commonly used to achieve this goal, and in this process, the uniformity of the polishing slurry plays a decisive role in the final polishing quality.

[0003] However, polishing slurries have a significant problem: the abrasive particles within them are highly prone to settling. Therefore, before commencing the polishing process, the slurry must be shaken to ensure its uniformity. However, in actual industrial production environments, a thorny problem arises: the shapes of the containers used for polishing slurries from different manufacturers and batches are not uniform. This variation in shape presents significant challenges in designing and implementing automated shaking devices and processes. Because automated shaking devices are typically designed and optimized based on specific container shapes and dimensions, it is difficult to achieve effective shaking using a universal mechanical structure and motion pattern when the container shape is inconsistent. For example, some containers may be cylindrical, while others may be square or other irregular shapes. This makes it difficult to find a universally applicable method and device to accommodate all situations when fixing, rotating, or agitating the container to shake the polishing slurry. Utility Model Content

[0004] The purpose of this utility model is to provide a clamping fixture suitable for clamping liquid containers of different shapes and specifications, so as to realize the automatic mixing of polishing liquid.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A clamping fixture includes: a top plate and a bottom plate disposed opposite to each other, wherein the top plate and the bottom plate are each provided with two intersecting guide rails;

[0007] The clamping column includes a first end and a second end, wherein the first end and the second end of the clamping column are slidably connected to the guide rails of the top plate and the bottom plate, respectively.

[0008] The number of clamping posts is four, with two posts forming a group, and the clamping posts in the same group are set on the same guide rail;

[0009] A driving device is disposed at each end of the guide rail and is used to drive the clamping column to slide along the guide rail;

[0010] The driving device drives the clamping columns to slide towards each other to form a clamping force.

[0011] Furthermore, a frame structure is included, connected between the top plate and the bottom plate, to maintain the overall structural stability of the clamping fixture.

[0012] Furthermore, the cross-section of the clamping column is L-shaped.

[0013] Furthermore, the driving device includes an output end and a transmission end;

[0014] The output terminal is a motor or a cylinder;

[0015] The transmission end is a connecting rod;

[0016] One end of the connecting rod is connected to the output end, and the other end of the connecting rod is connected to the clamping post.

[0017] Furthermore, a pressure sensor is provided between the output end and the connecting rod, or between the connecting rod and the clamping post, or on the clamping post.

[0018] Furthermore, it also includes a pressure plate for applying pressure longitudinally in the clamping fixture.

[0019] Furthermore, the pressure plate is disposed between the top plate and the bottom plate.

[0020] Furthermore, it also includes columns, the two ends of which are respectively connected to the top plate and the bottom plate;

[0021] The pressure plate is inserted through the column.

[0022] Furthermore, a locking structure is provided on the column to fix the position of the pressure plate on the column.

[0023] Furthermore, the column is a screw, and the locking structure is a nut.

[0024] The beneficial effects of this utility model are:

[0025] The clamping fixture provided in this application, through the cross-arranged guide rails on the top and bottom plates and four clamping columns slidably connected to the guide rails, can adapt to liquid tanks of different shapes and specifications. Whether it is a common round or square shape, or other irregular shapes, they can be effectively clamped, greatly solving the problem caused by the inconsistency of liquid tank shapes in automatic liquid shaking, improving the equipment's compatibility with various polishing liquid tanks, and reducing the time and cost of frequently changing or adjusting the clamping device due to liquid tank compatibility issues. The L-shaped cross-section of the clamping columns can better fit the tank wall. In addition, the pressure plate applies pressure in the longitudinal direction, and the drive device precisely controls the clamping force of the clamping columns, so that the liquid tank remains stable in both the horizontal and vertical directions after clamping, effectively preventing uneven shaking caused by shaking and displacement during automatic liquid shaking, thereby ensuring the quality of polishing liquid shaking. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural diagram of the clamping fixture of this utility model;

[0027] Figure 2 This is a side view of the clamping fixture of this utility model;

[0028] Figure 3 This is a schematic diagram of the base plate structure of the clamping fixture of this utility model.

[0029] In the diagram: 1. Frame structure; 2. Guide rail; 3. Clamping column; 4. Pressure plate; 5. Column; 6. Base plate; 7. Liquid tank; 8. Connecting rod; 9. Output end; 10. Top plate. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0031] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0034] In the semiconductor wafer polishing slurry processing, the varying shapes of the slurry containers from different manufacturers and batches cause significant inconvenience for automated slurry mixing. This embodiment aims to solve this problem by effectively clamping slurry containers of different shapes and sizes, thus facilitating the smooth implementation of the automated slurry mixing process.

[0035] See Figures 1 to 3 The clamping fixture includes a top plate 10 and a bottom plate 6 arranged opposite to each other, both of which are equipped with two intersecting guide rails 2. The guide rails 2 provide the basic structure for the subsequent installation and sliding of the clamping posts 3. The intersecting layout of the guide rails 2 allows the clamping posts 3 to be flexibly adjusted in different directions, thereby adapting to the clamping requirements of various shaped medicine tanks 7. For example, for a square medicine tank, the position of the clamping posts on the intersecting guide rails can be adjusted to clamp the four sides of the square; for a round medicine tank, stable clamping can be achieved by evenly distributing four clamping posts in the circumferential direction.

[0036] The top plate 10 and the bottom plate 6 are made of metal materials with certain strength and rigidity, such as aluminum alloy or stainless steel, to ensure that they will not deform during clamping. Meanwhile, a frame structure 1 connects the top plate 10 and the bottom plate 6. The frame structure 1 can be a welded or bolted metal frame, whose function is to maintain the stability of the overall structure of the clamping fixture, preventing the structure from loosening or deforming due to external forces during clamping and subsequent operations, further enhancing the reliability and durability of the fixture.

[0037] In this embodiment, there are four clamping columns 3, arranged in pairs, with each pair of clamping columns 3 positioned on the same guide rail 2. The clamping columns have an L-shaped cross-section. This design allows the clamping columns 3 to better conform to the wall of the liquid container 7 when in contact, increasing the stability and reliability of the clamping. The first and second ends of the clamping columns 3 are slidably connected to the guide rails 2 of the top plate 10 and the bottom plate 6, respectively. Through this sliding connection, the clamping columns 3 can flexibly slide towards or away from each other along the guide rails under the action of the driving device.

[0038] The drive unit is located at the end of the guide rail 2 on the base plate 6, and includes an output end 9 and a transmission end. The output end 9 can be a motor or a cylinder, selected according to the actual application scenario and requirements. The transmission end is a connecting rod 8, one end of which is connected to the output end 9, and the other end is connected to the clamping column 3. Through this connection method, the power of the drive unit can be effectively transmitted to the clamping column 3, driving the clamping column 3 to slide along the guide rail 2, thereby forming a clamping force on the medicine tank 7. A pressure sensor is installed between the output end 9 and the connecting rod 8, or between the connecting rod 8 and the clamping column 3, or on the clamping column 3, to monitor the magnitude of the clamping force in real time, ensuring that the clamping force can stably fix the medicine tank 7 without being too large and damaging the medicine tank 7 or the fixture itself.

[0039] The clamping fixture also includes a pressure plate 4, which applies pressure longitudinally to the fixture. The pressure plate 4 is positioned between the top plate 10 and the bottom plate 6, and is positioned and supported by a column 5. The two ends of the column 5 are connected to the top plate 10 and the bottom plate 6 respectively, and the pressure plate 4 passes through the column 5. This structural design allows the pressure plate 4 to move freely on the column 5 to accommodate the clamping requirements of liquid tanks 7 of different heights.

[0040] The column 5 employs a screw structure, with a corresponding locking mechanism of a nut. Once the pressure plate 4 is adjusted to the appropriate position, tightening the nut secures it to a specific location on the column 5, thereby applying stable pressure to the medicine container in the longitudinal direction. This adjustable and lockable design further enhances the clamping fixture's adaptability to medicine containers of different shapes and sizes, allowing for reliable clamping operations by adjusting the height of the pressure plate 4 and the clamping force.

[0041] During operation, first adjust the clamping column to the guide rail position according to the shape and size of the medicine tank 7, check the status of the drive device and pressure sensor, and adjust the height of the pressure plate 4. Then, place the medicine tank in the center of the base plate 6, start the drive device to make the clamping column 3 slide and clamp along the guide rail via the connecting rod, control the clamping force with the pressure sensor and let the pressure plate apply longitudinal pressure to stabilize the tank body, and then connect the clamping fixture to the automatic shaking device to shake evenly.

[0042] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A clamping fixture, characterized in that, include: The top plate and the bottom plate are arranged opposite each other, and both the top plate and the bottom plate are provided with two intersecting guide rails; The clamping column includes a first end and a second end, wherein the first end and the second end of the clamping column are slidably connected to the guide rails of the top plate and the bottom plate, respectively. The number of clamping posts is four, with two posts forming a group, and the clamping posts in the same group are set on the same guide rail; A driving device is disposed at each end of the guide rail and is used to drive the clamping column to slide along the guide rail; The driving device drives the clamping columns to slide towards each other to form a clamping force.

2. The clamping fixture according to claim 1, characterized in that: A frame structure, connected between the top plate and the bottom plate, is used to maintain the overall structural stability of the clamping fixture.

3. The clamping fixture according to claim 1, characterized in that: The cross-section of the clamping column is L-shaped.

4. The clamping fixture according to claim 1, characterized in that: The driving device includes an output end and a transmission end; The output terminal is a motor or a cylinder; The transmission end is a connecting rod; One end of the connecting rod is connected to the output end, and the other end of the connecting rod is connected to the clamping post.

5. The clamping fixture according to claim 4, characterized in that: A pressure sensor is provided between the output end and the connecting rod, or between the connecting rod and the clamping post, or on the clamping post.

6. The clamping fixture according to claim 1, characterized in that: It also includes a pressure plate for applying pressure longitudinally in the clamping fixture.

7. The clamping fixture according to claim 6, characterized in that: The pressure plate is located between the top plate and the bottom plate.

8. The clamping fixture according to claim 7, characterized in that: It also includes columns, with both ends of the columns connected to the top plate and the bottom plate, respectively; The pressure plate is inserted through the column.

9. The clamping fixture according to claim 8, characterized in that: A locking structure is provided on the column to fix the position of the pressure plate on the column.

10. The clamping fixture according to claim 9, characterized in that: The column is a screw, and the locking structure is a nut.

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