Seed crystal water-cooling shaft rotating device, crystal growth furnace and seed crystal growth system
By employing a drive mechanism and a water-cooled ring mechanism to connect the seed crystal water-cooling shaft with a magnetic fluid in a silicon carbide crystal growth furnace, the problems of water leakage and seepage caused by hard contact of rotating parts were solved, achieving uniform force and efficient crystal growth.
Patent Information
- Application Number
- CN202520401704.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-10
- Publication Date
- 2026-01-23
- Estimated Expiration
- 2035-03-10
AI Technical Summary
In existing silicon carbide crystal growth furnaces, the hard contact between the rotating parts and the seed crystal shaft causes water leakage and seepage problems, which affect crystal growth.
The seed crystal water-cooled shaft is connected by a drive mechanism, a water-lubricating ring mechanism, and a magnetohydrodynamic connection to avoid hard contact, achieve flexible limiting and sealing, and ensure uniform force distribution.
This solves the problems of water leakage and seepage, ensures uniform force on the seed crystal axis, reduces production costs, avoids rotational function deviation, and improves crystal growth quality.
Smart Images
Figure CN223823740U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of devices used for single crystal growth, specifically relating to single crystal growth equipment, and particularly to a seed crystal water-cooled shaft rotation device, a crystal growth furnace, and a seed crystal growth system. Background Technology
[0002] Due to process requirements, the seed crystal shaft needs to rotate. In order to avoid overheating and damage to the end of the seed crystal shaft, the seed crystal shaft needs to be continuously cooled by water. In the existing silicon carbide crystal growth furnace, the seed crystal shaft is directly connected by a rotating component, and water is circulated inside the seed crystal shaft. However, the hard contact between the rotating component and the seed crystal shaft will cause deviation in the rotation function, resulting in technical problems such as water leakage and seepage, which will also affect the normal growth of the crystal.
[0003] Therefore, there is an urgent need to develop a new seed crystal water-cooled shaft rotation device, crystal growth furnace and seed crystal growth system to solve the technical problem of water leakage caused by the direct connection of the rotating parts to the seed crystal shaft.
[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0005] This disclosure provides at least one seed crystal water-cooled shaft rotation device, a crystal growth furnace, and a seed crystal growth system.
[0006] In a first aspect, embodiments of this disclosure provide a seed crystal water-cooled shaft rotation device, comprising: a lantern frame, a magnetic fluid, a drive mechanism, a water-cooled slip ring mechanism, a water-cooled transfer shaft, and a seed crystal water-cooled shaft; wherein the lantern frame is connected to the magnetic fluid, the drive mechanism is connected to the lantern frame, and the water-cooled slip ring mechanism is mounted on the lantern frame; the drive mechanism is rotatably connected to the water-cooled slip ring mechanism, the water-cooled transfer shaft is rotatably connected to the drive mechanism, and the seed crystal water-cooled shaft passes through the magnetic fluid and is connected to the water-cooled transfer shaft; the interior of the water-cooled slip ring mechanism communicates with the interior of the water-cooled transfer shaft, and the interior of the water-cooled transfer shaft communicates with the seed crystal water-cooled shaft; the drive mechanism is configured to drive the water-cooled slip ring mechanism to rotate, thereby driving the water-cooled transfer shaft and the seed crystal water-cooled shaft to rotate, and the liquid inside the water-cooled slip ring mechanism, the water-cooled transfer shaft, and the seed crystal water-cooled shaft circulates.
[0007] In one optional embodiment, the driving mechanism includes: a rotary drive component, a reducer, a driving wheel, a driven wheel, and a timing belt; the rotary drive component is connected to the lantern frame, and the rotary drive component is connected to the driving wheel via the reducer; the driven wheel is mounted on the water skid ring mechanism, and the driving wheel and the driven wheel are connected by the timing belt; the rotary drive component transmits power to the water skid ring mechanism through the reducer, the driving wheel, the timing belt, and the driven wheel to drive the water skid ring mechanism to rotate.
[0008] In one optional embodiment, the water-cooled ring mechanism includes: a water-cooled ring body, a water-cooled ring shaft, and a first water inlet / outlet connector; the water-cooled ring body is connected to the lantern frame, the water-cooled ring shaft is rotatably connected to the water-cooled ring body, and the water-cooled ring shaft is connected to the driven wheel; the first water inlet / outlet connector connects the interior of the water-cooled ring body and the interior of the water-cooled intermediate shaft; the water-cooled ring shaft is adapted to rotate relative to the water-cooled ring body so that the liquid inside the water-cooled ring body circulates with the liquid inside the water-cooled intermediate shaft through the first water inlet / outlet connector.
[0009] In one optional embodiment, the water-cooled rotating shaft is connected to the water-cooled rotating shaft in sequence via a first Teflon pressure block, a first quartz glass, and a first sealing ring.
[0010] In one optional embodiment, the water-cooled transfer shaft is provided with a second water inlet / outlet connector, and the second water inlet / outlet connector connects the first water inlet / outlet connector and the interior of the water-cooled transfer shaft.
[0011] In one optional embodiment, the water-cooled transfer shaft is connected to the seed crystal water-cooled shaft in sequence via a second Teflon block, a second quartz glass, and a second sealing ring.
[0012] In one optional embodiment, the seed crystal water-cooling shaft is provided with a third water inlet / outlet connector, and the third water inlet / outlet connector connects the second water inlet / outlet connector and the interior of the seed crystal water-cooling shaft.
[0013] Secondly, this disclosure also provides a crystal growth furnace, which includes: a main furnace body and a seed crystal water-cooled shaft rotation device as described above; the seed crystal water-cooled shaft rotation device is connected to the main furnace body.
[0014] Thirdly, embodiments of this disclosure also provide a seed crystal growth system, which includes: a control module and a seed crystal water-cooled shaft rotation device as described above; wherein the seed crystal water-cooled shaft rotation device is electrically connected to the control module; and the control module is configured to drive the seed crystal water-cooled shaft rotation device to operate.
[0015] The beneficial effects of this utility model are that by installing the drive mechanism and the water slip ring mechanism on the lantern frame, and flexibly connecting the water slip ring mechanism and the water-cooled transfer shaft by the drive mechanism, and connecting the water-cooled transfer shaft to the seed crystal water-cooled shaft, the rotating parts are prevented from directly contacting the seed crystal shaft. Furthermore, the magnetic fluid can both provide flexible positioning and achieve a sealing function, ensuring that the seed crystal water-cooled shaft is subjected to uniform force and overcoming the problems of water leakage and seepage.
[0016] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0019] Figure 1 This is a structural diagram of a seed crystal water-cooled shaft rotation device provided in an embodiment of the present disclosure;
[0020] Figure 2 Provided for the embodiments of this disclosure Figure 1 A cross-sectional view along the AA direction;
[0021] Figure 3 Provided for the embodiments of this disclosure Figure 1 Cross-sectional view along the BB direction;
[0022] Figure 4 This is a schematic diagram of a seed crystal growth system provided in an embodiment of the present disclosure.
[0023] In the picture:
[0024] 1. Lantern stand;
[0025] 2. Magnetofluid;
[0026] 3. Drive mechanism; 31. Rotary drive component; 32. Reducer; 33. Drive pulley; 34. Driven pulley; 35. Synchronous belt;
[0027] 4. Water slip ring mechanism; 41. Water slip ring body; 42. Water slip ring shaft; 43. First inlet / outlet water connector; 44. First Teflon pressure block; 45. First quartz glass; 46. First sealing ring; 47. First transmission seat; 48. First transmission pin; 49. First fixed seat;
[0028] 5. Water-cooled intermediate shaft; 51. Second inlet / outlet water connector; 52. Second Teflon clamp; 53. Second quartz glass; 54. Second sealing ring;
[0029] 6. Seed crystal water-cooled shaft; 61. Third inlet / outlet water connector. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0031] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0032] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be restrictive. As used herein, the singular articles “a,” “one,” and “the” may also be intended to include plural forms unless otherwise clearly stated above.
[0033] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0034] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0035] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0036] like Figures 1 to 3As shown, at least one embodiment provides a seed crystal water-cooled shaft rotation device, which includes: a lantern frame 1, a magnetic fluid 2, a drive mechanism 3, a water-cooled ring mechanism 4, a water-cooled transfer shaft 5, and a seed crystal water-cooled shaft 6; wherein the lantern frame 1 is connected to the magnetic fluid 2, the drive mechanism 3 is connected to the lantern frame 1, and the water-cooled ring mechanism 4 is mounted on the lantern frame 1; the drive mechanism 3 is rotatably connected to the water-cooled ring mechanism 4, the water-cooled transfer shaft 5 is rotatably connected to the drive mechanism 3, and the seed crystal water-cooled shaft 6 passes through the magnetic fluid 2 and is connected to the water-cooled transfer shaft 5; the interior of the water-cooled ring mechanism 4 communicates with the interior of the water-cooled transfer shaft 5, and the interior of the water-cooled transfer shaft 5 communicates with the seed crystal water-cooled shaft 6; the drive mechanism 3 is configured to drive the water-cooled ring mechanism 4 to rotate, thereby driving the water-cooled transfer shaft 5 and the seed crystal water-cooled shaft 6 to rotate, and the liquid inside the water-cooled ring mechanism 4, the water-cooled transfer shaft 5, and the seed crystal water-cooled shaft 6 circulates.
[0037] Specifically, the magnetic fluid 2 is fastened to the frame by screws, and the seed crystal water-cooling shaft 6 is fastened to the magnetic fluid 2 by screws.
[0038] In at least one embodiment, by mounting the drive mechanism 3 and the water-cooled ring mechanism 4 on the lantern frame 1, and flexibly connecting the water-cooled ring mechanism 4 and the water-cooled transfer shaft 5 by the drive mechanism 3, and connecting the water-cooled transfer shaft 5 to the seed crystal water-cooled shaft 6, the rotating parts are prevented from making direct hard contact with the seed crystal shaft. Furthermore, the magnetic fluid 2 can both provide flexible positioning and achieve a sealing function, ensuring that the seed crystal water-cooled shaft 6 is subjected to uniform force, overcoming problems such as water leakage and seepage, thereby reducing production costs.
[0039] In at least one embodiment, please refer to Figure 1 The drive mechanism 3 includes: a rotary drive component 31, a reducer 32, a drive wheel 33, a driven wheel 34, and a timing belt 35; the rotary drive component 31 is connected to the lantern frame 1, and the rotary drive component 31 is connected to the drive wheel 33 through the reducer 32; the driven wheel 34 is mounted on the water skid ring mechanism 4, and the drive wheel 33 and the driven wheel 34 are connected by the timing belt 35; the rotary drive component 31 transmits power to the water skid ring mechanism 4 through the reducer 32, the drive wheel 33, the timing belt 35, and the driven wheel 34 to drive the water skid ring mechanism 4 to rotate.
[0040] Specifically, the rotary drive component 31 can be a servo motor.
[0041] Specifically, the rotary drive component 31 is connected to the reducer 32, the reducer 32 is connected to the drive wheel 33, the reducer 32 is fixed on the lantern frame 1, and the drive wheel 33 and the driven wheel 34 are driven by the synchronous belt 35.
[0042] Specifically, the driven wheel 34 is fastened to the water-cooled rotating shaft 5 by screws.
[0043] In at least one embodiment, please refer to Figure 2 The water-cooled ring mechanism 4 includes: a water-cooled ring body 41, a water-cooled ring rotating shaft 42, and a first water inlet / outlet connector 43; the water-cooled ring body 41 is connected to the lantern frame 1, the water-cooled ring rotating shaft 42 is rotatably connected to the water-cooled ring body 41, and the water-cooled ring rotating shaft 42 is connected to the driven wheel 34; the first water inlet / outlet connector 43 connects the interior of the water-cooled ring body 41 and the interior of the water-cooled intermediate shaft 5; the water-cooled ring rotating shaft 42 is adapted to rotate relative to the water-cooled ring body 41 so that the liquid in the water-cooled ring body 41 circulates with the liquid in the water-cooled intermediate shaft 5 through the first water inlet / outlet connector 43.
[0044] Specifically, the water slide ring body 41 is fixed on the lantern frame 1, the first transmission seat 47 is fixed on the driven wheel 34, the first transmission pin 48 is fixed on the first transmission seat 47, and the first fixed seat 49 connects the first transmission pin 48 and the water slide ring shaft 42, thereby driving the water slide ring shaft 42 to rotate.
[0045] Specifically, the first water inlet / outlet connector 43 is fixed on the water slip ring body 41, and the first water inlet / outlet connector 43 is internally connected to the water-cooled transfer shaft 5 through a water pipe.
[0046] In at least one embodiment, please refer to Figure 2 The water-cooled rotating shaft 42 is connected to the water-cooled rotating shaft 5 in sequence through the first Teflon pressure block 44, the first quartz glass 45, and the first sealing ring 46.
[0047] Specifically, the first Teflon block 44, the first quartz glass 45, and the first sealing ring 46 are locked onto the water-cooled rotating shaft 5 by the pressure cap nut, serving as a flexible connection and sealing function.
[0048] In at least one embodiment, please refer to Figure 3 The water-cooled transfer shaft 5 is provided with a second water inlet / outlet connector 51, and the second water inlet / outlet connector 51 connects the first water inlet / outlet connector 43 and the interior of the water-cooled transfer shaft 5.
[0049] Specifically, the second water inlet / outlet connector 51 is fixed on the water-cooled rotating shaft 5, and the second water inlet / outlet connector 51 is connected to the first water inlet / outlet connector 43 through a water pipe.
[0050] Specifically, the water-cooled transfer shaft 5 is mounted on the lantern frame 1 via a bearing seat.
[0051] In at least one embodiment, please refer to Figure 2 The water-cooled transfer shaft 5 is connected to the seed crystal water-cooled shaft 6 in sequence through the second Teflon pressure block 52, the second quartz glass 53, and the second sealing ring 54.
[0052] Specifically, the second Teflon pressure block 52, the second quartz glass 53, and the second sealing ring 54 are locked onto the seed crystal water-cooling shaft 6 by the pressure cap nut, which serves as a flexible connection and a seal.
[0053] In at least one embodiment, please refer to Figure 3 The seed crystal water-cooling shaft 6 is provided with a third water inlet / outlet connector 61, and the third water inlet / outlet connector 61 connects the second water inlet / outlet connector 51 and the interior of the seed crystal water-cooling shaft 6.
[0054] Specifically, the third water inlet / outlet connector 61 is fixed on the seed crystal water cooling shaft 6, and the third water inlet / outlet connector 61 is connected to the second water inlet / outlet connector 51 through a water pipe.
[0055] Specifically, the water-cooled ring shaft 42, the water-cooled intermediate shaft 5, and the seed crystal water-cooled shaft 6 rotate synchronously to achieve liquid circulation.
[0056] Specifically, the second transmission pin and the second fixed seat are fixed on the seed crystal water-cooled shaft 6, and the Y-shaped transmission seat connects the water-cooled transfer shaft 5, the second transmission pin, and the seed crystal water-cooled shaft 6.
[0057] Based on the same technological concept, such as Figures 1 to 3 As shown in the embodiments of this disclosure, a crystal growth furnace is also provided, which includes: a main furnace body and a seed crystal water-cooled shaft rotation device as described above; the seed crystal water-cooled shaft rotation device is connected to the main furnace body.
[0058] Based on the same technological concept, such as Figures 1 to 4 As shown, this disclosure also provides a seed crystal growth system, which includes: a control module and a seed crystal water-cooled shaft rotation device as described above; wherein the seed crystal water-cooled shaft rotation device is electrically connected to the control module; the control module is configured to drive the seed crystal water-cooled shaft rotation device to work.
[0059] In summary, this utility model mounts the drive mechanism and water-cooled slip ring mechanism on the lantern frame, and flexibly connects the water-cooled slip ring mechanism and the water-cooled transfer shaft through the drive mechanism. Simultaneously, it connects the water-cooled transfer shaft to the seed crystal water-cooled shaft, avoiding direct hard contact between the rotating parts and the seed crystal shaft. Furthermore, the magnetic fluid provides both flexible positioning and sealing, ensuring uniform force distribution on the seed crystal water-cooled shaft and overcoming problems such as leakage and seepage, thereby reducing production costs. Compared to traditional equipment, this model has a simple and compact structure and is easy to install. The drive mechanism is independently installed with a reasonable structural design, effectively preventing problems such as water leakage from the water-cooled slip ring. The flexible connection between the rotational power and the rotational shaft avoids potential deviations in rotational function and uneven rotation.
[0060] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0061] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0062] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.
[0063] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.
[0064] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A seed crystal water-cooled shaft rotation device, characterized in that, include: The components include a lantern frame (1), a magnetic fluid system (2), a drive mechanism (3), a water-cooled slip ring mechanism (4), a water-cooled transfer shaft (5), and a seed crystal water-cooled shaft (6); among which... The lantern frame (1) is connected to the magnetic fluid (2), the drive mechanism (3) is connected to the lantern frame (1), and the water sliding ring mechanism (4) is installed on the lantern frame (1); The drive mechanism (3) is rotatably connected to the water slip ring mechanism (4), the water-cooled transfer shaft (5) is rotatably connected to the drive mechanism (3), and the seed crystal water-cooled shaft (6) passes through the magnetic fluid (2) and is connected to the water-cooled transfer shaft (5); The interior of the water-cooled sliding ring mechanism (4) is connected to the interior of the water-cooled transfer shaft (5), and the interior of the water-cooled transfer shaft (5) is connected to the seed crystal water-cooling shaft (6); The drive mechanism (3) is configured to drive the water slide ring mechanism (4) to rotate, thereby driving the water-cooled transfer shaft (5) and the seed crystal water-cooled shaft (6) to rotate, and causing the liquid in the water slide ring mechanism (4), the water-cooled transfer shaft (5), and the seed crystal water-cooled shaft (6) to circulate.
2. The seed crystal water-cooled shaft rotation device as described in claim 1, characterized in that, The drive mechanism (3) includes: a rotary drive component (31), a reducer (32), a drive wheel (33), a driven wheel (34), and a timing belt (35); The rotary drive (31) is connected to the lantern frame (1), and the rotary drive (31) is connected to the drive wheel (33) through the reducer (32); The driven wheel (34) is mounted on the water slide ring mechanism (4), and the driving wheel (33) and the driven wheel (34) are connected by a timing belt (35); The rotary drive (31) transmits power to the water slip ring mechanism (4) through the reducer (32), drive wheel (33), timing belt (35), and driven wheel (34) to drive the water slip ring mechanism (4) to rotate.
3. The seed crystal water-cooled shaft rotation device as described in claim 2, characterized in that, The water slip ring mechanism (4) includes: a water slip ring body (41), a water slip ring shaft (42), and a first inlet / outlet water connector (43). The water-slip ring body (41) is connected to the lantern frame (1), the water-slip ring shaft (42) is rotatably connected to the water-slip ring body (41), and the water-slip ring shaft (42) is connected to the driven wheel (34); The first water inlet / outlet connector (43) connects the interior of the water slip ring body (41) and the interior of the water-cooled transfer shaft (5); The water-cooled ring rotating shaft (42) is adapted to rotate relative to the water-cooled ring body (41) so that the liquid in the water-cooled ring body (41) circulates with the liquid in the water-cooled rotating shaft (5) through the first water inlet / outlet connector (43).
4. The seed crystal water-cooled shaft rotation device as described in claim 3, characterized in that, The water-cooled rotating shaft (42) is connected to the water-cooled rotating shaft (5) in sequence through the first Teflon pressure block (44), the first quartz glass (45), and the first sealing ring (46).
5. The seed crystal water-cooled shaft rotation device as described in claim 4, characterized in that, The water-cooled transfer shaft (5) is provided with a second water inlet / outlet connector (51), and the second water inlet / outlet connector (51) connects the first water inlet / outlet connector (43) and the interior of the water-cooled transfer shaft (5).
6. The seed crystal water-cooled shaft rotation device as described in claim 5, characterized in that, The water-cooled transfer shaft (5) is connected to the seed crystal water-cooled shaft (6) in sequence through the second Teflon pressure block (52), the second quartz glass (53), and the second sealing ring (54).
7. The seed crystal water-cooled shaft rotation device as described in claim 6, characterized in that, The seed crystal water-cooling shaft (6) is provided with a third water inlet / outlet connector (61), and the third water inlet / outlet connector (61) connects the second water inlet / outlet connector (51) and the interior of the seed crystal water-cooling shaft (6).
8. A crystal growth furnace, characterized in that, include: The main furnace body and the seed crystal water-cooled shaft rotating device as described in any one of claims 1-7; The seed crystal water-cooled shaft rotation device is connected to the main furnace body.
9. A seed crystal growth system, characterized in that, include: The control module and the seed crystal water-cooled shaft rotation device as described in any one of claims 1-7; in The seed crystal water-cooled shaft rotation device is electrically connected to the control module; The control module is configured to drive the seed crystal water-cooling shaft rotation device.