Chip quality detection equipment

By designing a chip quality inspection device with a heating chamber and heating plate during the chip manufacturing process, the problems of efficiency and accuracy in chip heat resistance testing have been solved. This enables the automatic rejection of chips with insufficient heat resistance, thereby improving testing efficiency and resource utilization.

CN223827586UActive Publication Date: 2026-01-23昆山日月同芯半导体有限公司
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Patent Information

Application Number
CN202520034168.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-06
Publication Date
2026-01-23
Estimated Expiration
2035-01-06

AI Technical Summary

Technical Problem

In the current chip manufacturing process, it is too wasteful to inspect the appearance of chips on a single conveyor line, and it is difficult to efficiently test the heat resistance of chips.

Method used

A chip quality inspection device was designed, comprising a turntable, a heating chamber, and a heating plate. The chip is heated to expand the component, and an inspection camera is used to detect whether the chip has cracks. Automatic feeding is achieved by combining a connecting rod, a feeding cylinder, and a feeding plate.

Benefits of technology

This technology enables the timely removal of chips with insufficient heat resistance, avoiding resource waste and improving detection efficiency and accuracy.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses chip quality detection equipment, which is applied to the field of chip production and comprises a turntable, six feeding ports are formed in the surface of the turntable, and a plurality of supporting rods fixedly connected with the turntable are arranged in the feeding ports; by arranging the heating bin and the heating plate, chips can be heated, components in the chips can be promoted to expand by heating the chips, the chips with insufficient heat resistance can crack at high temperature, the quality of the chips can be conveniently detected by a detection camera after blanking, the chips with insufficient heat resistance can be timely removed, and the production efficiency is improved. And later-stage resource waste for circuit detection (high temperature generated by heating the chip can enable components in the chip to expand, and components in the chip with insufficient heat resistance are expanded to cause mutual extrusion to cause cracks of the chip) is avoided. And by arranging a connecting rod, a discharging air cylinder and a discharging plate, the chip can be pushed out after being heated, and discharging of the chip can be actively completed.
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Description

Technical Field

[0001] This utility model relates to the field of chip manufacturing, and in particular to a chip quality testing device. Background Technology

[0002] A chip generally refers to the carrier of an integrated circuit, and is the result of the integrated circuit's design, manufacturing, packaging, and testing. It is typically a self-contained unit ready for immediate use; a chip is also called a microcircuit. During the production process, chips are transported via conveyor belts, and quality inspection cameras check the chips' integrity during transport. However, using a single conveyor line for chip appearance inspection is too wasteful. To increase the versatility of inspection capabilities, we propose a chip quality inspection device. Utility Model Content

[0003] The purpose of this invention is to provide a chip quality inspection device, which has the advantage of being able to perform heating inspection on chips.

[0004] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a chip quality inspection device, including a turntable, the surface of which has six feeding ports, and the interior of each feeding port has several support rods fixedly connected to the turntable. A heating chamber is fitted onto the surface of the turntable, and heating plates are fixedly installed at the top and bottom of the inner cavity of the heating chamber. A temperature controller is installed on the outer side of the heating chamber. A connecting rod is fitted onto the interior of the turntable, and two feeding cylinders are fixedly installed on the surface of the connecting rod. The output end of each feeding cylinder is fixedly connected to a feeding plate.

[0005] Using the above technical solution, the chip can be heated by setting up a heating chamber and a heating plate. Heating the chip causes the components inside to expand. Chips with insufficient heat resistance will crack under the heating of the plate, facilitating the quality inspection of the chips by a camera after unloading. This allows for the timely rejection of chips with insufficient heat resistance, avoiding wasted resources for later circuit testing (the high temperature generated by heating the chip causes the components inside to expand; in chips with insufficient heat resistance, the expanding components will compress each other, causing cracks). By setting up a connecting rod, a feeding cylinder, and a feeding plate, the chip can be ejected after heating, thus actively completing the chip unloading process.

[0006] The present invention is further configured such that: a connecting pipe is fixedly connected to the bottom of the turntable, and a gear one is fixedly sleeved on the surface of the connecting pipe, and the gear one meshes with a gear two.

[0007] Using the above technical solution, through the arrangement of the connecting tube, gear one and gear two, under the drive of the drive motor, gear two rotates to drive gear one to rotate, gear one rotates to drive the connecting tube to rotate, and the rotation of the connecting tube can drive the turntable on its top and the chip inside to rotate.

[0008] The present invention is further configured such that: a drive motor is mounted on the bottom of the turntable via a bracket, and the output end of the drive motor is fixedly sleeved inside the second gear.

[0009] By adopting the above technical solution, a drive motor is set up to drive the second gear to rotate, and the second gear can drive the first gear and its internal connecting pipe to rotate.

[0010] The present invention is further configured such that: a support plate is provided at the bottom of the turntable, and the interior of the support plate is sleeved with the connecting pipe.

[0011] The above technical solution uses a support plate to provide support for the turntable.

[0012] The present invention is further configured such that: a groove is provided on the top of the support plate, and two sliders fixedly connected to the turntable are slidably connected inside the groove.

[0013] The above technical solution uses a chute and a slider to assist the turntable in rotating at a fixed position.

[0014] The present invention is further configured such that: a base plate is fixedly connected to the bottom end of the connecting rod, and three support legs fixedly connected to the support plate are fixedly connected to the top of the base plate.

[0015] The above technical solution uses a base plate and outriggers to provide stable support for the support plate.

[0016] The present invention is further configured such that: two support rods are fixedly connected to the surface of the base plate, and the bottom of the heating chamber is fixedly connected to the two support rods.

[0017] The above technical solution uses support rods to provide stable support for the heating chamber.

[0018] The present invention is further configured such that: both sides of the turntable are provided with conveyor belts, and detection cameras are installed on both conveyor belts.

[0019] Using the above technical solution, two conveyor belts are used to transport chip loading and unloading respectively, while two inspection cameras are used to inspect the appearance of unheated chips and heated chips respectively. By inspecting the appearance of heated chips, defects in the chips after high temperature can be found.

[0020] The conveyor belt used for feeding chips can work with a gripping robot to place the chips onto the support rod.

[0021] In summary, this utility model has the following beneficial effects:

[0022] This invention heats the chip by setting up a heating chamber and a heating plate. Heating the chip causes the components inside the chip to expand. Chips with insufficient heat resistance will crack under the heating of the heating plate. This makes it easier for the inspection camera to detect the quality of the chip after it is cut, so that chips with insufficient heat resistance can be rejected in time, avoiding the waste of resources for circuit testing later. (The high temperature generated by heating the chip can cause the components inside the chip to expand. The expansion of the internal components of chips with insufficient heat resistance will cause them to squeeze each other, resulting in cracks in the chip.)

[0023] By setting up a connecting rod, a feeding cylinder, and a feeding plate, the chip can be pushed out after being heated, thus actively completing the chip feeding process. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural view of the present invention;

[0025] Figure 2 This is a schematic diagram of the support plate of this utility model;

[0026] Figure 3 This is a cross-sectional view of the support plate of this utility model;

[0027] Figure 4 This is a top sectional view of the heating chamber of this utility model;

[0028] Figure 5 This is a schematic diagram of the heating chamber of this utility model;

[0029] Figure 6 This is a top view of the turntable of this utility model.

[0030] Reference numerals in the attached diagram: 1. Turntable; 2. Feeding port; 3. Support rod; 4. Heating chamber; 5. Heating plate; 6. Temperature controller; 7. Connecting rod; 8. Discharge cylinder; 9. Discharge plate; 10. Connecting pipe; 11. Gear 1; 12. Gear 2; 13. Drive motor; 14. Support plate; 15. Slide groove; 16. Sliding block; 17. Base plate; 18. Support leg; 19. Support rod. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to the accompanying drawings.

[0032] Example 1:

[0033] refer to Figures 1-6A chip quality inspection device includes a turntable 1 with six feeding ports 2 on its surface. Each feeding port 2 has several support rods 3 fixedly connected to the turntable 1. A heating chamber 4 is fitted onto the surface of the turntable 1. Heating plates 5 are fixedly installed at the top and bottom of the inner cavity of the heating chamber 4, and a temperature controller 6 is installed on the outer side of the heating chamber 4. A connecting rod 7 is fitted inside the turntable 1, and two feeding cylinders 8 are fixedly installed on the surface of the connecting rod 7. A feeding plate 9 is fixedly connected to the output end of the feeding cylinders 8. By setting up the heating chamber 4 and heating plates 5, the chip can be heated. Heating the chip causes the components inside the chip to expand. Chips with insufficient heat resistance will crack under the heating of the heating plates 5, facilitating the quality inspection of the chip after feeding and timely rejection of chips with insufficient heat resistance, thus avoiding the waste of resources for later circuit testing (the high temperature generated by heating the chip causes the components inside the chip to expand; the expansion of the components inside the chip with insufficient heat resistance will cause the chip to crack due to mutual compression).

[0034] By setting up a connecting rod 7, a feeding cylinder 8, and a feeding plate 9, the chip can be pushed out after being heated, thus actively completing the chip feeding process.

[0035] Furthermore, a connecting pipe 10 is fixedly connected to the bottom of the turntable 1, and a gear 11 is fixedly sleeved on the surface of the connecting pipe 10. The gear 11 meshes with a gear 2 12. Through the arrangement of the connecting pipe 10, the gear 11 and the gear 2 12, under the drive of the drive motor 13, the rotation of the gear 2 12 drives the rotation of the gear 11, the rotation of the gear 11 drives the rotation of the connecting pipe 10, and the rotation of the connecting pipe 10 can drive the turntable 1 on its top and the chip inside it to rotate.

[0036] Furthermore, a drive motor 13 is mounted on the bottom of the turntable 1 via a bracket. The output end of the drive motor 13 is fixedly sleeved inside the gear 2 12. The drive motor 13 is used to drive the gear 2 12 to rotate. The gear 2 12 can drive the gear 11 meshing with it and the connecting pipe 10 inside it to rotate.

[0037] Furthermore, a support plate 14 is provided at the bottom of the turntable 1. The interior of the support plate 14 is fitted with the connecting pipe 10. The support plate 14 is used to provide support for the turntable 1.

[0038] Furthermore, a groove 15 is provided on the top of the support plate 14. Two sliders 16 that are fixedly connected to the turntable 1 are slidably connected inside the groove 15. The groove 15 and the sliders 16 are used to assist the turntable 1 in rotating at a fixed position.

[0039] Furthermore, a base plate 17 is fixedly connected to the bottom end of the connecting rod 7, and three support legs 18, which are fixedly connected to the top of the base plate 17, are fixedly connected to the support plate 14. The base plate 17 and the support legs 18 are used to provide stable support for the support plate 14.

[0040] Furthermore, two support rods 19 are fixedly connected to the surface of the base plate 17, and the bottom of the heating chamber 4 is fixedly connected to the two support rods 19. The support rods 19 are used to provide stable support for the heating chamber 4.

[0041] Furthermore, both sides of the turntable 1 are equipped with conveyor belts, and each conveyor belt is equipped with an inspection camera. The two conveyor belts are used to transport the chip loading and unloading respectively, while the two inspection cameras are used to inspect the appearance of the unheated chip and the heated chip respectively. By inspecting the appearance of the heated chip, defects in the chip after high temperature can be found.

[0042] The conveyor belt used for feeding chips can work with a gripping robot to place the chips onto the support rod 3.

[0043] Brief description of the usage process: When in use, chip conveyor belts are installed on both sides of turntable 1, and detection cameras are installed on the conveyor belts.

[0044] See Figure 4 On the right is a feeding conveyor belt that can be used with a robotic arm to feed the chips on the conveyor belt onto the support rod 3.

[0045] First, the right conveyor belt transports the chip to the support rod 3 inside a feeding port 2 on the surface of the turntable 1. Then, the drive motor 13 starts and its output end drives the gear 2 12 to rotate. The gear 2 12 drives the gear 1 11 to rotate. The gear 1 11 drives the connecting pipe 10 to rotate. The connecting pipe 10 drives the turntable 1 to rotate. The rotation of the turntable 1 sends the support rod 3 containing the chip into the interior of the heating chamber 4. Then, the feeding port 2 reaches the position of the right conveyor belt for feeding.

[0046] After the chip is placed inside the heating chamber 4, the two heating plates 5 inside the heating chamber 4 are controlled by the temperature controller 6 to generate heat. The heat acts on the chip; if the chip's heat resistance is insufficient, the internal components will expand, causing cracks in the chip; if the heat resistance meets the heating temperature requirements, the internal components will not show any cracking. The chip's heating temperature is set according to the actual heat resistance temperature of the chip, and no temperature limit is specified here.

[0047] After the chip is heated, the drive motor 13 starts working again to drive the heated chip to the position on the left conveyor belt. The unloading cylinder 8 corresponding to the position on the left conveyor belt starts, and its output pushes the unloading plate 9 to move to the left conveyor belt. When the unloading plate 9 moves, it pushes the chip onto the left conveyor belt. The left conveyor belt transports the chip. During the transport process, the detection camera at the top of the left conveyor belt detects whether there are cracks in the chip.

[0048] The other set of feeding cylinders 8 and feeding plates 9 are used to push out the defective chips detected by the inspection camera at the top of the right conveyor belt during the conveying process. The defective chips are not heated and are directly pushed out of the equipment.

[0049] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A chip quality inspection device, comprising a turntable (1), characterized in that: The turntable (1) has six feeding ports (2) on its surface. Inside each feeding port (2) are several support rods (3) that are fixedly connected to the turntable (1). A heating chamber (4) is fitted on the surface of the turntable (1). Heating plates (5) are fixedly installed at the top and bottom of the inner cavity of the heating chamber (4). A temperature controller (6) is installed on the outside of the heating chamber (4). A connecting rod (7) is fitted inside the turntable (1). Two feeding cylinders (8) are fixedly installed on the surface of the connecting rod (7). A feeding plate (9) is fixedly connected to the output end of the feeding cylinder (8).

2. The chip quality testing equipment according to claim 1, characterized in that: The bottom of the turntable (1) is fixedly connected to a connecting pipe (10), and a gear one (11) is fixedly sleeved on the surface of the connecting pipe (10), and the gear one (11) meshes with a gear two (12).

3. The chip quality testing equipment according to claim 2, characterized in that: The bottom of the turntable (1) is equipped with a drive motor (13) via a bracket, and the output end of the drive motor (13) is fixedly sleeved inside the gear two (12).

4. The chip quality inspection equipment according to claim 2, characterized in that: The bottom of the turntable (1) is provided with a support plate (14), and the interior of the support plate (14) is fitted with the connecting pipe (10).

5. The chip quality inspection equipment according to claim 4, characterized in that: The top of the support plate (14) is provided with a groove (15), and two sliders (16) that are fixedly connected to the turntable (1) are slidably connected inside the groove (15).

6. The chip quality inspection equipment according to claim 4, characterized in that: The bottom end of the connecting rod (7) is fixedly connected to a base plate (17), and the top of the base plate (17) is fixedly connected to three support legs (18) that are fixedly connected to the support plate (14).

7. The chip quality inspection equipment according to claim 6, characterized in that: Two support rods (19) are fixedly connected to the surface of the base plate (17), and the bottom of the heating chamber (4) is fixedly connected to the two support rods (19).