Adsorption device and transmission system

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides an adsorption device and a transmission system. The adsorption device comprises a first adsorption unit and a second adsorption unit; the first adsorption unit is provided with a first vacuum flow channel, and the first vacuum flow channel is communicated with a first pipeline; the second adsorption unit is provided with a second vacuum flow channel, and the second vacuum flow channel is communicated with a second pipeline; at least one of the first pipeline and the second pipeline can independently control on-off of air flow in the first pipeline and the second pipeline. By means of the adsorption device, the mode that two products are fed and discharged at the same time can be adopted in a production line, and the productivity is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to a kind of adsorption device and transmission system. BACKGROUND

[0002] Power module is a kind of integrated circuit module integrated power semiconductor device, package and driving chip.It is widely used in electronic field.

[0003] Power module package needs to experience the production procedure such as preparation substrate, process copper, patch, vacuum welding, plasma cleaning, detection, bonding, glue filling and solidification, forming, test, marking and so on.

[0004] In the execution of each procedure, product needs to be transported, and defective product is inevitably produced in each procedure, leading to product scrap, so that the transmission quantity of a batch of products in a procedure is different.

[0005] For example, in electroplating process, part of products will be scrapped in previous procedure, which leads to the possibility of single number or double number of a batch of products, and if the products simultaneously fed and discharged on electroplating line are double number (for example, two products are simultaneously fed and discharged), the quantity of the last fed product is indefinite (may be one or two), therefore, the existing electroplating line operation usually adopts single product feeding and discharging mode and single product adsorption mode to realize product conveying.

[0006] Therefore, the utility model provides a kind of adsorption device and transmission system, through the adsorption device, production line can adopt the mode of multiple products simultaneously feeding and discharging to improve production capacity. UTILITY MODEL CONTENT

[0007] The utility model aims at providing a kind of adsorption device and transmission system, through the adsorption device, production line can adopt the mode of multiple products simultaneously feeding and discharging to improve production capacity.

[0008] The utility model provides a kind of adsorption device, comprising: first adsorption unit and second adsorption unit;

[0009] At least one of the first adsorption unit and the second adsorption unit is arranged to move relative to the other;

[0010] The first adsorption unit has a first vacuum flow channel, and the first vacuum flow channel is communicated with a first pipeline;

[0011] The second adsorption unit has a second vacuum flow channel, and the second vacuum flow channel is communicated with a second pipeline;

[0012] At least one of the first pipe and the second pipe can independently control the opening and closing of the airflow inside.

[0013] Optionally, the adsorption device further comprises a distance adjusting unit connected to the first adsorption unit and / or the second adsorption unit, for adjusting the distance between the first adsorption unit and the second adsorption unit.

[0014] Optionally, the adsorption device further comprises an angle adjusting unit connected to the first adsorption unit and / or the second adsorption unit, for adjusting the angle of the first adsorption unit and / or the second adsorption unit.

[0015] Optionally, the adsorption device further comprises a valve arranged in the first pipe and / or the second pipe.

[0016] Optionally, the distance adjusting unit is connected to the first adsorption unit or the second adsorption unit, for driving one of the first adsorption unit and the second adsorption unit to move.

[0017] Optionally, the angle adjusting unit comprises a first rotating member connected to the first adsorption unit, for driving the first adsorption unit to rotate.

[0018] Optionally, the angle adjusting unit further comprises a second rotating member connected to the second adsorption unit, for driving the second adsorption unit to rotate.

[0019] Optionally, the adsorption device further comprises a vacuum generating unit, and the first pipe and the second pipe are in communication with the air inlet of the vacuum generating unit.

[0020] The utility model further provides a kind of transmission system, and the transmission system includes above-mentioned adsorption device.

[0021] Optionally, the transmission system further comprises a rack, a conveyor belt and a quantity detection unit.

[0022] The conveyor belt is arranged in the rack for conveying products.

[0023] The first adsorption unit and the second adsorption unit are arranged in the rack for adsorbing the products conveyed on the conveyor belt.

[0024] The quantity detection unit is arranged in the rack for detecting the quantity of the products conveyed on the conveyor belt.

[0025] With this configuration, the aforementioned adsorption device, equipped with a first adsorption unit and a second adsorption unit, can adapt to a conveying method where at least two products are simultaneously loaded and unloaded. This increases the number of products adsorbed at the same time, thereby increasing the maximum conveying speed of the conveyor belt and thus improving conveying efficiency and production capacity. Furthermore, at least one of the first and second pipes can be independently controlled to open and close, allowing at least one adsorption structure in either the first or second adsorption unit to be independently controlled to close, adapting to the adsorption of a single product and making the adsorption device more flexible in use. This configuration of the adsorption device eliminates the need for manual checks of batch quantities (odd / even) and manual patching before loading, helping to reduce manual intervention, optimize the conveying process, improve production efficiency, and enhance the automation capability of the entire conveying system. It also improves the stability of the entire conveying system, reduces the number of machine alarms and shutdowns, and mitigates downtime caused by human error, further increasing production capacity and product yield. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural diagram of a transmission system according to an embodiment of the present invention;

[0027] Figure 2 This is a structural block diagram of an adsorption device according to an embodiment of the present invention;

[0028] Figure 3 This is a three-dimensional structural diagram of an adsorption device according to an embodiment of the present invention;

[0029] Figure 4 This is a front view of the adsorption device according to an embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the frame structure of a transmission system according to an embodiment of the present invention.

[0031] In the attached diagram:

[0032] 100 - Adsorption device;

[0033] 10-First adsorption unit; 11-Suction cup; 12-Suction nozzle;

[0034] 20 - Second adsorption unit;

[0035] 30 - First Pipeline;

[0036] 40 - Second pipe;

[0037] 50 - Valve;

[0038] 60 - Vacuum generating unit; 61 - Three-way valve;

[0039] 70-Robotic arm; 71-Frame; 72-Rotating arm; 73-Drive component;

[0040] 80 - Angle adjustment unit; 81 - First rotating component; 811 - Rotating frame; 82 - Second rotating component; 83 - Base; 84 - Mounting seat; 85 - Slide rail;

[0041] 90 - Distance adjustment unit; 91 - Telescopic component;

[0042] 200 - Rack; 210 - Backplane;

[0043] 300 - Conveyor belt;

[0044] 400 - Quantity detection unit; 410 - First photoelectric sensor; 420 - Second optical sensor;

[0045] 500-product. Detailed Implementation

[0046] The adsorption device proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0047] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0048] This invention proposes a conveying system for the electroplating process of a product. The electroplating process is used to create patterns on copper foil on the surface of a substrate of the product.

[0049] The conveying system includes an adsorption device 100, a frame 200, and a conveyor belt 300.

[0050] The conveyor belt 300 is mounted on the frame 200 for transporting products.

[0051] Combination Figure 1 As shown, in this embodiment, the conveyor belt 300 is a steel belt, and it is vertically arranged. The modular products are suspended on the conveyor belt 300 and conveyed. The frame 200 has a frame structure, and the conveyor belt 300 is driven by a drive structure mounted on the frame 200, thereby moving the products suspended on it. The conveyor belt 300 can be driven to rotate by pulley meshing transmission or friction transmission. The assembly method of the conveyor belt 300 and the frame 200, as well as the driving method of the conveyor belt 300, adopt existing technologies and will not be described in detail here.

[0052] Figure 1 The conveyor system in the middle adopts a method of loading and unloading two products at the same time.Figure 1 Two products 500 are suspended on the conveyor belt 300. For a batch of products, due to the scrapping of some products in the previous process, the number of products in the batch may be even or odd when it reaches the electroplating process. Therefore, the method of loading and unloading two products at the same time is adopted, which may result in the final loading being a single product.

[0053] When an electroplating line uses a two-product simultaneous loading and unloading method, the adsorption device 100 must typically pick up two products at a time. If the adsorption device 100 only picks up a single product, it will trigger a vacuum alarm on the loading and unloading machine, causing a shutdown. This requires that the batch quantity of electroplating materials must be even. Normally, the number of products in a standard batch is even. However, there are multiple processes preceding the electroplating process, and each process inevitably produces defective products that lead to scrap. Therefore, the batch quantity of electroplating materials is not necessarily even. When using a two-product simultaneous loading and unloading method, to avoid triggering the alarm, a person can manually check the batch quantity for odd or even numbers before loading. If it is odd, a dummy piece must be manually added to make it even. This manual addition method has a high degree of uncertainty and is prone to incorrect addition or forgetting to add a piece, which can lead to a vacuum alarm shutdown when picking up the last product. Once the electroplating line stops during normal operation, the products are easily contaminated by the chemicals, causing some products to be scrapped, affecting product yield and machine OEE (Overall Equipment Effectiveness).

[0054] Based on this, in order to better adapt to the operation mode of loading and unloading two products at the same time, the adsorption device 100 was improved in this embodiment.

[0055] Combination Figure 2 and Figure 3 As shown, the adsorption device 100 includes: a first adsorption unit 10 and a second adsorption unit 20.

[0056] The first adsorption unit 10 and the second adsorption unit 20 are disposed on the frame 200 for adsorbing the products conveyed on the conveyor belt 300;

[0057] The first adsorption unit 10 has a first vacuum channel (not shown in the figure), which is connected to the first pipe 30.

[0058] Combination Figure 3As shown, in this embodiment, the first adsorption unit 10 includes a suction cup 11 and a suction nozzle 12. A first vacuum channel is disposed within the suction cup 11, and the cross-section and orientation of the first vacuum channel can be configured based on actual needs. The suction cup 11 has a rectangular plate structure, and four suction nozzles 12 are disposed at the four corners of the suction cup 11. The suction nozzles 12 are connected to the first vacuum channel, so when the first pipe 30 draws in gas, a negative pressure environment is formed within the first vacuum channel, thereby allowing the suction nozzles 12 to adsorb the product.

[0059] In this embodiment, the suction nozzle 12 is a conventional circular suction nozzle, which can be made of rubber, silicone, or other materials. The structure of the suction nozzle 12 and the assembly method between the suction nozzle 12 and the suction cup 11 are based on existing technology and will not be described in detail here.

[0060] The first adsorption unit 10 of the above structure is adapted to adsorb rectangular products. In other alternative embodiments, the overall shape of the first adsorption unit 10 can be adaptively adjusted based on the shape of the adsorbed product. For example, when the adsorbed product is disc-shaped, the suction cup 11 can be adaptively arranged in a disc shape, and the suction nozzles 12 are distributed in a circular pattern.

[0061] Please continue to refer to this. Figure 2 and Figure 3 As shown, the second adsorption unit 20 has a second vacuum channel (not shown in the figure), which is connected to the second pipe 40. The structure of the second adsorption unit 20 is the same as that of the first adsorption unit 10 described above, and will not be repeated here.

[0062] At least one of the first pipe 30 and the second pipe 40 can independently control the flow of air inside it.

[0063] Combination Figure 2 As shown, in this embodiment, a valve 50 is installed on the second pipe 40. The valve 50 controls the opening and closing of the second pipe 40, thereby opening or closing the second adsorption unit 20. The valve 50 is normally open, and closes when the second adsorption unit 20 is not needed for adsorption.

[0064] In this embodiment, valve 50 is a solenoid valve, used for signal reception and control of the opening and closing of the second pipeline 40. In other alternative embodiments, valve 50 can be a conventional manual valve, and the type of valve 50 can be a ball valve, gate valve, butterfly valve, etc. The specific type of valve 50 can be selected based on actual usage requirements.

[0065] In this embodiment, a valve 50 is installed on the second pipe 40 to control the opening and closing of the second pipe 40, thereby controlling whether the second adsorption unit 20 participates in adsorption. When only a single product is being transported on the conveyor belt 300, the second adsorption unit 20 is closed by the valve 50, allowing the first adsorption unit 10 to participate in product adsorption. The above configuration should prioritize ensuring product feeding to the first adsorption unit 10; that is, when there is only a single product, the feeding position of that product should correspond to the first adsorption unit 10.

[0066] by Figure 1 For example, two products are suspended on the conveyor belt 300. The product on the left corresponds to the first adsorption unit 10, and the product on the right corresponds to the second adsorption unit 20. Therefore, during feeding, priority is given to feeding the product corresponding to the first adsorption unit 10. This ensures that even if there is only one product, it will correspond to the first adsorption unit 10 after feeding. The valve settings and feeding sequence configuration described above make the adsorption device more suitable for production lines that use two products for simultaneous feeding and unloading, which helps to improve the production line's capacity.

[0067] The aforementioned adsorption device, equipped with a first adsorption unit 10 and a second adsorption unit 20, can adapt to a conveying method where at least two products are simultaneously loaded and unloaded, increasing the number of products adsorbed at the same time. This improves the maximum conveying speed of the conveyor belt 300, thereby increasing conveying efficiency and production capacity. Furthermore, at least one of the first pipe 30 and the second pipe 40 can be independently controlled to open and close, allowing at least one adsorption structure in the first adsorption unit 10 and the second adsorption unit 20 to be independently controlled to close, adapting to the adsorption of a single product and making the adsorption device more flexible. This configuration of the adsorption device eliminates the need for manual checks of batch quantities (odd / even) and manual patching before loading, reducing manual intervention, optimizing the conveying process, improving production efficiency, and enhancing the automation capability of the entire conveying system. It also improves the stability of the entire conveying system, reduces machine alarms and shutdowns, and mitigates downtime caused by human error, further increasing production capacity and product yield.

[0068] In this embodiment, the adsorption unit is controlled by installing a valve 50 on the second pipe 40. In other alternative embodiments, only one valve 50 can be installed on the first pipe 30 to control the opening and closing of the first pipe 30. In this case, when only a single product is being transported on the conveyor belt 300, the first adsorption unit 10 is closed by the valve 50, so that only the second adsorption unit 20 participates in the adsorption of the product.

[0069] In other alternative embodiments, a valve 50 can be installed on both the first pipe 30 and the second pipe 40 to control the opening and closing of the first pipe 30 and the second pipe 40. In this case, when only a single product is being transported on the conveyor belt 300, one of the pipes can be flexibly closed, and one of the adsorption units can be selected to participate in the adsorption of the product, while the other adsorption unit is closed.

[0070] In this embodiment, two adsorption structures, a first adsorption unit 10 and a second adsorption unit 20, are provided to accommodate the simultaneous loading and unloading of two products. In other alternative embodiments, a third adsorption unit, a fourth adsorption unit, etc., can be added. The number of adsorption units can be flexibly adjusted according to usage requirements; for example, three, four, or more adsorption units can be provided. By setting more adsorption units, the simultaneous loading and unloading of more products can be accommodated.

[0071] Please continue to refer to this. Figure 2 As shown, in this embodiment, the adsorption device 100 further includes a vacuum generating unit 60, which is, for example, a vacuum pump. Both the first pipe 30 and the second pipe 40 are connected to the air inlet of the vacuum generating unit 60.

[0072] In this embodiment, a three-way valve 61 is provided to facilitate the connection between the first pipe 30 and the second pipe 40 and the air inlet of the vacuum generating unit 60. The outlet of the three-way valve 61 is connected to the air inlet of the vacuum generating unit 60, one air inlet of the three-way valve 61 is connected to the first pipe 30, and the other air inlet is connected to the second pipe 40. In other alternative embodiments, the three-way valve can be replaced with a three-way valve. The airflow within the first pipe 30 and the second pipe 40 can be adjusted via the three-way valve, thereby flexibly adjusting the vacuum level of the first adsorption unit 10 and the second adsorption unit 20, and thus adjusting their adsorption force.

[0073] The aforementioned adsorption device is equipped with a vacuum generating unit 60. Through the vacuum generating unit 60 and a valve 50, independent control of the first pipe 30 and the second pipe 40 can be achieved. This allows for individual control of the first adsorption unit 10 and the second adsorption unit 20 with fewer components, simplifying the structure of the entire adsorption system and the control logic during the adsorption process. This helps reduce improvement costs and improve adsorption and control efficiency.

[0074] In other alternative embodiments, each adsorption unit can be configured with a separate vacuum generating unit. For example, two vacuum generating units can be provided, each connected separately to the first pipe 30 and the second pipe 40, thereby independently controlling the first adsorption unit 10 and the second adsorption unit 20. In this case, the valve 50 and the tee 61 can be omitted.

[0075] Please combine Figure 1 and Figure 3 As shown, in this embodiment, the adsorption device 100 further includes a robotic arm 70. The robotic arm 70 includes a gate-shaped frame 71, a rotating arm 72, and a drive component 73. The frame 71 is mounted on the frame 200. The two ends of the rotating arm 72 are mounted between the two upright arms of the frame 71 via bearings. The first adsorption unit 10 and the second adsorption unit 20 are disposed on the rotating arm 72. The drive component 73 is mounted on the frame 71 and is used to drive the rotating arm 72 to rotate. When the rotating arm 72 rotates, it drives the first adsorption unit 10 and the second adsorption unit 20 to move, thereby adjusting the posture of the first adsorption unit 10 and the second adsorption unit 20. Figure 1 As shown, when the rotating arm 72 rotates 90° towards the side closer to the conveyor belt 300, the first adsorption unit 10 and the second adsorption unit 20 face the conveyor belt 300, and the conveyor belt 300 carries the product 500 suspended on it along... Figure 1 Moving to the left, when the product is directly in front of the first adsorption unit 10 and the second adsorption unit 20, the first adsorption unit 10 and the second adsorption unit 20 generate a vacuum to adsorb the product. After adsorbing the product, the rotating arm 72 is driven to rotate and reset, thereby moving the first adsorption unit 10, the second adsorption unit 20, and the adsorbed product to... Figure 1 The location of the product allows for its transfer.

[0076] The aforementioned robotic arm 70 can rotate 90°, with its rotation axis parallel to the conveying direction of the conveyor belt 300. In other alternative embodiments, the movement mode of the robotic arm 70 can be adaptively adjusted based on the conveying requirements of the products in the electroplating process. For example, a linear drive structure and a rotation drive structure can be added between the frame 71 and the frame 200 to drive the frame 71 in linear and rotational motion. Furthermore, the robotic arm 70 can also be selected from existing multi-degree-of-freedom robotic arms based on the product conveying requirements, such as existing three-degree-of-freedom, four-degree-of-freedom, five-degree-of-freedom, and six-degree-of-freedom robotic arms. The specific structural form of the robotic arm 70 can be selected based on factors such as the operational complexity, precision, and flexibility of the application scenario.

[0077] Please refer to Figure 1As shown, in this embodiment, the driving component 73 is a motor, which is mounted on the crossbeam of the frame 71. The driving component 73 transmits power to the rotating arm 72 through a transmission structure built into the vertical beam of the frame 71, thereby driving the rotating arm 72. The transmission structure can be, for example, a belt drive, a chain drive, or a gear drive. Taking a belt drive as an example, it includes a driving pulley, a driven pulley, and a transmission belt. The driving pulley is driven by the output shaft of the driving component 73, the driven pulley is driven by the rotating arm 72, and the belt meshes with the driving pulley and the transmission pulley to realize the transmission of power. The reduction ratio can be adjusted by controlling the diameter of the driving pulley and the driven pulley to achieve the effect of speed reduction and torque increase. The transmission structure can be adaptively adjusted based on its transmission requirements (transmission accuracy, reduction ratio, transmission torque, etc.).

[0078] In other alternative embodiments, the drive component 73 can also be directly mounted on the vertical beam of the frame 71 and directly connected to the rotating arm 72 for driving. Alternatively, a speed reduction structure can be added between the drive component 73 and the rotating arm 72 to achieve indirect driving.

[0079] In this embodiment, the conveyor belt 300 is a vertical steel belt structure, and the product is suspended on the conveyor belt 300 in an upright position. After the first adsorption unit 10 and the second adsorption unit 20 adsorb the product, it is necessary to change the product's posture to a horizontal position. Therefore, a robotic arm 70 is added to meet the requirements of changing the product's posture. In other alternative embodiments, the conveyor belt 300 can also be set as a horizontal conveying structure. For example, if the conveyor belt 300 adopts a horizontal conveying steel belt structure, the product is in a horizontal posture on the conveyor belt 300. In this case, there is no need for the product to change between an upright and a horizontal posture, so the robotic arm 70 does not need to be added.

[0080] Furthermore, in combination Figure 3 and Figure 4 As shown, the adsorption device 100 further includes an angle adjustment unit 80, which is connected to the first adsorption unit 10 and the second adsorption unit 20 and is used to adjust the angle between the first adsorption unit 10 and the second adsorption unit 20.

[0081] In this embodiment, the angle adjustment unit 80 includes a first rotating component 81, which is connected to the first adsorption unit 10 and is used to drive the first adsorption unit 10 to rotate. The central axis of the rotation of the first adsorption unit 10 is parallel to its adsorption direction.

[0082] Combination Figure 3 and Figure 4As shown, in this embodiment, the first rotating component 81 is a rotary cylinder, the suction cup 11 is mounted on the output shaft of the first rotating component 81, and the first rotating component 81 is mounted on the rotating frame 811. When the first rotating component 81 rotates, it can drive the suction cup 11 to rotate, thereby adjusting the posture of the product adsorbed by the suction cup (for example, adjusting the orientation of the long side of the product).

[0083] In addition, the first rotating component 81 is equipped with an angle sensor, which detects and controls the rotation angle of the first rotating component 81 to meet the product's posture adjustment requirements.

[0084] In other alternative embodiments, the first rotating component 81 may be a motor or other rotation drive structure, and the first rotating component 81 may be selected based on rotation requirements.

[0085] By setting the first rotating component 81, the first adsorption unit 10 can be driven to rotate, thereby adjusting the placement posture of the adsorbed product. It can also be applied to the adsorption of products in different postures, which helps to improve the flexibility of the adsorption device and make it suitable for more adsorption application scenarios.

[0086] In this embodiment, the angle adjustment unit 80 further includes a second rotating component 82, which is connected to the second adsorption unit 20 and is used to drive the second adsorption unit 20 to rotate.

[0087] The installation method of the second rotating component 82 is similar to that of the first rotating component 81, and will not be described again here.

[0088] In this embodiment, the second rotating component 82 is a rotary cylinder, and the second rotating component 82 is equipped with an angle sensor. In other alternative embodiments, the second rotating component 82 may be a motor or other rotary drive structure, and the selection of the second rotating component 82 can be based on the rotation requirements.

[0089] By setting the second rotating component 82, the second adsorption unit 20 can be driven to rotate, thereby adjusting the placement posture of the adsorbed product. It can also be applied to the adsorption of products in different postures, which helps to improve the flexibility of the adsorption device and make it suitable for more adsorption scenarios.

[0090] The aforementioned angle adjustment unit 80 can drive the first adsorption unit 10 and the second adsorption unit 20 to rotate, making the adsorption device more flexible in use. In other alternative embodiments, the angle adjustment unit 80 may also include only the first rotating member 81 for driving the first adsorption unit 10 to rotate; or only the second rotating member 82 for driving the second adsorption unit 20 to rotate. The driving object of the angle adjustment unit 80 can be adjusted based on actual usage requirements.

[0091] Furthermore, in combinationFigure 3 and Figure 4 As shown, the adsorption device 100 further includes a distance adjustment unit 90, which is connected to the first adsorption unit 10 and is used to adjust the distance between the first adsorption unit 10 and the second adsorption unit 20.

[0092] In this embodiment, the distance adjustment unit 90 is connected to the first adsorption unit 10 and is used to drive the first adsorption unit 10 to move away from or towards the second adsorption unit 20.

[0093] Combination Figure 3 and Figure 4 As shown, the adsorption device 100 also includes a base 83, which is connected to the rotating arm 72. The first adsorption unit 10 and the second adsorption unit 20 are both disposed on the base 83.

[0094] The rotating frame 811 corresponding to the first adsorption unit 10 is connected to the mounting base 84, and a certain distance is maintained between the rotating frame 811 and the mounting base 84 to allow the first rotating component 81 to be installed. A slide rail 85 is provided at the bottom of the base 83, and the mounting base 84 is slidably mounted on the slide rail 85. The distance adjustment unit 90 is mounted on the base 83, and the drive end of the distance adjustment unit 90 is connected to the mounting base 84. Therefore, the first adsorption unit 10 can be driven by the distance adjustment unit 90 to slide relative to the base 83 in a direction closer to or further away from the second adsorption unit 20.

[0095] The mounting base corresponding to the second adsorption unit 20 is fixedly set on the base 83, so the second adsorption unit 20 cannot slide in the direction of approaching or moving away from the first adsorption unit 10.

[0096] In the above configuration, the first adsorption unit 10 moves relative to the base 83, while the second adsorption unit 20 is fixed relative to the base 83. Adjusting the distance between the first adsorption unit 10 and the second adsorption unit 20 by moving individual adsorption units helps simplify the structure of the entire adsorption device and simplifies the control method for adjusting the distance between them.

[0097] By setting the distance adjustment unit 90, the distance between the first adsorption unit 10 and the second adsorption unit 20 can be adjusted. On the one hand, the first adsorption unit 10 and the second adsorption unit 20 can be flexibly adjusted based on the product placement distance to adapt to the adsorption of products in different conveying scenarios. On the other hand, the adjustable distance between the first adsorption unit 10 and the second adsorption unit 20 can prevent interference caused by the rotation of the first adsorption unit 10 and the second adsorption unit 20.

[0098] In other alternative embodiments, the distance adjustment unit 90 may be connected only to the second adsorption unit 20, in which case the second adsorption unit 20 can be driven to move away from or closer to the first adsorption unit 10. Alternatively, the distance adjustment unit 90 may be connected between the first adsorption unit 10 and the second adsorption unit 20 to synchronously drive the first adsorption unit 10 and the second adsorption unit 20 to move closer or further apart.

[0099] In this embodiment, the distance adjustment unit 90 is a telescopic component, which is a telescopic cylinder. Its cylinder body is fixed to the base 83, and its output shaft is connected to the mounting base 84. In other alternative embodiments, the distance adjustment unit 90 may employ a hydraulic telescopic structure, or it may employ a drive structure consisting of a rotating component (e.g., a motor) and a lead screw and nut. The specific drive mechanism of the distance adjustment unit 90 can be adjusted based on actual needs.

[0100] In other alternative embodiments, the angle adjustment unit 80 can also be directly connected to the base 83 to drive the base 83 to rotate. The central axis of the rotation of the base 83 driven by the angle adjustment unit 80 is perpendicular to the central axis of rotation of the rotating arm 72. In this case, the angle adjustment unit 80 can drive the base 83 to rotate, thereby driving the first adsorption unit 10 and the second adsorption unit 20 to adjust the placement posture of the adsorbed products.

[0101] In this embodiment, the angle adjustment unit 80 allows the first adsorption unit 10 and the second adsorption unit 20 to rotate relative to each other; the distance adjustment unit 90 allows the first adsorption unit 10 to move linearly relative to the second adsorption unit 20. In other alternative embodiments, one of the first adsorption unit 10 and the second adsorption unit 20 can perform other types of movement relative to the other, such as curvilinear movement or oscillation. The relative movement of the first adsorption unit 10 and the second adsorption unit 20 can be adjusted based on actual usage requirements. This relative movement configuration makes the use of the first adsorption unit 10 and the second adsorption unit 20 more flexible, adapting to more usage scenarios.

[0102] Furthermore, in this embodiment, the conveying system also includes a quantity detection unit 400.

[0103] The quantity detection unit 400 is disposed on the frame 200 and is used to detect the quantity of products conveyed on the conveyor belt 300.

[0104] Combination Figure 5As shown, the frame 200 has a back plate 210, which is vertically oriented and parallel to the conveyor belt 300's conveying direction. Vertically, the conveyor belt 300 is positioned between the back plate 210 and the adsorption device 100. The back plate 210 is positioned lower than the conveyor belt 300, and its height is approximately equal to the height of the product suspended on the conveyor belt 300. The position of the back plate 210 is the adsorption position. When the conveyor belt 300 carries the product to the position of the back plate 210, the product will not interfere with the back plate 210 due to the misalignment between the back plate 210 and the conveyor belt 300. When the product is directly opposite the back plate 210, it reaches the adsorption position, and the adsorption device 100 activates to adsorb the product.

[0105] The backplate 210 is designed to mark the adsorption position of the product and to provide support during the adsorption process, which helps to prevent the product from shaking.

[0106] Combination Figure 5 As shown, in this embodiment, the quantity detection unit 400 is disposed on the back plate 210. The quantity detection unit 400 includes a first photoelectric sensor 410 and a second light sensor 420. Two detection holes are formed on the back plate 210, and the first photoelectric sensor 410 and the second light sensor 420 are respectively located in the two detection holes. The distance between the first photoelectric sensor 410 and the second light sensor 420 is the same as the distance between two products simultaneously fed on the conveyor belt 300. That is, when the conveyor belt 300 carrying products runs to the back plate 210, one product is facing the first photoelectric sensor 410 and the other product is facing the second light sensor 420. At this time, the two products are detected by the first photoelectric sensor 410 and the second light sensor 420 respectively, and are identified as an even number. The first adsorption unit 10 and the second adsorption unit 20 operate simultaneously to adsorb the two products respectively. When the conveyor belt 300 is feeding one item, due to the absence of one product, only one of the first photoelectric sensor 410 and the second photoelectric sensor 420 detects the product, and the count is odd. At this time, one of the adsorption units in the first adsorption unit 10 and the second adsorption unit 20 is turned off, and the other adsorption unit is activated to adsorb the product.

[0107] The first photoelectric sensor 410 and the second photoelectric sensor 420 are sensors that utilize the photoelectric effect to convert the motion of an object into an electrical signal, thereby achieving counting. Their basic principle is to send and receive light through the photoelectric sensor, detect the direction and speed of the object's motion, and then transmit the signal to the counting circuit. The counting circuit counts the number of objects by counting and interpreting the signal.

[0108] In this embodiment, the photoelectric counting sensor consists of two parts: a photoelectric sensor and a counting circuit. The photoelectric sensor detects the direction and speed of an object's movement by sending light and receiving reflected light. When an object passes through the detection area of ​​the photoelectric sensor, the reflected light is captured by the receiver, forming an electrical signal. The counting circuit is responsible for processing these electrical signals, and by counting and interpreting the signals, the number of objects is finally determined. Therefore, when the conveyor belt 300 feeds two objects, the light signal paths of the first photoelectric sensor 410 and the second photoelectric sensor 420 are blocked, forming a reflected signal, and the number of products can be detected as even. When the conveyor belt 300 feeds one object, the light signal path of one of the photoelectric sensors is not blocked, and no reflected signal is detected, so the number of products can be detected as odd.

[0109] The structure and counting principle of the photoelectric counting sensor are existing technologies and will not be described in detail here. In this embodiment, the first photoelectric sensor 410 and the second photoelectric sensor 420 can be selected from existing signals based on usage requirements, such as a DS-type photoelectric sensor.

[0110] The first photoelectric sensor 410 and the second photoelectric sensor 420 can be connected to the controller and transmit the detected signals to the controller. The controller then controls the action of the valve 50. For example, when the controller receives a quantity of one, it sends a signal to close the valve 50, thereby closing the second adsorption unit 20, and allowing only the first adsorption unit 10 to adsorb the product.

[0111] In other alternative embodiments, the quantity detection unit 400 can also employ a through-beam sensor, which includes a signal transmitter and a signal receiver, forming a light path between them. The signal transmitter and receiver are mounted on a frame and located on opposite sides of the conveyor belt. When the path between the signal transmitter and receiver is blocked, the signal receiver cannot receive the signal from the signal transmitter, thus generating an electrical signal for counting. Alternatively, the quantity detection unit 400 can also use a camera in conjunction with image recognition technology to identify the quantity of products. For example, it can acquire image data of the products through a camera, perform noise reduction, enhancement, and filtering on the image to improve image quality and recognition accuracy, extract useful feature information such as color, texture, and shape from the image, match the extracted features with a known feature library to determine the quantity of products, and output the result to the controller. The quantity detection unit 400 can also employ other known technologies, which will not be elaborated upon here.

[0112] In this embodiment, two photoelectric sensors (first photoelectric sensor 410 and second photoelectric sensor 420) are provided, along with two adsorption units (first adsorption unit 10 and second adsorption unit 20), which can be used for a transfer method where two products are loaded and unloaded simultaneously. In other alternative embodiments, the number of adsorption units and the number of photoelectric sensors can be adapted to the loading and unloading method, ensuring that the number of photoelectric sensors and adsorption units matches the loading and unloading method. For example, when using a transfer method where three products are loaded and unloaded simultaneously, three adsorption units can be provided, and three photoelectric sensors can be configured accordingly.

[0113] In this embodiment, the quantity detection unit 400 is disposed on the back plate 210. In other alternative embodiments, the quantity detection unit 400 may also be disposed at other locations on the rack 200, and its specific placement can be flexibly adjusted based on actual detection requirements.

[0114] In this embodiment, the transmission process of the above-mentioned transmission system is illustrated using tin plating as an example.

[0115] Depending on the requirements, tin plating processes can be divided into full tin plating and partial tin plating, and the feeding posture of the product differs between the two processes. Figure 1 The posture of the product on the middle conveyor belt 300 corresponds to the full tin plating process, where the long axis of the product is vertical. In the partial tin plating process, the posture of the product on the conveyor belt 300 needs to be... Figure 1 Rotate it 90° from the original position, at which point the long axis of the product will be horizontal.

[0116] During the full tin plating process, the quantity detection unit 400 detects the number of products that have reached the backplate 210. When there are two products, the valve 50 does not activate (the valve 50 is normally open), and the first adsorption unit 10 and the second adsorption unit 20 each adsorb two products. When only one product is detected, the valve 50 activates, the second adsorption unit 20 is closed, and the product is adsorbed through the first adsorption unit 10. At this time, the second adsorption unit 20 will not alarm due to vacuum leakage at the nozzle.

[0117] During the localized tin plating process, the quantity detection unit 400 detects the number of products moving to the backplate 210. When there are two products, the valve 50 remains inactive (it is normally open). After the first adsorption unit 10 and the second adsorption unit 20 adsorb two products respectively, the distance adjustment unit 90 activates, increasing the distance between the first adsorption unit 10 and the second adsorption unit 20. The first rotating component 81 and the second rotating component 82 activate, causing the first adsorption unit 10 and the second adsorption unit 20 to rotate and adjust the posture of the adsorbed products. After the first adsorption unit 10 and the second adsorption unit 20 place the two products into the feeding track respectively, the first rotating component 81 and the second rotating component 82 activate, causing the first adsorption unit 10 and the second adsorption unit 20 to reset their rotation. When only one product is detected, the valve 50 activates, the second adsorption unit 20 is closed, and the product is adsorbed by the first adsorption unit 10. At this time, the second adsorption unit 20 will not alarm due to vacuum leakage at the nozzle. The distance adjustment unit 90 actuates, increasing the distance between the first adsorption unit 10 and the second adsorption unit 20. Then, the first rotating component 81 actuates, causing the first adsorption unit 10 to rotate and adjust the posture of the adsorbed product. After the product adsorbed by the first adsorption unit 10 is placed into the feeding track, the first rotating component 81 actuates, causing the first adsorption unit 10 to rotate and reset.

[0118] The aforementioned adsorption device offers greater flexibility, automatically identifying both odd and even quantities of products. It can adsorb two products simultaneously or a single product at a time, requiring no manual intervention. The elimination of manual replacement of duplicate pieces reduces operator workload, streamlines production, and significantly improves efficiency. It supports multiple loading and unloading methods, making operation simpler and more convenient, and enhancing machine intelligence. The entire conveying system exhibits improved stability, reducing machine alarms and increasing product yield and machine OEE.

[0119] Furthermore, this system saves manual patching time, reducing it by hundreds of minutes per day (e.g., 2 minutes / batch × 50 batches / day = 100 minutes / day). Additionally, assuming a 4% probability of missing defective wafers, each alarm stop results in approximately 10 products needing rework. Therefore, the daily rework count is 50 × 4% × 10 = 20 products, improving the yield by 20 / 4800 = 0.4%. Moreover, replacing the loading / unloading mechanism with one that supports both full and partial tin plating would cost millions, while the improvement in this embodiment costs less than ten thousand, representing a 99% cost saving.

[0120] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0121] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. An adsorption device, characterized in that, include: First adsorption unit and second adsorption unit; The arrangement of at least one of the first adsorption unit and the second adsorption unit being movable relative to the other; The first adsorption unit has a first vacuum channel, which is connected to a first pipe; The second adsorption unit has a second vacuum channel, which is connected to a second pipe; At least one of the first pipe and the second pipe can be independently controlled to control the flow of air inside it.

2. The adsorption device as described in claim 1, characterized in that, The adsorption device further includes a distance adjustment unit, which is connected to the first adsorption unit and / or the second adsorption unit and is used to adjust the distance between the first adsorption unit and the second adsorption unit.

3. The adsorption device as described in claim 1, characterized in that, The adsorption device further includes an angle adjustment unit, which is connected to the first adsorption unit and / or the second adsorption unit and is used to adjust the angle of the first adsorption unit and / or the second adsorption unit.

4. The adsorption device as described in claim 1, characterized in that, The adsorption device further includes a valve, which is disposed in the first pipe and / or the second pipe.

5. The adsorption device as described in claim 2, characterized in that, The distance adjustment unit is connected to the first adsorption unit or the second adsorption unit and is used to drive one of the first adsorption unit and the second adsorption unit to move.

6. The adsorption device as described in claim 3, characterized in that, The angle adjustment unit includes a first rotating component, which is connected to the first adsorption unit and is used to drive the first adsorption unit to rotate.

7. The adsorption device as described in claim 6, characterized in that, The angle adjustment unit further includes a second rotating component, which is connected to the second adsorption unit and is used to drive the second adsorption unit to rotate.

8. The adsorption device as described in claim 4, characterized in that, The adsorption device further includes a vacuum generating unit, and both the first pipe and the second pipe are connected to the air inlet of the vacuum generating unit.

9. A transmission system, characterized in that, The transmission system includes the adsorption device according to any one of claims 1 to 8.

10. The transmission system as described in claim 9, characterized in that, The transmission system also includes a frame, a conveyor belt, and a quantity detection unit; The conveyor belt is mounted on the frame for transporting products; The first adsorption unit and the second adsorption unit are disposed on the frame for adsorbing the products conveyed on the conveyor belt; The quantity detection unit is mounted on the frame and is used to detect the quantity of products being transported on the conveyor belt.

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