Transverse mask clamp storage device

Abstract

The utility model relates to the field of semiconductor integrated circuit manufacturing, and discloses a transverse mask plate clamp storage device which comprises a frame, an air purification shower device and a plurality of universal wheels, the frame is of a cuboid frame structure, a plurality of layers of placing areas are arranged on the frame, the placing areas are transversely arranged, and the air purification shower device is arranged on the air purification shower device. A limiting bolt capable of being adjusted up and down is arranged at the inlet end of each placing area; the air purifying and showering device is arranged at the top of the frame, and an air outlet of the air purifying and showering device faces the frame; the universal wheels are arranged at the four corners of the bottom of the frame respectively. The utility model has the beneficial effects that the air purification shower device is arranged at the top of the frame and is used for purging the mask plate clamp on the frame, so that the Particle is prevented from being in contact with the clamp, the clamp is ensured not to carry pollutants into a machine table, and the product quality is further ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor integrated circuit manufacturing, specifically to a horizontal mask fixture storage device. Background Technology

[0002] A photomask, also known as a photomask or photomask, uses quartz glass as a substrate. First, a layer of chromium metal is deposited on the quartz glass substrate. Then, photoresist is coated on the chromium layer to make it a photosensitive material. The designed circuit pattern is exposed to light by an electronic laser device. The exposed area is developed and etched onto the chromium metal to form a circuit pattern, which becomes a photomask master similar to an exposed film.

[0003] In the photomask manufacturing process, the coating, developing, etching, and cleaning stations often require a single machine to manufacture masks of different sizes. The dimensions initially designed for production often cannot be fully covered, necessitating the development of fixtures to accommodate new market orders. This results in a significant demand for fixtures at the coating, developing, etching, and cleaning stations.

[0004] The photomask manufacturing process is, in a sense, a battle against particles. Particle control is crucial in every step, including coating, developing, etching, and cleaning. Currently, photomask fixtures are placed directly on the ground against a wall, each fixture positioned independently. This results in the fixtures being in direct contact with the ground, leading to contact with ground particles. The fixtures can carry contaminants into the machine, causing product defects. Furthermore, the fixtures are prone to tipping over when placed against the wall, causing damage, deformation, and other issues that affect their usability. Utility Model Content

[0005] The technical problem this invention aims to solve is that current mask holders are placed directly on the ground against a wall, causing the holders to come into contact with ground particles. This allows the holders to carry contaminants into the machine, resulting in defective products. The purpose is to provide a horizontal mask holder storage device with an air purification and blowing device installed at the top of the frame to blow away the mask holders located on the frame, preventing particles from coming into contact with the holders and ensuring that the holders do not carry contaminants into the machine, thereby ensuring product quality.

[0006] This utility model is achieved through the following technical solution:

[0007] A horizontal mask holder storage device includes a frame, an air purification and blowing device, and several casters. The frame is a cuboid frame structure with several placement areas arranged horizontally. Each placement area has an adjustable limiting pin at its entrance. The air purification and blowing device is located at the top of the frame, with its air outlet facing the frame. The casters are located at the four bottom corners of the frame.

[0008] The beneficial effects of this utility model are as follows: by setting several layers of placement areas on the frame and arranging the placement areas horizontally to facilitate the flat placement of the fixtures, and by setting an adjustable limiting pin at the entrance end of each placement area, the limiting pin can be moved upward when a mask fixture is placed, and moved downward before removing the mask fixture and when no mask fixture is placed, making it convenient to remove and place the mask fixture; an air purification and blowing device is set at the top of the frame, which allows the airflow treated by the air purification and blowing device to blow the mask fixtures located on the frame, preventing particles from contacting the fixtures and ensuring that the fixtures do not carry contaminants into the machine, thereby ensuring product quality; and casters are set at the bottom of the frame, which facilitates the movement of the frame near the fixtures and improves storage efficiency.

[0009] In some embodiments, the placement areas are arranged sequentially along the height direction of the frame, and the distance between each placement area is greater than the height of the fixture to be placed. By arranging the placement areas sequentially along the height direction of the frame, the storage space of the frame is increased, while the floor area occupied by the frame is reduced. Furthermore, ensuring that the distance between each placement area is greater than the height of the fixture prevents interference between the placement area and the fixture, facilitating the insertion and removal of the fixture.

[0010] In some embodiments, each placement area is provided with several flow strips, the two ends of which are connected to corresponding long crossbars of the frame. The rollers of the flow strips are made of Teflon. By using Teflon as the roller material, the low hardness of Teflon is utilized to prevent the flow strips from damaging the clamps. Furthermore, the flow strips assist in rolling during clamp placement and removal, preventing friction between the clamps and the storage rack.

[0011] In some embodiments, the flow strips within the same placement area are arranged side by side, with a spacing between adjacent flow strips, the spacing being less than the width of the fixture to be placed. By making the spacing between the flow strips less than the width of the fixture to be placed, it is easier to support the fixture using the flow strips.

[0012] In some embodiments, the spacing between adjacent flow strips within each placement area is not the same. By setting the spacing between adjacent flow strips within each placement area to be different, it is easier to place fixtures of different widths, thus improving the versatility of the frame.

[0013] In some embodiments, the frame has several back anti-fall uprights at its back and several side anti-fall uprights on each side. The back anti-fall uprights are connected to several long horizontal bars, and the side anti-fall uprights are connected to several short horizontal bars. By providing several back anti-fall uprights at the back and several side anti-fall uprights on each side of the frame, the strength and rigidity of the frame can be improved, and the clamps can be prevented from falling off the back or sides of the frame.

[0014] In some embodiments, the limiting pin is in the shape of an n-shaped strip, with both ends of the limiting pin being adjustable up and down and connected to the corresponding long horizontal bar on the front of the frame, and located on the front of the frame. By making the limiting pin in the shape of an n-shaped strip and having both ends adjustable up and down and connected to the corresponding long horizontal bar on the front of the frame, the contact area between the limiting pin and the clamp is increased, thereby improving the limiting effect on the clamp.

[0015] In some embodiments, the long crossbar is provided with a vertical through hole for both ends of the limiting pin to pass through. A transverse hole communicating with the vertical through hole is provided on one side wall of the vertical through hole. A compression spring and a locking block connected to the transverse hole are provided in the transverse hole. The long crossbar is also provided with a mounting groove communicating with the transverse hole. One end of the locking block is connected to the end of the compression spring away from the bottom of the transverse hole, and the other end extends out of the mounting groove. In the working state, the locking block abuts against the side wall of the limiting pin. A vertical through hole and a horizontal hole communicating with the vertical through hole are provided on the long horizontal bar. A compression spring is installed in the horizontal hole. The end of the compression spring near the vertical through hole is connected to the locking block. An installation groove is provided so that the top of the locking block can extend out of the long horizontal bar. After adjustment on the limit pin, the locking block and the limit pin are pressed together by the restoring force of the compression spring to position the limit pin. When the limit pin is lowered, the locking block is slid away from the end of the limit pin, so that the compression spring is compressed and the limit pin is released.

[0016] In some embodiments, the frame is provided with a plurality of anti-collision soft pads, which are respectively located on the inner side wall of each placement area. By providing a plurality of anti-collision soft pads on the inner side wall of each placement area, the clamps are prevented from being damaged by bumps and collisions.

[0017] In some embodiments, the anti-collision soft pad is made of silicone or rubber. By using silicone or rubber for the anti-collision soft pad, the high elasticity of silicone or rubber can be utilized to absorb the impact force of the clamp.

[0018] Compared with the prior art, this utility model has the following advantages and beneficial effects:

[0019] 1. Each placement area entrance is equipped with an adjustable limit pin, which can be moved up when a mask fixture is placed, and moved down before the mask fixture is removed and when no mask fixture is placed, making it convenient to remove and place the mask fixture.

[0020] 2. An air purification and blowing device is installed at the top of the frame. This allows the airflow treated by the air purification and blowing device to clean the mask plate fixture located on the frame, preventing particles from contacting the fixture and ensuring that the fixture does not carry contaminants into the machine, thereby ensuring product quality.

[0021] 3. Install casters at the bottom of the frame to facilitate moving the frame near the clamps and improve storage efficiency. Attached Figure Description

[0022] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0023] Figure 1 This is a structural diagram of the present invention after removing the air purification and air shower device;

[0024] Figure 2 This is the front view of the present invention;

[0025] Figure 3 This is a top view of the present invention after the air purification and air shower device has been removed;

[0026] Figure 4 This is a schematic diagram of the limiting structure of the limiting pin in this utility model.

[0027] The attached diagram shows the markings and corresponding component names:

[0028] Air purification shower device 10, vertical support rod 11, rear anti-fall upright 12, side anti-fall upright 13, long horizontal bar 14, short horizontal bar 15, caster wheel 16, anti-collision soft pad 17, limit pin 18, locking block 181, mounting groove 182, compression spring 183, horizontal hole 184, vertical through hole 185, smooth strip 19. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0030] Throughout this specification, references to "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with that embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "an embodiment," "an example," "an example," or "an example" appearing in various places throughout the specification do not necessarily refer to the same embodiment or example. Furthermore, specific features, structures, or characteristics can be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. Moreover, those skilled in the art will understand that the illustrations provided herein are for illustrative purposes and are not necessarily drawn to scale. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0031] In the description of this utility model, the terms "front", "rear", "left", "right", "up", "down", "vertical", "horizontal", "high", "low", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0032] The terms "first," "second," etc., used in this utility model are merely for clarity of description and are not intended to limit any order or emphasize importance. Furthermore, the term "connection" as used herein, unless otherwise specified, can refer to a direct connection or an indirect connection via other components. Example

[0033] like Figures 1-4 As shown, this embodiment provides a horizontal mask fixture storage device, including a frame, an air purification and blowing device 10, and several casters 16. The frame has a cuboid frame structure and several placement areas are arranged horizontally on the frame. Each placement area has an adjustable limiting pin 18 at its entrance end. The air purification and blowing device 10 is located at the top of the frame, with its air outlet facing the frame. The casters 16 are located at the four bottom corners of the frame. To prevent particles from contacting the fixture and ensure that the fixture does not carry contaminants into the machine, thus ensuring product quality, the casters 16 are also located at the bottom of the frame to facilitate movement of the frame near the fixture and improve storage efficiency.

[0034] Specifically, the frame includes four vertical support rods 11, several long horizontal rods 14, and several short horizontal rods 15. The four vertical support rods 11 form the four edges of the frame. The short horizontal rods 15 are connected to the corresponding vertical support rods 11 to form the sides of the frame. The long horizontal rods 14 are connected to the corresponding vertical support rods 11 to form the front and back of the frame.

[0035] like Figures 1-3 As shown, the placement areas are arranged sequentially along the height of the frame, and the distance between each placement area is greater than the height of the fixture to be placed. By arranging the placement areas sequentially along the height of the frame, the storage space of the frame is increased, while the floor area occupied by the frame is reduced. Furthermore, ensuring that the distance between each placement area is greater than the height of the fixture prevents interference between the placement area and the fixture, facilitating the insertion and removal of the fixture.

[0036] like Figures 1-3 As shown, each placement area is equipped with several flow strips 19. The two ends of each flow strip 19 are connected to the corresponding long crossbars 14 of the frame. The rollers of the flow strips 19 are made of Teflon. By using Teflon as the roller material, the low hardness of Teflon prevents the flow strips 19 from damaging the clamps. Furthermore, the flow strips 19 assist in rolling during clamp placement and removal, preventing friction between the clamps and the storage rack.

[0037] like Figures 1-3 As shown, the flow strips 19 within the same placement area are arranged side by side, with a spacing between adjacent flow strips 19. This spacing is less than the width of the fixture to be placed. By making the spacing between the flow strips 19 less than the width of the fixture, it is easier to support the fixture using the flow strips 19.

[0038] like Figures 1-3 As shown, the spacing between two adjacent flow rails 19 in each placement area is not the same. By setting the spacing between two adjacent flow rails 19 in each placement area to be different, it is convenient to place clamps of different widths, thereby improving the versatility of the frame.

[0039] like Figures 1-3 As shown, the frame has several back anti-fall uprights 12 on its back and several side anti-fall uprights 13 on each side. The back anti-fall uprights 12 are connected to several long horizontal bars 14, and the side anti-fall uprights 13 are connected to several short horizontal bars 15. By providing several back anti-fall uprights 12 on the back of the frame and several side anti-fall uprights 13 on each side, the strength and rigidity of the frame can be improved, and the clamps can be prevented from falling off the back or sides of the frame.

[0040] like Figures 1-3 As shown, the limiting pin 18 is an n-shaped strip, and its two ends are adjustable up and down and connected to the corresponding long horizontal bar 14 on the front of the frame, and are located on the front of the frame. By making the limiting pin 18 into an n-shaped strip and adjusting its two ends to the corresponding long horizontal bar 14 on the front of the frame, the contact area between the limiting pin 18 and the clamp is increased, thereby improving the limiting effect on the clamp.

[0041] like Figure 1 and Figure 4 As shown, the long horizontal bar 14 is provided with a vertical through hole 185 for the two ends of the limiting pin 18 to pass through. A horizontal hole 184 communicating with the vertical through hole 185 is provided on one side wall of the vertical through hole 185. A compression spring 183 and a locking block 181 connected to each other are provided in the horizontal hole 184. The long horizontal bar 14 is also provided with a mounting groove 182 communicating with the horizontal hole 184. One end of the locking block 181 is connected to one end of the compression spring 183 away from the bottom of the horizontal hole 184, and the other end extends out of the mounting groove 182. In the working state, the locking block 181 abuts against the side wall of the limiting pin 18. A vertical through hole 185 is provided on the long horizontal bar 14, and a horizontal hole 184 is provided in the horizontal hole 184. A compression spring 183 is provided in the horizontal hole 184. One end of the compression spring 183 near the vertical through hole 185 is connected to the locking block 181. An installation groove 182 is provided so that the top of the locking block 181 can extend out of the long horizontal bar 14. After adjustment on the limiting pin 18, the locking block 181 is pressed against the limiting pin 18 by the restoring force of the compression spring 183 to position the limiting pin 18. When the limiting pin 18 is lowered, the locking block 181 is slid away from the end of the limiting pin 18, so that the compression spring 183 is compressed and the limiting pin 18 is released.

[0042] like Figures 1-3 As shown, the frame is provided with several anti-collision soft pads 17, which are located on the inner side of the side wall of each placement area. By providing several anti-collision soft pads 17 on the inner side of the side wall of each placement area, the clamps are prevented from being damaged by bumps and collisions.

[0043] like Figures 1-3 As shown, the anti-collision soft pad 17 is made of silicone or rubber. By using silicone or rubber for the anti-collision soft pad 17, the high elasticity of silicone or rubber can be utilized to absorb the impact force of the clamp.

[0044] Specifically, the air purification shower device 10 is an FFU air purification device, and the frame body is made of several rectangular tubes made of stainless steel welded together.

[0045] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A transverse mask holder storage device, characterized in that, include: The frame is a cuboid frame structure, and several layers of placement areas are provided on the frame. The placement areas are arranged horizontally, and each placement area has an adjustable limit pin at its entrance. An air purification and air shower device is provided, which is located at the top of the frame and has its air outlet facing the frame. Several casters are provided, which are respectively located at the four bottom corners of the frame.

2. The transverse mask holder storage device according to claim 1, characterized in that, The placement areas are arranged sequentially along the height direction of the frame, and the distance between each placement area is greater than the height of the fixture to be placed.

3. The transverse mask holder storage device according to claim 1, characterized in that, Each of the placement areas is provided with several flow strips, the two ends of which are connected to the corresponding long crossbars of the frame, and the rollers of the flow strips are made of Teflon.

4. The transverse mask holder storage device according to claim 3, characterized in that, The flow strips within the same placement area are arranged side by side, with a spacing between adjacent flow strips, the spacing being less than the width of the fixture to be placed.

5. The transverse mask holder storage device according to claim 4, characterized in that, The spacing between adjacent flow strips within each placement area is not the same.

6. The transverse mask holder storage device according to claim 4, characterized in that, The frame has several rear anti-fall uprights at the back and several side anti-fall uprights on both sides. The rear anti-fall uprights are connected to several long horizontal bars, and the side anti-fall uprights are connected to several short horizontal bars.

7. The transverse mask holder storage device according to claim 6, characterized in that, The limiting pin is in the shape of an n-shaped strip, and its two ends are respectively adjustable up and down connected to the corresponding long crossbar on the front of the frame and located on the front of the frame.

8. The transverse mask holder storage device according to claim 7, characterized in that, The long horizontal bar is provided with several vertical through holes for the two ends of the limiting pin to pass through. A horizontal hole is provided on one side wall of each vertical through hole, and a compression spring and a locking block are provided in the horizontal hole. The long horizontal bar is also provided with a mounting groove that communicates with the horizontal hole. One end of the locking block is connected to the end of the compression spring away from the bottom of the horizontal hole, and the other end extends out of the mounting groove. In the working state, the locking block abuts against the side wall of the limiting pin.

9. The transverse mask holder storage device according to claim 1, characterized in that, The frame is provided with several anti-collision soft pads, which are located on the inner side wall of each layer of the placement area.

10. The transverse mask holder storage device according to claim 9, characterized in that, The anti-collision soft pad is made of silicone or rubber.

Images