Transverse mask clamp storage device

By designing a horizontal mask fixture storage device, and utilizing an air purification and blowing device and casters, the problem of contaminants entering the machine tool was solved, ensuring product quality and improving storage efficiency.

CN223834493UActive Publication Date: 2026-01-27CHENGDU ROADWAY OPTOELECTRONICS CO LTD
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Patent Information

Application Number
CN202520404921.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-10
Publication Date
2026-01-27
Estimated Expiration
2035-03-10

AI Technical Summary

Technical Problem

The photomask fixture is placed directly on the ground against the wall, causing the fixture to come into contact with ground particles, which can carry contaminants into the machine and affect product quality.

Method used

Design a horizontal mask fixture storage device, including a frame, an air purification and blowing device, and casters. The frame is provided with several layers of horizontal placement areas, each with an adjustable limit pin at the entrance end, an air purification and blowing device at the top, and casters at the bottom to prevent particles from contacting the fixture.

Benefits of technology

An air purification and air shower device is used to prevent the clamps from carrying contaminants into the machine, ensuring product quality, and casters are used to improve storage efficiency.

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Abstract

The utility model relates to the field of semiconductor integrated circuit manufacturing, and discloses a transverse mask plate clamp storage device which comprises a frame, an air purification shower device and a plurality of universal wheels, the frame is of a cuboid frame structure, a plurality of layers of placing areas are arranged on the frame, the placing areas are transversely arranged, and the air purification shower device is arranged on the air purification shower device. A limiting bolt capable of being adjusted up and down is arranged at the inlet end of each placing area; the air purifying and showering device is arranged at the top of the frame, and an air outlet of the air purifying and showering device faces the frame; the universal wheels are arranged at the four corners of the bottom of the frame respectively. The utility model has the beneficial effects that the air purification shower device is arranged at the top of the frame and is used for purging the mask plate clamp on the frame, so that the Particle is prevented from being in contact with the clamp, the clamp is ensured not to carry pollutants into a machine table, and the product quality is further ensured.
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