Observation window and coating equipment

Abstract

The utility model provides an observation window and coating equipment, and the observation window comprises a base which comprises a first surface and a second surface which are oppositely arranged, the first surface is used for being connected with an equipment cavity, and the base is provided with an observation hole penetrating through the first surface and the second surface; the baffle is arranged in the observation hole; the sight glass is arranged on the side, away from the first surface, of the baffle; and the driving assembly is connected with the baffle and used for driving the baffle to move in the observation hole so as to open or close the observation hole. According to the observation window, the observation hole is opened or closed through the baffle, the sight glass can be shielded under the non-observation condition, and the sight glass is prevented from being polluted. Meanwhile, the baffle moves in the observation hole, so that the baffle is prevented from occupying the internal space of the equipment cavity when moving, and the influence on the normal work of the equipment cavity is avoided. And secondly, the influence of the movement of the baffle on the sealing performance between the observation window and the equipment cavity can be avoided, so that the sealing effect of the equipment cavity is ensured.

Description

Technical Field

[0001] This application relates to the field of coating equipment technology, and more particularly to an observation window and coating equipment. Background Technology

[0002] Vacuum coating is an important aspect of vacuum applications. It is a technique based on vacuum technology that uses physical or chemical methods to deposit thin film materials with special functions on the surface of substrate materials.

[0003] To optimize the coating process and obtain higher quality films, observation windows are typically installed on the coating equipment to monitor the film deposition process. To prevent coating deposits from affecting observation, the observation window is usually designed with a baffle structure. During non-observation periods, the observation window is closed to prevent contamination of the glass.

[0004] However, the existing baffle structure has a design flaw. Utility Model Content

[0005] In view of this, the purpose of this application is to provide an observation window that can avoid occupying the internal space of the equipment when the baffle is moving, and ensure the sealing between the observation window and the equipment cavity when the baffle is moving.

[0006] For the purposes described above, this application provides an observation window, which includes:

[0007] The base includes a first surface and a second surface disposed opposite to each other. The first surface is used to connect with the device cavity. The base is provided with an observation hole that passes through the first surface and the second surface.

[0008] A baffle is provided inside the observation hole;

[0009] A sight glass is disposed on the side of the baffle away from the first surface;

[0010] A drive assembly, connected to the baffle, is used to drive the baffle to move within the observation hole to open or close the observation hole.

[0011] In a preferred embodiment, the observation hole includes a first part and a second part, the first part being located between the second part and the sight glass, the orthographic projection area of ​​the first part on the plane of the first surface being smaller than the orthographic projection area of ​​the second part on the plane of the first surface, and the orthographic projection of the first part on the plane of the first surface being located within the orthographic projection of the second part on the plane of the first surface, and the baffle being disposed on the second part and movable within the second part.

[0012] In a preferred embodiment, the first portion includes a first sidewall, and the second portion includes a second sidewall and a third surface connecting the first sidewall and the second sidewall;

[0013] The drive assembly includes a handle and a rotating shaft. The rotating shaft passes through the base, with one end extending from the third surface and connecting to the baffle, and the other end extending from the second surface and connecting to the handle. The handle is used to drive the rotating shaft to rotate so that the baffle rotates within the second part.

[0014] In a preferred embodiment, the observation window further includes a first limiting member and a second limiting member, which are installed inside the observation hole. When the baffle rotates within the observation hole in a first direction to abut against the first limiting member, the observation hole is fully opened; when the baffle rotates within the observation hole in a second direction to abut against the second limiting member, the observation hole is fully closed; wherein the first direction is opposite to the second direction.

[0015] In a preferred embodiment, the base is further provided with a first annular sealing groove, the first annular sealing groove being disposed around the first portion, and the observation window further includes a first sealing ring, the first sealing ring being disposed within the first annular sealing groove and located between the viewing mirror and the base, the first sealing ring sealing the viewing mirror and the base.

[0016] And / or, the base is further provided with a second annular sealing groove, the second annular sealing groove being disposed around the second part, and the observation window further includes a second sealing ring, the second sealing ring being disposed within the second annular sealing groove, the second sealing ring being used to seal the first surface with the device cavity.

[0017] In a preferred embodiment, the viewing window further includes:

[0018] When the observation hole is opened, the return member deforms and generates a restoring force that returns the return member to its initial state to close the observation hole.

[0019] In a preferred embodiment, the observation window further includes a first connecting plate and a second connecting plate. One end of the recovery member is connected to the driving assembly through the first connecting plate, and the other end is connected to the base through the second connecting plate. When the driving assembly drives the baffle to move within the observation hole, it simultaneously causes the recovery member to deform.

[0020] In a preferred embodiment, the viewing window further includes a pressure cover connected to the second surface, and a limiting groove matching the shape of the viewing mirror is formed on the side of the pressure cover near the second surface. The viewing mirror is located between the base and the pressure cover and is at least partially located within the limiting groove.

[0021] In a preferred embodiment, the base includes a flange, the first surface and the second surface are the two flange faces of the flange, the observation hole is the center hole of the flange, and when the baffle moves within the observation hole, the surface of the baffle is always parallel to the flange face.

[0022] Based on the same inventive concept, this application also discloses a coating apparatus, which includes:

[0023] The device cavity; and the observation window described in any of the preceding claims, the observation window being mounted on the device cavity.

[0024] As can be seen from the above, the observation window provided in this application can be opened or closed by a baffle to cover the sight glass when not observing, thus preventing the sight glass from being contaminated.

[0025] Meanwhile, the baffle is positioned within the observation hole of the base and moves within it, preventing it from occupying internal space of the equipment cavity and affecting its normal operation. Secondly, the baffle's movement within the observation hole prevents it from affecting the seal between the observation window and the equipment cavity, thus ensuring the cavity's sealing performance. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram showing the connection between the observation window and the device cavity in one embodiment of this application;

[0028] Figure 2 This is a top view of the observation window when the observation hole is open, according to one embodiment of this application;

[0029] Figure 3 This is a bottom view of the observation window when the observation hole is open, according to one embodiment of this application;

[0030] Figure 4 This is a top view of the observation window when the observation hole is closed, according to one embodiment of this application;

[0031] Figure 5 for Figure 4 Sectional view along AA;

[0032] Figure 6 This is a bottom view of the observation window when the observation hole is closed, according to one embodiment of this application;

[0033] Figure 7 This is a partial structural diagram of the observation window in one embodiment of this application;

[0034] Figure 8 This is a schematic diagram of the internal structure of the base in one embodiment of this application;

[0035] Figure 9 This is a schematic diagram of the internal structure of the gland in one embodiment of this application.

[0036] Figure Labels

[0037] 100. Observation window; 200. Equipment cavity;

[0038] 1. Base; 11. First surface; 12. Second surface; 13. Observation hole; 14. First part; 141. First sidewall; 15. Second part; 151. Second sidewall; 152. Third surface; 16. First annular sealing groove; 17. Second annular sealing groove;

[0039] 2. Sight mirror;

[0040] 3. Baffle;

[0041] 4. Drive assembly; 41. Handle; 42. Shaft;

[0042] 51. First limiting component; 52. Second limiting component;

[0043] 61. First sealing ring; 62. Second sealing ring; 63. Third sealing ring;

[0044] 7. Reply document;

[0045] 81. First connecting plate; 82. Second connecting plate;

[0046] 9. Pressure cap; 91. Limiting groove. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0048] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0049] Reference Figures 1-9 As shown, one embodiment of this application discloses an observation window 100, which includes a base 1, a viewing mirror 2, a baffle 3, and a driving assembly 4.

[0050] The base 1 includes a first surface 11 and a second surface 12 disposed opposite to each other. The first surface 11 is used to connect with the device cavity 200. The base 1 is provided with an observation hole 13 that passes through the first surface 11 and the second surface 12. A baffle 3 is disposed in the observation hole 13. A sight glass 2 is disposed on the side of the baffle 3 away from the first surface 11. A drive assembly 4 is connected to the baffle 3 and is used to drive the baffle 3 to move within the observation hole 13 to open or close the observation hole 13.

[0051] The observation window 100 provided in this embodiment can open or close the observation hole 13 through the baffle 3, which can block the sight glass 2 when not observing, thus preventing the sight glass 2 from being contaminated.

[0052] Meanwhile, the baffle 3 is positioned within the observation hole 13 of the base 1 and moves within the observation hole 13, preventing the baffle 3 from occupying the internal space of the equipment cavity 200 when it moves, thus avoiding any impact on the normal operation of the equipment cavity 200. Secondly, the movement of the baffle 3 within the observation hole 13 prevents the movement of the baffle 3 from affecting the sealing between the observation window 100 and the equipment cavity 200, thereby ensuring the sealing effect of the equipment cavity 200.

[0053] Specifically, refer to Figure 3 As shown, at this time, the baffle 3 does not obstruct the observation hole 13, and the observation hole 13 is in the open state, allowing observation of the inside of the equipment cavity 200 through the sight glass 2. (Refer to...) Figure 6As shown, at this time, the baffle 3 blocks the observation hole 13, and the observation hole 13 is in a closed state. At this time, it is impossible to observe the inside of the equipment cavity 200 through the sight glass 2. The baffle 3 plays the role of protecting the sight glass 2 and preventing the sight glass 2 from being affected by the deposited coating.

[0054] Optionally, the viewing mirror is made of glass. Specifically, it can be sapphire or a composite glass made of multiple types of glass.

[0055] Reference Figure 2 and 4 As shown, in one embodiment, the observation window 100 further includes a return member 7. When the observation hole 13 is opened, the return member 7 deforms, generating a restoring force that returns the return member 7 to its initial state to close the observation hole 13. When the drive assembly 4 opens the observation hole 13 via the baffle 3, if the observation hole 13 is forgotten to be closed, the baffle 3 will move under the restoring force of the return member 7 to close the observation hole 13, preventing the sight glass 2 from being contaminated due to the operator forgetting to close the observation window 100. Preferably, the return member 7 is a spring. In other embodiments, the return member 7 can be a torsion spring, elastic rope, etc.

[0056] Reference Figure 5 As shown, in one embodiment, the observation window 100 further includes a first connecting plate 81 and a second connecting plate 82. One end of the return member 7 is connected to the drive assembly 4 through the first connecting plate 81, and the other end is connected to the base 1 through the second connecting plate 82. When the drive assembly 4 drives the baffle 3 to move within the observation hole 13, it simultaneously causes the return member 7 to deform. Taking the return member 7 as a spring as an example, one end of the spring is connected to the connecting hole on the first connecting plate 81, and the other end is connected to the connecting hole on the second connecting plate 82. When the drive assembly 4 drives the baffle 3 to open the observation hole 13, the first connecting plate 81 causes the spring to stretch. If the observation hole 13 is not closed, the drive assembly 4 will move under the restoring force of the spring and drive the baffle 3 to close the observation hole 13.

[0057] Reference Figure 5 and 8 As shown, in one embodiment, the base 1 includes a flange, with a first surface 11 and a second surface 12 being the two flange faces. An observation hole 13 is the center hole of the flange. When the baffle 3 moves within the observation hole 13, the surface of the baffle 3 remains parallel to the flange face, thus preventing the baffle 3 from occupying internal space of the equipment cavity 200 and affecting its normal operation. Furthermore, the flange is connected to the equipment cavity 200 by bolts to ensure connection stability.

[0058] Please continue to refer to Figure 5 and 8As shown, in one embodiment, the observation hole 13 includes a first portion 14 and a second portion 15. The first portion 14 is located between the second portion 15 and the viewing mirror 2. The orthographic projection area of ​​the first portion 14 on the plane of the first surface 11 is smaller than the orthographic projection area of ​​the second portion 15 on the plane of the first surface 11, and the orthographic projection of the first portion 14 on the plane of the first surface 11 lies within the orthographic projection of the second portion 15 on the plane of the first surface 11. A baffle 3 is disposed in the second portion 15 and moves within the second portion 15. The second portion 15 provides sufficient space for the baffle 3 to fully open or close the observation hole 13. The first portion 14 determines the field of view of the viewing mirror 2.

[0059] Furthermore, referring to Figure 3 As shown, in one embodiment, both the first part 14 and the second part 15 are cylindrical structures, and the central axis of the first part 14 and the central axis of the second part 15 are not on the same straight line to facilitate the movement of the baffle 3.

[0060] Please refer to Figure 5 and 7 As shown, in one embodiment, the first part 14 includes a first sidewall 141, and the second part 15 includes a second sidewall 151 and a third surface 152 connecting the first sidewall 141 and the second sidewall 151. The drive assembly 4 includes a handle 41 and a rotating shaft 42. The rotating shaft 42 passes through the base 1, with one end extending out of the third surface 152 and connecting to the baffle 3, and the other end extending out of the second surface 12 and connecting to the handle 41. The handle 41 is used to drive the rotating shaft 42 to rotate, thereby driving the baffle 3 to rotate within the second part 15. The handle 41 facilitates operation by the operator. Simultaneously, the rotating shaft 42 is spaced apart from the first part 14 to avoid interference between the rotating shaft 42 and the first part 14 during rotation, thus avoiding affecting the field of view of the sight glass 2 and ensuring a tight seal.

[0061] Optionally, both ends of the rotating shaft 42 are provided with external threads, and the handle 41 and the baffle 3 are provided with threaded holes. The two ends of the rotating shaft 42 are screwed to the handle 41 and the baffle 3 respectively to facilitate disassembly and assembly.

[0062] Furthermore, a third sealing ring 63 is fitted onto the rotating shaft 42 to ensure the sealing between the rotating shaft 42 and the base 1. Even further, a third annular sealing groove is provided circumferentially on the rotating shaft 42 to accommodate the third sealing ring 63. Optionally, two third sealing rings 63 are provided, spaced apart along the axial direction of the rotating shaft 42, to improve sealing performance.

[0063] Furthermore, the first connecting plate 81 is fixedly connected to the handle 41, and the second connecting plate 82 is connected to the base 1 by bolts.

[0064] Reference Figure 3 and 6 As shown, in one embodiment, the observation window 100 further includes a first limiting member 51 and a second limiting member 52, which are installed inside the observation hole 13. When the baffle 3 rotates in the observation hole 13 along a first direction to abut against the first limiting member 51, the observation hole 13 is fully opened; when the baffle 3 rotates in the observation hole 13 along a second direction to abut against the second limiting member 52, the observation hole 13 is fully closed; wherein, the first direction is opposite to the second direction.

[0065] The first limiting member 51 and the second limiting member 52 cooperate to restrict the rotation range of the baffle 3. Further, referring to... Figure 7 As shown, in one embodiment, the first limiting member 51 and the second limiting member 52 are columnar structures with threads in their circumference and threaded holes on the third surface 152. The first limiting member 51 and the second limiting member 52 can be screwed into the threaded holes for easy assembly and disassembly.

[0066] In another embodiment, the drive component 4 is a cylinder or an electric cylinder, with the piston of the cylinder or electric cylinder connected to the baffle 3, and the movement of the piston directly driving the movement of the baffle 3. In other embodiments, the drive component 4 may also include a motor, etc.

[0067] Reference Figure 5 and 8 As shown, in one embodiment, the base 1 is further provided with a first annular sealing groove 16, which surrounds the first portion 14. The observation window 100 also includes a first sealing ring 61, which is disposed within the first annular sealing groove 16 and located between the sight glass 2 and the base 1, sealing the sight glass 2 and the base 1. By improving the sealing between the sight glass 2 and the base 1, the sealing performance of the device cavity 200 is ensured.

[0068] In one embodiment, reference is made to Figure 5 and 6 As shown, the base 1 is also provided with a second annular sealing groove 17, which surrounds the second part 15. The observation window 100 also includes a second sealing ring 62, which is disposed within the second annular sealing groove 17. The second sealing ring 62 is used to seal the first surface 11 with the equipment cavity 200. By improving the sealing performance between the first surface 11 and the equipment cavity 200, the sealing performance of the equipment cavity 200 is ensured.

[0069] Reference Figure 1 , 5As shown in Figure 9, in one embodiment, the viewing window 100 further includes a pressure cover 9 connected to the second surface 12. A limiting groove 91 matching the shape of the viewing mirror 2 is formed on the side of the pressure cover 9 near the second surface 12. The viewing mirror 2 is located between the base 1 and the pressure cover 9 and is at least partially located within the limiting groove 91. The pressure cover 9 secures the viewing mirror 2, ensuring its stability and the seal between the viewing mirror 2 and the base 1. Furthermore, the pressure cover 9 is connected to the base 1 by bolts, and a rotating shaft 42 is mounted on the pressure cover 9.

[0070] The observation window 100 in this application adopts a modular design, which is convenient for disassembly and cleaning, and easy to process. At the same time, only the observation hole 13 and the threaded hole need to be opened, and there is no need to open the high-precision shaft hole on the equipment cavity 200, thus reducing the impact on the equipment cavity 200.

[0071] Based on the same inventive concept, this application also discloses a coating device, which includes a device cavity 200; and an observation window 100 in any of the above embodiments, the observation window 100 being mounted on the device cavity 200.

[0072] In this embodiment, the coating equipment has an observation window 100 that opens or closes the observation hole 13 via a baffle 3, which can block the sight glass 2 when not in use, thus preventing the sight glass 2 from being contaminated.

[0073] Meanwhile, the baffle 3 is positioned within the observation hole 13 of the base 1 and moves within the observation hole 13 under the action of the drive assembly 4. This prevents the baffle 3 from occupying the internal space of the equipment cavity 200 when it moves, thus avoiding any impact on the normal operation of the equipment cavity 200. Secondly, the movement of the baffle 3 within the observation hole 13 prevents its movement from affecting the seal between the observation window 100 and the equipment cavity 200, thereby ensuring a good seal and improving the performance of the coating equipment.

[0074] It should be noted that some embodiments of this application have been described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. In addition, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired result.

[0075] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the above embodiments of this application, which are not provided in detail for the sake of brevity.

[0076] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. An observation window, characterized in that, include: The base includes a first surface and a second surface disposed opposite to each other. The first surface is used to connect with the device cavity. The base is provided with an observation hole that passes through the first surface and the second surface. A baffle is provided inside the observation hole; A sight glass is disposed on the side of the baffle away from the first surface; A driving component, connected to the baffle, is used to drive the baffle to move within the observation hole to open or close the observation hole; The observation hole includes a first part and a second part. The first part is located between the second part and the sight glass. The orthographic projection area of ​​the first part on the plane where the first surface is located is smaller than the orthographic projection area of ​​the second part on the plane where the first surface is located. The orthographic projection of the first part on the plane where the first surface is located is located within the orthographic projection of the second part on the plane where the first surface is located. The baffle is disposed in the second part and is movable within the second part.

2. The observation window according to claim 1, characterized in that, The first portion includes a first sidewall, and the second portion includes a second sidewall and a third surface connecting the first sidewall and the second sidewall; The drive assembly includes a handle and a rotating shaft. The rotating shaft passes through the base, with one end extending from the third surface and connecting to the baffle, and the other end extending from the second surface and connecting to the handle. The handle is used to drive the rotating shaft to rotate so that the baffle rotates within the second part.

3. The observation window according to claim 1, characterized in that, The observation window further includes a first limiting member and a second limiting member, which are installed inside the observation hole. When the baffle rotates in the observation hole along a first direction until it abuts against the first limiting member, the observation hole is fully opened; when the baffle rotates in the observation hole along a second direction until it abuts against the second limiting member, the observation hole is fully closed; wherein, the first direction is opposite to the second direction.

4. The observation window according to claim 1, characterized in that, The base is also provided with a first annular sealing groove, which surrounds the first part. The observation window also includes a first sealing ring, which is disposed in the first annular sealing groove and located between the viewing mirror and the base. The first sealing ring seals the viewing mirror and the base. And / or, the base is further provided with a second annular sealing groove, the second annular sealing groove being disposed around the second part, and the observation window further includes a second sealing ring, the second sealing ring being disposed within the second annular sealing groove, the second sealing ring being used to seal the first surface with the device cavity.

5. The observation window according to claim 1, characterized in that, The observation window also includes: When the observation hole is opened, the return member deforms and generates a restoring force that returns the return member to its initial state to close the observation hole.

6. The observation window according to claim 5, characterized in that, The observation window also includes a first connecting plate and a second connecting plate. One end of the recovery component is connected to the driving assembly through the first connecting plate, and the other end is connected to the base through the second connecting plate. When the driving assembly drives the baffle to move within the observation hole, it simultaneously causes the recovery component to deform.

7. The observation window according to claim 1, characterized in that, The observation window also includes a pressure cover connected to the second surface. A limiting groove matching the shape of the sight glass is formed on the side of the pressure cover near the second surface. The sight glass is located between the base and the pressure cover and is at least partially located within the limiting groove.

8. The observation window according to claim 1, characterized in that, The base includes a flange, the first surface and the second surface are the two flange faces of the flange, the observation hole is the center hole of the flange, and when the baffle moves within the observation hole, the surface of the baffle is always parallel to the flange face.

9. A coating equipment, characterized in that, include: Equipment cavity; as well as The observation window as described in any one of claims 1-8, wherein the observation window is mounted on the device cavity.

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